公开(公告)号：US09419407B2

公开(公告)日：2016-08-16

申请号：US14859122

申请日：2015-09-18

Applicant: KLA-Tencor Corporation

Inventor： Yujun Deng ,  J. Joseph Armstrong ,  Yung-Ho Alex Chuang ,  Vladimir Dribinski ,  John Fielden

IPC: G01J1/42 ,  H01S3/137 ,  G01J1/44 ,  H01S3/00 ,  H01S3/16 ,  G01J1/04

CPC classification number: H01S3/137 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/44 ,  G01J2001/4238 ,  G02F1/37 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0092 ,  H01S3/1611 ,  H01S3/1643 ,  H01S3/1671 ,  H01S2301/08

Abstract: A pulsed UV laser assembly includes a partial reflector or beam splitter that divides each fundamental pulse into two sub-pulses and directs one sub-pulse to one end of a Bragg grating and the other pulse to the other end of the Bragg grating (or another Bragg grating) such that both sub-pulses are stretched and receive opposing (positive and negative) frequency chirps. The two stretched sub-pulses are combined to generate sum frequency light having a narrower bandwidth than could be obtained by second-harmonic generation directly from the fundamental. UV wavelengths may be generated directly from the sum frequency light or from a harmonic conversion scheme incorporating the sum frequency light. The UV laser may further incorporate other bandwidth reducing schemes. The pulsed UV laser may be used in an inspection or metrology system.

Abstract translation: 脉冲UV激光器组件包括部分反射器或分束器，其将每个基本脉冲分成两个子脉冲，并将一个子脉冲引导到布拉格光栅的一端，将另一个脉冲引导到布拉格光栅的另一端（或另一个 布拉格光栅），使得两个子脉冲都被拉伸并接收相对（正和负）频率的线性调频脉冲。 两个延伸的子脉冲被组合以产生具有比通过直接从基波的二次谐波产生可以获得的窄带宽的和频光。 紫外波长可以直接从和频光或从包含和频光的谐波转换方案中产生。 UV激光器可以进一步并入其他带宽减小方案。 脉冲UV激光可用于检测或计量系统。

公开(公告)号：US09413134B2

公开(公告)日：2016-08-09

申请号：US14753275

申请日：2015-06-29

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong

IPC: H01S3/10 ,  H01S5/00 ,  H01S3/11 ,  G02F1/37 ,  H01S3/00 ,  C30B29/10 ,  C30B33/02 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  C03B33/02 ,  C30B1/02 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  G02F1/35 ,  G02F1/355

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: A frequency-conversion crystal annealing process includes a first ramp-up period (e.g., increasing the crystal's temperature to a first set point in the range of 100° C. to 150° C. over about 2 hours), a first fixed temperature period (e.g., maintaining at the first set point for 10 to 20 hours), a second ramp-up period (e.g., increasing from the first set point to a second set point above 150° C. over about 1 hour or more), a second fixed period (e.g., maintaining at the second set point for 48 to 300 hours), and then a temperature ramp-down period (e.g., decreasing from the second set point to room temperature over about 3 hours). Transitions from the first and second fixed temperature periods are optionally determined by —OH bonds absorption levels that are measured using Fourier transform infrared spectroscopy, e.g., by monitoring the absorption of —OH bonds (including H2O) near 3580 cm−1 in the infra-red spectrum.

Abstract translation: 频率转换晶体退火处理包括第一斜坡上升​​周期（例如，在约2小时内将晶体的温度提高到在100℃至150℃的范围内的第一设定点），第一固定温度周期 （例如，在第一设定点保持10至20小时），第二加速时间段（例如，在大约1小时或更长时间内从第一设定点增加到高于150℃的第二设定点），a 第二固定时间（例如，在第二设定点保持48至300小时），然后温度降低时间（例如，从大约3小时的第二设定点降低到室温）。 从第一和第二固定温度周期的转变可任选地由使用傅立叶变换红外光谱法测量的-OH键吸收水平确定，例如通过监测基底内的3580cm-1附近的-OH键（包括H 2 O）的吸收， 红色光谱。

