Substrate processing apparatus, substrate processing method and storage medium
    21.
    发明授权
    Substrate processing apparatus, substrate processing method and storage medium 有权
    基板处理装置,基板处理方法和存储介质

    公开(公告)号:US08778092B2

    公开(公告)日:2014-07-15

    申请号:US13042645

    申请日:2011-03-08

    IPC分类号: B08B3/04 B08B5/02 F26B5/00

    CPC分类号: H01L21/67057 H01L21/67028

    摘要: There is provided a substrate processing method including cleaning a substrate by immersing the substrate in a cleaning solution in a longitudinal direction while the cleaning solution is supplied to a cleaning tank; transferring the substrate picked up from the cleaning tank to a drying chamber while holding the substrate in a longitudinal direction; and drying the substrate in the drying chamber communicating with an upper area of the cleaning tank by alternately supplying a first drying gas containing vapor of a solvent for removing a liquid and a second drying gas without containing the vapor of the solvent for removing the liquid to an area where the substrate is exposed between the upper area of the cleaning tank and the drying chamber after an upper end of the cleaned substrate is picked up from a liquid surface of the cleaning solution.

    摘要翻译: 提供了一种基板处理方法,包括通过在将清洁溶液供应到清洗槽的同时将基板浸入清洁溶液中而沿纵向清洗基板; 将从所述清洗槽拾取的所述基板沿长度方向保持所述基板; 以及通过交替地供给包含用于除去液体的溶剂的蒸气的第一干燥气体和第二干燥气体来干燥所述干燥室中与所述清洗槽的上部区域连通的基板,而不将所述溶剂的蒸气除去以除去所述液体 从清洗液的液面取出基板在清洗槽的上部区域与清洗后的基板的上端之间的干燥室之间露出的区域。

    Part clamp and nailing machine
    27.
    发明授权
    Part clamp and nailing machine 有权
    部分夹具和打钉机

    公开(公告)号:US08308038B2

    公开(公告)日:2012-11-13

    申请号:US13477141

    申请日:2012-05-22

    IPC分类号: F16L3/00 B25C7/00

    摘要: A part clamp is temporarily held in a short cylindrical portion provided on a contact arm of a nailing machine and is nailed to a building body or the like by the nailing machine. The part clamp is provided with a base portion having a through hole at its center for inserting a nail therethrough, and an engaging portions for engaging with the short cylindrical portion. When the part clamp is pushed in the axial direction of an injection port of the nailing machine, the part clamp is temporarily held in the short cylindrical portion. The load to push the part clamp to engage with the short cylindrical portion is lower than the load to push the contact arm to slide along the injection port.

    摘要翻译: 部分夹具暂时保持在设置在打钉机的接触臂上的短圆柱形部分中,并通过打钉机钉在建筑物等上。 部件夹具设置有在其中心具有用于插入钉的通孔的基部,以及用于与短圆柱形部分接合的接合部分。 当部件夹具沿着打钉机的注射口的轴向被推动时,部件夹具暂时保持在短圆柱形部分中。 推动部件夹具与短圆柱形部分接合的负载低于推动接触臂沿着注射口滑动的负载。

    ELECTROSTATIC CAPACITANCE TYPE INPUT DEVICE
    29.
    发明申请
    ELECTROSTATIC CAPACITANCE TYPE INPUT DEVICE 失效
    静电电容式输入装置

    公开(公告)号:US20120132511A1

    公开(公告)日:2012-05-31

    申请号:US13322052

    申请日:2010-05-26

    IPC分类号: H03K17/975

    摘要: An electrostatic capacitance type input device is provided which has a structure in which translucent electrodes are aligned on the same layer in two axial directions, and has features that jumpers for connecting among the translucent electrodes in one of the two axial directions can be prevented from becoming conspicuous, and disconnection is less likely to occur. Jumpers 8 formed of an electrically conductive material are formed on a surface of a substrate 2, and thereafter an insulating film 6 is provided so as to cover the jumpers 8 and the substrate 2, and first translucent electrodes 3 and second translucent electrodes 4 are provided on the insulating film 6 so as to form a matrix. The first translucent electrodes 3 aligned in the leftward/rightward direction in the drawings are electrically connected to each other by the jumpers 8 via through holes 7 formed in the insulating film 6. On the other hand, the second translucent electrodes 4 aligned in the direction orthogonal to the surface of a sheet are connected to each other by connecting portions 5 which are formed by patterning so as to be integrated with the second translucent electrodes 4. Since the jumpers 8 for connecting among the first translucent electrodes 3 are formed on the substrate 2, the jumper 8 can be prevented from becoming conspicuous as viewed from the surface side.

    摘要翻译: 提供了一种静电电容型输入装置,其具有半透明电极沿两个轴向对准在同一层上的结构,并且具有能够防止在两个轴向中的一个方向上连接透光性电极的跳线变成 显眼,断线不太可能发生。 在基板2的表面上形成由导电材料形成的跳线8,然后设置绝缘膜6以覆盖跳线8和基板2,并且设置第一透光性电极3和第二透光性电极4 在绝缘膜6上形成矩阵。 在图中左右方向排列的第一透光性电极3通过形成在绝缘膜6上的通孔7由跳线8电连接。另一方面,第二透光性电极4在方向 通过图案形成的连接部分5与片材的表面正交地连接,以便与第二透光电极4一体化。由于用于连接第一透光性电极3的跳线8形成在基板上 如图2所示,当从表面侧观察时,可以防止跳线8变得显眼。