Abstract:
A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
Abstract:
The invention relates to an electronic device for measuring and/or controlling a property of an analyte (100). The electronic device comprises: i) an electrode (Snsr) forming an interface with the analyte (100) in which the electrode (Snsr) is immersed in operational use, the interface having an interface temperature (T), and ii) a resistive heater (Htr) being thermally and capacitively coupled to the electrode (Snsr), the resistive heater (Htr) being configured for setting the interface temperature (T) by controlling a current through the resistive heater (Htr). The resistive heater (Htr) is provided with signal integrity protection for reducing the capacitive charging of the electrode (Snsr) by the resistive heater (Htr) if the current through the resistive heater (Htr) is modulated. The invention further relates to an electrochemical sensor for determining a charged particle concentration in the analyte (100) using the thermo-potentiometric principle, the electrochemical sensor comprising such electronic device. The invention also relates to an RFID tag and a semiconductor device comprising such electrochemical sensor. The effect of the feature of the invention is that the capacitive charging effect between the resistive heater and the electrode is reduced by the signal integrity protection.
Abstract:
A capacitive sensor for detecting the presence of a substance includes a plurality of upstanding conductive pillars arranged within a first layer of the sensor, a first electrode connected to a first group of the pillars, a second electrode connected to a second, different group of the pillars, and a dielectric material arranged adjacent the pillars, for altering the capacitance of the sensor in response to the presence of said substance.
Abstract:
Disclosed is a semiconductor device comprising a stack of patterned metal layers (12) separated by dielectric layers (14), said stack comprising a first conductive support structure (20) and a second conductive support structure (21) and a cavity (42) in which an inertial mass element (22) comprising at least one metal portion is conductively coupled to the first support structure and the second support structure by respective conductive connection portions (24), at least one of said conductive connection portions being designed to break upon the inertial mass element being exposed to an acceleration force exceeding a threshold defined by the dimensions of the conductive connection portions. A method of manufacturing such a semiconductor device is also disclosed.
Abstract:
A detector device comprises a substrate (50), a source region (S) and a drain region (D), and a channel region (65) between the source and drain regions. A nanopore (54) passes through the channel region, and connects fluid chambers (56,58) on opposite sides of the substrate. A voltage bias is provided between the fluid chambers, the source and drain regions and a charge flow between the source and drain regions is sensed. The device uses a nanopore for the confinement of a sample under test (for example nucleotides) close to a sensor. The size of the sensor can be made similar to the spacing of adjacent nucleotides in a DNA strand. In this way, the disadvantages of PCR based techniques for DNA sequencing are avoided, and single nucleotide resolution can be attained.
Abstract:
The invention relates to an electronic device for measuring and/or controlling a property of an analyte (100). The electronic device comprises: i) an electrode (Snsr) forming an interface with the analyte (100) in which the electrode (Snsr) is immersed in operational use, the interface having an interface temperature (T), and ii) a resistive heater (Htr) being thermally and capacitively coupled to the electrode (Snsr), the resistive heater (Htr) being configured for setting the interface temperature (T) by controlling a current through the resistive heater (Htr). The resistive heater (Htr) is provided with signal integrity protection for reducing the capacitive charging of the electrode (Snsr) by the resistive heater (Htr) if the current through the resistive heater (Htr) is modulated. The invention further relates to an electrochemical sensor for determining a charged particle concentration in the analyte (100) using the thermo-potentiometric principle, the electrochemical sensor comprising such electronic device. The invention also relates to an RFID tag and a semiconductor device comprising such electrochemical sensor. The effect of the feature of the invention is that the capacitive charging effect between the resistive heater and the electrode is reduced by the signal integrity protection.
Abstract:
A capacitive sensor for detecting the presence of a substance includes a plurality of upstanding conductive pillars arranged within a first layer of the sensor, a first electrode connected to a first group of the pillars, a second electrode connected to a second, different group of the pillars, and a dielectric material arranged adjacent the pillars, for altering the capacitance of the sensor in response to the presence of said substance.
Abstract:
The present invention relates to a sensor comprising a substrate (10) carrying a field effect transistor (30) having a gate electrode (32), the sensor further comprising a measurement electrode (36) spatially separated from the gate electrode; and a reference electrode (40), said measurement electrode being in configurable conductive contact with said gate electrode, the sensor further comprising a charge storage element (60) comprising a first electrode connected to a node (38) between the measurement electrode and the gate electrode; and a second electrode configurably connected to a known potential source (80). The present invention further relates to a method of performing a measurement with such a sensor.
Abstract:
Disclosed is an integrated circuit comprising a substrate (10) carrying a plurality of circuit elements; a metallization stack (12, 14, 16) interconnecting said circuit elements, said metallization stack comprising a patterned upper metallization layer comprising a first metal portion (20) and a second metal portion (21); a passivation stack (24, 26, 28) covering the metallization stack; a gas sensor including a sensing material portion (32, 74) on the passivation stack; a first conductive portion (38) extending through the passivation stack connecting a first region of the sensing material portion to the first metal portion; and a second conductive portion (40) extending through the passivation stack connecting a second region of the sensing material portion to the second metal portion. A method of manufacturing such an IC is also disclosed.
Abstract:
A sensor module (130) for a catheter (110), the sensor module (130) comprising a biofilm detection unit (131) adapted for detecting a characteristic of a biofilm (132) and electric circuitry (135, 800) for providing an output signal indicative of a result of the detection.