公开(公告)号：US20130327147A1

公开(公告)日：2013-12-12

申请号：US13880388

申请日：2011-09-19

申请人： Ando Feyh ,  Christina Leinenbach ,  Axel Franke ,  Gary O'Brien

发明人： Ando Feyh ,  Christina Leinenbach ,  Axel Franke ,  Gary O'Brien

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

摘要： A micromechanical device measures an acceleration, a pressure or the like. It comprises a substrate having at least one fixed electrode, a seismic mass moveably arranged on the substrate, at least one ground electrode, which is arranged on the seismic mass, and resetting means for returning the seismic mass into an initial position, wherein the fixed electrode and the ground electrode are configured in one measurement plane for measuring an acceleration, a pressure or the like in the measurement plane, and wherein the fixed electrode and the ground electrode are configured for measuring an acceleration, pressure or the like acting on the seismic mass perpendicular to the measurement plane. The disclosure likewise relates to a corresponding method and a corresponding use.

摘要翻译： 微机械装置测量加速度，压力等。 它包括具有至少一个固定电极的基板，可移动地布置在基板上的地震块，布置在地震块上的至少一个接地电极，以及用于使地震块返回初始位置的复位装置，其中固定 电极和接地电极被配置在一个测量平面中，用于测量测量平面中的加速度，压力等，并且其中固定电极和接地电极被配置为测量作用在地震上的加速度，压力等 质量垂直于测量平面。 本公开同样涉及相应的方法和相应的用途。

公开(公告)号：US08566057B2

公开(公告)日：2013-10-22

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US20120187509A1

公开(公告)日：2012-07-26

申请号：US13120994

申请日：2009-09-15

申请人： Knut Gottfried ,  Maik Wiemer ,  Axel Franke ,  Achim Trautmann ,  Ando Feyh ,  Sonja Knies ,  Joerg Froemel

发明人： Knut Gottfried ,  Maik Wiemer ,  Axel Franke ,  Achim Trautmann ,  Ando Feyh ,  Sonja Knies ,  Joerg Froemel

IPC分类号： H01L29/84 ,  H01L21/768 ,  H01L23/48

CPC分类号： B81C1/00238 ,  B81B2207/012 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/038 ,  H01L24/94 ,  H01L2224/81801 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01058 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2224/13099 ,  H01L2224/13599 ,  H01L2224/05599 ,  H01L2224/05099 ,  H01L2224/29099 ,  H01L2224/29599 ,  H01L2924/00

摘要： A contact arrangement for establishing a spaced, electrically conducting connection between a first wafer and a second wafer includes an electrical connection contact, a passivation layer on the electrical connection contact, and a dielectric spacer layer arranged on the passivation layer, wherein the contact arrangement is arranged at least on one of the first wafer and the second wafer, wherein the contact arrangement comprises trenches at least partly filled with a first material capable of forming a metal-metal connection, wherein the trenches are continuous trenches from the dielectric spacer layer through the passivation layer as far as the electrical connection contact, and wherein the first material is arranged in the trenches from the electrical connection contact as far as the upper edge of the trenches.

摘要翻译： 用于在第一晶片和第二晶片之间建立间隔的导电连接的接触装置包括电连接触点，电连接触点上的钝化层以及布置在钝化层上的电介质间隔层，其中触点布置是 布置在所述第一晶片和所述第二晶片中的至少一个上，其中所述接触装置包括至少部分地填充有能够形成金属 - 金属连接的第一材料的沟槽，其中所述沟槽是来自所述电介质间隔层的连续沟槽， 钝化层直到电连接接触，并且其中第一材料从电连接触点设置在沟槽中，直到沟槽的上边缘。

公开(公告)号：US20110140692A1

公开(公告)日：2011-06-16

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01P15/105

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US20110120208A1

公开(公告)日：2011-05-26

申请号：US12927345

申请日：2010-11-12

申请人： Torsten Ohms ,  Axel Franke

发明人： Torsten Ohms ,  Axel Franke

IPC分类号： G01P21/00 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

摘要： A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

摘要翻译： 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20110060543A1

公开(公告)日：2011-03-10

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US20110048132A1

公开(公告)日：2011-03-03

申请号：US12806135

申请日：2010-08-06

申请人： Christian Rettig ,  Axel Franke ,  Ando Feyh

发明人： Christian Rettig ,  Axel Franke ,  Ando Feyh

IPC分类号： G01P15/08 ,  B81C3/00

CPC分类号： G01C19/56 ,  B81B7/0041 ,  B81B7/02 ,  B81C2203/0109 ,  G01P15/0802 ,  Y10T29/49144 ,  Y10T29/49146 ,  Y10T428/13

摘要： A microsystem, e.g., a micromechanical sensor, has a first cavity which is sealed off from the surroundings and a second cavity which is sealed off from the surroundings. The first cavity is bounded by a first bond joint and the second cavity is bounded by a second bond joint. Either the first bond joint or the second bond joint is a eutectic bond joint or a diffusion-soldered joint.

