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41 条记录 (耗时 0.027 秒)

    ANGULAR VELOCITY DETECTING DEVICE
    32.
    发明申请
    ANGULAR VELOCITY DETECTING DEVICE 有权
    角速度检测装置

    公开(公告)号：US20100269589A1

    公开(公告)日：2010-10-28

    申请号：US12832965

    申请日：2010-07-08

    申请人： Heewon Jeong ,  Yasushi Goto

    发明人： Heewon Jeong ,  Yasushi Goto

    IPC分类号： G01C19/56

    CPC分类号： G01P3/22 ,  G01C19/5747 ,  G01C19/5762

    摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

    摘要翻译： 提供了一种高性能角速率检测装置。 包括驱动框架和科里奥利框架的驱动部分由共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁而缓冲，从而使驱动部分振动。 即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。 因此，可以获得对安装环境变化坚固的高性能角速度检测装置。

    INERTIAL SENSOR
    33.
    发明申请
    INERTIAL SENSOR 有权
    惯性传感器

    公开(公告)号：US20100037691A1

    公开(公告)日：2010-02-18

    申请号：US12189920

    申请日：2008-08-12

    申请人： Heewon Jeong ,  Hiroshi Fukuda

    发明人： Heewon Jeong ,  Hiroshi Fukuda

    IPC分类号： G01C19/56 ,  G01P15/125

    CPC分类号： G01P15/097 ,  G01C19/5719 ,  G01P15/125

    摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.

    摘要翻译： 一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。 驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。 以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测 位移量与电容变化相同，从而检测驱动方向上的加速度。

    Inertial sensor
    34.
    发明授权
    Inertial sensor 有权
    惯性传感器

    公开(公告)号：US07513155B2

    公开(公告)日：2009-04-07

    申请号：US11566399

    申请日：2006-12-04

    申请人： Heewon Jeong ,  Hiroshi Fukuda

    发明人： Heewon Jeong ,  Hiroshi Fukuda

    IPC分类号： G01C19/00

    CPC分类号： G01C19/5747

    摘要： Four sensor units (SUA1 to SUA4) are disposed symmetrically about a point, on both top and bottom and left and right centering around one point of a support (15e). Furthermore, four sensor units (SUA1 to SUA4) are designed so that all the components are fully in tuning-fork structure. Drive frames (5, 5) of the sensor units (SUA1, SUA2) disposed adjacent to each other in a first direction (Y) are vibrated in mutually inverted phases, and drive frames of the other sensor units (SUA3, SUA4) disposed adjacent to each other in a second direction (X) are vibrated in mutually inverted phases as well. Moreover, the drive frames of the sensor units (SUA1, SUA2) and the drive frames of the other sensor units (SUA3, SUA4) are operated in synchronization in the state in which phases are shifted by 90 degrees. Whereby, it is possible to reduce or prevent vibration coupling in the driving direction and in the detection direction, and the leakage (loss) of excitation energy and Coriolis force. Thereby, performance of an inertial sensor is improved.

    摘要翻译： 四个传感器单元（SUA1至SUA4）围绕位于顶部和底部以及围绕支撑件（15e）的一个点的中心的左右对称地布置。 此外，四个传感器单元（SUA1至SUA4）被设计成使得所有组件完全处于音叉结构中。 在第一方向（Y）上彼此相邻设置的传感器单元（SUA1，SUA2）的驱动框架（5,5）以相互反相的方式振动，并且相邻设置的其它传感器单元（SUA3，SUA4）的驱动框架 在第二方向（X）上彼此相反地相互振动。 此外，传感器单元（SUA1，SUA2）的驱动框架和其他传感器单元（SUA3，SUA4）的驱动框架在相位偏移90度的状态下同步地操作。 由此，可以减少或防止在驱动方向和检测方向上的振动耦合，以及激发能和科里奥利力的泄漏（损失）。 由此，提高了惯性传感器的性能。

    SENSOR DEVICE
    35.
    发明申请
    SENSOR DEVICE 审中-公开
    传感器设备

    公开(公告)号：US20150036782A1

    公开(公告)日：2015-02-05

    申请号：US14384169

    申请日：2012-03-21

    申请人： Heewon Jeong

    发明人： Heewon Jeong

    IPC分类号： G01D21/00

    CPC分类号： G01D21/00

    摘要： In order to provide a suitable sensor device for a sensor system in which a plurality of request sources request the acquisition of information for the same sensor, the sensor device is provided with a physical mass sensing unit (1) for measuring an external physical mass, an input-output unit (4) for receiving physical mass acquisition requests from the external plurality of request sources, and a first counter (3) for counting and storing the total number of times the input/output unit receives an acquisition request from the plurality of request sources. The input-output unit transmits the physical mass and a value stored by the first counter to the request source of the acquisition request.

