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49 条记录 (耗时 0.018 秒)

    Suppression of transient enhanced diffusion in ion implanted silicon
    31.
    发明授权
    Suppression of transient enhanced diffusion in ion implanted silicon 失效
    离子注入硅中瞬态增强扩散的抑制

    公开(公告)号：US5759904A

    公开(公告)日：1998-06-02

    申请号：US746108

    申请日：1996-11-06

    申请人： Geoffrey Dearnaley

    发明人： Geoffrey Dearnaley

    IPC分类号： H01L21/265 ,  H01L21/322 ,  H01L29/04

    CPC分类号： H01L21/3223 ,  H01L21/26506 ,  H01L21/26513 ,  H01L29/04

    摘要： The present invention provides a method for suppressing transient enhanced diffusion of ion implanted dopants in a semiconductor substrate comprising bombarding the substrate in a vacuum with a beam of bubble-forming ions at a first temperature, a first energy, and a first ion dose sufficient to form a dispersion of bubbles at a depth equivalent to a peak of damage distribution in the substrate from implantation of dopant ions into the substrate in a vacuum at a second temperature, a second energy, and a second ion dose, said dispersion being sufficient to reduce said damage distribution.

    摘要翻译： 本发明提供了一种用于抑制半导体衬底中的离子注入掺杂剂的瞬时增强扩散的方法，包括在真空中用第一温度，第一能量和第一离子剂量在一定的气泡形成离子束中轰击衬底， 在第二温度，第二能量和第二离子剂量的真空中，在相当于衬底中的损伤分布的峰值的深度处形成气泡的分散体，从而将掺杂剂离子注入到衬底中，所述分散体足以减少 说伤害分配。

    Parylene precursors for diamond-like carbon coatings
    32.
    发明授权
    Parylene precursors for diamond-like carbon coatings 失效
    类金刚石碳涂层的聚对二甲苯前体

    公开(公告)号：US5512330A

    公开(公告)日：1996-04-30

    申请号：US317896

    申请日：1994-10-04

    申请人： Geoffrey Dearnaley

    发明人： Geoffrey Dearnaley

    IPC分类号： B05D7/24 ,  C23C16/26 ,  C23C16/56 ,  C23C14/12 ,  B05D3/06

    CPC分类号： B05D1/60 ,  C23C16/26 ,  C23C16/56 ,  Y10S427/103

    摘要： The present invention provides a new class of precursors for forming an improved diamond-like carbon coating on a workpiece. The precursors of the present invention are paraxylylenes, preferably dimers of paraxylylene, which are solid at room temperature and which will vaporize, pyrolize to substantially monomeric form, condense onto a workpiece, and spontaneously polymerize to form a "parylene" film which is free of precursor droplets and absorbed water. Upon bombardment with an ion beam, the parylene film is converted into a uniform, pinhole-free DLC coating.

    摘要翻译： 本发明提供了用于在工件上形成改进的类金刚石碳涂层的新类型的前体。 本发明的前体是对二甲苯，优选对二甲苯的二聚体，其在室温下是固体，并且将蒸发，热解至基本上单体形式，冷凝到工件上，并自发聚合以形成不含 前体液滴和吸收的水。 当用离子束轰击时，将聚对二甲苯膜转变成均匀的无针孔DLC涂层。

    Ion beam assisted method of producing a diamond like carbon coating
    33.
    发明授权
    Ion beam assisted method of producing a diamond like carbon coating 失效
    离子束辅助法生产类似碳的金刚石涂层

    公开(公告)号：US5393572A

    公开(公告)日：1995-02-28

    申请号：US273492

    申请日：1994-07-11

    申请人： Geoffrey Dearnaley

    发明人： Geoffrey Dearnaley

    IPC分类号： C23C14/06 ,  C23C14/22 ,  B05D3/06

    CPC分类号： C23C14/22 ,  C23C14/0605 ,  Y10S427/102

    摘要： The present invention relates to an ion beam assisted method of producing a diamond like carbon (DLC) coating on the surface of a material. More particular, the invention relates to an ion beam assisted method using a fullerene precursor to produce a DLC coating, wherein the chemical composition of the ion beam and precursor are selectively chosen to determine the physical properties of the DLC coating.

    摘要翻译： 本发明涉及一种在材料表面上生产类金刚石（DLC）涂层的离子束辅助方法。 更具体地说，本发明涉及使用富勒烯前体制备DLC涂层的离子束辅助方法，其中选择性地选择离子束和前体的化学组成以确定DLC涂层的物理性质。

    Surface treatment of metals
    34.
    发明授权
    Surface treatment of metals 失效
    表面处理金属

    公开(公告)号：US4629631A

    公开(公告)日：1986-12-16

    申请号：US773816

    申请日：1985-09-09

    申请人： Geoffrey Dearnaley

    发明人： Geoffrey Dearnaley

    IPC分类号： C23C10/00 ,  C23C14/48 ,  C23C26/00 ,  C23C28/00 ,  B05D3/06

    CPC分类号： C23C26/00 ,  C23C10/00 ,  C23C14/48 ,  C23C28/00

    摘要： A process for hardening the surface of a metal body in which the surface is first bombarded with ions capable of occupying interstitial sites in its crystal lattice, then a coating of a reactive metal is deposited on the surface, and finally the coating is bombarded with ions which will react with it to form a hard material such as a carbide or nitride. The bombardment is continued until the hard material has become embodied in the surface by means of radiation enhanced diffusion.

    摘要翻译： 首先用能够占据其晶格中的间隙位置的离子轰击表面的金属体的表面硬化的方法，然后在表面上沉积反应性金属的涂层，最后用离子轰击涂层 其将与其反应以形成诸如碳化物或氮化物的硬质材料。 继续轰击，直到硬质材料通过辐射增强扩散体现在表面上。

    Catalytic coatings and fuel cell electrodes and membrane electrode assemblies made therefrom
    37.
    发明授权
    Catalytic coatings and fuel cell electrodes and membrane electrode assemblies made therefrom 有权
    催化涂层和由此制成的燃料电池电极和膜电极组件

    公开(公告)号：US06610436B1

    公开(公告)日：2003-08-26

    申请号：US09509849

    申请日：2000-09-18

    申请人： Geoffrey Dearnaley ,  James H. Arps

    发明人： Geoffrey Dearnaley ,  James H. Arps

    IPC分类号： H01M490

    CPC分类号： H01M4/8885 ,  H01M4/8621 ,  H01M4/92 ,  H01M4/96

    摘要： Fuel cell electrodes comprising a minimal load of catalyst having maximum catalytic activity and a method of forming such fuel cell electrodes. The preferred method comprises vaporizing a catalyst, preferably platinum, in a vacuum to form a catalyst vapor. A catalytically effective amount of the catalyst vapor is deposited onto a carbon catalyst support on the fuel cell electrode. The electrode preferably is carbon cloth. The method reduces the amount of catalyst needed of a high performance fuel cell electrode to about 0.3 mg/cm2 or less, preferably to about 0.1 mg/cm2. The electrocatalytic layer formed comprises unique, rod-like structures.

    摘要翻译： 包括具有最大催化活性的催化剂负载最小的燃料电池电极和形成这种燃料电池电极的方法。 优选的方法包括在真空中蒸发催化剂，优选铂，以形成催化剂蒸气。 将催化有效量的催化剂蒸气沉积在燃料电池电极上的碳催化剂载体上。 电极优选为碳布。 该方法将高性能燃料电池电极所需的催化剂的量减少至约0.3mg / cm 2或更低，优选至约0.1mg / cm 2。 所形成的电催化层包含独特的棒状结构。