公开(公告)号：US20120269031A1

公开(公告)日：2012-10-25

申请号：US13089513

申请日：2011-04-19

Applicant: James D. Huffman ,  Gary A. Kneezel

Inventor： James D. Huffman ,  Gary A. Kneezel

IPC: G03B42/06 ,  G01N29/04

CPC classification number: G01N29/245 ,  G01N2291/0427

Abstract: An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate.

Abstract translation: 超声波发射器和接收器包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。

公开(公告)号：US20120268529A1

公开(公告)日：2012-10-25

申请号：US13089594

申请日：2011-04-19

Applicant: Michael F. Baumer ,  James D. Huffman ,  Hrishikesh V. Panchawagh ,  Jeremy M. Grace ,  Yonglin Xie ,  Qing Yang ,  David P. Trauernicht ,  John A. Lebens

Inventor： Michael F. Baumer ,  James D. Huffman ,  Hrishikesh V. Panchawagh ,  Jeremy M. Grace ,  Yonglin Xie ,  Qing Yang ,  David P. Trauernicht ,  John A. Lebens

IPC: B41J2/04

CPC classification number: B41J2/03 ,  B41J2002/14346

Abstract: A method of continuously ejecting liquid includes providing a liquid ejection system that includes a substrate and an orifice plate affixed to the substrate. Portions of the substrate define a liquid chamber. The orifice plate includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the liquid chamber. The second portion of the MEMS transducing member is free to move relative to the liquid chamber. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate. The compliant membrane includes an orifice. Liquid is provided under a pressure sufficient to eject a continuous jet of the liquid through the orifice located in the compliant membrane of the orifice plate by a liquid supply. A drop of liquid is caused to break off from the liquid jet by selectively actuating the MEMS transducing member which causes a portion of the compliant membrane to be displaced relative to the liquid chamber.

Abstract translation: 一种连续喷射液体的方法包括提供一种液体喷射系统，其包括基板和固定在基板上的孔板。 衬底的一部分限定了液体室。 孔板包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在液体室的至少一部分上延伸。 MEMS转换构件的第二部分相对于液体腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。 柔性膜包括孔口。 在足够的压力下提供液体，该压力通过位于孔板的柔顺膜中的孔通过液体供应喷射液体的连续射流。 通过选择性地致动MEMS转换构件使一滴液体从液体射流中脱离，这导致顺应性膜的一部分相对于液体腔移位。

公开(公告)号：US20120268527A1

公开(公告)日：2012-10-25

申请号：US13089563

申请日：2011-04-19

Applicant: Carolyn R. Ellinger ,  James A. Katerberg ,  James D. Huffman

Inventor： Carolyn R. Ellinger ,  James A. Katerberg ,  James D. Huffman

IPC: B41J2/04

CPC classification number: B41J2/14427 ,  B41J2002/14403 ,  B41J2002/14435

Abstract: A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening.

Abstract translation: 液体分配器包括基底。 衬底的第一部分限定了包括出口开口的液体分配通道。 衬底的第二部分限定空腔的外边界。 衬底的其他部分限定了液体供应通道和液体返回通道。 液体供应提供液体从液体供应通过液体供应通道通过液体分配通道通过液体返回通道并返回到液体供应源的连续流动。 分流器构件可选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口开口转向。 分流器构件包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 柔性膜的第二部分锚固到基底上，使得柔顺膜形成液体分配通道的壁的一部分。 墙壁位于出口开口对面。

公开(公告)号：US20100176855A1

公开(公告)日：2010-07-15

申请号：US12352034

申请日：2009-01-12

Applicant: James D. Huffman ,  John A. Agostinelli

Inventor： James D. Huffman ,  John A. Agostinelli

IPC: H03K5/01

CPC classification number: G09G3/2014 ,  G09G3/3433 ,  G09G2300/0828 ,  G09G2310/027

Abstract: An apparatus for producing a separate pulse width modulation signal for each of a plurality of integrated devices, comprising circuitry for each integrated device having structures that :receive and convert a digital signal for each integrated device to an analog voltage level; sample the analog voltage level and storing such analog voltage level; and compare the stored analog voltage level to a common dynamic reference signal and producing a variable width pulse having a first level when the reference signal is above the analog voltage level and a second level when the reference signal is below the analog voltage level, wherein the common dynamic reference signal is the same signal for each integrated device

