-
公开(公告)号:US20150140832A1
公开(公告)日:2015-05-21
申请号:US14081161
申请日:2013-11-15
Applicant: Universal Display Corporation
Inventor: William E. Quinn , Siddharth Harikrishna Mohan , Gregory McGraw
CPC classification number: H01L51/0011 , C23C14/042 , C23C14/12 , H01L51/56
Abstract: Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.
Abstract translation: 提供了用于沉积有机层的源,器件和技术,例如用于OLED。 蒸发器可以将冷却的侧壁之间的材料蒸发并且朝向具有可调节的掩模开口的掩模蒸发。 可以调节掩模开口以控制材料在衬底上的沉积图案,以便校正在沉积期间发生的材料堆积。 可以从冷却的侧壁收集材料以供重新使用。
-
公开(公告)号:US20140027740A1
公开(公告)日:2014-01-30
申请号:US13895892
申请日:2013-05-16
Applicant: UNIVERSAL DISPLAY CORPORATION
Inventor: Paul E. Burrows , Emory Krall , Huiqing Pang , Jason Paynter , Kamala Rajan , Ruiqing Ma , Gregory McGraw
IPC: H01L51/52
CPC classification number: H01L51/5275 , F21S8/06 , F21V3/062 , F21V5/008 , F21V17/002 , F21V17/12 , F21Y2105/00 , F21Y2115/15
Abstract: Luminaires and luminaire components are provided that may include emissive, index-matching, and/or outcoupling components that are replaceable separately from other components of the luminaire. In some embodiments, an index-matching component may include a gel sheet or pad that can be disposed between an emissive component and an outcoupling component. The index-matching component may be replaceable separately from the emissive and outcoupling components. In some embodiments, an emissive component including an OLED panel and/or an index-matching component may be replaceable separately from other components of the luminaire.
Abstract translation: 提供的灯具和灯具组件可以包括可以与照明器的其他部件分开替换的发射,折射率匹配和/或外耦合部件。 在一些实施例中,折射率匹配部件可以包括可布置在发射部件和外耦合部件之间的凝胶片或垫。 索引匹配部件可以与发射和输出耦合部件分开地替换。 在一些实施例中,包括OLED面板和/或折射率匹配部件的发射部件可以与照明器的其他部件分开替换。
-
公开(公告)号:US12127467B2
公开(公告)日:2024-10-22
申请号:US17370050
申请日:2021-07-08
Applicant: Universal Display Corporation
Inventor: Gregory McGraw , William E. Quinn , Roman Korotkov
CPC classification number: H10K71/135 , B05C5/0275 , B41J2/1433 , H10K71/00 , H10K85/40
Abstract: Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel. The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.
-
公开(公告)号:US20240279789A1
公开(公告)日:2024-08-22
申请号:US18610937
申请日:2024-03-20
Applicant: Universal Display Corporation
Inventor: Edwin van den Tillaart , Sven Pekelder , Mark Meuwese , William E. Quinn , Gregory McGraw , Gregg Kottas
CPC classification number: C23C14/24 , C23C14/12 , C23C16/45517 , C23C16/45525 , C23C16/45563 , C23C16/45565 , C23C16/45574 , C23C16/45578 , C23C16/545 , H10K71/135 , H10K85/342
Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
-
公开(公告)号:US12065728B2
公开(公告)日:2024-08-20
申请号:US17854232
申请日:2022-06-30
Applicant: Universal Display Corporation
Inventor: Matthew King , Gregg Kottas , Gregory McGraw , William E. Quinn
IPC: B41J2/14 , B05B1/00 , B05B1/24 , B05B1/28 , B41J2/005 , C23C14/12 , C23C14/24 , H10K71/00 , H10K50/11 , H10K71/18 , H10K101/10
CPC classification number: C23C14/24 , B05B1/005 , B05B1/24 , B05B1/28 , B41J2/005 , B41J2/14 , B41J2/14145 , C23C14/12 , H10K71/00 , H10K50/11 , H10K71/18 , H10K2101/10
Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.
-
公开(公告)号:US12029102B2
公开(公告)日:2024-07-02
申请号:US17142490
申请日:2021-01-06
Applicant: Universal Display Corporation
Inventor: Michael Hack , William E. Quinn , Gregory McGraw , William T. Mayweather, III , Julia J. Brown
IPC: H01L35/24 , C23C16/30 , H01L51/00 , H10K50/11 , H10K50/844 , H10K71/18 , H10K101/10 , H10K101/40
CPC classification number: H10K71/18 , C23C16/301 , H10K50/11 , H10K50/844 , H10K2101/10 , H10K2101/40
Abstract: Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.
-
公开(公告)号:US11751466B2
公开(公告)日:2023-09-05
申请号:US17224240
申请日:2021-04-07
Applicant: Universal Display Corporation
Inventor: Matthew King , Gregg Kottas , Gregory McGraw , William E. Quinn
CPC classification number: H10K71/00 , B41J2/005 , B41J2/14 , B41J2/14145 , H10K71/135 , H10K71/16 , B41J2002/0055
Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.
-
公开(公告)号:US11168391B2
公开(公告)日:2021-11-09
申请号:US15475408
申请日:2017-03-31
Applicant: Universal Display Corporation
Inventor: Edwin van den Tillaart , Sven Pekelder , Mark Meuwese , William E. Quinn , Gregory McGraw , Gregg Kottas
IPC: C23C14/24 , C23C14/12 , C23C16/455 , C23C16/54 , H01L51/00
Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
-
公开(公告)号:US11121322B2
公开(公告)日:2021-09-14
申请号:US16689259
申请日:2019-11-20
Applicant: Universal Display Corporation
Inventor: Matthew King , William E. Quinn , Gregory McGraw , Siddharth Harikrishna Mohan , Elliot H. Hartford , Benjamin Swedlove , Gregg Kottas , Tomasz Trojacki , Julia J. Brown
Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.
-
公开(公告)号:US11108027B2
公开(公告)日:2021-08-31
申请号:US16245517
申请日:2019-01-11
Applicant: Universal Display Corporation
Inventor: William E. Quinn , Jason Paynter , Gregory McGraw , Matthew King
Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.
-
-
-
-
-
-
-
-
-