公开(公告)号：US5572057A

公开(公告)日：1996-11-05

申请号：US360940

申请日：1994-12-21

申请人： Toshimasa Yamamoto ,  Yukihiro Takeuchi ,  Yoshinori Ohtsuka ,  Kazuhiko Kano

发明人： Toshimasa Yamamoto ,  Yukihiro Takeuchi ,  Yoshinori Ohtsuka ,  Kazuhiko Kano

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L29/82

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  Y10S73/01

摘要： Adverse effects due to electrostatic force between a semiconductor substrate and a movable electrode are avoided with a new structure. A movable electrode of beam structure is disposed at a specified interval above a p-type silicon substrate. Fixed electrodes, each composed of an impurity diffusion layer, are disposed on both sides of the movable electrode on the p-type silicon substrate; these fixed electrodes are self-aligningly with respect to the movable electrode. The movable electrode is displaced in accompaniment to the action of acceleration, and acceleration is detected by change (fluctuation) in current between the fixed electrodes generated by means of this displacement. Additionally, an electrode for movable electrode upward-movement use is disposed above the movable electrode, a potential difference is given between the movable electrode and the electrode for movable electrode upward-movement use, and attractive force of the movable electrode to the silicon substrate is alleviated.

摘要翻译： 通过新的结构避免了由于半导体衬底和可移动电极之间的静电力引起的不利影响。 光束结构的可移动电极以指定的间隔设置在p型硅衬底上方。 每个由杂质扩散层构成的固定电极设置在p型硅衬底上的可移动电极的两侧; 这些固定电极相对于可动电极自对准。 可移动电极伴随着加速度的作用而移动，并且通过由该位移产生的固定电极之间的电流的变化（波动）来检测加速度。 另外，可动电极向上移动用的电极设置在可动电极的上方，在可动电极向上移动用的电极之间施加电位差，并且可移动电极对硅衬底的吸引力为 缓解

公开(公告)号：US5504356A

公开(公告)日：1996-04-02

申请号：US152505

申请日：1993-11-16

申请人： Yukihiro Takeuchi ,  Toshimasa Yamamoto ,  Yoshinori Ohtsuka ,  Shigeyuki Akita ,  Tadashi Hattori ,  Kazuhiko Kanou ,  Hirotane Ikeda

发明人： Yukihiro Takeuchi ,  Toshimasa Yamamoto ,  Yoshinori Ohtsuka ,  Shigeyuki Akita ,  Tadashi Hattori ,  Kazuhiko Kanou ,  Hirotane Ikeda

IPC分类号： G01P15/08 ,  G01P15/12 ,  H01L29/78 ,  H01L29/84

CPC分类号： G01P15/124 ,  G01P15/0802

摘要： This invention aims at providing a novel semiconductor accelerometer comprising a smaller number of substrates and a production method thereof.An insulating film is formed on a main plane of a P-type silicon substrate, and a beam-like movable electrode is formed on the insulating film. Fixed electrodes are then formed on both sides of the movable electrode in self-alignment with the movable electrode by diffusing an impurity into the P-type silicon substrate, and the insulating film below the movable electrode is etched and removed. There is thus produced a semiconductor accelerometer comprising the P-type silicon substrate 1, the movable electrode 4 having the beam structure and disposed above the P-type silicon substrate 1 with a predetermined gap between them, and the fixed electrodes 8, 9 consisting of the impurity diffusion layer and formed on both sides of the movable electrode 4 on the P-type silicon substrate 1 in self-alignment with the movable electrode 4. This sensor can detect acceleration from the change (increase/decrease) of a current between the fixed electrodes 8 and 9 resulting from the displacement of the movable electrode 4 due to acceleration.

