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公开(公告)号：US5441300A
公开(公告)日：1995-08-15
申请号：US978397
申请日：1992-11-18
IPC分类号： B60R21/0136 , B60R21/16 , B81B3/00 , G01P15/125 , G01P15/18 , B60R21/32
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0828 , G01P2015/084 , G01P2015/0842
摘要： A three-dimensional acceleration sensor capable of detecting a small acceleration value and even an acceleration value amounting up to 100G occurring in the event of a collision comprises a diaphragm for linking a frame and a massive part and diaphragms and beams for linking the massive part and a central part. These elements are formed by working a single crystalline silicon plate. Gaps between the massive part and opposing electrodes are changed by acceleration applied to the massive part. A circuit connected to terminals detects the changes in gaps as changes in capacitances and determines direction and level of the applied acceleration.
摘要翻译： 能够检测碰撞时发生的加速度小，加速度高达100G的三维加速度传感器包括用于连接框架和块状部件的隔膜以及用于连接块状部件的隔膜和梁 中心部分。 这些元件通过加工单晶硅板形成。 大块部件和相对电极之间的间隙由施加在大块部件上的加速度而改变。 连接到端子的电路检测间隙的变化，作为电容的变化，并确定施加的加速度的方向和水平。
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22.发明授权
公开(公告)号：US5437761A
公开(公告)日：1995-08-01
申请号：US206097
申请日：1994-03-04
申请人： Akira Koide
发明人： Akira Koide
摘要： A lithium niobate crystal wafer wherein the deviations of the maximum and minimum absorption coefficients of the wafer at a wavelength of 2.87 .mu.m from the average absorption coefficient thereof at that wavelength fall within the range of .+-.0.1 cm.sup.-1 exclusive of both borders; a process for the preparation of the same; and a method for the evaluation thereof.
摘要翻译： 铌酸锂晶体晶片，其中在波长2.87μm处的晶片的最大和最小吸收系数与该波长处的平均吸收系数的偏差落在+/- 0.1cm-1的范围内，不包括两个边界 ; 一个制备过程的过程; 及其评价方法。
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公开(公告)号：US08652834B2
公开(公告)日：2014-02-18
申请号：US12817333
申请日：2010-06-17
申请人： Toyoshige Kobayashi , Kazutoshi Kan , Akira Koide , Hideaki Sakai
发明人： Toyoshige Kobayashi , Kazutoshi Kan , Akira Koide , Hideaki Sakai
摘要： A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper surface and a culture space formed thereon, and a joint for supplying solution such as a medium to the culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.
摘要翻译： 培养装置具有培养容器，其具有在其上表面上形成的第一弹性密封件和形成在其上的培养空间，以及用于向培养容器供应诸如培养基的溶液的接头和形成在下表面的微突起的第二弹性密封件 。 第一弹性密封件具有用于供应或排出溶液的阀。 第二弹性密封件在对应于用于防止溢出的阀的位置处由微喷射体形成。 培养容器和接头被吸入第一弹性密封件和第二弹性密封件之间，从而形成整体的种子装置。
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公开(公告)号：US08438718B2
公开(公告)日：2013-05-14
申请号：US13028592
申请日：2011-02-16
申请人： Takanori Aono , Kengo Suzuki , Akira Koide , Masahide Hayashi
发明人： Takanori Aono , Kengo Suzuki , Akira Koide , Masahide Hayashi
IPC分类号： G01R3/00
CPC分类号： G01C19/56 , B81B2201/0235 , B81B2201/0242 , B81B2207/096 , B81C1/00285 , B81C2203/0118 , B81C2203/035 , G01C19/5769 , G01C19/5783 , G01P15/0802 , G01P2015/0882 , H01L2224/48145 , H01L2224/73265 , H01L2224/92247 , H01L2924/181 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49171 , Y10T29/49176 , Y10T29/49826 , H01L2924/00012
摘要： A movable device of acceleration sensors and a vibration device of a gyroscope are formed on the same sensor wafer spaced apart from each other by a wall. A cap wafer having gaps corresponding to the movable mechanical components of the acceleration sensors and gyroscope is provided for the wafer and an adsorbent divided into a plurality of divisional portions is disposed in the gap for the gyroscope. After the sensor wafer and the cap wafer have been bonded together at a temperature of inactivation of the adsorbent and in an atmospheric pressure ambience of noble gas and activated gas, the adsorbent divisional portions are activated in sequence to adsorb the activated gas so as to adjust the pressure inside the gyroscope, thus manufacturing a combined sensor wafer.
