公开(公告)号：US08771632B2

公开(公告)日：2014-07-08

申请号：US13571791

申请日：2012-08-10

申请人： Ho-Cheol Kim ,  Robert D. Miller ,  Oun Ho Park

发明人： Ho-Cheol Kim ,  Robert D. Miller ,  Oun Ho Park

IPC分类号： C01G23/00 ,  B05D3/06

CPC分类号： C01G23/047 ,  C01B13/18 ,  C01B13/185 ,  C01P2002/72 ,  C01P2004/03 ,  C01P2004/04 ,  C01P2006/16

摘要： A method of forming a metal oxide nanostructure comprises disposing a chelated oligomeric metal oxide precursor on a solvent-soluble template to form a first structure comprising a deformable chelated oligomeric metal oxide precursor layer; setting the deformable chelated oligomeric metal oxide precursor layer to form a second structure comprising a set metal oxide precursor layer; dissolving the solvent-soluble template with a solvent to form a third structure comprising the set metal oxide precursor layer; and thermally treating the third structure to form the metal oxide nanostructure.

摘要翻译： 形成金属氧化物纳米结构的方法包括将螯合的低聚金属氧化物前体置于溶剂可溶的模板上以形成包含可变形的螯合低聚金属氧化物前体层的第一结构; 设置可变形螯合低聚金属氧化物前体层以形成包含固定金属氧化物前体层的第二结构; 用溶剂溶解溶剂可溶性模板以形成包含固定金属氧化物前体层的第三结构; 并对第三结构进行热处理以形成金属氧化物纳米结构。

公开(公告)号：US20130224652A1

公开(公告)日：2013-08-29

申请号：US13405587

申请日：2012-02-27

申请人： John David Bass ,  Ho-Cheol Kim ,  Robert Dennis Miller ,  Qing Song ,  Linda Karin Sundberg ,  Gregory Michael Wallraff

发明人： John David Bass ,  Ho-Cheol Kim ,  Robert Dennis Miller ,  Qing Song ,  Linda Karin Sundberg ,  Gregory Michael Wallraff

IPC分类号： G03F7/20 ,  C07F9/00 ,  C07F7/28 ,  G03F7/004

CPC分类号： G03F7/0042

摘要： Compositions are disclosed having the formula (3): [C′]k[Ta(O2)x(L′)y]  (3), wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O2)x(L′)y has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.

摘要翻译： 公开了具有式（3）的组合物：[C'] k [Ta（O 2）x（L'）y]（3）其中x是1至4的整数，y是1至4的整数， Ta（O 2）x（L'）y具有0至-3的电荷，C'是具有+1至+3的电荷的抗衡离子，k是0至3的整数，L'是氧化稳定的有机物 具有0至-4电荷的配体，L'包括选自羧酸盐，醇盐，胺，氧化胺，膦，氧化膦，胂氧化物及其组合的给电子官能团。 该组合物具有作为高分辨率光致抗蚀剂的作用。

公开(公告)号：US08491965B2

公开(公告)日：2013-07-23

申请号：US12060516

申请日：2008-04-01

申请人： Joy Cheng ,  Ho-Cheol Kim ,  Daniel P. Sanders ,  Linda Sundberg

发明人： Joy Cheng ,  Ho-Cheol Kim ,  Daniel P. Sanders ,  Linda Sundberg

IPC分类号： B05D5/00 ,  B05D5/12

CPC分类号： C08L63/00 ,  B05D5/02 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C08F283/10 ,  C08L53/00 ,  C09D125/14 ,  G03F7/0002 ,  G03F7/038 ,  Y10S264/901 ,  Y10S428/91 ,  Y10T428/24942

摘要： A method of orienting microphase-separated domains is disclosed, comprising applying a composition comprising an orientation control component, and a block copolymer assembly component comprising a block copolymer having at least two microphase-separated domains in which the orientation control component is substantially immiscible with the block copolymer assembly component upon forming a film; and forming a compositionally vertically segregated film on the surface of the substrate from the composition. The orientation control component and block copolymer segregate during film forming to form the compositionally vertically-segregated film on the surface of a substrate, where the orientation control component is enriched adjacent to the surface of the compositionally segregated film adjacent to the surface of the substrate, and the block copolymer assembly is enriched at an air-surface interface.