摘要翻译： 本发明的目的在于提供一种新型的半导体加速度计，其包括较少数量的基板及其制造方法。 在P型硅基板的主平面上形成绝缘膜，在绝缘膜上形成有束状的可动电极。 然后通过将杂质扩散到P型硅衬底中，在可动电极的两侧与可动电极自对准地形成固定电极，蚀刻除去可动电极下面的绝缘膜。 因此，制造了包括P型硅衬底1，具有光束结构的可动电极4并且在它们之间具有预定间隙并且设置在P型硅衬底1上方的固定电极8,9的半导体加速度计， 该杂质扩散层形成在与可动电极4自对准的P型硅衬底1上的可动电极4的两侧。该传感器可以从电流的变化（增加/减少） 固定电极8和9由于加速而由可动电极4的位移而产生。

公开(公告)号：US08542957B2

公开(公告)日：2013-09-24

申请号：US13086455

申请日：2011-04-14

申请人： Shuichi Yamashita ,  Yukihiro Takeuchi

发明人： Shuichi Yamashita ,  Yukihiro Takeuchi

IPC分类号： G02B6/10

CPC分类号： G02B6/125 ,  G01N21/552 ,  G01N2021/7783

摘要： An optical waveguide sensor includes a substrate and an optical waveguide. The optical waveguide includes a core and a lateral clad. The core extends in a spiral shape above a surface of the substrate. The lateral clad is disposed in a same layer as the core above the surface of the substrate and is in contact with either side surfaces of the core. At least a part of a surface of the core located opposite from the substrate is a transmission surface from which light leaks and is absorbed by a detected object.

摘要翻译： 光波导传感器包括基板和光波导。 光波导包括芯和横向包层。 芯部以衬底表面上方的螺旋形状延伸。 横向包层设置在与基板表面上方的芯相同的层中，并且与芯的任一侧表面接触。 位于与衬底相对的芯的表面的至少一部分是透射表面，光从该表面泄漏并被检测到的物体吸收。

公开(公告)号：US20110268385A1

公开(公告)日：2011-11-03

申请号：US13086455

申请日：2011-04-14

申请人： Shuichi YAMASHITA ,  Yukihiro Takeuchi

发明人： Shuichi YAMASHITA ,  Yukihiro Takeuchi

IPC分类号： G02B6/02 ,  B05D5/06

CPC分类号： G02B6/125 ,  G01N21/552 ,  G01N2021/7783

摘要： An optical waveguide sensor includes a substrate and an optical waveguide. The optical waveguide includes a core and a lateral clad. The core extends in a spiral shape above a surface of the substrate. The lateral clad is disposed in a same layer as the core above the surface of the substrate and is in contact with either side surfaces of the core. At least a part of a surface of the core located opposite from the substrate is a transmission surface from which light leaks and is absorbed by a detected object.

摘要翻译： 光波导传感器包括基板和光波导。 光波导包括芯和横向包层。 芯部以衬底表面上方的螺旋形状延伸。 横向包层设置在与基板表面上方的芯相同的层中，并且与芯的任一侧表面接触。 位于与衬底相对的芯的表面的至少一部分是透射表面，光从该表面泄漏并被检测到的物体吸收。

公开(公告)号：US07199914B2

公开(公告)日：2007-04-03

申请号：US11311181

申请日：2005-12-20

申请人： Yukihiro Takeuchi ,  Nobuaki Kawahara ,  Takahiko Yoshida

发明人： Yukihiro Takeuchi ,  Nobuaki Kawahara ,  Takahiko Yoshida

IPC分类号： G02B26/08

CPC分类号： G02B26/12 ,  G02B26/0833 ,  G02B26/105

摘要： A scanning apparatus includes a mirror coupled to a base via a spring portion, and a light source for emitting a beam toward a reflecting surface of the mirror so that the beam is incident thereon. The mirror reflects the beam from the light source and rotationally swings under a resilient force of the spring portion when a force is applied thereto. The reflecting surface of the mirror includes a plurality of mirror surfaces at different angles. The beam from the light source is simultaneously reflected by the mirror surfaces at different angles.

摘要翻译： 扫描装置包括经由弹簧部分耦合到基座的反射镜，以及用于将光束朝向反射镜的反射表面发射以使光束入射到其上的光源。 镜子反射来自光源的光束，并且当向其施加力时，在弹簧部分的弹性力下旋转摆动。 反射镜的反射面包括多个不同角度的镜面。 来自光源的光束被镜面以不同的角度同时反射。

