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公开(公告)号：US20210313958A1
公开(公告)日：2021-10-07
申请号：US16934265
申请日：2020-07-21
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Tae Kyung LEE , Won HAN , Sang Uk SON , Hwa Sun LEE , Moon Chul LEE
Abstract: A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer covering at least a portion of the first electrode, and a second electrode covering at least a portion of the piezoelectric layer. When an active region, in which the first electrode and the second electrode are disposed to overlap each other, is viewed from above, among four sides of a rectangle with which at least three vertices of a polygon formed by the active region are in contact, a longest side is defined as a side B and a side connected to side B is defined as a side A, and an aspect ratio (side B/side A) is 1.3 to 3.
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公开(公告)号：US20190199319A1
公开(公告)日：2019-06-27
申请号：US16292715
申请日：2019-03-05
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Tae Yoon KIM , Yeong Gyu LEE , Moon Chul LEE , Jae Chang LEE , Duck Hwan KIM
CPC classification number: H03H9/131 , H03H3/02 , H03H9/1007
Abstract: A resonator package and a method of manufacturing the same are provided. The method of manufacturing a resonator package involves etching a lower electrode with a hardmask, in which only a portion of a thickness of the lower electrode is etched to shape the lower electrode.
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公开(公告)号：US20180205360A1
公开(公告)日：2018-07-19
申请号：US15812842
申请日：2017-11-14
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Won HAN , Dae Ho KIM , Yong Suk KIM , Seung Hun HAN , Moon Chul LEE , Chang Hyun LIM , Sung Jun LEE , Sang Kee YOON , Tae Yoon KIM , Sang Uk SON
CPC classification number: H03H9/02118 , H03H3/02 , H03H9/02015 , H03H9/02157 , H03H9/132 , H03H9/17 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
Abstract: A bulk acoustic wave resonator includes: a substrate; a membrane layer forming a cavity together with the substrate; a lower electrode disposed on the membrane layer; a piezoelectric layer disposed on a flat surface of the lower electrode; and an upper electrode covering a portion of the piezoelectric layer and exposing a side of the piezoelectric layer to air, wherein the piezoelectric layer includes a step portion extended from the side of the piezoelectric layer and disposed on the flat surface of the lower electrode.
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公开(公告)号：US20180138888A1
公开(公告)日：2018-05-17
申请号：US15789194
申请日：2017-10-20
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Sang Kee YOON , Hyung Jae PARK , Nam Soo PARK , Jong Woon KIM , Moon Chul LEE
CPC classification number: H03H9/17 , H01L41/0477 , H01L41/081 , H01L41/18 , H01L41/29 , H01L41/35 , H03H3/02 , H03H9/02118 , H03H9/02157 , H03H9/13 , H03H9/173 , H03H2003/021
Abstract: A bulk acoustic wave resonator includes a substrate on which a substrate protective layer is disposed, a membrane layer forming a cavity together with the substrate, and a resonant portion disposed on the membrane layer. The cavity is formed by removing a sacrificial layer using a mixed gas obtained by mixing a halide-based gas and an oxygen gas, and at least one of the membrane layer and the substrate protective layer has a thickness difference of 170 Å or less, after the cavity is formed.
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公开(公告)号：US20180048281A1
公开(公告)日：2018-02-15
申请号：US15487620
申请日：2017-04-14
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Moon Chul LEE , Jae Chang LEE , Chang Hyun LIM , Tae Hun LEE , Tae Kyung LEE , Tae Yoon KIM
IPC: H03H9/02 , H01L41/047 , H03H9/54
CPC classification number: H03H9/02102 , H01L41/047 , H03H9/173 , H03H9/542 , H03H9/564
Abstract: A bulk acoustic filter device includes: a substrate; a cavity forming layer disposed on the substrate so as to form a cavity; a lower electrode disposed on the cavity; a piezoelectric layer disposed on the lower electrode; an upper electrode disposed on the piezoelectric layer; and a temperature compensation layer disposed below the lower electrode and in the cavity portion.
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Patent Agency Ranking
公开(公告)号：US20180013401A1
公开(公告)日：2018-01-11
申请号：US15391353
申请日：2016-12-27
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Tae Hun LEE , Won HAN , Moon Chul LEE , Sung HAN
Abstract: An acoustic resonator including a substrate, an active vibration region including, sequentially stacked on the substrate, a lower electrode, a piezoelectric layer, and an upper electrode, and a horizontal resonance suppressing part formed from and disposed in the piezoelectric layer, the horizontal resonance suppressing part having piezoelectric physical properties that are different from piezoelectric physical properties of the piezoelectric layer.
