公开(公告)号：US20060214761A1

公开(公告)日：2006-09-28

申请号：US11442180

申请日：2006-05-30

Applicant: Gregory McAvoy ,  Kia Silverbrook

Inventor： Gregory McAvoy ,  Kia Silverbrook

IPC: H01H37/52 ,  H01H37/46

CPC classification number: B81C99/006 ,  B41J2/14427 ,  B81B3/0024 ,  B81B3/0035 ,  B81B2201/038 ,  F03G7/06 ,  F05C2203/0813 ,  F05C2203/083 ,  F05C2251/04 ,  F05C2251/044 ,  F05C2251/046 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micro-electromechanical actuator includes a pair of elongate layers capable of being heated with an electrical current to thermally expand and to perform work. A pair of spacers separates the elongate layers from each other. The spacers are arranged at respective opposite ends of the elongate layers and are fast with the layers so that the actuator is deflected when one of the layers is heated.

公开(公告)号：US06940630B2

公开(公告)日：2005-09-06

申请号：US10835344

申请日：2004-04-29

Applicant: Huikai Xie

Inventor： Huikai Xie

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0866 ,  B81B3/0018 ,  B81B2201/038 ,  B81B2201/06 ,  G02B6/3512 ,  G02B6/3526 ,  G02B6/3534 ,  G02B6/3584

Abstract: A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.

Abstract translation: 能够相对于基座移动一个或多个可垂直移位的平台的MEMS垂直位移装置。 特别地，垂直位移装置可以能够移动可垂直移动的平台，使得垂直移位的平台保持大致平行于基部。 可垂直移位的平台可以是但不限于微透镜，微镜，微光栅或其他器件。 垂直位移装置也可以包括在光学相干和共焦成像系统中。

公开(公告)号：US20050140987A1

公开(公告)日：2005-06-30

申请号：US11065017

申请日：2005-02-24

Applicant: Huikai Xie

Inventor： Huikai Xie

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  G01B11/02

CPC classification number: G02B26/0866 ,  B81B3/0018 ,  B81B2201/038 ,  B81B2201/06 ,  G02B6/3512 ,  G02B6/3526 ,  G02B6/3534 ,  G02B6/3584

Abstract: A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.

公开(公告)号：US20040012301A1

公开(公告)日：2004-01-22

申请号：US10415631

申请日：2003-08-12

Inventor： Mohamed Yahia Benslimane ,  Peter Gravesen

IPC: H01L041/18

CPC classification number: H01L41/0986 ,  B81B3/007 ,  B81B2201/038 ,  H01L41/333 ,  H01L41/45 ,  H02N1/006 ,  H04R23/00

Abstract: The invention relates to anactuating member comprising an elastomer body that is provided with one electrode each on opposite peripheries. The aim of the invention is to improve the dynamism of such an actuating member. To this end, at least one periphery is provided with at least one waved section that comprises elevations and depressions as the extremes disposed in parallel to the cross direction. Said section is covered by an electrode that completely covers at least a part of the extremes and that extends across the waved section.

Abstract translation: 本发明涉及一种包括弹性体的致动构件，该弹性体在相对的周边上设置有一个电极。 本发明的目的是改善这种致动构件的动力。 为此，至少一个周边设置有至少一个波形部分，其包括作为平行于交叉方向设置的极值的高度和凹陷。 所述部分由完全覆盖极限的至少一部分并且横过波形部分延伸的电极覆盖。

公开(公告)号：US06588208B1

公开(公告)日：2003-07-08

申请号：US10058887

申请日：2002-01-28

Applicant: Ken Clements

Inventor： Ken Clements

IPC: F01B2910

CPC classification number: F03G7/065 ,  B81B3/0029 ,  B81B2201/038 ,  B82Y15/00 ,  C21D2201/01 ,  C22C13/00 ,  C22F1/006 ,  F05B2250/84 ,  Y10S977/725 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/89

Abstract: The present invention is a method and apparatus for achieving high work output per unit volume in micro-robotic actuators, and in particular TiNi actuators. Such actuators are attractive as a means of powering nano-robotic movement, and are being developed for manipulation of structures at near the molecular scale. In these very small devices (one micron scale), one means of delivery of energy is by electron beams. Movement of mechanical structures a few microns in extent has been demonstrated in a scanning electron microscope. Results of these and subsequent experiments will be described, with a description of potential structures for fabricating moving a microscopic x-y stage.