公开(公告)号：US07174072B2

公开(公告)日：2007-02-06

申请号：US11139540

申请日：2005-05-31

申请人： Junji Oohara ,  Shinji Yoshihara ,  Yukihiro Takeuchi

发明人： Junji Oohara ,  Shinji Yoshihara ,  Yukihiro Takeuchi

IPC分类号： G02B6/26 ,  H01L21/00

CPC分类号： G02B6/136 ,  G02B6/122 ,  G02B6/4207

摘要： An optical device includes: a silicon substrate; a plurality of silicon oxide columns having a rectangular plan shape; and a cavity disposed between the columns. Each column has a lower portion disposed on the substrate. Each column has a width defined as W1. The cavity has a width defined as W2. A ratio of W1/W2 becomes smaller as it goes to the lower portion of the column. A core layer provided by the columns and the cavity can have the thickness equal to or larger than a few dozen μm easily. Therefore, connection loss between a light source and the device is reduced.

摘要翻译： 光学器件包括：硅衬底; 多个具有矩形平面形状的氧化硅柱; 以及设置在列之间的空腔。 每列具有设置在基板上的下部。 每列具有定义为W 1的宽度。空腔的宽度定义为W 2.W 1 / W 2的比率随着进入塔的下部而变小。 由柱和空腔提供的芯层可以容易地具有等于或大于几十个的厚度。 因此，光源与设备之间的连接损耗减小。

公开(公告)号：US07129176B2

公开(公告)日：2006-10-31

申请号：US10759025

申请日：2004-01-20

申请人： Junji Oohara ,  Kazuhiko Kano ,  Yoshitaka Noda ,  Yukihiro Takeuchi ,  Toshiyuki Morishita

发明人： Junji Oohara ,  Kazuhiko Kano ,  Yoshitaka Noda ,  Yukihiro Takeuchi ,  Toshiyuki Morishita

IPC分类号： H01L21/027

CPC分类号： H01L27/14625 ,  G02B6/4249 ,  H01L27/14627 ,  H01L27/14685

摘要： An optical device includes a semiconductor substrate and an optical part having a plurality of columnar members disposed on the substrate. Each columnar member is disposed in a standing manner and adhered each other so that the optical part is provided. The optical part is integrated with the substrate. This optical part has high design freedom.

摘要翻译： 光学器件包括半导体衬底和具有设置在衬底上的多个柱状构件的光学部件。 每个柱状构件以立式的方式设置并彼此粘合，从而设置光学部件。 光学部件与基板一体化。 该光学部件具有高设计自由度。

公开(公告)号：US06906394B2

公开(公告)日：2005-06-14

申请号：US10448277

申请日：2003-05-30

申请人： Hiroshi Muto ,  Tsuyoshi Fukada ,  Kenichi Ao ,  Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Junji Oohara

发明人： Hiroshi Muto ,  Tsuyoshi Fukada ,  Kenichi Ao ,  Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Junji Oohara

IPC分类号： G01P15/125 ,  B81B3/00 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/762 ,  H01L29/84 ,  H01L27/01

CPC分类号： B81C1/00936 ,  B81B2203/0136 ,  B81C1/0019 ,  B81C1/00531 ,  B81C2201/0132 ,  G01P2015/0814 ,  H01L21/76232 ,  H01L21/76264 ,  H01L21/76283

摘要： A method of manufacturing a semiconductor device is provided. The device is manufactured with use of an SOI (Silicon On Insulator) substrate having a first silicon layer, an oxide layer, and a second silicon layer laminated in this order. After forming a trench reaching the oxide layer from the second silicon layer, dry etching is performed, thus allowing the oxide layer located at the trench bottom to be charged at first. This charging forces etching ions to impinge upon part of the second silicon layer located laterally to the trench bottom. Such part is removed, forming a movable section. For example, ions to neutralize the electric charges are administered into the trench, so that the electric charges are removed from charged movable electrodes and their charged surrounding regions. Removing the electric charges prevents the movable section to stick to its surrounding portions.

