公开(公告)号：US08158048B2

公开(公告)日：2012-04-17

申请号：US11847636

申请日：2007-08-30

申请人： Kenya Ohashi ,  Masahiko Ogino ,  Akihiro Miyauchi

发明人： Kenya Ohashi ,  Masahiko Ogino ,  Akihiro Miyauchi

IPC分类号： B29C59/00

CPC分类号： B29C33/10 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10S977/887

摘要： A mold for forming a resin pattern using nanoimprint lithography according to the present invention comprises a main mold including a fine pattern of a protrusion and a depression intended to be transferred, and a spacer for forming a space between the protrusion of the fine pattern of the main mold and a transferred object during a transfer of the fine pattern, in which the spacer has a vent passage capable of flowing gas therethrough and has an elasticity against a pressing force during the transfer.

摘要翻译： 根据本发明的使用纳米压印光刻形成树脂图案的模具包括：主模具，其包括突起的精细图案和待转印的凹陷;以及间隔件，用于在所述微型图案的突起之间形成空间 主模具和被转移物体在精细图案的转印期间，其中间隔件具有能够使气体流过的通气通道，并且具有抵抗转印期间的按压力的弹性。

公开(公告)号：US07815706B2

公开(公告)日：2010-10-19

申请号：US10521818

申请日：2003-08-04

申请人： Koji Yamada ,  Masahiko Ogino ,  Nobuyasu Ezawa ,  Hiroshi Inoue

发明人： Koji Yamada ,  Masahiko Ogino ,  Nobuyasu Ezawa ,  Hiroshi Inoue

IPC分类号： C22B11/00

CPC分类号： C22B9/16 ,  C22B11/02 ,  C22B11/021 ,  C22B11/026 ,  C22B15/0054 ,  Y02P10/214

摘要： A method for recovering platinum group elements comprises charging into a closed electric furnace and melting, together with flux components and a reducing agent, a platinum group element-containing substance to be processed and a copper source material containing copper oxide, sinking molten metal of primarily metallic copper below a molten slag layer of primarily oxides, and enriching the platinum group elements in the molten metal sunk below, and is characterized in that molten slag whose copper content has decreased to 3.0 wt % or less is discharged from the electric furnace and that the copper source material charged into the electric furnace is a granular copper source material of a grain diameter of not less than 0.1 mm and not greater than 10 mm.

摘要翻译： 回收铂族元素的方法包括：向封闭的电炉中加入熔融物，与助熔剂成分和还原剂一起熔化待加工的含铂族元素的物质和含有氧化铜的铜源材料，主要沉入熔融金属 金属铜在主要氧化物的熔融渣层以下，并且将熔融金属中的铂族元素富集在下面，并且其特征在于，铜含量已降至3.0重量％以下的熔渣从电炉中排出， 装入电炉的铜源材料是粒径不小于0.1mm且不大于10mm的粒状铜源材料。

公开(公告)号：US20100255139A1

公开(公告)日：2010-10-07

申请号：US12752808

申请日：2010-04-01

申请人： Ryuta WASHIYA ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

发明人： Ryuta WASHIYA ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

IPC分类号： B29C59/02

CPC分类号： G03F7/0002 ,  B29C33/00 ,  B29C43/021 ,  B29C2043/025 ,  B29C2043/3233 ,  B29C2043/3488 ,  B29C2043/3602 ,  B29C2043/5808 ,  B82Y10/00 ,  B82Y40/00

摘要： A micropattern transfer stamper has a space that hermetically contains fluid, on an opposite side of a surface with an indented pattern formed thereon of a pattern forming sheet member. The pattern forming sheet member is convexly bent by pressure of the fluid contained in the space. When the indented pattern is transferred onto the material to be transferred, the pattern forming sheet member deforms following the surface of the material to be transferred.

摘要翻译： 在图案形成片部件的形成有凹凸图案的表面的相对侧上，微图案转印印模具有气密地含有流体的空间。 图案形成片构件通过包含在空间中的流体的压力而凸起地弯曲。 当凹入图案转印到待转印的材料上时，图案形成片材随着要转印的材料的表面变形。

公开(公告)号：US20090166914A1

公开(公告)日：2009-07-02

申请号：US12343550

申请日：2008-12-24

申请人： Masahiko Ogino ,  Mitsuru Hasegawa ,  Akihiro Miyauchi

发明人： Masahiko Ogino ,  Mitsuru Hasegawa ,  Akihiro Miyauchi

IPC分类号： B29C59/04

CPC分类号： B29C59/04 ,  B29C35/16 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.

摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。

公开(公告)号：US20090087506A1

公开(公告)日：2009-04-02

申请号：US12191326

申请日：2008-08-14

申请人： Mitsuru Hasegawa ,  Masahiko Ogino

发明人： Mitsuru Hasegawa ,  Masahiko Ogino

IPC分类号： B29C33/36

CPC分类号： B29C59/04 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10S977/887

摘要： There is provided a fine pattern transfer, belt-shaped mold, with which a fine structure having a high aspect ratio can be formed rapidly and stably using nanoimprinting, and a fine pattern transfer system (a nanoimprint system) that employs this mold. According to the present invention, a nanoimprint mold includes: a belt-shaped support member; a plurality of stampers, for each of which a fine convex-and-concave pattern, to be transferred, is formed on one surface; and an adhesive member, to which the belt-shaped support member and the stampers are to be securely adhered, wherein the adhesive member includes a porous member and adhesive layers, which are deposited on either face of the porous member, for impregnating one part of the porous member, and wherein, for the porous member, a porous area that is not impregnated with the adhesive layers, is provided and positioned so as to sandwich the porous member between portions impregnated with the adhesive layers.

摘要翻译： 提供了一种精细图案转印，带状模具，利用其可以使用纳米压印快速且稳定地形成具有高纵横比的精细结构，并且使用该模具的精细图案转印系统（纳米压印系统）。 根据本发明，纳米压印模具包括：带状支撑构件; 在一个表面上形成多个刻印机，每个都要在其上形成要转印的细凹凸图案; 以及粘合构件，其中带状支撑构件和压模应牢固地粘附到该粘合构件上，其中粘合构件包括多孔构件和粘合剂层，其沉积在多孔构件的任一面上，用于浸渍一部分 多孔构件，并且其中，对于多孔构件，设置并定位未浸渍有粘合剂层的多孔区域，以将多孔构件夹在浸渍有粘合剂层的部分之间。

公开(公告)号：US20080299247A1

公开(公告)日：2008-12-04

申请号：US12129881

申请日：2008-05-30

申请人： Masahiko Ogino ,  Mitsuru Hasegawa ,  Kenya Ohashi ,  Akihiro Miyauchi ,  Hitoshi Suzuki ,  Toshio Haba ,  Haruo Akahoshi

发明人： Masahiko Ogino ,  Mitsuru Hasegawa ,  Kenya Ohashi ,  Akihiro Miyauchi ,  Hitoshi Suzuki ,  Toshio Haba ,  Haruo Akahoshi

IPC分类号： B29C33/42 ,  C25D1/10

CPC分类号： B29C33/3878 ,  B29C33/424 ,  C25D1/02 ,  C25D1/10 ,  Y10S425/81 ,  Y10T29/49549 ,  Y10T29/49552

摘要： There is provided a fine pattern mold capable of transferring a fine concave/convex pattern accurately without causing deformation of the fine concave/convex pattern itself.The fine patter mold comprises: a roll; a buffer tube whose inner peripheral surface is in contact with an outer peripheral surface of the roll; and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.

摘要翻译： 提供了能够精确地转印精细凹凸图案的精细图案模具，而不会导致精细凹凸图案本身的变形。 精细模具包括：卷; 缓冲管，其内周面与所述辊的外周面接触; 以及其内周面与缓冲管的外周面接触的压模管，在其外周面上形成微细的凹凸图案，其中缓冲管具有较大的线膨胀系数和 比压模管的弹性模量小。

公开(公告)号：US20080174976A1

公开(公告)日：2008-07-24

申请号：US11834452

申请日：2007-08-06

申请人： Toshiya SATOH ,  Masahiko OGINO ,  Takao MIWA ,  Takashi NAITOU ,  Takashi NAMEKAWA ,  Toshihide NABATAME ,  Shigehisa MOTOWAKI

发明人： Toshiya SATOH ,  Masahiko OGINO ,  Takao MIWA ,  Takashi NAITOU ,  Takashi NAMEKAWA ,  Toshihide NABATAME ,  Shigehisa MOTOWAKI

IPC分类号： H05K1/18

CPC分类号： H01L27/13 ,  H01F17/0006 ,  H01L23/49822 ,  H01L23/49827 ,  H01L27/016 ,  H01L27/0676 ,  H01L27/08 ,  H01L2224/16 ,  H01L2924/01021 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01063 ,  H01L2924/01066 ,  H01L2924/01067 ,  H01L2924/01068 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/12044 ,  H01L2924/19011 ,  H01L2924/3011 ,  H01L2924/3025 ,  H05K1/16 ,  H05K1/162 ,  H05K1/165 ,  H05K1/167 ,  H05K3/28 ,  H05K3/3457 ,  H05K3/4602 ,  H05K3/4644 ,  H05K2201/09536 ,  H05K2201/09827 ,  H01L2924/00

摘要： Through an improvement of module size increase due to mounting a single passive element on a substrate and an increase in the mounting cost, to provide a highly reliable, high performance and small sized electronic circuit component which permits to integrate a variety of electronic parts such as capacitors, inductors and resistors in a high density with low cost.The electronic circuit component comprises an insulator substrate, a plurality of electrodes having different areas provided on the insulator substrate, one or more elements selected from a capacitor element of dielectric material sandwiched between the electrodes, an inductor element and resistor element, a metal wiring connecting the elements, a metal terminal part of a part of the metal wiring and an organic insulator material covering the elements and the circumference of the metal wiring portion excluding the metal terminal portion.