公开(公告)号：US09318869B2

公开(公告)日：2016-04-19

申请号：US14586646

申请日：2014-12-30

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Chuang ,  J. Joseph Armstrong ,  Vladimir Dribinski ,  Yujun Deng ,  John Fielden

IPC: H01S3/30 ,  H01S3/108 ,  H01S3/00 ,  H01S3/067 ,  H01S3/06 ,  G01N21/95 ,  G01N21/84 ,  G01N21/956

CPC classification number: H01S3/1083 ,  G01N21/84 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G02F1/3534 ,  G02F1/3536 ,  G02F1/39 ,  G02F2001/3507 ,  G02F2201/16 ,  H01S3/0078 ,  H01S3/0092 ,  H01S3/0602 ,  H01S3/067

Abstract: A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.

Abstract translation: 用于产生约193.4nm的输出波长的激光器包括基本激光器，光参量发生器，第四谐波发生器和混频模块。 耦合到基本激光器的光学参数发生器可以产生下变频信号。 可以耦合到光学参数发生器或基本激光器的第四谐波发生器可以产生四次谐波。 耦合到光参量发生器和第四谐波发生器的混频模块可产生频率等于下变频信号频率的四次谐波和两倍的频率的激光输出。

公开(公告)号：US20160056606A1

公开(公告)日：2016-02-25

申请号：US14210355

申请日：2014-03-13

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Chuang ,  J. Joseph Armstrong ,  Justin Dianhuan Liou ,  Vladimir Dribinski ,  John Fielden

IPC: H01S3/23 ,  G01N21/95 ,  H01S3/06 ,  G01N21/88 ,  H01S3/00 ,  H01S3/067

CPC classification number: H01S3/2308 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/353 ,  G02F2001/3507 ,  G02F2001/354 ,  H01S3/0078 ,  H01S3/0092 ,  H01S3/0602 ,  H01S3/06708 ,  H01S3/06758 ,  H01S3/09415 ,  H01S3/1618 ,  H01S3/2375 ,  H01S3/302

Abstract: An improved laser uses a pump laser with a wavelength near 1109 nm and a fundamental wavelength near 1171 nm to generate light at a wavelength between approximately 189 nm and approximately 200 nm, e.g. 193 nm. The laser mixes the 1109 nm pump wavelength with the 5th harmonic of the 1171 nm fundamental, which is at a wavelength of approximately 234.2 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.

Abstract translation: 改进的激光器使用波长接近1109nm和基本波长接近1171nm的泵浦激光器来产生在约189nm至约200nm之间的波长的光，例如， 193nm。 激光器将1109nm泵浦波长与1171nm基波的5次谐波混合，其波长约为234.2nm。 通过适当选择非线性介质，可以通过几乎非关键的相位匹配来实现这种混合。 这种混合导致高转换效率，良好的稳定性和高可靠性。

公开(公告)号：US09209589B2

公开(公告)日：2015-12-08

申请号：US14607515

申请日：2015-01-28

Applicant: KLA-Tencor Corporation

Inventor： J. Joseph Armstrong

IPC: H01S3/30 ,  H01S3/067 ,  H01S3/10 ,  H01S3/02 ,  H01S3/00 ,  G01N21/00 ,  G01N21/95 ,  G01N21/956

CPC classification number: H01S3/06754 ,  G01N21/00 ,  G01N21/9501 ,  G01N21/956 ,  H01S3/0057 ,  H01S3/0092 ,  H01S3/02 ,  H01S3/06758 ,  H01S3/10 ,  H01S3/30 ,  H01S3/302 ,  H01S2301/08

Abstract: A laser system for semiconductor inspection includes a fiber-based fundamental light source for generating fundamental light that is then converted/mixed by a frequency conversion module to generate UV-DUV laser light. The fundamental light source includes a nonlinear chirp element (e.g., a Bragg grating or an electro-optic modulator) that adds a nonlinear chirp to the seed light laser system prior to amplification by the fiber amplifier(s) (e.g., doped fiber or Raman amplifiers). The nonlinear chirp includes an x2 or higher nonlinearity and is configured to compensates for the Self Phase Modulation (SPM) characteristics of the fiber-based amplifiers such that fundamental light is generated that has a spectral E95 bandwidth within five times that of the seed light. When multiple series-connected amplifiers are used, either a single nonlinear chirp element is provided before the amplifier string, or a chirp elements are included before each amplifier.

