SUBSTRATE ASSEMBLY AND RELATED METHODS
    35.
    发明申请

    公开(公告)号:US20190127219A1

    公开(公告)日:2019-05-02

    申请号:US16094411

    申请日:2016-07-22

    Abstract: Example sensor apparatus for microfluidic devices and related methods are disclosed. In examples disclosed herein, a method of fabricating a sensor apparatus for a microfluidic device includes etching a portion of an intermediate layer to form a sensor chamber in a substrate assembly, where the substrate assembly has a base layer and the intermediate layer, and where the base layer comprises a first material and the intermediate layer comprises a second material different than the first material. The method includes forming a first electrode and a second electrode in the sensor chamber. The method also includes forming a fluidic transport channel in fluid communication with the sensor chamber, where the fluidic transport channel comprises a third material different than the first material and the second material.

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