公开(公告)号：US20140295318A1

公开(公告)日：2014-10-02

申请号：US14229164

申请日：2014-03-28

Applicant: TOTO LTD.

Inventor： Shigeru ANDO ,  Osamu OKAMOTO ,  Kiyoshi HAYAMA ,  Seiki FURUYA ,  Yutaka MOMIYAMA ,  Nobuo ISAKA ,  Masaki SATO ,  Shuhei TANAKA ,  Takuya HOSHIKO ,  Naoki WATANABE

IPC: H01M8/12

CPC classification number: H01M8/1286 ,  H01M8/004 ,  H01M8/0236 ,  H01M8/0243 ,  H01M8/0245 ,  H01M8/0252 ,  H01M8/1226 ,  H01M8/124 ,  H01M8/1246 ,  H01M2300/0074 ,  Y02E60/521 ,  Y02E60/525 ,  Y02P70/56

Abstract: Disclosed is a solid oxide fuel cell which includes an inner electrode, a solid electrolyte, and an outer electrode, each being sequentially laminated on the surface of a porous support. The porous support contains forsterite, and further has a strontium element concentration of 0.02 mass % to 1 mass % both inclusive in terms of SrO based on the mass of the forsterite.

Abstract translation: 公开了一种固体氧化物燃料电池，其包括内电极，固体电解质和外电极，各自依次层压在多孔载体的表面上。 所述多孔质载体包含镁橄榄石，并且进一步具有基于所述镁橄榄石质量的SrO换算为0.02质量％〜1质量％的锶元素浓度。

公开(公告)号：US20140295317A1

公开(公告)日：2014-10-02

申请号：US14229185

申请日：2014-03-28

Applicant: TOTO LTD.

Inventor： Shigeru ANDO ,  Osamu OKAMOTO ,  Kiyoshi HAYAMA ,  Seiki FURUYA ,  Yutaka MOMIYAMA ,  Nobuo ISAKA ,  Masaki SATO ,  Shuhei TANAKA ,  Takuya HOSHIKO ,  Naoki WATANABE ,  Yasuo KAKINUMA

IPC: H01M8/02 ,  H01M8/10

CPC classification number: H01M8/0236 ,  C04B35/20 ,  C04B38/067 ,  C04B2111/00853 ,  C04B2111/00913 ,  C04B2235/3208 ,  C04B2235/72 ,  H01M4/8621 ,  H01M4/8885 ,  H01M4/9025 ,  H01M4/905 ,  H01M4/9066 ,  H01M8/004 ,  H01M8/0243 ,  H01M8/0245 ,  H01M8/0252 ,  H01M8/0637 ,  H01M8/1097 ,  H01M8/1226 ,  H01M8/124 ,  H01M8/1246 ,  H01M2008/1293 ,  Y02E60/521 ,  Y02E60/525 ,  Y02E60/566 ,  Y02P70/56

Abstract: Provided is a solid oxide fuel cell which includes a fuel electrode, a solid electrolyte, and an air electrode, each being sequentially laminated on the surface of a porous support. The porous support comprises forsterite and a nickel element. Ni and/or NiO fine particles are exposed on a surface of a sintered compact of the forsterite constituting the porous support.

Abstract translation: 提供了一种固体氧化物燃料电池，其包括燃料电极，固体电解质和空气电极，各自依次层压在多孔载体的表面上。 多孔载体包括镁橄榄石和镍元素。 Ni和/或NiO微粒暴露在构成多孔载体的镁橄榄石的烧结体的表面上。

公开(公告)号：US20250119079A1

公开(公告)日：2025-04-10

申请号：US18891449

申请日：2024-09-20

Applicant: TOTO LTD.

Inventor： Kouta KOBAYASHI ,  Masafumi IKEGUCHI ,  Yutaka MOMIYAMA

IPC: H02N13/00 ,  B23Q3/15

Abstract: An electrostatic chuck (10) includes a dielectric substrate (100), a base plate (200) formed of a metal material, and a bonding layer (300) bonding the dielectric substrate (100) and the base plate (200). At least a portion of the base plate (200) facing the bonding layer (300) is covered with a ceramic film (231), and a surface of the ceramic film (231) is a bonded surface (S). The bonded surface (S) satisfies at least one of a first condition: arithmetic average height (Sa)≤1.5 μm or a second condition: root mean square height (Sq)≤2.0 μm, and at least one of a third condition: maximum valley depth (Sv)≥20.0 μm or a fourth condition: maximum height (Sz)≥20.0 μm.

公开(公告)号：US20250069933A1

公开(公告)日：2025-02-27

申请号：US18806123

申请日：2024-08-15

Applicant: TOTO LTD.

Inventor： Masafumi IKEGUCHI ,  Kouta KOBAYASHI ,  Yutaka MOMIYAMA

IPC: H01L21/683

Abstract: An electrostatic chuck 10 includes a dielectric substrate 100, a base plate 200, and a joining layer 300 which joins the dielectric substrate 100 and the base plate 200. The joining layer 300 is obtained by containing a plurality of particulate filler materials 320 inside resin 310. The content of the filler materials 320 in the joining layer 300 is equal to or lower than 70% by weight.

