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公开(公告)号:US20230307541A1
公开(公告)日:2023-09-28
申请号:US17702593
申请日:2022-03-23
Applicant: Intel Corporation
Inventor: Abhishek A. Sharma , Wilfred Gomes , Tahir Ghani , Anand S. Murthy , Pushkar Sharad Ranade , Sagar Suthram
IPC: H01L29/78 , H01L29/423 , H01L29/51 , H01L29/66
CPC classification number: H01L29/78391 , H01L29/42364 , H01L29/516 , H01L29/6684
Abstract: Disclosed herein are transistor gate-channel arrangements with transistor gate stacks that include thick hysteretic elements (i.e., hysteretic elements having a thickness of at least 10-15 nanometers, e.g., between 55 and 100 nanometers), and related methods and devices. Transistor gate stacks disclosed herein include a multilayer gate insulator having a thick hysteretic element and an interface layer, where the thick hysteretic element is between the interface layer and a gate electrode material, and the interface layer is between the thick hysteretic element and a channel material of a transistor. The interface layer may be a dielectric material with an effective dielectric constant of at least 20 and/or be a dielectric material that is thinner than about 3 nanometers. Such an interface layer may help improve gate control and allow use of thick hysteretic elements while maintaining transistor performance in terms of, e.g., gate leakage, carrier mobility, and subthreshold swing.
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公开(公告)号:US20230299135A1
公开(公告)日:2023-09-21
申请号:US17697129
申请日:2022-03-17
Applicant: Intel Corporation
Inventor: Leonard P. Guler , Tahir Ghani , Saurabh Morarka , Charles H. Wallace
IPC: H01L29/06 , H01L29/423 , H01L29/786 , H01L29/66 , H01L27/088
CPC classification number: H01L29/0665 , H01L29/42392 , H01L29/78618 , H01L29/78696 , H01L29/6656 , H01L27/0886
Abstract: Techniques are provided herein to form an integrated circuit having any number of partial gate cut structures between adjacent semiconductor devices. Neighboring semiconductor devices each include a semiconductor region extending between a source region and a drain region, and a gate structure extending over the semiconductor regions of the neighboring semiconductor devices. In some such examples, a partial gate cut structure is present between a given pair of neighboring semiconductor devices. The partial gate cut structure acts as a dielectric pillar between the semiconductor structures that allows the conductive gate layer (from the gate structure) to extend above and/or below it such that the gates of each of the semiconductor devices remain electrically coupled together. The gate cut structure itself removes a portion of the gate layer from between the semiconductor devices, thus reducing parasitic capacitance.
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公开(公告)号:US11764275B2
公开(公告)日:2023-09-19
申请号:US16074373
申请日:2016-04-01
Applicant: Intel Corporation
Inventor: Chandra S. Mohapatra , Glenn A. Glass , Harold W. Kennel , Anand S. Murthy , Willy Rachmady , Gilbert Dewey , Sean T. Ma , Matthew V. Metz , Jack T. Kavalieros , Tahir Ghani
IPC: H01L29/417 , H01L29/201 , H01L29/66 , H01L29/78
CPC classification number: H01L29/41791 , H01L29/201 , H01L29/66795 , H01L29/785 , H01L2029/7858
Abstract: An apparatus including a transistor device disposed on a surface of a circuit substrate, the device including a body including opposing sidewalls defining a width dimension and a channel material including indium, the channel material including a profile at a base thereof that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls. A method including forming a transistor device body on a circuit substrate, the transistor device body including opposing sidewalls and including a buffer material and a channel material on the buffer material, the channel material including indium and the buffer material includes a facet that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls; and forming a gate stack on the channel material.
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公开(公告)号:US20230282575A1
公开(公告)日:2023-09-07
申请号:US17685541
申请日:2022-03-03
Applicant: Intel Corporation
Inventor: Leonard P. Guler , Chanaka D. Munasinghe , Manish Chandhok , Charles H. Wallace , Tahir Ghani
IPC: H01L23/528 , H01L27/088 , H01L21/8234 , H01L29/40 , H01L29/417 , H01L23/522 , H01L23/532 , H01L21/768
CPC classification number: H01L23/5283 , H01L27/088 , H01L21/823475 , H01L29/401 , H01L29/41775 , H01L23/5226 , H01L23/5329 , H01L21/76897
Abstract: An integrated circuit includes (i) a first transistor device having a first source or drain region coupled to a first source or drain contact, and a first gate electrode, (ii) a second transistor device having a second source or drain region coupled to a second source or drain contact, and a second gate electrode, (iii) a first dielectric material above the first and second source or drain contacts, (iv) a second dielectric material above the first and second gate electrodes, (v) a third dielectric material above the first and second dielectric materials, and (vi) an interconnect feature above and conductively coupled to the first source or drain contact. In an example, the interconnect feature comprises an upper body of conductive material extending within the third dielectric material, and a lower body of conductive material extending within the first dielectric material, with an interface between the upper and lower bodies.
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公开(公告)号:US20230282573A1
公开(公告)日:2023-09-07
申请号:US17685536
申请日:2022-03-03
Applicant: Intel Corporation
Inventor: Leonard P. Guler , Charles H. Wallace , Tahir Ghani
IPC: H01L23/528 , H01L23/535 , H01L21/768
CPC classification number: H01L23/5283 , H01L23/535 , H01L21/76805 , H01L21/76895
Abstract: An integrated circuit device includes a device layer comprising a plurality of transistor devices, and an interconnect layer above the device layer. The interconnect layer includes a conductive interconnect feature. In an example, the interconnect feature includes (i) a bottom portion having a first diameter, and (ii) a top portion above the bottom portion. In an example, the top portion has a second diameter that is less than the first diameter by at least 10%. In an example, the interconnect feature includes a monolithic body of conductive material that is within both the top portion and the bottom portion.
