Abstract:
Electrolytic capacitors are provided with a pressure-relief valve which opens if the gas pressure inside the capacitor exceeds a given value to relieve the pressure. In the case of severe electrical overloading, however, the gas-relief passage usually is of insufficient size to prevent excessive pressure build-up, and there is a possibility of explosions. The present invention provides a capacitor in which the pressure-relief valve comprises a venting aperture in a bowl-shaped recess member with the aperture being closed by an elastic member held in compression over the aperture by a thermoplastic strip secured at its ends to the wall of the capacitor housing. The valve is self-sealing for minor pressure increases, but with severe increases a rapid temperature rise of the capacitor roll softens the thermoplastic strip which then allows the elastic member to be blown away so that the aperture becomes directly open to the atmosphere and allows the excessive pressure to be released very rapidly to prevent any possible explosion.
Abstract:
Disclosed is a method for fabricating very high performance semiconductor devices, particularly bipolar-type transistors having a heavily doped inactive base and a lightly doped narrow active base formed by ion implantation. In order to prevent the high dose boron implantation, for an NPN transistor, from getting into the active base region, a self-aligned mask covering the emitter contact i.e., active base region, is required for inactive base implantation. The self-aligned mask is anodically oxidized aluminum pads. The device wafer metallized with blanket aluminum film is immersed in a dilute H.sub.2 SO.sub.4 solution electrolytic cell which selectively anodizes only the aluminum lands situated over the Si.sub.3 N.sub.4 /SiO.sub.2 defined device contact windows. The aluminum oxide formed by anodization process is porous but may be sealed and densified. The aluminum film that is not anodized is then selectively etched off using either chemical solution or sputter etching. Using the aluminum oxide formed over the contact windows to mask the active base region, a high dose boron implantation is made through the Si.sub.3 N.sub.4 /SiO.sub.2 layers to dope the external base region. After stripping the aluminum oxide from the emitter contact window, the emitter with a desired concentration profile and junction depth is subsequently formed. Formation of the active base is formed by a low dose boron implantation made with its concentration peak below the emitter. A relatively low temperature annealing, as for example, 900.degree. C., is used to fully activate the implanted boron and minimize the redistribution of the active base doping profile. The device thus formed will have a controllable narrow base width and doping profile.
Abstract translation:公开了一种用于制造非常高性能的半导体器件的方法,特别是具有重掺杂非活性碱和通过离子注入形成的轻掺杂窄活性碱的双极型晶体管。 为了防止对于NPN晶体管的高剂量硼注入进入有源基极区域,需要一个覆盖发射极接触的自对准掩模,即有源基极区域,用于无源基极植入。 自对准掩模是阳极氧化铝垫。 用橡皮布铝膜金属化的器件晶片浸入稀释的H 2 SO 4溶液电解池中,该电解池仅选择性地阳极氧化位于Si 3 N 4 / SiO 2界定的器件接触窗上方的铝焊盘。 通过阳极氧化法形成的氧化铝是多孔的,但可以被密封和致密化。 然后使用化学溶液或溅射蚀刻选择性地蚀刻掉未阳极氧化的铝膜。 使用形成在接触窗口上的氧化铝来掩蔽活性碱性区域,通过Si 3 N 4 / SiO 2层制备高剂量硼注入以掺杂外部碱性区域。 在从发射极接触窗口剥离氧化铝之后,随后形成具有所需浓度分布和结深度的发射极。 活性碱的形成是通过低浓度硼掺杂形成的,其浓度峰值低于发射极。 使用相对低温退火(例如900℃)来完全激活注入的硼并最小化活性碱掺杂分布的再分配。 如此形成的器件将具有可控的窄基极宽度和掺杂分布。
Abstract:
The solar cell module of this invention is fabricated by placing an array of solar cells in a suitable mold having a bottom surface, an entry port and an exit port. A light transparent superstrate effectively serves as the top for the mold and is placed over the array of solar cells in the mold. The superstrate is spaced from the array such that the superstrate does not come in contact with the top surface of any of the cells or interconnectors of the solar cell array. Clamp means are provided to hold the superstrate in position while encapsulant is pumped into the mold under pressure through the inlet port in an amount sufficient to fill the mold. Thereafter the assembly can be placed in an oven and heated for a time sufficient to cure the encapsulant and bond the materials to each other.
