METHOD AND APPARATUS FOR ONLINE ANALYSIS BY LASER-INDUCED SPECTROSCOPY
    7.
    发明申请
    METHOD AND APPARATUS FOR ONLINE ANALYSIS BY LASER-INDUCED SPECTROSCOPY 有权
    激光诱导光谱法在线分析的方法与装置

    公开(公告)号:US20160305887A1

    公开(公告)日:2016-10-20

    申请号:US15100422

    申请日:2013-12-02

    IPC分类号: G01N21/71 G01N1/20 G01N21/85

    摘要: A presentation module is provided for presenting a fluid sample to a Laser-induced breakdown spectroscopy (LIBS) analysis. The presentation module comprises an inlet for admitting a fluid sample flow from a process flow, a measurement opening for co-operating with measurement optics, and a stabilizer surface facing towards the measurement opening. The stabilizer surface is adapted to form a stabilized sample flow along the stabilizer surface such that the depth and the outer surface of the sample flow are stabilized, and the surface fluctuation and depth variation of the stabilized sample slurry flow are reduced. As laser pulses are focused on the outer surface of the planar sample flow to transform at least a part of the sample into a state of a plasma, the accuracy and repeatability of the LIBS measurement are significantly improved due to the stabilized sample flow.

    摘要翻译: 提供呈现模块用于将流体样品呈现给激光诱发击穿光谱(LIBS)分析。 呈现模块包括用于允许来自工艺流程的流体样品流的入口,用于与测量光学器件协作的测量开口以及面向测量开口的稳定器表面。 稳定器表面适于沿着稳定器表面形成稳定的样品流,使得样品流的深度和外表面稳定,并且降低了稳定的样品浆料流的表面波动和深度变化。 由于激光脉冲聚焦在平面样品流的外表面上,以将至少一部分样品转变成等离子体的状态,由于稳定​​的样品流动,LIBS测量的精度和重复性显着提高。

    Method and apparatus for analyzing multiphase fluid flow using a multivariate optical element calculation device
    8.
    发明授权
    Method and apparatus for analyzing multiphase fluid flow using a multivariate optical element calculation device 有权
    使用多元光学元件计算装置分析多相流体流动的方法和装置

    公开(公告)号:US08817264B2

    公开(公告)日:2014-08-26

    申请号:US13870202

    申请日:2013-04-25

    IPC分类号: G01N21/55 G01N33/24

    摘要: A method is presented for analyzing a multiphase fluid flowing through a tubular. A sample fluid flow of multiphase fluid (a mixture of some combination of gas, liquid and solid) is separated from a primary tubular, such as with a probe which traverses the tubular. At least one property of the multiphase fluid is determined using at least one multivariate optical element (MOE) calculating device. Measured properties include the presence, proportional amount, mass or volumetric flow rate, and other data related to a constituent of the fluid, such as CO2, H2S, water, inorganic and organic gases and liquids, or group of constituents of the fluid, such as SARA, C1-C4 hydrocarbons, etc. The multiphase fluid is preferably mixed prior to analysis. Additional data can be gathered and used to calculate derivative information, such as mass and volumetric flow rates of constituents in the tubular, etc.

    摘要翻译: 提出了一种用于分析流过管状体的多相流体的方法。 将多相流体(气体,液体和固体的某种组合的混合物)的样品流体流从初级管状物分离,例如穿过管状物的探针。 使用至少一个多元光学元件(MOE)计算装置来确定多相流体的至少一个性质。 测量性质包括存在,比例量,质量或体积流量以及与流体成分(如CO2,H2S,水,无机和有机气体和液体)或流体成分组相关的其他数据,如 作为SARA,C 1 -C 4烃等。多相流体优选在分析前混合。 可以收集和使用附加数据来计算导数信息,例如管状物中组分的质量和体积流量等。

    Control over hydrogen fluoride levels in oxide etchant
    9.
    发明授权
    Control over hydrogen fluoride levels in oxide etchant 有权
    控制氧化物腐蚀剂中的氟化氢水平

    公开(公告)号:US08716028B2

    公开(公告)日:2014-05-06

    申请号:US13731296

    申请日:2012-12-31

    IPC分类号: G01N21/75

    摘要: The invention is directed towards methods and compositions for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.

    摘要翻译: 本发明涉及用于鉴定缓冲氧化物蚀刻组合物中氢氟酸的量的方法和组合物。 在缓冲氧化物蚀刻组合物中,非常难以测量氢氟酸的量,因为其具有不同的平衡,并且它是有毒的,因此难以处理和取样。 然而,当用于制造微芯片时,不正确量的氢氟酸会破坏这些芯片。 当与添加的显色剂接触时,本发明利用光谱测量氢氟酸的独特方法,以获得准确,立即和安全的精确测量。