Methods for encapsulating microelectromechanical (MEM) devices on a wafer scale
    34.
    发明授权
    Methods for encapsulating microelectromechanical (MEM) devices on a wafer scale 有权
    将微机电(MEM)器件封装在晶片上的方法

    公开(公告)号:US07863070B2

    公开(公告)日:2011-01-04

    申请号:US12049836

    申请日:2008-03-17

    IPC分类号: H01L21/00

    CPC分类号: B81C1/00293 B81C2203/0145

    摘要: Apparatus and methods are provided for enabling wafer-scale encapsulation of microelectromechanical (MEM) devices (e.g., resonators, filters) to protect the MEMs from the ambient and to provide either a controlled ambient or a reduced pressure. In particular, methods for wafer-scale encapsulation of MEM devices are provided, which enable encapsulation of MEM devices under desired ambient conditions that are not determined by the deposition conditions of a sealing process in which MEM release via holes are sealed or pinched-off, and which prevent sealing material from being inadvertently deposited on the MEM device during the sealing process.

    摘要翻译: 提供了设备和方法,用于实现微机电(MEM)装置(例如,谐振器,滤波器)的晶片级封装,以保护MEM免受环境影响,并提供受控的环境或减压。 特别地,提供了用于MEM器件的晶片级封装的方法,其能够在期望的环境条件下封装MEM器件,所述环境条件不是通过其中MEM释放通孔被密封或夹断的密封工艺的沉积条件来确定的, 并且其在密封过程中防止密封材料被无意中沉积在MEM装置上。