摘要翻译： 加速度传感器的可移动装置和陀螺仪的振动装置形成在通过壁彼此间隔开的相同传感器晶片上。 为晶片提供具有与加速度传感器和陀螺仪的可移动机械部件相对应的间隙的盖片晶片，并且分离成多个分割部分的吸附剂设置在用于陀螺仪的间隙中。 在传感器晶片和盖晶片已经在吸附剂失活的温度下并且在惰性气体和活性气体的大气压氛围下结合在一起，吸附剂分段依次被激活以吸附活性气体，以便调节 陀螺仪内部的压力，从而制造组合的传感器晶片。
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公开(公告)号：US20060115893A1
公开(公告)日：2006-06-01
申请号：US11192023
申请日：2005-07-29
申请人： Toyoshige Kobayashi , Kazutoshi Kan , Akira Koide , Hideaki Sakai
发明人： Toyoshige Kobayashi , Kazutoshi Kan , Akira Koide , Hideaki Sakai
IPC分类号： C12M1/22
摘要： A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper face and a culture space formed thereon, and a joint having supplying means for supplying solution such as a medium to this culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked by the adsorbing means between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.
摘要翻译： 培养装置具有培养容器，其具有在其上表面上形成的第一弹性密封件和形成在其上的培养空间，以及具有用于向该培养容器供应溶液的介质的供给装置和具有微突出物的第二弹性密封件 下面。 第一弹性密封件具有用于供应或排出溶液的阀。 第二弹性密封件在对应于用于防止溢出的阀的位置处由微喷射体形成。 培养容器和接头由第一弹性密封件和第二弹性密封件之间的吸附装置吸引，从而形成整体的种子装置。
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公开(公告)号：US5389198A
公开(公告)日：1995-02-14
申请号：US763519
申请日：1991-09-23
申请人： Akira Koide , Kazuo Sato , Seiko Suzuki , Norio Ichikawa , Hidehito Obayashi , Masahide Hayashi
发明人： Akira Koide , Kazuo Sato , Seiko Suzuki , Norio Ichikawa , Hidehito Obayashi , Masahide Hayashi
IPC分类号： G01P15/125 , B81B3/00 , H01L21/306 , H01L21/308 , H01L29/84 , H01L21/00
CPC分类号： H01L21/30608 , H01L21/3086 , G01P2015/0828
摘要： A method of manufacturing structures such as a pressure gauge, an accelerometer and the like with a single crystal material such as silicon uses etching techniques where the shape of a part subjected to stress concentration has a curvature, another part is formed in a plane body and a polyhedron is constituted by combining both.To attain the above constitution, a wafer of single crystal material is formed with a stepped surface having a value corresponding to at least the depth of the curvature in a first anisotropic etching process using a prescribed etching mask, and in a second anisotropic etching process, an etching mask is used by removing at least a part of the etching mask used in the first anisotropic etching process.
摘要翻译： 使用诸如硅的单晶材料制造诸如压力计，加速度计等的结构的方法使用蚀刻技术，其中经受应力集中的部分的形状具有曲率，另一部分形成在平面体中， 多面体是通过组合两者构成的。 为了实现上述结构，在使用规定的蚀刻掩模的第一各向异性蚀刻工艺中，形成具有至少与曲率深度相对应的值的阶梯面的单晶材料晶片，在第二各向异性蚀刻工艺中， 通过去除在第一各向异性蚀刻工艺中使用的蚀刻掩模的至少一部分来使用蚀刻掩模。
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公开(公告)号：US5367429A
公开(公告)日：1994-11-22
申请号：US962508
申请日：1992-10-16
申请人： Shigeki Tsuchitani , Seiko Suzuki , Satoshi Shimada , Masayuki Miki , Masahiro Matsumoto , Susumu Murakami , Akira Koide , Masahiro Kurita , Hiromichi Ebine
发明人： Shigeki Tsuchitani , Seiko Suzuki , Satoshi Shimada , Masayuki Miki , Masahiro Matsumoto , Susumu Murakami , Akira Koide , Masahiro Kurita , Hiromichi Ebine
CPC分类号： B81B3/0008 , B81B3/001 , G01P15/125 , G01P2015/0828 , H01H2059/0018 , H01H2059/0072
摘要： An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.
