Method for manufacturing semiconductor integrated circuit device
    32.
    发明授权
    Method for manufacturing semiconductor integrated circuit device 有权
    半导体集成电路器件的制造方法

    公开(公告)号:US06909133B2

    公开(公告)日:2005-06-21

    申请号:US10699690

    申请日:2003-11-04

    摘要: In a process of forming MISFETs that have gate insulating films that are mutually different in thickness on the same substrate, the formation of an undesirable natural oxide film at the interface between the semiconductor substrate and the gate insulating film is suppressed. A gate insulating film of MISFETs constituting an internal circuit is comprised of a silicon oxynitride film. Another gate insulating film of MISFETs constituting an I/O circuit is comprised of a laminated silicon oxynitride film and a high dielectric film. A process of forming the two types of gate insulating films on the substrate is continuously carried out in a treatment apparatus of a multi-chamber system. Accordingly, the substrate will not be exposed to air. Therefore, it is possible to suppress the inclusion of undesirable foreign matter and the formation of a natural oxide film at the interface between the substrate and the gate insulating films.

    摘要翻译: 在形成具有相同基板上的厚度相互不同的栅极绝缘膜的MISFET的过程中,抑制了在半导体基板和栅极绝缘膜之间的界面处形成不期望的自然氧化膜。 构成内部电路的MISFET的栅极绝缘膜由氮氧化硅膜构成。 构成I / O电路的MISFET的另一个栅极绝缘膜由层叠的氮氧化硅膜和高介电膜构成。 在多室系统的处理装置中连续地进行在基板上形成两种栅极绝缘膜的工序。 因此,基板不会暴露在空气中。 因此,可以抑制在基板和栅极绝缘膜之间的界面处包含不需要的异物和形成自然氧化膜。

    Method for fabricating semiconductor integrated circuit device

    公开(公告)号:US06417114B1

    公开(公告)日:2002-07-09

    申请号:US09752736

    申请日:2001-01-03

    IPC分类号: C23C1600

    摘要: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.

    Apparatus and method for managing and distributing design and manufacturing information throughout a sheet metal production facility
    35.
    发明授权
    Apparatus and method for managing and distributing design and manufacturing information throughout a sheet metal production facility 有权
    在整个钣金生产设备中管理和分配设计和制造信息的装置和方法

    公开(公告)号:US06411862B1

    公开(公告)日:2002-06-25

    申请号:US09272095

    申请日:1999-03-18

    IPC分类号: G06F1900

    摘要: An apparatus and method is provided for managing and distributing design and manufacturing information throughout a factory in order to facilitate the production of components, such as bent sheet metal components. In accordance with an aspect of the present invention, the management and distribution of critical design and manufacturing information is achieved by storing and distributing the design and manufacturing information associated with each job. By replacing the traditional paper job set-up or work sheet with, for example, an electronically stored job sheet that can be accessed instantaneously from any location in the factory, the present invention improves the overall efficiency of the factory. In addition, through the various aspects and features of the invention, the organization and accessibility of part information and stored expert knowledge is improved.

    摘要翻译: 提供了一种用于在整个工厂中管理和分配设计和制造信息的装置和方法,以便于生产诸如弯曲的金属板零件的部件。 根据本发明的一个方面,通过存储和分发与每个作业相关联的设计和制造信息来实现关键设计和制造信息的管理和分发。 通过用例如工厂中的任何位置即时访问的电子存储工作表来代替传统的纸张作业设置或工作表,本发明提高了工厂的整体效率。 另外,通过本发明的各个方面和特征,改进了部件信息的组织和可访问性以及存储的专家知识。

    Computer readable medium for managing and distributing design and
manufacturing information throughout a sheet metal production facility
    36.
    发明授权
    Computer readable medium for managing and distributing design and manufacturing information throughout a sheet metal production facility 失效
    用于在整个钣金生产设备中管理和分发设计和制造信息的计算机可读介质

    公开(公告)号:US6065857A

    公开(公告)日:2000-05-23

    申请号:US159849

    申请日:1998-09-25

    摘要: An apparatus and method is provided for managing and distributing design and manufacturing information throughout a factory in order to facilitate the production of components, such as bent sheet metal components. In accordance with an aspect of the present invention, the management and distribution of critical design and manufacturing information is achieved by storing and distributing the design and manufacturing information associated with each job. By replacing the traditional paper job set-up or work sheet with, for example, an electronically stored job sheet that can be accessed instantaneously from any location in the factory, the present invention improves the overall efficiency of the factory. In addition, through the various aspects and features of the invention, the organization and accessibility of part information and stored expert knowledge is improved.

