Gating Voltage Control System And Method For Electrostatically Actuating A Micro-Electromechanical Device
    25.
    发明申请
    Gating Voltage Control System And Method For Electrostatically Actuating A Micro-Electromechanical Device 有权
    静电驱动微机电装置门控电压控制系统及方法

    公开(公告)号:US20080169707A1

    公开(公告)日:2008-07-17

    申请号:US11622483

    申请日:2007-01-12

    IPC分类号: H01H9/54

    摘要: A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit electrically coupled to a gate terminal of the device to apply a gating voltage. The gating voltage control system may further comprise a controller electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.

    摘要翻译: 提供了门控电压控制系统和方法,用于静电致动微机电系统(MEMS)装置,例如MEMS开关。 该装置可以包括静电响应致动器,其可通过间隙移动,以将装置致动到对应于第一致动状态(例如,闭合开关状态)和第二致动状态(例如,开启状态)之一的相应致动状态, 。 门控电压控制系统可以包括电耦合到该器件的栅极端子以施加选通电压的驱动电路。 门控电压控制系统还可以包括电耦合到驱动电路的控制器,以根据门控电压控制顺序控制施加到门控端子的门控电压。 门控电压控制序列可以包括用于将门控电压升高到电压电平的第一间隔,用于产生足以通过由致动器穿过的间隙的一部分来加速致动器以达到相应的致动状态的静电力。 门控电压控制序列还可以包括用于将门控电压降低到足以减小作用在可移动致动器上的静电力的水平的第二间隔。 这允许减小致动器接合接触件以建立第一致动条件的力的量,或者避免致动器在达到第二致动状态时的过冲位置。

    Micro-discharge optical source apparatus and method and system for analyzing a sample
    28.
    发明申请
    Micro-discharge optical source apparatus and method and system for analyzing a sample 有权
    微放电光源装置及分析样品的方法和系统

    公开(公告)号:US20050093417A1

    公开(公告)日:2005-05-05

    申请号:US10937918

    申请日:2004-09-10

    摘要: A micro-discharge optical source apparatus and a method and system which utilizes the apparatus to analyze a sample are provided. The apparatus includes a substrate and an anode electrode and a cathode electrode supported on the substrate. One of the electrodes, such as the cathode, is preferably a liquid electrode. The electrodes are spaced apart to define an inter-electrode gap therebetween. The apparatus further includes a voltage source for applying a voltage between the electrodes sufficient to generate a glow micro-discharge in the gap to cause a first emission having a first desired excitation spectrum. An optical element is integrated with the substrate to direct the first emission to travel along an optical path including an axis. In one embodiment, the system detects the direct fluorescence of a sample such as tryptophan and other amino acids. In another embodiment, the system detects fluorescence of dye-labeled biochemicals.

    摘要翻译: 提供一种微放电光源装置以及利用该装置分析样品的方法和系统。 该装置包括基板和支撑在基板上的阳极电极和阴极电极。 诸如阴极的电极之一优选为液体电极。 电极间隔开以限定它们之间的电极间间隙。 该装置还包括用于在电极之间施加足以在间隙中产生辉光微放电以产生具有第一期望激发光谱的第一发射的电压的电压源。 光学元件与衬底集成以引导第一发射沿着包括轴的光路行进。 在一个实施方案中,系统检测样品如色氨酸和其它氨基酸的直接荧光。 在另一个实施方案中,该系统检测染料标记的生物化学物质的荧光。