Abstract translation: 一种用于为多个集成器件中的每一个生成单独的脉冲宽度调制信号的装置，包括用于每个集成器件的电路，其具有以下结构：将每个集成器件的数字信号接收并转换为模拟电压电平; 对模拟电压电平进行采样并存储模拟电压电平; 并且将所存储的模拟电压电平与公共动态参考信号进行比较，并且当参考信号高于模拟电压电平时产生具有第一电平的可变宽度脉冲，并且当参考信号低于模拟电压电平时产生第二电平，其中， 每个集成器件的通用动态参考信号是相同的信号

公开(公告)号：US20100025797A1

公开(公告)日：2010-02-04

申请号：US12575629

申请日：2009-10-08

Applicant: David A. Rothenbury ,  James D. Huffman

Inventor： David A. Rothenbury ,  James D. Huffman

IPC: H01L23/48 ,  H01L31/0232

CPC classification number: B81C1/00095 ,  B81B2201/042 ,  B81B2207/07

Abstract: Device comprising an ohmic via contact, and method of fabricating thereof. A preferred embodiment comprises forming a metal layer over a substrate, forming a conductive barrier layer over the metal layer, depositing an insulating layer over the conductive barrier layer, creating an opening in the insulating layer to expose the conductive barrier layer, and forming a via contact in the opening. The conductive barrier layer protects the metal layer by preventing the formation of an oxide layer, which could reduce conductivity.

Abstract translation: 包含欧姆通孔接点的装置及其制造方法。 优选实施例包括在衬底上形成金属层，在金属层上形成导电阻挡层，在导电阻挡层上沉积绝缘层，在绝缘层中形成露出导电阻挡层的开口，以及形成通孔 接触在开幕。 导电阻挡层通过防止形成可能降低导电性的氧化物层来保护金属层。

公开(公告)号：US07548365B2

公开(公告)日：2009-06-16

申请号：US11759160

申请日：2007-06-06

Applicant: James D. Huffman ,  James Norman Hall

Inventor： James D. Huffman ,  James Norman Hall

IPC: G02B26/00 ,  G09G3/34 ,  G09G5/00 ,  H03L7/00 ,  H03L5/00

CPC classification number: G11C11/412 ,  H01L27/1104 ,  H01L29/1045 ,  H01L29/42368 ,  H01L29/7835 ,  H01L2924/0002 ,  H04N5/7458 ,  H04N2005/7466 ,  H01L2924/00

Abstract: A method of operating a semiconductor device, a semiconductor device and a digital micromirror system are presented. In an embodiment, the semiconductor device comprises a grounded substrate, a memory array, and a reset driver. The memory array may be isolated from the grounded substrate with a buried layer. The set of voltages of the memory array may be shifted with respect to a reset voltage. The reset driver may drive the reset voltage and the reset driver may have at least one extended drain transistor in the grounded substrate.

Abstract translation: 提出了一种操作半导体器件，半导体器件和数字微镜系统的方法。 在一个实施例中，半导体器件包括接地衬底，存储器阵列和复位驱动器。 存储器阵列可以与具有掩埋层的接地衬底隔离。 存储器阵列的电压组可以相对于复位电压移动。 复位驱动器可以驱动复位电压，并且复位驱动器可以在接地的基板中具有至少一个延伸的漏极晶体管。

公开(公告)号：US07252395B2

公开(公告)日：2007-08-07

申请号：US11372686

申请日：2006-03-10

Applicant: Anthony DiCarlo ,  Patrick I. Oden ,  Richard L. Knipe ,  Rabah Mezenner ,  James D. Huffman

Inventor： Anthony DiCarlo ,  Patrick I. Oden ,  Richard L. Knipe ,  Rabah Mezenner ,  James D. Huffman

IPC: G02B26/00

CPC classification number: B81B3/0035 ,  G02B26/0841 ,  Y10T428/22

Abstract: A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.