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公开(公告)号：US20170317660A1
公开(公告)日：2017-11-02
申请号：US15385448
申请日：2016-12-20
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Tae Yoon KIM , Tae Kyung LEE , Moon Chul LEE , Sung Min CHO , Sang Kee YOON
CPC classification number: H03H9/17 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H9/54
Abstract: A bulk acoustic wave resonator may include: an air cavity; an etching stop layer and an etching stop part, which define a lower boundary surface and a side boundary surface of the air cavity; and a resonating part formed on an approximately planar surface, which is formed by a upper boundary surface of the air cavity and a top surface of the etching stop part. A width of a top surface of the etching stop part may be greater than a width of a bottom surface of the etching stop part. A side surface of the etching stop part connecting the top surface of the etching stop part to the bottom surface of the etching stop part may be inclined.
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公开(公告)号：US20170077898A1
公开(公告)日：2017-03-16
申请号：US15232116
申请日：2016-08-09
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Ho Soo PARK , Jea Shik SHIN , Sang Uk SON , Yeong Gyu LEE , Moon Chul LEE , Duck Hwan KIM , Chul Soo KIM
Abstract: An acoustic wave resonator includes a substrate; a resonating part disposed on a first surface of the substrate and including a first electrode, a piezoelectric layer, and a second electrode; and a cap disposed on the first surface of the substrate and including an accommodating part accommodating the resonating part. The resonating part is configured to be operated by either one or both of a signal output from a first device substrate disposed facing a second surface of the substrate on an opposite side of the substrate from the first surface of the substrate and a signal output from a second device substrate disposed on the cap.
Abstract translation: 声波谐振器包括基板; 设置在所述基板的第一表面上并包括第一电极，压电层和第二电极的谐振部分; 以及盖，其设置在所述基板的所述第一表面上，并且包括容纳所述共振部的容纳部。 谐振部分被配置为由从衬底的与衬底的第一表面相对的一侧面朝向衬底的第二表面布置的第一器件衬底输出的信号中的一个或两个来操作，以及从衬底的第一表面输出的信号 设置在盖上的第二装置基板。
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公开(公告)号：US20160035960A1
公开(公告)日：2016-02-04
申请号：US14642054
申请日：2015-03-09
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Moon Chul LEE , Jea Shik SHIN , Young Gyu LEE , Ho Soo PARK , Duck Hwan KIM
IPC: H01L41/047 , H01L41/332
CPC classification number: H03H9/173 , H03H2003/021
Abstract: An acoustic resonator is provided in which loss of acoustic waves in a transverse direction may be reduced through a cavity formed in an acoustic resonance unit including a first electrode, a piezoelectric layer, and a second electrode, and in which acoustic waves in a longitudinal direction may be reduced by forming an air gap between the acoustic resonance unit and a substrate. Whereby, a quality factor may be improved.
Abstract translation: 提供一种声谐振器，其中可以通过在包括第一电极，压电层和第二电极的声共振单元中形成的空腔来减小横向的声波损失，并且其中沿纵向的声波 可以通过在声共振单元和基板之间形成气隙来减小。 因此，可以改善品质因素。
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公开(公告)号：US20230216470A1
公开(公告)日：2023-07-06
申请号：US17824145
申请日：2022-05-25
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Won HAN , Hwa Sun LEE , Jeong Hoon RYOU , Moon Chul LEE , Tae Yoon KIM , Sang Kee YOON , Yong Suk KIM , Joung Hun KIM , Sung Jun LEE , Sung Joon PARK
CPC classification number: H03H9/0211 , H03H9/173 , H03H9/02102
Abstract: A bulk acoustic wave resonator includes a substrate; a central portion including a first portion of a first electrode, a first portion of a piezoelectric layer, and a first portion of a second electrode laminated in order on the substrate; and a reflective region disposed laterally of the central portion and including a second portion of the first electrode, an insertion layer, a second portion of the piezoelectric layer, and a second portion of the second electrode. A side surface of the insertion layer adjacent to the central portion has an inclined surface, the first portion of the second electrode and the second portion of the second electrode are coplanar, and an end of the second electrode overlaps the inclined surface of the insertion layer in the reflective region.
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