Abstract translation: 用于半导体检测的激光系统包括用于产生基本光的基于光纤的基本光源，然后由变频模块转换/混合以产生UV-DUV激光。 基本光源包括非线性啁啾元件（例如，布拉格光栅或电光调制器），其在由光纤放大器（例如，掺杂光纤或拉曼）放大之前将种子光激光系统添加非线性啁啾 放大器）。 非线性啁啾包括x2或更高的非线性，并且被配置为补偿基于光纤的放大器的自相位调制（SPM）特性，使得产生具有在种子光的5倍以内的光谱E95带宽的基本光。 当使用多个串联放大器时，在放大器串之前提供单个非线性啁啾元件，或者在每个放大器之前包括啁啾元件。

公开(公告)号：US20150299893A1

公开(公告)日：2015-10-22

申请号：US14753275

申请日：2015-06-29

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong

IPC: C30B1/02 ,  C30B29/14 ,  C30B29/30 ,  G02F1/355 ,  C30B29/22

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: A frequency-conversion crystal annealing process includes a first ramp-up period (e.g., increasing the crystal's temperature to a first set point in the range of 100° C. to 150° C. over about 2 hours), a first fixed temperature period (e.g., maintaining at the first set point for 10 to 20 hours), a second ramp-up period (e.g., increasing from the first set point to a second set point above 150° C. over about 1 hour or more), a second fixed period (e.g., maintaining at the second set point for 48 to 300 hours), and then a temperature ramp-down period (e.g., decreasing from the second set point to room temperature over about 3 hours). Transitions from the first and second fixed temperature periods are optionally determined by —OH bonds absorption levels that are measured using Fourier transform infrared spectroscopy, e.g., by monitoring the absorption of —OH bonds (including H2O) near 3580 cm−1 in the infra-red spectrum.

Abstract translation: 频率转换晶体退火处理包括第一斜坡上升​​周期（例如，在约2小时内将晶体的温度提高到在100℃至150℃的范围内的第一设定点），第一固定温度周期 （例如，在第一设定点保持10至20小时），第二加速时间段（例如，在大约1小时或更长时间内从第一设定点增加到高于150℃的第二设定点），a 第二固定时间（例如，在第二设定点保持48至300小时），然后温度降低时间（例如，从大约3小时的第二设定点降低到室温）。 从第一和第二固定温度周期的转变可任选地由使用傅立叶变换红外光谱法测量的-OH键吸收水平确定，例如通过监测基底内的3580cm-1附近的-OH键（包括H 2 O）的吸收， 红色光谱。

公开(公告)号：US09097683B2

公开(公告)日：2015-08-04

申请号：US14507758

申请日：2014-10-06

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

IPC: H01S3/13 ,  G01N21/88 ,  H01S3/11 ,  H01S3/10 ,  H01S5/00 ,  G02F1/37 ,  H01S3/00 ,  C30B29/10 ,  C03B33/02 ,  G01N21/94 ,  G01N21/95 ,  G02F1/35 ,  G02F1/355

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: An optical system for detecting contaminants and defects on a test surface includes an improved laser system for generating a laser beam and optics directing the laser beam along a path onto the test surface, and producing an illuminated spot thereon. A detector and ellipsoidal mirrored surface are also provided with an axis of symmetry about a line perpendicular to the test surface. In one embodiment, an optical system for detecting anomalies of a sample includes the improved laser system for generating first and second beams, first optics for directing the first beam of radiation onto a first spot on the sample, second optics for directing the second beam onto a second spot on the sample, with the first and second paths at different angles of incidence to the sample surface. In another embodiment, a surface inspection apparatus includes an illumination system configured to focus beams at non-normal incidence angles.