Abstract translation: 本发明是一种用于在微型机器人致动器，特别是TiNi致动器中实现每单位体积的高工作输出的方法和装置。 这样的致动器作为对纳米机器人运动的供电的手段是有吸引力的，并且正在开发用于在分子规模附近的结构的操纵。 在这些非常小的器件（一微米级）中，一种能量传递方式是电子束。 已经在扫描电子显微镜中证明了在几微米范围内的机械结构的移动。 将描述这些和随后的实验的结果，并描述了用于制造移动微观x-y阶段的潜在结构。

公开(公告)号：US20030021004A1

公开(公告)日：2003-01-30

申请号：US10025182

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Svetlana Tatic-Lucic ,  Dana R. DeReus

IPC: G02B026/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device is fabricated in either a surface or bulk micromachining process wherein an integral process step entails providing an antireflective coating on one or more surfaces of a substrate through which optical information is to be transmitted. In one method, a surface micromachining process is carried out in which a sacrificial layer is formed and patterned on an optically transmissive substrate. A structural layer is formed on the sacrificial layer and fills in regions of the sacrificial layer that have been removed. An amount of the sacrificial layer is removed sufficient to define and release a microstructure and thereby render the microstructure movable for interaction with an optical signal directed toward the optically transmissive substrate. In another method, a bulk micromachining process is carried out in which a first substrate is provided that is composed of an optically transmissive material. An antireflective coating is deposited on a major surface of the first substrate to enable an optical signal to be transmitted along a path directed through the antireflective coating and the first substrate. A movable, actuatable microstructure is formed a second substrate. The first and second substrates are aligned and bonded together in a manner enabling the microstructure to interact with the optical signal upon actuation of the microstructure.

Abstract translation: 光学MEMS器件以表面或体积微加工工艺制造，其中整体工艺步骤需要在要传输光学信息的衬底的一个或多个表面上提供抗反射涂层。 在一种方法中，进行表面微加工工艺，其中在光学透射基底上形成牺牲层并图案化。 在牺牲层上形成结构层，并填充已被去除的牺牲层的区域。 牺牲层的量被去除足以限定和释放微结构，从而使微结构可移动以与指向光学透射基底的光信号相互作用。 在另一种方法中，进行体微加工工艺，其中提供由光学透射材料组成的第一衬底。 抗反射涂层沉积在第一基底的主表面上，以使得光信号沿着穿过抗反射涂层和第一基底的路径传输。 可移动的可致动微结构形成第二基板。 将第一和第二基板对准并结合在一起，使得微结构在致动微结构时能与光信号相互作用。

公开(公告)号：US20020181838A1

公开(公告)日：2002-12-05

申请号：US10025180

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Dana Richard DeReus ,  Victor Ramsey

IPC: G02B006/35

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device and a package include an optical through path for allowing light to pass from a first side of the package, through a substrate on which the optical MEMS device is mounted and through a second side of the package opposite the first side. The package can include first and second light-transmissive portions or apertures for allowing the light to pass. The optical MEMS device can be a shutter for selectively affecting the flow of light through the package. A plurality of optical MEMS devices may be located within a single package because the optical paths for the MEMS devices can be substantially parallel to each other.

Abstract translation: 光学MEMS器件和封装包括光学通过路径，用于允许光从封装的第一侧通过其上安装有光学MEMS器件的基板，并且穿过与第一侧相对的封装的第二侧。 封装可以包括用于允许光通过的第一和第二透光部分或孔。 光学MEMS器件可以是用于选择性地影响通过封装件的光流的快门。 多个光学MEMS器件可以位于单个封装内，因为用于MEMS器件的光路可以基本上彼此平行。

公开(公告)号：US20020114058A1

公开(公告)日：2002-08-22

申请号：US10025188

申请日：2001-12-19

Inventor： Dana Richard DeReus ,  Shawn J. Cunningham ,  Arthur S. Morris III

IPC: G02F001/29 ,  G02B026/08 ,  G02B026/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: Light-Transmissive Substrate for an Optical MEMS Device. According to one embodiment of the present invention, an optical device is provided. The optical device includes a substrate having an aperture for providing a pathway for light transmission and a device attached to a surface of the substrate for interacting with light transmitted along the pathway. According to another embodiment of the present invention, an optical device is provided which includes a substrate manufactured of a light-transmissive material having surfaces coated with an anti-reflective material for providing a pathway for light transmission and a device attached to a surface of the substrate for interacting with light transmitted along the pathway.