摘要翻译： 提供一种制造半导体器件的方法。 使用具有按顺序层叠的第一硅层，氧化物层和第二硅层的SOI（绝缘体上硅）基板来制造器件。 在形成从第二硅层到达氧化物层的沟槽之后，进行干蚀刻，从而允许首先将位于沟槽底部的氧化物层充电。 该充电迫使蚀刻离子撞击位于沟槽底部横向的第二硅层的一部分。 去除这样的部件，形成可动部分。 例如，中和电荷的离子被施加到沟槽中，使得电荷从带电的可移动电极及其带电的周围区域中去除。 拆卸电荷可防止可动部分粘附到其周围部分。

公开(公告)号：US06626037B1

公开(公告)日：2003-09-30

申请号：US09515496

申请日：2000-02-29

申请人： Hiroyuki Wado ,  Yukihiro Takeuchi ,  Toshimasa Yamamoto

发明人： Hiroyuki Wado ,  Yukihiro Takeuchi ,  Toshimasa Yamamoto

IPC分类号： G01F168

CPC分类号： G01F1/692 ,  G01F1/6845

摘要： A flow sensor, which can detect flow velocity in a wide range including high flow velocity area with simple structure. A flow sensor includes a substrate having a hollow portion; and a thin film structure portion provided above the hollow portion. The thin film structure portion is provided with a heater formed in a center portion, an upper and a lower stream temperature detectors for detecting temperature of the fluid, a fluid thermometer for detecting temperature of the fluid, and thermal couple films provided on the substrate at a portion, where is between the heater and both temperature detectors. According to this structure, the thermal couple films enhance thermal coupling between the heater and the temperature detectors. Accordingly, it can prevent the temperature of the upper stream temperature detector from falling to around the temperature of the fluid, and it can raise a certain flow velocity at which a cooling of the low stream temperature detector due to the flowing fluid exceeds a heating by the heater. Therefore, it can detect flow velocity in a wide range including high flow velocity area.

摘要翻译： 一种流量传感器，可以在宽范围内检测流速，包括结构简单的高流速区域。 流量传感器包括具有中空部分的基板; 以及设置在中空部分上方的薄膜结构部分。 薄膜结构部分设置有形成在中心部分的加热器，用于检测流体温度的上下流温度检测器，用于检测流体温度的流体温度计，以及设置在基板上的热耦合膜 加热器和两个温度检测器之间的部分。 根据该结构，热耦合膜增强了加热器和温度检测器之间的热耦合。 因此，能够防止上游温度检测器的温度下降到流体的温度附近，并且能够提高一定的流速，在该流速下，由流动的流体导致的低流量温度检测器的冷却超过加热 加热器。 因此，它可以检测到包括高流速面积在内的宽范围内的流速。

公开(公告)号：US06423563B2

公开(公告)日：2002-07-23

申请号：US09861535

申请日：2001-05-22

申请人： Tsuyoshi Fukada ,  Minekazu Sakai ,  Minoru Murata ,  Yukihiro Takeuchi ,  Seiki Aoyama

发明人： Tsuyoshi Fukada ,  Minekazu Sakai ,  Minoru Murata ,  Yukihiro Takeuchi ,  Seiki Aoyama

IPC分类号： H01L2984

CPC分类号： B81C1/00936 ,  B81B3/0005 ,  B81B2201/0235 ,  B81B2201/025 ,  B81B2203/0136 ,  B81B2203/033 ,  B81B2203/04 ,  B81C2201/0132 ,  B81C2201/053 ,  B81C2201/112 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/084

摘要： A semiconductor dynamic quantity sensor includes a semiconductor support substrate having a specific resistance equal to or less than 3&OHgr; cm. An insulation film is provided on the support substrate and a semiconductor layer is provided on the support substrate with the insulation film interposed therebetween. The semiconductor layer has a specific resistance equal to or less than 3&OHgr; cm. A movable electrode is provided in the semiconductor layer to be displaced according to a dynamic quantity acting thereto. A fixed electrode is fixedly provided in the semiconductor layer to make a specific gap with the movable electrode and to from a capacitor with the movable electrode. The capacitor has a capacity that changes in response to displacement of the movable electrode to detect the dynamic quantity.

摘要翻译： 半导体动态量传感器包括具有等于或小于3OMEGA cm的电阻率的半导体支撑衬底。 绝缘膜设置在支撑基板上，半导体层设置在支撑基板上，绝缘膜位于支撑基板之间。 半导体层的电阻率等于或小于3OMEGA cm。 可移动电极设置在半导体层中，以根据作用于其的动态量而移位。 在半导体层中固定设置固定电极，与可动电极和可动电极的电容器形成特定的间隙。 电容器具有响应于可动电极的位移而变化以检测动态量的容量。