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93 条记录 (耗时 0.029 秒)

    Method and apparatus for fine processing
    22.
    发明授权
    Method and apparatus for fine processing 失效
    精细加工的方法和装置

    公开(公告)号：US5409802A

    公开(公告)日：1995-04-25

    申请号：US164822

    申请日：1993-12-09

    申请人： Yasue Sato ,  Toshiyuki Komatsu ,  Shinichi Kawate

    发明人： Yasue Sato ,  Toshiyuki Komatsu ,  Shinichi Kawate

    IPC分类号： H01L21/28 ,  G03F7/004 ,  G03F7/16 ,  H01L21/027 ,  H01L21/033 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/308 ,  G03C5/00

    CPC分类号： G03F7/0041 ,  G03F7/167 ,  H01L21/0337 ,  H01L21/3086 ,  Y10S430/146

    摘要： A method for fine processing includes a first step in which a first reaction gas is introduced into a reaction chamber which contains a material to be processed, followed by irradiation with light to form an active layer on the surface of the material through photochemical reaction between the material and the first reaction gas, a second step in which the active layer is selectively irradiated with energy in an atmosphere of a second reaction gas to cause a chemical change only in the irradiated portion to form a latent image layer, a third step in which either the latent image layer or active layer is removed and a fourth step in which, using the portion left unremoved in the third step as a shield mask, the portion other than the masked portion is etched.

    摘要翻译： 精细加工方法包括第一步骤，其中将第一反应气体引入到含有待处理材料的反应室中，随后通过光的光化反应在该材料的表面上形成活性层， 材料和第一反应气体，第二步骤，其中活性层在第二反应气体的气氛中被选择性地照射能量，仅在照射部分中引起化学变化以形成潜像层，第三步骤 去除潜像层或活性层，第四步骤，其中使用在第三步骤中未被除去的部分作为屏蔽掩模，蚀刻除了掩模部分以外的部分。

    Matrix circuit
    25.
    发明授权
    Matrix circuit 失效
    矩阵电路

    公开(公告)号：US5043719A

    公开(公告)日：1991-08-27

    申请号：US630778

    申请日：1990-12-21

    申请人： Katsumi Nakagawa ,  Toshiyuki Komatsu ,  Shinichi Seito ,  Yasuo Kuroda ,  Katsunori Hatanaka

    发明人： Katsumi Nakagawa ,  Toshiyuki Komatsu ,  Shinichi Seito ,  Yasuo Kuroda ,  Katsunori Hatanaka

    IPC分类号： H03K17/00 ,  G09G3/20 ,  H01L27/10 ,  H01L31/0248 ,  H04N1/028 ,  H04N1/40

    CPC分类号： G09G3/2085 ,  G09G3/20 ,  H04N1/40056

    摘要： A matrix circuit has a plurality of blocks each including a plurality of semiconductor unit elements, the semiconductor unit elements of each block being adapted to be impressed with a predetermined voltage at the same time, each unit element becoming active when impressed with the predetermined voltage, and a drive device for impressing the predetermined voltage to the plurality of blocks sequentially. The matrix circuit includes a first selective device for selecting either ground or a desired other than ground voltage, and a second selective device for selecting one of the output of the drive device and the output of the first selective device whereby the output of the second selective device renders active the plurality of unit elements of each block.

    摘要翻译： 矩阵电路具有多个块，每个块包括多个半导体单元元件，每个块的半导体单元元件同时被施加预定电压，每个单元元件在施加预定电压时变得有效， 以及用于将预定电压顺序地施加到多个块的驱动装置。 矩阵电路包括用于选择接地或除接地电压之外的期望的第一选择装置，以及用于选择驱动装置的输出和第一选择装置的输出之一的第二选择装置，由此第二选择装置的输出 设备呈现活动每个块的多个单元元素。

    Method of manufacturing photosensors
    27.
    发明授权
    Method of manufacturing photosensors 失效
    制造光电传感器的方法

    公开(公告)号：US4792670A

    公开(公告)日：1988-12-20

    申请号：US169467

    申请日：1988-03-10

    申请人： Masaki Fukaya ,  Toshiyuki Komatsu ,  Tatsumi Shoji ,  Masaru Kamio ,  Nobuyuki Sekimura

    发明人： Masaki Fukaya ,  Toshiyuki Komatsu ,  Tatsumi Shoji ,  Masaru Kamio ,  Nobuyuki Sekimura

    IPC分类号： H01L27/146 ,  H01L31/09 ,  H04N1/031 ,  H04N1/40 ,  H01L31/18 ,  B05D3/06

    CPC分类号： H01L31/095 ,  H01L27/14665 ,  H04N1/031 ,  H04N1/40056

    摘要： There is a photosensor comprising: a photoconductive layer containing amorphous silicon provided on a substrate in which this photoconductive layer consists of laminated films of two or more layers having different refractive indexes and the refractive index of the lowest layer of the laminated films is not larger than 3.2 for the incident light of a wavelength of 6328 .ANG.; a pair of electrodes provided in electrical contact with the photoconductive layer; and a photo sensing section. A long size image sensor unit is constituted by a plurality of such photosensors arranged like an array, a matrix drive circuit to matrix-drive each photosensor, and a light source such as light emitting diodes or a fluorescent lamp to illuminate an original to be read. With this image sensor unit, it is possible to provide a low-cost image reading apparatus which can read an image on the original at a high speed in which: the uniformity of the characteristic of each photosensor is improved; a variation in signal between the bits is reduced; a correction circuit for such a variation is unnecessary; and the peel-off of the photoconductive layer does not occur. A method of manufacturing such photosensors is also disclosed.

    摘要翻译： 有一种光电传感器，它包括：一个光电导层，它包含非晶硅，它设置在基片上，该光电导层由具有不同折射率的两层或更多层的叠层膜组成，层压薄膜最低层的折射率不大于 3.2对于波长为6328的入射光ANGSTROM; 一对与光电导层电接触的电极; 和感光部。 长尺寸图像传感器单元由多个布置成阵列的光电传感器构成，矩阵驱动电路用于矩阵驱动每个光电传感器，以及诸如发光二极管或荧光灯的光源来照亮待读取的原稿 。 利用该图像传感器单元，可以提供一种低成本图像读取装置，其可以高速读取原稿上的图像，其中：每个光电传感器的特性的均匀性得到改善; 位之间的信号变化减小; 不需要用于这种变化的校正电路; 并且不会发生光电导层的剥离。 还公开了制造这种光电传感器的方法。