    摘要翻译： 为了提供用于传感器系统的合适的传感器装置，其中多个请求源请求获取相同传感器的信息，传感器装置设置有用于测量外部物理质量的物理质量感测单元（1） 用于从外部多个请求源接收物理质量获取请求的输入输出单元（4），以及用于对来自多个请求源的输入/输出单元接收到获取请求的总次数进行计数和存储的第一计数器（3） 的请求来源。 输入 - 输出单元将物理量和由第一计数器存储的值发送到获取请求的请求源。

    Semiconductor Physical Quantity Detecting Sensor
    36.
    发明申请
    Semiconductor Physical Quantity Detecting Sensor 有权
    半导体物理量检测传感器

    公开(公告)号：US20130346015A1

    公开(公告)日：2013-12-26

    申请号：US13983775

    申请日：2012-01-18

    申请人： Kiyoko Yamanaka ,  Heewon Jeong ,  Chisaki Takubo

    发明人： Kiyoko Yamanaka ,  Heewon Jeong ,  Chisaki Takubo

    IPC分类号： B81B7/02

    CPC分类号： B81B7/02 ,  G01C19/5747 ,  G01C19/5769 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0822

    摘要： A semiconductor physical quantity detection sensor includes (1) a first electrostatic capacitance formed by the movable electrode, and a first fixed electrode formed in a first conductive layer shared with the movable electrode, (2) a second electrostatic capacitance that is formed by the movable electrode, and a second fixed electrode formed in a second conductive layer different in a height from a substrate surface from the movable electrode, and (3) an arithmetic circuit that calculates the physical quantity on the basis of a change in the first and second electrostatic capacitances generated when the physical quantity is applied. In this configuration, an electric signal from the first electrostatic capacitance, and an electric signal from the second electrostatic capacitance are input to the arithmetic circuit.

    摘要翻译： 半导体物理量检测传感器包括（1）由可动电极形成的第一静电电容和形成在与可动电极共用的第一导电层中的第一固定电极，（2）由可动电极形成的第二静电电容 电极和形成在与可动电极的基板表面不同高度的第二导电层中的第二固定电极，以及（3）基于第一和第二静电的变化来计算物理量的运算电路 当施加物理量时产生的电容。 在该结构中，来自第一静电电容的电信号和来自第二静电电容的电信号被输入到运算电路。

    Method of manufacturing micro electro mechanical systems device
    39.
    发明授权
    Method of manufacturing micro electro mechanical systems device 有权
    微机电系统装置的制造方法

    公开(公告)号：US07972886B2

    公开(公告)日：2011-07-05

    申请号：US12143372

    申请日：2008-06-20

    申请人： Heewon Jeong ,  Yasushi Goto ,  Yuko Hanaoka ,  Tsukasa Fujimori

    发明人： Heewon Jeong ,  Yasushi Goto ,  Yuko Hanaoka ,  Tsukasa Fujimori

    IPC分类号： H01L21/00

    CPC分类号： B81C1/00952 ,  B81B2201/0235 ,  B81B2203/0307 ,  B81C1/00039 ,  B81C2201/019 ,  B81C2203/058 ,  G01C19/5733 ,  G01C19/5755 ,  G01P15/0802 ,  G01P15/125

    摘要： Provided is a MEMS device which is robust to the misalignment and does not require the double-side wafer processing in the manufacture of a MEMS device such as an angular velocity sensor, an acceleration sensor, a combined sensor or a micromirror. After preparing a substrate having a space therein, holes are formed in a device layer at positions where fixed components such as a fixing portion, a terminal portion and a base that are fixed to a supporting substrate are to be formed, and the holes are filled with a fixing material so that the fixing material reaches the supporting substrate, thereby fixing the device layer around the holes to the supporting substrate.

    摘要翻译： 提供了一种MEMS装置，其对于未对准是坚固的，并且不需要在诸如角速度传感器，加速度传感器，组合传感器或微镜的MEMS装置的制造中的双面晶片处理。 在制备其中具有空间的基板之后，在要形成固定到支撑基板上的诸如固定部分，端子部分和基座等固定部件的位置的器件层中形成孔，并且填充孔 固定材料使得固定材料到达支撑基板，从而将装置层围绕孔固定到支撑基板。

    Angular velocity detecting device
    40.
    发明授权
    Angular velocity detecting device 有权
    角速度检测装置

    公开(公告)号：US07770451B2

    公开(公告)日：2010-08-10

    申请号：US12136759

    申请日：2008-06-10

    申请人： Heewon Jeong ,  Yasushi Goto

    发明人： Heewon Jeong ,  Yasushi Goto

    IPC分类号： G01P15/08

    CPC分类号： G01P3/22 ,  G01C19/5747 ,  G01C19/5762

    摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

    摘要翻译： 提供了一种高性能角速率检测装置。 包括驱动框架和科里奥利框架的驱动部分通过共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁悬浮，从而使驱动部分振动。 即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。 因此，可以获得对安装环境变化坚固的高性能角速度检测装置。