摘要翻译： 一种静电型微加速度计，包括当可移动电极过度位移时，由于残余电介质极化，电阻和残余电荷以及在其间可能的接触部分的水吸附和冷凝而防止可动电极和固定电极之间的永久性粘附的装置。 防粘装置通过在可能的接触部分周围设置电场减小装置，水吸附和冷凝减少装置和接触区域限制装置来实现。
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公开(公告)号：US09146253B2
公开(公告)日：2015-09-29
申请号：US13699235
申请日：2011-05-20
申请人： Takanori Aono , Kengo Suzuki , Akira Koide , Masahide Hayashi
发明人： Takanori Aono , Kengo Suzuki , Akira Koide , Masahide Hayashi
IPC分类号： G01P1/02 , G01P15/08 , B81C1/00 , G01C19/56 , G01P15/125 , G01C19/5783 , H01L23/00 , H01L23/31 , H01L21/56
CPC分类号： G01P15/0802 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81B2207/095 , B81C1/00293 , B81C2203/031 , G01C19/56 , G01C19/5783 , G01P15/125 , H01L21/561 , H01L23/315 , H01L24/94 , H01L2924/12042 , H01L2924/15788 , H01L2924/16235 , Y10T29/49146 , Y10T29/49826 , H01L2924/00
摘要： An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors.A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.
摘要翻译： 加速度传感器和角速度传感器在一系列接合步骤的过程中被密封在适合于其的相应的压力环境中，从而提高传感器的检测灵敏度。 加速度传感器11的可动部件111和角速度传感器12的振动器121被制造在相同的传感器晶片10上，壁16插入其中。 形成盖片20，其中设置有与加速度传感器11的可动构件111对应的间隙21,22和角速度传感器12的振子121。 凸起23设置在角速度传感器12的间隙22附近。加速度传感器11在大气压下被密封。 然后，对角速度传感器12进行高温高负荷的真空密封。 此后，进行用金刚石磨石切割并安装电路基板和布线基板以形成组合的传感器。
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公开(公告)号：US20110209815A1
公开(公告)日：2011-09-01
申请号：US13028592
申请日：2011-02-16
申请人： Takanori AONO , Kengo Suzuki , Akira Koide , Masahide Hayashi
发明人： Takanori AONO , Kengo Suzuki , Akira Koide , Masahide Hayashi
CPC分类号： G01C19/56 , B81B2201/0235 , B81B2201/0242 , B81B2207/096 , B81C1/00285 , B81C2203/0118 , B81C2203/035 , G01C19/5769 , G01C19/5783 , G01P15/0802 , G01P2015/0882 , H01L2224/48145 , H01L2224/73265 , H01L2224/92247 , H01L2924/181 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49171 , Y10T29/49176 , Y10T29/49826 , H01L2924/00012
摘要： A movable device of acceleration sensors and a vibration device of a gyroscope are formed on the same sensor wafer spaced apart from each other by a wall. A cap wafer having gaps corresponding to the movable mechanical components of the acceleration sensors and gyroscope is provided for the wafer and an adsorbent divided into a plurality of divisional portions is disposed in the gap for the gyroscope. After the sensor wafer and the cap wafer have been bonded together at a temperature of inactivation of the adsorbent and in an atmospheric pressure ambience of noble gas and activated gas, the adsorbent divisional portions are activated in sequence to adsorb the activated gas so as to adjust the pressure inside the gyroscope, thus manufacturing a combined sensor wafer.
摘要翻译： 加速度传感器的可移动装置和陀螺仪的振动装置形成在通过壁彼此间隔开的相同传感器晶片上。 为晶片提供具有与加速度传感器和陀螺仪的可移动机械部件相对应的间隙的盖片晶片，并且分离成多个分割部分的吸附剂设置在用于陀螺仪的间隙中。 在传感器晶片和盖晶片已经在吸附剂失活的温度下并且在惰性气体和活性气体的大气压氛围下结合在一起，吸附剂分段依次被激活以吸附活性气体，以便调节 陀螺仪内部的压力，从而制造组合的传感器晶片。
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公开(公告)号：US07749750B2
公开(公告)日：2010-07-06
申请号：US11192023
申请日：2005-07-29
申请人： Toyoshige Kobayashi , Kazutoshi Kan , Akira Koide , Hideaki Sakai
发明人： Toyoshige Kobayashi , Kazutoshi Kan , Akira Koide , Hideaki Sakai
摘要： A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper surface and a culture space formed thereon, and a joint for supplying solution such as a medium to the culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.
摘要翻译： 培养装置具有培养容器，其具有在其上表面上形成的第一弹性密封件和形成在其上的培养空间，以及用于向培养容器供应诸如培养基的溶液的接头和形成在下表面的微突起的第二弹性密封件 。 第一弹性密封件具有用于供应或排出溶液的阀。 第二弹性密封件在对应于用于防止溢出的阀的位置处由微喷射体形成。 培养容器和接头被吸入第一弹性密封件和第二弹性密封件之间，从而形成整体的种子装置。
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