Abstract translation: 用于光学MEMS器件的光透射衬底。 根据本发明的一个实施例，提供一种光学装置。 光学装置包括具有用于提供光透射路径的孔径的基板和附着到基板表面的装置，用于与沿着路径传输的光相互作用。 根据本发明的另一实施例，提供了一种光学装置，其包括由透光材料制成的基板，该透光材料具有涂覆有用于提供光透射路径的抗反射材料的表面，以及附接到 用于与沿着路径传输的光相互作用的衬底。

公开(公告)号：US20020086456A1

公开(公告)日：2002-07-04

申请号：US10025181

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Svetlana Tacic-Lucic ,  Dana R. DeReus

IPC: H01L021/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device is fabricated by forming and aperture through the thickness of a first substrate to enable an optical signal to be transmitted through the aperture. A movable, actuatable microstructure is formed on a second substrate. The second substrate is bonded to the first substrate. The first and second substrates are aligned to enable the microstructure to interact with the optical signal upon actuation of the microstructure. A conductive element is formed on the first substrate to serve as a contact or an interconnect. A channel is formed in the second substrate. An insulating layer can be deposited on the inside surfaces of this channel. When the first and second substrates are bonded together, the conductive element formed on the first substrate is disposed within the channel and is isolated from conductive regions of the resulting optical MEMS device. In another method, an optical MEMS device is fabricated from a substrate that comprises an etch-stop layer interposed between first and second bulk layers. The movable, actuatable microstructure is formed into the first bulk layer, and the aperture is formed through the second bulk layer.

Abstract translation: 通过在第一衬底的厚度上形成和开孔来制造光学MEMS器件，以使光信号能够透过该孔。 在第二基板上形成可移动的致动微结构。 第二基板结合到第一基板。 对准第一和第二基板以使微结构在微结构的致动时与光信号相互作用。 导电元件形成在第一基板上以用作接触件或互连件。 在第二基板中形成通道。 绝缘层可以沉积在该通道的内表面上。 当第一和第二基板接合在一起时，形成在第一基板上的导电元件设置在通道内并与所得到的光学MEMS器件的导电区域隔离。 在另一种方法中，光学MEMS器件由衬底制造，该衬底包括介于第一和第二体层之间的蚀刻停止层。 可移动可致动的微结构形成第一体层，并且孔通过第二体层形成。

公开(公告)号：US20020037221A1

公开(公告)日：2002-03-28

申请号：US09874927

申请日：2001-06-05

Inventor： Carlos H. Mastrangelo ,  Edwin T. Carlen

IPC: H01L041/08 ,  H01L041/18 ,  B05B017/04 ,  E03B001/00 ,  B05B012/08 ,  F17D001/00 ,  H02N002/00 ,  A01G025/00 ,  A01G027/00 ,  F04B049/02

CPC classification number: F15C5/00 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2201/054 ,  F03G7/06 ,  F04B17/00 ,  F04B43/043 ,  F15B2015/208 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0368

Abstract: A microfluidic device adapted for use with a power source is disclosed. The device includes a substrate and a heater member. The substrate and heater member form a first portion. A second portion is formed adjacent to the first portion. The second portion includes a high activating power polymer portion, at least one resin layer and a shield member. The second portion is selectively shaped to form a thermal expansion portion. A diaphragm member encapsulates the thermal expansion portion so that when power is applied to the heater portion, the high activating power polymer expands against the diaphragm member, causing the diaphragm member to deflect. This device is adapted for use as a microactuator or a blocking microvalve.

Abstract translation: 公开了一种适用于电源的微流体装置。 该装置包括基板和加热器构件。 衬底和加热器构件形成第一部分。 第二部分与第一部分相邻地形成。 第二部分包括高激活力聚合物部分，至少一个树脂层和屏蔽部件。 第二部分被选择成形以形成热膨胀部分。 隔膜构件封装热膨胀部分，使得当向加热器部分施加电力时，高启动力聚合物抵靠隔膜构件膨胀，导致隔膜构件偏转。 该装置适用于微致动器或阻塞微型阀。