Abstract translation: 制造在半导体衬底上的微镜阵列。 该阵列由三个操作层组成。 在衬底上制造寻址层。 铰链层通过气隙在寻址层上方间隔开。 镜层通过第二气隙在铰链层上间隔开。 铰链层具有在镜子下方并附接到铰链上的铰链，铰链允许镜子倾斜。 铰链层还具有在镜下的弹簧尖端，其附接到寻址层。 这些弹簧尖端为镜子提供了固定的着陆面。

公开(公告)号：US06614262B2

公开(公告)日：2003-09-02

申请号：US10056836

申请日：2002-01-25

Applicant: Keith E. Kunz ,  James D. Huffman

Inventor： Keith E. Kunz ,  James D. Huffman

IPC: H03K19094

CPC classification number: H03K19/00315

Abstract: Failsafe interface circuits are provided for an integrated circuit having a core logic section providing a signal to, or receiving a signal from, a bond pad connection. The interface circuits employ high voltage tolerant, extended drain devices in circuit arrangements which insure that the stress of a failsafe event is only exhibited by the extended drain devices. A failsafe event is defined as a bond pad voltage which exceeds the supply voltage of the integrated circuit plus the threshold voltage of the transistors within the integrated circuit. Both failsafe output driver circuit and failsafe receiver circuit embodiments are provided.

公开(公告)号：US06282010B1

公开(公告)日：2001-08-28

申请号：US09306271

申请日：1999-05-06

Applicant: Frank C. Sulzbach ,  Brian L. Ray ,  G. Sreenivas ,  Duane E. Carter ,  Henry W. Trombley ,  Austin L. Huang ,  James D. Huffman

Inventor： Frank C. Sulzbach ,  Brian L. Ray ,  G. Sreenivas ,  Duane E. Carter ,  Henry W. Trombley ,  Austin L. Huang ,  James D. Huffman

IPC: G02F103

CPC classification number: G02F1/133502

Abstract: A spatial light modulator with an anti-reflective coating (ARC) 100 integrated into its structure. The manufacturing of the device is altered to include deposition of an ARC 100, and any necessary patterning and etching to allow the elements of the array to operate properly. The ARC could reside in several places of the element structure including over the addressing circuitry 26, over a middle layer 32 or on the underside of the reflective structure 10. Micromechanical spatial light modulators, as well as non-moving modulators, such as reflective and transmissive LCD modulators can use the invention.

Abstract translation: 具有集成到其结构中的抗反射涂层（ARC）100的空间光调制器。 改变器件的制造以包括ARC 100的沉积，以及任何必要的图案化和蚀刻，以允许阵列的元件正常工作。 ARC可以驻留在元件结构的多个位置，包括在寻址电路26上方，中间层32上或反射结构10的下侧。微机械空间光调制器以及非移动调制器，例如反射和 透射式LCD调制器可以使用本发明。

公开(公告)号：US06191883B1

公开(公告)日：2001-02-20

申请号：US09470719

申请日：1999-12-23

Applicant: James D. Huffman ,  Rodney D. Miller

Inventor： James D. Huffman ,  Rodney D. Miller

IPC: G02B2600

CPC classification number: G09G3/346 ,  G02B26/0841 ,  G09G2300/0842 ,  G09G2300/0857 ,  G11C11/41

Abstract: An improved memory cell (300) for use in applications, such as micromirror arrays, in which little space is available and a slow read-back cycle is tolerated. The memory (300) comprises a first input/output node (314) connected to the input of a first inverter and to the output of a second inverter. The first inverter is comprised of two transistors (304, 306) and drives a signal to a second input/output node (316). The input of the second inverter is connected to the second input/output node (316). When used to drive a typical micromirror cell, the address electrode of the micromirror cell are electrically connected to the first input/output node (314) and the second input/output node (316).

Abstract translation: 用于诸如微镜阵列的应用中的改进的存储单元（300），其中容纳很少的空间和缓慢的回读周期。 存储器（300）包括连接到第一反相器的输入端和第二反相器的输出端的第一输入/输出节点（314）。 第一反相器由两个晶体管（304,306）组成，并将信号驱动到第二输入/输出节点（316）。 第二反相器的输入连接到第二输入/输出节点（316）。 当用于驱动典型的微镜单元时，微镜单元的寻址电极电连接到第一输入/输出节点（314）和第二输入/输出节点（316）。