Abstract translation: 用于检测测试表面上的污染物和缺陷的光学系统包括用于产生激光束的改进的激光系统和将激光束沿着路径引导到测试表面上并在其上产生照明点的光学系统。 检测器和椭圆形镜面也具有围绕垂直于测试表面的线的对称轴。 在一个实施例中，用于检测样本异常的光学系统包括用于产生第一和第二光束的改进的激光系统，用于将第一辐射束引导到样品上的第一光点上的第一光学器件，用于将第二光束引导到 样品上的第二个点，第一和第二个路径与样品表面的入射角不同。 在另一个实施例中，表面检查装置包括被配置为以非正常入射角聚焦光束的照明系统。

公开(公告)号：US20140204963A1

公开(公告)日：2014-07-24

申请号：US14158615

申请日：2014-01-17

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Chuang ,  J. Joseph Armstrong ,  Vladimir Dribinski ,  Yujun Deng ,  John Fielden

IPC: H01S3/00 ,  G01N21/84

CPC classification number: H01S3/1083 ,  G01N21/84 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G02F1/3534 ,  G02F1/3536 ,  G02F1/39 ,  G02F2001/3507 ,  G02F2201/16 ,  H01S3/0078 ,  H01S3/0092 ,  H01S3/0602 ,  H01S3/067

Abstract: A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.

Abstract translation: 用于产生约193.4nm的输出波长的激光器包括基本激光器，光参量发生器，第四谐波发生器和混频模块。 耦合到基本激光器的光学参数发生器可以产生下变频信号。 可以耦合到光学参数发生器或基本激光器的第四谐波发生器可以产生四次谐波。 耦合到光参量发生器和第四谐波发生器的混频模块可产生频率等于下变频信号频率的四次谐波和两倍的频率的激光输出。

公开(公告)号：US20140153596A1

公开(公告)日：2014-06-05

申请号：US13711593

申请日：2012-12-11

Applicant: KLA-TENCOR CORPORATION

Inventor： Yung-Ho Alex Chuang ,  Justin Dianhuan Liou ,  J. Joseph Armstrong ,  Yujun Deng

IPC: H01S3/10

CPC classification number: H01S3/005 ,  C23C16/00 ,  G02B17/00 ,  G02B17/0848 ,  G02B27/00 ,  G02B27/108 ,  H01S3/00 ,  H01S3/10

Abstract: A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

Abstract translation: 脉冲倍增器包括分束器和一个或多个反射镜。 分束器接收一系列输入激光脉冲并将每个脉冲的能量的一部分引导到环形腔中。 在环形腔周围循环后，部分脉冲能量通过分束器离开环形空腔，部分能量被再循环。 通过选择环腔光路长度，可以将输出系列激光脉冲的重复率设为输入重复率的倍数。 可以通过选择分束器的透射和反射系数来控制输出脉冲的相对能量。 该脉冲倍增器可以以最小的总功率损耗来降低每脉冲的峰值功率，同时增加每秒的脉冲数。

公开(公告)号：US10199149B2

公开(公告)日：2019-02-05

申请号：US15659981

申请日：2017-07-26

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  Yujun Deng ,  Vladimir Dribinski ,  John Fielden ,  Jidong Zhang

IPC: H01F17/00 ,  G02F1/35 ,  G02B21/10 ,  G02B21/16 ,  G02B21/36 ,  H01S3/10 ,  H01S3/108 ,  H01S3/109 ,  H01S5/00 ,  H01S5/06 ,  H01S5/40 ,  G01N21/95 ,  G01N21/956 ,  H01F17/04 ,  H01F27/29 ,  H01S3/00

Abstract: A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.