    摘要翻译: 提供了一种用于在整个工厂中管理和分配设计和制造信息的装置和方法,以便于生产诸如弯曲的金属板零件的部件。 根据本发明的一个方面,通过存储和分发与每个作业相关联的设计和制造信息来实现关键设计和制造信息的管理和分配。 通过用例如工厂中的任何位置即时访问的电子存储工作表来代替传统的纸张作业设置或工作表,本发明提高了工厂的整体效率。 另外,通过本发明的各个方面和特征,改进了部件信息的组织和可访问性以及存储的专家知识。

    Photovoltaic device and process for producing photovoltaic device
    39.
    发明授权
    Photovoltaic device and process for producing photovoltaic device 有权
    光伏器件及其制造方法

    公开(公告)号:US08859887B2

    公开(公告)日:2014-10-14

    申请号:US12997418

    申请日:2009-07-08

    摘要: A photovoltaic device that exhibits increased open-circuit voltage and an improved fill factor due to an improvement in the contact properties between the n-layer and a back-side transparent electrode layer or intermediate contact layer, and a process for producing the photovoltaic device. The photovoltaic device comprises a photovoltaic layer having a p-layer, an i-layer and an n-layer stacked on top of a substrate, wherein the n-layer comprises a nitrogen-containing n-layer and an interface treatment layer formed on the opposite surface of the nitrogen-containing n-layer to the substrate, the nitrogen-containing n-layer comprises nitrogen atoms at an atomic concentration of not less than 1% and not more than 20%, and has a crystallization ratio of not less than 0 but less than 3, and the interface treatment layer has a crystallization ratio of not less than 1 and not more than 6.

    摘要翻译: 由于n层和背面透明电极层或中间接触层之间的接触特性的改善,显示出增加的开路电压和改善的填充因子的光电器件,以及用于制造光伏器件的工艺。 光伏器件包括具有层叠在衬底顶部上的p层,i层和n层的光电转换层,其中n层包括含氮的n层和形成在衬底上的界面处理层 含氮n层相对于基板的相对表面,含氮n层包含原子浓度为1%以上且20%以下的氮原子,结晶化比例不小于 0但小于3,并且界面处理层的结晶比不小于1且不大于6。

    Vehicle light
    40.
    发明授权
    Vehicle light 有权
    车灯

    公开(公告)号:US08550676B2

    公开(公告)日:2013-10-08

    申请号:US12901485

    申请日:2010-10-08

    IPC分类号: F21V11/00

    摘要: A vehicle light can include a light emitting diode (LED) serving as a light source and an optical system for controlling a light distribution pattern of the light beams from the LED light source utilizing a light guide (such as a lens body having an inner reflecting surface). The vehicle light can project illumination light with a low beam light distribution pattern. The vehicle light can include an LED light source and a lens body serving as a light guide. The lens body can include a light incident surface, a reflecting surface, and a light exiting surface. The LED light source can have a rearmost end light emitting point from which light beams are emitted to form a bright-dark boundary line. Among the light beams, perpendicularly incident light beams not subjected to refraction can be projected toward the bright-dark boundary line while obliquely incident light beams that are subjected to refraction can be corrected to be directed in a lower angular direction than the bright-dark boundary line and to be mixed with the other light beams, thereby preventing color shading of illumination light from the vehicle light.

    摘要翻译: 车灯可以包括用作光源的发光二极管(LED)和用于控制来自LED光源的光束的配光图案的光学系统,其利用光导(例如具有内部反射的透镜体 表面)。 车灯可投射具有近光配光图案的照明光。 车辆灯可以包括LED光源和用作光导的透镜体。 透镜体可以包括光入射表面,反射表面和光出射表面。 LED光源可以具有最后端发光点,光束从该发光点发射以形成明暗的边界线。 在光束中,不会受到折射的垂直入射光束可以投射到明暗边界线,而可以将经受折射的倾斜入射光束校正为比明暗边界更低的角度方向 并且与其他光束混合,从而防止来自车辆灯的照明光的颜色阴影。