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45 条记录 (耗时 0.015 秒)

    Ion source device
    31.
    发明授权
    Ion source device 失效
    离子源装置

    公开(公告)号：US5296713A

    公开(公告)日：1994-03-22

    申请号：US7786

    申请日：1993-01-22

    申请人： Hisato Tanaka

    发明人： Hisato Tanaka

    IPC分类号： H01J37/067 ,  H01J27/04 ,  H01J37/08 ,  H01J37/15 ,  H01J37/317 ,  H01L21/265 ,  H01J3/02

    CPC分类号： H01J27/04 ,  H01J2237/31701

    摘要： An ion source device includes an electron generating chamber detachably combined with an electron attraction electrode and an ion generating chamber through insulating members. Hooks are projected from both sides of the electron generating chamber. A holder plate is arranged under the ion generating chamber with an insulating member interposed between them. A fixing member is arranged under the holder plate. The fixing member includes a pusher supported by coned disc springs and this pusher of the fixing member is fitted into a recess on the underside of the holder plate and struck against the top of the recess. A pair of holder members are arranged along both sides of the device. The holder members are detachably engaged with the hooks of the electron generating chamber at the upper portion thereof and also detachably engaged with the fixing member at the lower portion thereof. The components ranging from the electron generating chamber to the holder plate are held and fixed between the hooks of the electron generating chamber and the pusher of the fixing member through the holder members.

    摘要翻译： 离子源装置包括通过绝缘构件与电子吸引电极和离子产生室可拆卸地组合的电子发生室。 钩从电子发生室的两侧突出。 在离子产生室下方设置有夹持板，其间插入绝缘构件。 固定构件设置在保持板下方。 固定构件包括由锥形盘弹簧支撑的推动器，并且固定构件的推动器装配到保持器板的下侧上的凹部中并撞击凹部的顶部。 一对保持器构件沿着装置的两侧布置。 保持器构件在其上部与电子发生室的钩可拆卸地接合，并且在其下部可拆卸地与固定构件接合。 从电子发生室到保持板的组件通过保持件保持和固定在电子发生室的钩和固定构件的推动器之间。

    Electron gun for electron irradiation equipment
    34.
    发明授权
    Electron gun for electron irradiation equipment 失效
    电子辐射设备电子枪

    公开(公告)号：US3857055A

    公开(公告)日：1974-12-24

    申请号：US36118073

    申请日：1973-05-17

    申请人： AKASHI SEISAKUSHO KK

    发明人： SHIRAI S ,  UCHIDA H

    IPC分类号： H01J37/067 ,  G01N23/225 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J1/00

    CPC分类号： H01J37/065

    摘要： An electron gun for use in electron irradiation equipment. The gun comprises a cartridge including a Wehnelt electrode and a filament with two plug electrodes mounted on an insulating plate. The filament is mounted between the Wehnelt electrode and a conductive plate by two fasteners and can be adjustably aligned with respect to the Wehnelt electrode by moving the electrode with respect to the filament before the mounting is made fast. The electrical potential supply terminal has two jacks which receive the plug electrodes thereby mechanically and electrically coupling the cartridge to the potential supply and the Wehnelt electrode receives its potential through a resilient contact on the potential supply terminal.

    摘要翻译： 用于电子照射设备的电子枪。 该枪包括一个包括Wehnelt电极的盒和一个安装在绝缘板上的两个插头电极的灯丝。 灯丝通过两个紧固件安装在Wehnelt电极和导电板之间，并且可以在安装快速之前通过相对于灯丝移动电极而相对于Wehnelt电极可调节地对准。 电位供应端子具有接收插塞电极的两个插孔，从而将盒机械地电耦合到电源，并且Wehnelt电极通过电位供应端子上的弹性接触件接收其电位。

    Filament positioning system and filament positioning method
    36.
    发明授权
    Filament positioning system and filament positioning method 有权

    公开(公告)号：US10607805B2

    公开(公告)日：2020-03-31

    申请号：US15834152

    申请日：2017-12-07

    申请人： NATIONAL CENTER FOR NANOSCIENCE AND TECHNOLOGY, CHINA

    发明人： Xixue Hu ,  Hongbo Guo ,  Dongliang Wang ,  Yaling Gan ,  Xiaohui Xu

    IPC分类号： H04N9/47 ,  H04N7/18 ,  H01J37/067 ,  G06T7/73 ,  H01J37/244

    摘要： Disclosed are a filament positioning system and a filament positioning method. The filament positioning system includes a bottom plate, a first positioning regulating mechanism and a second positioning regulating mechanism, wherein the first positioning regulating mechanism is configured to conduct positioning regulation of a position of a filament seat on the bottom plate, so that filament seats of different models can be fixed to the bottom plate, and the second positioning regulating mechanism is configured to conduct positioning regulation on the filament; and a detection module configured to collect and display position information of a filament tip and the filament seat, wherein the first positioning regulating mechanism and the second positioning regulating mechanism correspondingly regulate positions of the filament seat and the filament tip according to the position information.