摘要翻译： 通过在基板上安装单个无源元件并增加安装成本来改善模块尺寸增加，提供高可靠性，高性能和小尺寸的电子电路元件，其允许将各种电子部件如 电容器，电感器和电阻器，高密度，低成本。 电子电路部件包括绝缘体基板，设置在绝缘体基板上的具有不同区域的多个电极，从夹在电极之间的电介质材料的电容器元件中选择的一个或多个元件，电感器元件和电阻元件，连接 所述元件，所述金属布线的一部分的金属端子部分和覆盖所述元件的有机绝缘体材料以及除了所述金属端子部分之外的所述金属布线部分的周边。

公开(公告)号：US07374417B2

公开(公告)日：2008-05-20

申请号：US10802777

申请日：2004-03-18

申请人： Kosuke Kuwabara ,  Akihiro Miyauchi ,  Masahiko Ogino ,  Sigehisa Motowaki

发明人： Kosuke Kuwabara ,  Akihiro Miyauchi ,  Masahiko Ogino ,  Sigehisa Motowaki

IPC分类号： B29C43/10 ,  B32B3/00 ,  G11B7/26

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10S425/81

摘要： A stamper and a transfer apparatus that utilizes the stamper, which is capable of accurately transferring its own pattern onto an article, such as a substrate, without being affected by any distribution of convex portions on the stamper surface or any contour of the substrate. The stamper has a fine concave-convex pattern on a surface thereof for forming a fine structure on a substrate using a pressing machine. The stamper is flexible and includes a buffer formed on an opposite side to the side on which the concave-convex pattern is formed. The buffer has a longitudinal distribution of moduli of elasticity.

摘要翻译： 一种压模和传送装置，其利用压模，其能够将其自身的图案精确地转印到诸如基板的物品上，而不受压模表面上的凸部的任何分布或基板的任何轮廓的任何分布的影响。 压模在其表面上具有精细的凹凸图案，用于使用压制机在基板上形成精细结构。 压模是柔性的，并且包括形成在其上形成有凹凸图案的一侧的相对侧上的缓冲器。 缓冲液具有弹性模量的纵向分布。

公开(公告)号：US20080041248A1

公开(公告)日：2008-02-21

申请号：US11774216

申请日：2007-07-06

申请人： KOSUKE KUWABARA ,  Takashi Ando ,  Masahiko Ogino ,  Hiroshi Yoshida ,  Yasuhiko Tada

发明人： KOSUKE KUWABARA ,  Takashi Ando ,  Masahiko Ogino ,  Hiroshi Yoshida ,  Yasuhiko Tada

IPC分类号： B41J9/00

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855 ,  H01L21/76817

摘要： The present invention provides an imprint apparatus transferring a surface structure of a stamper to material to be patterned by allowing the stamper come in contact with the material to be patterned. The imprint apparatus includes a holding means that holds the material to be patterned and the stamper with a distance therebetween, a pressure reduction means that reduces pressure of a chamber in which the material to be patterned and the stamper are placed, and an alignment means that aligns the stamper with the material to be patterned.

摘要翻译： 本发明提供一种压印装置，通过允许压模与待图案化的材料接触，将压模的表面结构转移到待图案化的材料。 压印装置包括保持装置，其保持要被图案化的材料和压模之间的距离;减压装置，其减小其中待图案化材料和压模放置的室的压力;以及对准装置， 将压模与待图案化的材料对准。

公开(公告)号：US20080029931A1

公开(公告)日：2008-02-07

申请号：US11774266

申请日：2007-07-06

申请人： Yasuhiko TADA ,  Masahiko OGINO ,  Hiroshi YOSHIDA ,  Takashi ANDO ,  Kosuke KUWABARA

发明人： Yasuhiko TADA ,  Masahiko OGINO ,  Hiroshi YOSHIDA ,  Takashi ANDO ,  Kosuke KUWABARA

IPC分类号： B29C59/02

CPC分类号： B29C59/022 ,  B29C37/0003 ,  B29C2059/023 ,  B29L2017/005 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/855

摘要： An imprint device transfers a finely patterned structure created on a stamper onto a material to be patterned, by bringing the stamper and the material to be patterned in contact with each other. At least one chamfered edge portion is formed at least one of the stamper and the material to be patterned. The imprint device has a separating unit for holding the chamfered edge portion of at least one of the stamper and the material to be patterned, so as to separate the stamper from the material to be patterned.

摘要翻译： 压印设备通过使压模和待图案化的材料彼此接触来将形成在压模上的精细图案化结构传递到待图案化的材料上。 至少一个倒角边缘部分形成有压模和要被图案化的材料中的至少一个。 压印装置具有用于保持压模和要被图案化的材料中的至少一个的倒角边缘部分的分离单元，以便将压模与要被图案化的材料分开。