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公开(公告)号:US20230268382A1
公开(公告)日:2023-08-24
申请号:US17677239
申请日:2022-02-22
Applicant: Intel Corporation
Inventor: Abhishek A. Sharma , Tahir Ghani , Anand S. Murthy , Wilfred Gomes , Sagar Suthram
CPC classification number: H01L29/045 , H01L29/0673 , H01L29/66439 , H01L29/42392
Abstract: IC devices including angled transistors formed based on angled wafers are disclosed. An example IC device includes a substrate and a semiconductor structure. A crystal direction of a crystal structure in the semiconductor structure is not aligned with a corresponding crystal direction (e.g., having same Miller indices) of a crystal structure in the substrate. An angle between the two crystal directions may be 4-60 degrees. The semiconductor structure is formed based on another substrate (e.g., a wafer) that has a different orientation from the substrate, e.g., flats or notches of the two substrates are not aligned. The crystal direction of the semiconductor structure may be determined based on a crystal direction in the another substrate. The semiconductor structure may be a portion of a transistor, e.g., the channel region and S/D regions of the transistor. The semiconductor structure may be angled with respect to an edge of the substrate.
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公开(公告)号:US20230223475A1
公开(公告)日:2023-07-13
申请号:US18174825
申请日:2023-02-27
Applicant: Intel Corporation
Inventor: Abhishek A. Sharma , Ravi Pillarisetty , Brian S. Doyle , Elijah V. Karpov , Prashant Majhi , Gilbert W. Dewey , Benjamin Chu-Kung , Van H. Le , Jack T. Kavalieros , Tahir Ghani
CPC classification number: H01L29/78391 , H01L29/6684
Abstract: Disclosed herein are transistors with ferroelectric gates, and related methods and devices. For example, in some embodiments, a transistor may include a channel material, and a gate stack, and the gate stack may include a gate electrode material and a ferroelectric material between the gate electrode material and the channel material.
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公开(公告)号:US20230209797A1
公开(公告)日:2023-06-29
申请号:US17560779
申请日:2021-12-23
Applicant: Intel Corporation
Inventor: Clifford Ong , Leonard Guler , Smita Shridharan , Zheng Guo , Eric Karl , Tahir Ghani
IPC: H01L27/11
CPC classification number: H01L27/1108
Abstract: Integrated circuit (IC) static random-access memory (SRAM) comprising colinear pass-gate transistors and pull-down transistors having different nanoribbon widths. A narrower ribbon width within the pass-gate transistor, relative to the pull-down transistor, may reduce read instability of a bit-cell, and/or reduce overhead associated with read assist circuitry coupled to the bit-cell. In some examples, a transition between narrower and width ribbon widths is symmetrical about a centerline shared by ribbons of both the access and pull-down transistors. In some examples, the ribbon width transition is positioned within an impurity-doped semiconductor region shared by the access and pull-down transistors and may be located under a terminal contact metallization. In some examples, the impurity-doped semiconductor regions surrounding the ribbons of differing width also have differing widths.
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公开(公告)号:US20230071699A1
公开(公告)日:2023-03-09
申请号:US17470993
申请日:2021-09-09
Applicant: Intel Corporation
Inventor: Andrew Smith , Brian Greene , Seonghyun Paik , Omair Saadat , Chung-Hsun Lin , Tahir Ghani
IPC: H01L29/423 , H01L29/786 , H01L27/092 , H01L29/06 , H01L21/8238
Abstract: A transistor structure includes a channel region including first sidewall. A gate electrode includes a first layer having a first portion adjacent to the first sidewall and a second portion adjacent to a gate electrode boundary sidewall. The gate electrode includes a second layer between the first and second portions of the first layer. The first layer has a first composition associated with a first work function material, and has a first lateral thickness from the first sidewall. The second layer has a second composition associated with a second work function material. Depending one a second lateral thickness of the second layer, the second layer may modulate a threshold voltage (VT) of the transistor structure by more or less. In some embodiments, a ratio of the second lateral thickness to the first lateral thickness is less than three.
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公开(公告)号:US11600524B2
公开(公告)日:2023-03-07
申请号:US17147423
申请日:2021-01-12
Applicant: Intel Corporation
Inventor: Mark T. Bohr , Tahir Ghani , Nadia M. Rahhal-Orabi , Subhash M. Joshi , Joseph M. Steigerwald , Jason W. Klaus , Jack Hwang , Ryan Mackiewicz
IPC: H01L21/768 , H01L29/78 , H01L29/49 , H01L29/66 , H01L29/51 , H01L21/28 , H01L21/283 , H01L21/311 , H01L23/522 , H01L23/528 , H01L29/08 , H01L29/423 , H01L29/16 , H01L29/45 , H01L21/285 , H01L23/535
Abstract: A transistor comprises a substrate, a pair of spacers on the substrate, a gate dielectric layer on the substrate and between the pair of spacers, a gate electrode layer on the gate dielectric layer and between the pair of spacers, an insulating cap layer on the gate electrode layer and between the pair of spacers, and a pair of diffusion regions adjacent to the pair of spacers. The insulating cap layer forms an etch stop structure that is self aligned to the gate and prevents the contact etch from exposing the gate electrode, thereby preventing a short between the gate and contact. The insulator-cap layer enables self-aligned contacts, allowing initial patterning of wider contacts that are more robust to patterning limitations.
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