    Electron source architecture for a scanning electron microscopy system
    37.
    发明授权
    Electron source architecture for a scanning electron microscopy system 有权

    公开(公告)号：US10388489B2

    公开(公告)日：2019-08-20

    申请号：US15887861

    申请日：2018-02-02

    申请人： KLA-Tencor Corporation

    发明人： Mohammed Tahmassebpur

    IPC分类号： H01J37/06 ,  H01J37/063 ,  H01J37/065 ,  H01J37/244 ,  H01J37/28 ,  H01J37/147 ,  H01J37/09 ,  H01J37/073 ,  H01J37/317 ,  H01J37/067 ,  H01J37/26 ,  H01J37/30

    摘要： A scanning electron microscopy (SEM) system includes a plurality of electron-optical columns and a plurality of electron beam sources. The electron beam sources include an emitter including one or more emitter tips configured to generate one or more electron beams of a plurality of electron beams. The electron beam sources include a stack of one or more positioners configured to adjust a position of the emitter based on one or more measurements of the electron beam generated by the emitter. The emitter is configured to scan the one or more electron beams across an area surrounding a bore of an electron-optical column of the plurality of electron-optical columns. The electron beam source array includes a carrier plate and a source tower. The source tower is configured to adjust a position of the plurality of electron beam sources relative to a position of the plurality of electron-optical columns.

    Automatic probe replacement in a scanning probe microscope
    39.
    发明授权
    Automatic probe replacement in a scanning probe microscope 失效
    在扫描探针显微镜中自动探针更换

    公开(公告)号：US6093930A

    公开(公告)日：2000-07-25

    申请号：US54013

    申请日：1998-04-02

    申请人： James Edward Boyette, Jr. ,  James Michael Hammond ,  Salvatore R. Riggio, Jr. ,  Michael Servedio

    发明人： James Edward Boyette, Jr. ,  James Michael Hammond ,  Salvatore R. Riggio, Jr. ,  Michael Servedio

    IPC分类号： G01Q70/02 ,  G01Q70/14 ,  H01J37/067

    CPC分类号： G01Q70/02 ,  B82Y35/00 ,  Y10S977/86

    摘要： A scanning probe microscope having a probe attachment fixture, to which a probe assembly is removably attached during measurements, driven in an engagement direction, and a sample stage driven in scanning directions perpendicular to the engagement direction includes a buffer with a number of buffer stations within the sample stage. When the stage is driven so that one of the buffer stations is in alignment with the attachment fixture, and when the attachment fixture is driven in the engagement direction to be in proximity to the buffer station, the probe assembly is selectively transferred in either direction between the attachment fixture and the buffer station. In a preferred embodiment, probe assemblies are transferred on transfer pallets, and a stationary magazine is provided for storing these pallets, which are transferred in either direction between the magazine and the buffer.

    摘要翻译： 一种扫描探针显微镜，其具有探针附接固定装置，探测器组件在测量期间以接合方向被驱动而可移除地附接到该探针附件，并且沿垂直于接合方向的扫描方向驱动的样本台包括具有多个缓冲站的缓冲器， 样品阶段。 当舞台被驱动使得缓冲站中的一个与附接夹具对准时，并且当附接夹具沿接合方向被驱动以接近缓冲站时，探针组件选择性地在 附件夹具和缓冲站。 在优选实施例中，探针组件被转移到转移托盘上，并且提供固定盒以存储这些托盘，这些托盘在盒和缓冲器之间沿任一方向传送。

    Device for the generation of electron beams
    40.
    发明授权
    Device for the generation of electron beams 失效
    用于产生电子束的装置

    公开(公告)号：US5623148A

    公开(公告)日：1997-04-22

    申请号：US570185

    申请日：1995-12-11

    申请人： Bernd-Dieter Wenzel ,  Wolfgang Erbkamm ,  Olaf Gawer

    发明人： Bernd-Dieter Wenzel ,  Wolfgang Erbkamm ,  Olaf Gawer

    IPC分类号： H01J37/067 ,  H01J37/075 ,  H01J37/065

    CPC分类号： H01J37/067 ,  H01J37/075

    摘要： The invention which relates to a device for the generating of electron beams with a vacuum chamber, in which a massive cathode (10) is arranged with a wire cathode (14) arranged above and a aperture anode (17) below the massive cathode (10) and whom below the aperture anode (17) focusing and/or deflecting magnet arrangements are provided which direct an electron beam (23) emitted by the massive cathode (10) and accelerated by the aperture anode (17) to a processing location (22), has the basic task to make the power of such devices variable over a large range using simple mechanical means. According to the invention the task is solved by arranging the aperture anode (17) rigidly and the massive cathode (10) and the wire cathode (14) axially movable within the vacuum chamber (1). For the movements of the massive cathode (10) and the wire cathode (14) contact means are provided which follow their movements and lead to the outside of the vacuum chamber (1). In addition for the axial movement of the massive cathode (10) a motion means is provided connected with the cathode (Figure).

    摘要翻译： 本发明涉及一种用于产生具有真空室的电子束的装置，其中大块阴极（10）布置有布置在其上的线阴极（14）和在大量阴极（10）下方的孔径阳极（17） ），并且在孔径阳极（17）下面聚焦和/或偏转磁体布置被提供，其引导由大量阴极（10）发射的电子束（23）并且被孔径阳极（17）加速到处理位置（22） ）的基本任务是使用简单的机械手段使这种装置的功率在大范围内变化。 根据本发明，通过刚性布置孔径阳极17和大量阴极10以及线阴极14在真空室1内可轴向移动来解决该任务。 对于大规模阴极（10）和线阴极（14）的移动，提供接触装置，其接触其运动并导致真空室（1）的外部。 另外，为了大量阴极（10）的轴向运动，还提供了一个与阴极连接的运动装置（图）。