公开(公告)号：US08491768B2

公开(公告)日：2013-07-23

申请号：US12821953

申请日：2010-06-23

申请人： Xin Ai ,  John David Bass ,  Ho-Cheol Kim ,  Robert Dennis Miller ,  John Campbell Scott ,  Qing Song

发明人： Xin Ai ,  John David Bass ,  Ho-Cheol Kim ,  Robert Dennis Miller ,  John Campbell Scott ,  Qing Song

IPC分类号： B01D57/02

CPC分类号： B03C5/026

摘要： Nanoparticles in a colloid are purified, with the colloid including a fluid, unwanted matter, and the nanoparticles to be purified. An electric field is applied that is substantially spatially uniform over a distance that is at least equal to a characteristic dimension of the nanoparticles, so that at least some of the nanoparticles move towards at least one collection surface as a result of the force arising between their electrical charge and the electric field, whereupon nanoparticles are collected on said at least one collection surface. The collection surface(s) may be one or more electrodes to which a voltage potential is applied. The collected nanoparticles are then removed from the collection surface, e.g., by dispersing them into another fluid.

摘要翻译： 胶体中的纳米颗粒被纯化，胶体包括流体，不想要的物质和待纯化的纳米颗粒。 施加的电场在至少等于纳米颗粒的特征尺寸的距离上基本上在空间上均匀，使得至少一些纳米颗粒由于在它们之间产生的力而朝向至少一个收集表面移动 电荷和电场，由此将纳米颗粒收集在所述至少一个收集表面上。 收集表面可以是施加电压电位的一个或多个电极。 然后将收集的纳米颗粒从收集表面中除去，例如通过将其分散到另一种流体中。

公开(公告)号：US20120129357A1

公开(公告)日：2012-05-24

申请号：US12017598

申请日：2008-01-22

申请人： Timothy J. Dalton ,  Bruce B. Doris ,  Ho-Cheol Kim ,  Carl Radens

发明人： Timothy J. Dalton ,  Bruce B. Doris ,  Ho-Cheol Kim ,  Carl Radens

IPC分类号： H01L21/31 ,  B82Y40/00

CPC分类号： H01L21/0337 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y30/00 ,  H01L21/0338 ,  Y10T428/24612

摘要： A first nanoscale self-aligned self-assembled nested line structure having a sublithographic width and a sublithographic spacing and running along a first direction is formed from first self-assembling block copolymers within a first layer. The first layer is filled with a filler material and a second layer is deposited above the first layer containing the first nanoscale nested line structure. A second nanoscale self-aligned self-assembled nested line structure having a sublithographic width and a sublithographic spacing and running in a second direction is formed from second self-assembling block copolymers within the second layer. The composite pattern of the first nanoscale nested line structure and the second nanoscale nested line structure is transferred into an underlayer beneath the first layer to form an array of structures containing periodicity in two directions.

摘要翻译： 具有亚光刻宽度和亚光刻距离并沿着第一方向延伸的第一纳米级自对准自组装嵌套线结构由第一层内的第一自组装嵌段共聚物形成。 第一层填充有填充材料，并且第二层沉积在包含第一纳米级嵌套线结构的第一层之上。 具有亚光刻宽度和亚光刻距离并沿第二方向运行的第二纳米级自对准自组装嵌套线结构由第二层内的第二自组装嵌段共聚物形成。 第一纳米级嵌套线结构和第二纳米级嵌套线结构的复合图案被转移到第一层下面的底层中以形成在两个方向上包含周期性的结构阵列。

公开(公告)号：US20110245418A1

公开(公告)日：2011-10-06

申请号：US13101014

申请日：2011-05-04

申请人： Geraud Jean-Michel Dubois ,  James Lupton Hedrick ,  Ho-Cheol Kim ,  Victor Yee-Way Lee ,  Teddie Peregrino Magbitang ,  Robert Dennis Miller ,  Willi Volksen

发明人： Geraud Jean-Michel Dubois ,  James Lupton Hedrick ,  Ho-Cheol Kim ,  Victor Yee-Way Lee ,  Teddie Peregrino Magbitang ,  Robert Dennis Miller ,  Willi Volksen

IPC分类号： C08L71/08

CPC分类号： C08G63/66 ,  C08J9/26 ,  C08K5/5419 ,  C08L67/00 ,  C08L83/04 ,  C08L83/00

摘要： Substantially or roughly spherical micellar structures useful in the formation of nanoporous materials by templating are disclosed. A roughly spherical micellar structure is formed by organization of one or more spatially unsymmetric organic amphiphilic molecules. Each of those molecules comprises a branched moiety and a second moiety. The branched moiety can form part of either the core or the surface of the spherical micellar structure, depending on the polarity of the environment. The roughly spherical micellar structures form in a thermosetting polymer matrix. They are employed in a templating process whereby the amphiphilic molecules are dispersed in the polymer matrix, the matrix is cured, and the porogens are then removed, leaving nanoscale pores.