摘要翻译： 微系统，例如微机械传感器，具有与周围环境密封的第一空腔和与周围环境密封的第二空腔。 第一腔体由第一接合接头限定，第二腔体由第二接合接头限定。 第一接合接头或第二接合接头是共晶接合接头或扩散焊接接头。

公开(公告)号：US20090314079A1

公开(公告)日：2009-12-24

申请号：US11990573

申请日：2006-06-13

申请人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

发明人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

IPC分类号： G01F1/692

CPC分类号： G01F1/6986 ,  G01F1/6845 ,  G01F1/692

摘要： A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

摘要翻译： 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面，测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 该方法被实施为使得使用频率ωm周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器，至少检测两个测量信号。 测量信号和/或至少两个测量信号的至少一个差分信号使用频率ω进行调制。

公开(公告)号：US20080053837A1

公开(公告)日：2008-03-06

申请号：US11575187

申请日：2005-09-13

申请人： Gunther Huber ,  Michael Lutz ,  Michael Wille ,  Holger Friedrich ,  Josef Guth ,  Uwe Behling ,  Axel Franke ,  Elisabeth Gunkel

发明人： Gunther Huber ,  Michael Lutz ,  Michael Wille ,  Holger Friedrich ,  Josef Guth ,  Uwe Behling ,  Axel Franke ,  Elisabeth Gunkel

IPC分类号： C25C1/22 ,  C25D17/00

CPC分类号： C25C7/005 ,  C25C3/02 ,  C25C7/007

摘要： An electrolysis device producing alkali metals from a liquid alkali metal heavy metal alloy, including at least two connected tubes forming an electrolysis unit. Two solid electrolyte tubes are arranged concentrically in each tube and oriented with openings towards one end of each tube such that a first annular gap for guiding a liquid alkali metal forming an anode is located between the inside of the tube and the outside of the solid electrolyte tubes. An alloy inlet and outlet for the liquid alkali metal in each of the tubes leads into the first annular gap of a tube. An inner chamber sealed off from the alloy inlet, first annular gap, and alloy outlet in each solid electrolyte tube receives liquid alkali metal that can be used as a cathode connected to the alkali metal outlet. Two respective closure devices are arranged at the two ends of each tube.

摘要翻译： 一种从液态碱金属重金属合金制造碱金属的电解装置，包括形成电解单元的至少两个连接管。 两个固体电解质管同心地布置在每个管中并且朝向每个管的一端定向开口，使得用于引导形成阳极的液态碱金属的第一环形间隙位于管的内部和固体电解质的外部之间 管。 每个管中的液态碱金属的合金入口和出口通向管的第一环形间隙。 在每个固体电解质管中的合金入口，第一环形间隙和合金出口密封的内室容纳可用作连接到碱金属出口的阴极的液态碱金属。 两个相应的闭合装置布置在每个管的两端。

公开(公告)号：US06617047B1

公开(公告)日：2003-09-09

申请号：US09869139

申请日：2001-06-26

申请人： Stephan Hüffer ,  Thilo Krebs ,  Wolfgang Loth ,  Bernd Rumpf ,  Jürgen Sturm ,  Bernd Diebold ,  Juergen Korkhaus ,  Joachim Nilges ,  Axel Franke

发明人： Stephan Hüffer ,  Thilo Krebs ,  Wolfgang Loth ,  Bernd Rumpf ,  Jürgen Sturm ,  Bernd Diebold ,  Juergen Korkhaus ,  Joachim Nilges ,  Axel Franke

IPC分类号： B05D136

CPC分类号： F28F19/02 ,  C23C18/1616 ,  C23C18/1662 ,  C23C18/36 ,  Y10T428/12556 ,  Y10T428/12944 ,  Y10T428/31678

摘要： The present invention relates to a process for coating apparatuses and apparatus parts for chemical plant construction—which are taken to mean, for example, apparatus, tank and reactor walls, discharge devices, valves, pumps, filters, compressors, centrifuges, columns, dryers, comminution machines, internals, packing elements and mixing elements—wherein a metal layer or a metal/polymer dispersion layer is deposited in an electroless manner on the apparatus(es) or apparatus part(s) to be coated by bringing the parts into contact with a metal electrolyte solution which, in addition to the metal electrolyte, comprises a reducing agent and optionally the polymer or polymer mixture to be deposited in dispersed form, where at least one polymer is halogenated.

摘要翻译： 本发明涉及一种用于化工厂建设的涂布设备和设备部件的方法，其被认为是指例如设备，罐和反应器壁，排放装置，阀，泵，过滤器，压缩机，离心机，柱，干燥器 粉碎机，内部构件，填料元件和混合元件，其中金属层或金属/聚合物分散层以无电解的方式沉积在待涂覆的设备或设备部分上，使部件接触 与除了金属电解质之外的金属电解质溶液包含还原剂和任选的待分散形式沉积的聚合物或聚合物混合物，其中至少一种聚合物被卤化。