Abstract:
A semiconductor wafer is appropriately doped to create a P-N or P-I-N junction, and metallized on both its planar surfaces with electrode material. The wafer is then bonded to a second similarly processed wafer. Without damaging the semiconductor material, the stacked wafer is processed so as to delineate a plurality of diodes on each side of the center metallization, such that the diodes on each side are registered with each other. The center metallization is then cut so as to yield a plurality of stacked semiconductor diodes.
Abstract:
A monolithic charge-coupled infrared imaging device (CCIRID) is fabricated on N-type HgCdTe. A native oxide layer on the semiconductor is used, in combination with ZnS to provide first level insulation. An opaque field plate over first level insulation is provided for signal channel definition. Second level insulation (ZnS) is substantially thicker than the first level, and is provided with a stepped or sloped geometry under the first level gates. Input and output diodes are provided with MIS guard rings to increase breakdown voltages.
Abstract:
An energy efficient process is disclosed for the continuous production of semiconductor matrices formed from depositing doped silicon or germanium films on metallic sheet substrates. The energy released from such deposition can then be used to regenerate the anode material used in the deposition.
Abstract:
A method for use in making semiconductor type electrical devices such as solar cells. In the method, a wafer of semiconductor material having two major surfaces is provided, the wafer being doped with an impurity of one conductivity type. A layer of a metal-containing compositions such as aluminum, is placed on one of the major surfaces of the wafer, and the wafer is then heated in the presence of an impurity of the opposite conductivity type to a temperature such that a high-low junction is formed by the metal at one major surface while the impurity of the opposite conductivity type diffuses or penetrates the other major surface to form a p-n junction thereat.
Abstract:
This invention provides the structure for a two-phase charge coupled storage device. Alternate regions of thicker and thinner silicon dioxide are grown upon a silicon substrate. These silicon dioxide regions are covered with a layer of deposited, undoped polysilicon. A layer of silicon dioxide is grown over the polysilicon. Ion implantation is applied to cause isolated regions of conductivity in the polysilicon. Then contact windows are cut in the upper most layer of silicon dioxide exposing the polysilicon therethrough and a metal coating is deposited in the contact windows. Two-phase signals are applied to the resulting electrodes to advance charges at the surface of the silicon substrate.
Abstract:
A process for producing VLSI (very large scale integrated) circuits employs techniques of self-aligned gates and contacts for FET devices and for both diffused conducting lines in the substrate and polysilicon conducting lines situated on isolating field oxide formed on the substrate. Mask alignment tolerances are increased and rendered non-critical. The use of materials in successive layers having different etch characteristics permits selective oxidation of only desired portions of the structure without need for masking and removal of selected material from desired locations by batch removal processes again without use of masking. There results VLSI circuits having increased density and reliabilty. The process allows the simultaneous doping of two or more regions resulting in uniformity of device characteristics.
Abstract:
A silicon body (10) of a first conductivity type is covered with a sandwich of silicon dioxide (12), polycrystalline silicon (14) and silicon nitride (16). Source, drain, and interconnect work sites of the body are exposed by a first photoshaping operation. The work sites are doped forming regions (21, 22, 23) of a second conductivity type. Silicon dioxide (24, 26, 28) is grown over the work sites. A second photoshaping operation provides an opening 36. The walls of the opening 36 on two opposite sides comprise sides of the sandwich layer as established by the first photoshaping operation and the two remaining walls comprise sides of the silicon dioxide as established by the second photoshaping operation. Silicon nitride (44) is next deposited over the entire wafer (15) which is then photoshaped to define the field regions (46, 48). The etching process is continued to remove part of the silicon body as well as the sides of those exposed regions. Thereafter, silicon dioxide (47, 49) is grown in the field regions. The remaining silicon nitride layer is removed to reveal the underlying conductive polycrystalline silicon (14) at the gate region, the walls of the contact opening 36 and the interconnect region 23. A conductive material (51, 50) is deposited over the wafer (15) and then photoshaped to provide the desired pattern of ohmic interconnections.