摘要翻译： 公开了用于通过模板形成纳米多孔材料的基本或大致球形的胶束结构。 通过组织一个或多个空间上不对称的有机两亲分子形成大致球形的胶束结构。 这些分子中的每一个包括支链部分和第二部分。 取决于环境的极性，支化部分可以形成球形胶束结构的芯或表面的一部分。 大致球形的胶束结构在热固性聚合物基体中形成。 它们用于模板化过程，由此将两亲分子分散在聚合物基质中，使基质固化，然后去除孔隙原，留下纳米孔。

公开(公告)号：US20100311895A1

公开(公告)日：2010-12-09

申请号：US12857633

申请日：2010-08-17

申请人： Geraud Jean-Michel Dubois ,  James Lupton Hedrick ,  Ho-Cheol Kim ,  Victor Yee-Way Lee ,  Teddie Peregrino Magbitang ,  Robert Dennis Miller ,  Muthumanickam Sankarapandian ,  Linda Karin Sundberg ,  Willi Volksen

发明人： Geraud Jean-Michel Dubois ,  James Lupton Hedrick ,  Ho-Cheol Kim ,  Victor Yee-Way Lee ,  Teddie Peregrino Magbitang ,  Robert Dennis Miller ,  Muthumanickam Sankarapandian ,  Linda Karin Sundberg ,  Willi Volksen

IPC分类号： C08L83/06 ,  C08L83/04

CPC分类号： C08L101/12 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/31695 ,  H01L21/76807 ,  H01L21/7682 ,  H01L2221/1047

摘要： A composition of matter and a structure fabricated using the composition. The composition comprising: a resin; polymeric nano-particles dispersed in the resin, each of the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscible with the resin; and a solvent, the solvent volatile at a first temperature, the resin cross-linkable at a second temperature, the polymeric nano-particle decomposable at a third temperature, the third temperature higher than the second temperature, the second temperature higher than the first temperature, wherein a thickness of a layer of the composition shrinks by less than about 3.5% between heating the layer from the second temperature to the third temperature.

摘要翻译： 使用该组合物制造的物质组成和结构。 所述组合物包含：树脂; 分散在树脂中的聚合物纳米颗粒，每个聚合纳米颗粒包含多臂芯聚合物和连接到多臂芯聚合物的悬置聚合物，与树脂不混溶的多臂芯聚合物和可混溶的侧链聚合物 与树脂; 和溶剂，所述溶剂在第一温度下挥发，所述树脂在第二温度下可交联，所述聚合物纳米颗粒在第三温度下可分解，所述第三温度高于所述第二温度，所述第二温度高于所述第一温度 ，其中在从第二温度到第三温度的层之间加热组合物的层的厚度收缩小于约3.5％。

公开(公告)号：US07763319B2

公开(公告)日：2010-07-27

申请号：US12013138

申请日：2008-01-11

申请人： Joy Cheng ,  Ho-Cheol Kim ,  Daniel P. Sanders ,  Linda Sundberg

发明人： Joy Cheng ,  Ho-Cheol Kim ,  Daniel P. Sanders ,  Linda Sundberg

IPC分类号： B05D5/00 ,  B05D5/12

CPC分类号： C08L63/00 ,  B05D5/02 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C08F283/10 ,  C08L53/00 ,  C09D125/14 ,  G03F7/0002 ,  G03F7/038 ,  Y10S264/901 ,  Y10S428/91 ,  Y10T428/24942

摘要： A method of orienting microphase-separated domains is disclosed, comprising applying a composition comprising an orientation control component, and a block copolymer assembly component comprising a block copolymer having at least two microphase-separated domains in which the orientation control component is substantially immiscible with the block copolymer assembly component upon forming a film; and forming a compositionally vertically segregated film on the surface of the substrate from the composition. The orientation control component and block copolymer segregate during film forming to form the compositionally vertically-segregated film on the surface of a substrate, where the orientation control component is enriched adjacent to the surface of the compositionally segregated film adjacent to the surface of the substrate, and the block copolymer assembly is enriched at an air-surface interface.