公开(公告)号：US20240331985A1

公开(公告)日：2024-10-03

申请号：US18610491

申请日：2024-03-20

Applicant: TOTO LTD.

Inventor： Ryosuke SAKURAI ,  Keisuke SANO ,  Masafumi IKEGUCHI ,  Jun SHIRAISHI ,  Ikuo ITAKURA ,  Yutaka MOMIYAMA

IPC: H01J37/32 ,  C23C16/458 ,  H01L21/683

CPC classification number: H01J37/32715 ,  C23C16/4583 ,  H01J2237/2007 ,  H01J2237/3321 ,  H01L21/6833

Abstract: An electrostatic chuck includes: a dielectric substrate in which a through hole is formed; an RF electrode which is embedded inside the dielectric substrate; and an attracting electrode which is embedded inside the dielectric substrate at a position that is closer to a placement surface than the RF electrode. When viewed from a direction perpendicular to the placement surface, a circular first opening which is concentric with the through hole and which includes the through hole is formed in the attracting electrode and a circular second opening which is concentric with the through hole and which includes the through hole is formed in the RF electrode. A radius of the second opening is larger than a radius of the first opening.

公开(公告)号：US20240279810A1

公开(公告)日：2024-08-22

申请号：US18443418

申请日：2024-02-16

Applicant: TOTO LTD.

Inventor： Shunya MIYAZAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Ikuo ITAKURA

IPC: C23C16/458 ,  C23C16/455

CPC classification number: C23C16/4583 ,  C23C16/45561

Abstract: An electrostatic chuck includes: a dielectric substrate on which a plurality of first gas holes are formed; a base plate on which a second gas hole is formed; and a joining layer which is provided between the dielectric substrate and the base plate and which is formed of an insulating material. A first opening being an end of each of the first gas holes is formed in plurality on a surface of the dielectric substrate on a side of the joining layer. A second opening being an end of the second gas hole is formed on a surface of the base plate on a side of the joining layer. The second opening is communicated with the plurality of first openings via a communication groove formed on the surface of the base plate on the side of the joining layer.

公开(公告)号：US20230068968A1

公开(公告)日：2023-03-02

申请号：US17897445

申请日：2022-08-29

Applicant: TOTO LTD.

Inventor： Yuki SASAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Reo KAWANO

IPC: H01J37/32

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a bonding part, a gas inlet path, a counterbore part, and a ceramic porous part. The bonding part is located between the ceramic dielectric substrate and the base plate. The gas inlet path extends through the ceramic dielectric substrate, the base plate, and the bonding part. The gas inlet path includes a first hole part, a second hole part, and a third hole part. The first hole part is positioned at the ceramic dielectric substrate. The second hole part is positioned at the base plate. The third hole part is positioned at the bonding part. The counterbore part is located in at least one of the first hole part or the second hole part. The ceramic porous part is located in the counterbore part. The ceramic porous part includes an exposed surface exposed in the third hole part.

公开(公告)号：US20230061208A1

公开(公告)日：2023-03-02

申请号：US17897417

申请日：2022-08-29

Applicant: TOTO LTD.

Inventor： Yuki SASAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Reo KAWANO

IPC: H01L21/683

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a bonding part, a gas inlet path, a counterbore part, a ceramic porous part, and an elastic body. The base plate supports the ceramic dielectric substrate. The bonding part is located between the ceramic dielectric substrate and the base plate. The gas inlet path extends through the ceramic dielectric substrate, the base plate, and the bonding part. The gas inlet path includes a first hole part, a second hole part and a third hole part. The first hole part is positioned at the ceramic dielectric substrate. The third hole part is positioned at the bonding part. The counterbore part is located in the first hole part. The ceramic porous part is located in the counterbore part. The elastic body faces an end part of the bonding part at the third hole part side.

公开(公告)号：US20210074572A1

公开(公告)日：2021-03-11

申请号：US17009432

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the third surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US20190287838A1

公开(公告)日：2019-09-19

申请号：US16352565

申请日：2019-03-13

Applicant: TOTO LTD.

Inventor： Kosuke YAMAGUCHI ,  Jun SHIRAISHI ,  Ikuo ITAKURA ,  Yutaka MOMIYAMA ,  Shuichiro SAIGAN

IPC: H01L21/683 ,  H01L21/67

Abstract: According to the embodiment, the first invention relates to an electrostatic chuck. The electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing a suction object and a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface and being opposite to the gas introduction path. The first porous part includes sparse portions including pores and a dense portion having a density higher than a density of the sparse portions. Each of the sparse portions extends from the base plate toward the ceramic dielectric substrate. The dense portion is positioned between the sparse portions. The sparse portions include a wall portion provided between the pores and the pores.