摘要翻译： 公开了一种定向微相分离的结构域的方法，包括施加包含取向控制组分的组合物和包含具有至少两个微相分离结构域的嵌段共聚物的嵌段共聚物组合组分，其中取向控制组分与 嵌段共聚物组合物组分; 以及从所述组合物在所述基材的表面上形成组成上垂直分离的膜。 取向控制成分和嵌段共聚物在成膜时分离，在基板表面形成组成垂直分离的膜，其中取向控制成分相邻于与基板表面相邻的组成偏析膜的表面富集， 并且嵌段共聚物组件在空气 - 表面界面处富集。

公开(公告)号：US20100055307A1

公开(公告)日：2010-03-04

申请号：US12338692

申请日：2008-12-18

申请人： Jennifer Nam Cha ,  Geraud Jean-Michel Dubois ,  James Lupton Hedrick ,  Ho-Cheol Kim ,  Victor Yee-Way Lee ,  Teddie Peregrino Magbitang ,  Robert Dennis Miller ,  Willi Volksen

发明人： Jennifer Nam Cha ,  Geraud Jean-Michel Dubois ,  James Lupton Hedrick ,  Ho-Cheol Kim ,  Victor Yee-Way Lee ,  Teddie Peregrino Magbitang ,  Robert Dennis Miller ,  Willi Volksen

IPC分类号： B05D3/10 ,  B05D3/02

CPC分类号： H01L21/3121 ,  G03F7/0002 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/312 ,  H01L21/31695 ,  Y10T428/249953 ,  Y10T428/31663

摘要： A nanoporous material exhibiting a lamellar structure is disclosed. The material comprises three or more substantially parallel sheets of an organosilicate material, separated by highly porous spacer regions. The distance between the centers of the sheets lies between 1 nm and 50 nm. The highly porous spacer regions may be substantially free of condensed material. For the manufacture of such materials, a process is disclosed in which matrix non-amphiphilic polymeric material and templating polymeric material are dispersed in a solvent, where the templating polymeric material includes a polymeric amphiphilic material. The solvent with the polymeric materials is distributed onto a substrate. Organization is induced in the templating polymeric material. The solvent is removed, leaving the polymeric materials in place. The matrix polymeric material is cured, forming a lamellar structure.

摘要翻译： 公开了具有层状结构的纳米多孔材料。 该材料包括由高度多孔的间隔区隔开的三个或更多个基本平行的有机硅酸盐材料片。 片材中心之间的距离介于1nm和50nm之间。 高度多孔的间隔区域可以基本上不含冷凝材料。 为了制造这种材料，公开了一种方法，其中将基质非两亲性聚合物材料和模板聚合物材料分散在溶剂中，其中模板聚合材料包括聚合物两亲性材料。 具有聚合物材料的溶剂分布在基材上。 组织在模板聚合材料中被诱导。 除去溶剂，留下聚合物材料就位。 基体聚合材料固化，形成层状结构。

公开(公告)号：US07560141B1

公开(公告)日：2009-07-14

申请号：US12268562

申请日：2008-11-11

申请人： Ho-Cheol Kim ,  Charles T. Rettner ,  Sang-Min Park

发明人： Ho-Cheol Kim ,  Charles T. Rettner ,  Sang-Min Park

IPC分类号： B05D3/02

CPC分类号： B05D3/02 ,  B33Y80/00 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  H01L21/0337

摘要： A method of controlling both alignment and registration (lateral position) of lamellae formed from self-assembly of block copolymers, the method comprising the steps of obtaining a substrate having an energetically neutral surface layer comprising a first topographic “phase pinning” pattern and a second topographic “guiding” pattern; obtaining a self-assembling di-block copolymer; coating the self-assembling di-block copolymer on the energetically neutral surface to obtain a coated substrate; and annealing the coated substrate to obtain micro-domains of the di-block copolymer.

摘要翻译： 一种控制由嵌段共聚物的自组装形成的薄片的对准和配准（横向位置）的方法，所述方法包括以下步骤：获得具有能量中性的表面层的基材，该基材包含第一形貌“相位钉扎”图案和第二 地形“导向”模式; 得到自组装二嵌段共聚物; 在能量中性表面上涂布自组装二嵌段共聚物以获得涂布的基材; 并对涂覆的基材进行退火以获得二嵌段共聚物的微畴。