摘要:
A plating apparatus can form a bump having a flat top or can form a metal film having a good in-plane uniformity even when the plating of a plating object (substrate) is carried out under high-current density conditions. The plating apparatus includes a plating tank for holding a plating solution; an anode to be immersed in the plating solution in the plating tank; a holder for holding a plating object and disposing the plating object at a position opposite the anode; a paddle, disposed between the anode and the plating object held by the holder, which reciprocates parallel to the plating object to stir the plating solution; and a control section for controlling a paddle drive section which drives the paddle. The control section controls the paddle drive section so that the paddle moves at a velocity whose average absolute value is 70 cm/sec to 100 cm/sec.
摘要:
The present invention provides a control power supply capable of stably operating to output a desired voltage as electric power, even when the input voltage thereof varies over a wide range. A power supply includes a rectification circuit 2 for rectifying the AC output from a power generator 1 and a non-insulation type DC/DC converter 3 for stepping down the DC output from the rectification circuit 2. A self-excited oscillation type converter (RCC) 4 is provided at the following stage of the non-insulation type DC/DC converter 3. The input voltage which has been stepped down by the converter 3 is input to the primary side of the RCC 4, and the RCC 4 stably operates with the input voltage which varies largely to supply, from its secondary side, a power supply to an ECU 5 or the like.
摘要:
A choke valve is controlled finely suited to the running state of an engine. A throttle valve 8 and a choke valve 9 are provided in series on an intake pipe 6, and the opening degree of the choke valve 9 is controlled by a stepping motor. The choke valve opening degree upon start of engine (start opening degree) is determined depending on the engine temperature. The stepping motor 11 is initialized at the fully closed side of the choke valve 9 when the power source for starting the engine is turned on. The start opening degree of the choke valve is judged to be closer to the fully closed side or fully opened side, and the stepping motor 11 is initialized at the fully closed side if judged to be close to the fully closed side, and at the fully opened side if at the fully opened side.
摘要:
A choke valve is controlled finely suited to the running state of an engine. A throttle valve 8 and a choke valve 9 are provided in series on an intake pipe 6, and the opening degree of the choke valve 9 is controlled by a stepping motor 11. A choke valve opening degree upon start of engine (start opening degree) is determined depending on the engine temperature. The start opening degree judging unit 27 judges whether the start opening degree is closer to the fully closed side or fully opened side. The motor initializing unit 28 initializes the stepping motor 11 at the fully closed side or the fully opened side if the start opening degree is at the fully closed side or the fully opened side, respectively. After choke release, a driving signal in a specified number of steps is issued periodically.
摘要:
The present invention relates to a polishing apparatus for polishing a workpiece, such as a semiconductor wafer, to a flat mirror finish. The polishing apparatus comprises a polishing table having a polishing surface, and a top ring, and the workpiece is interposed between the polishing table and the top ring, and pressed at a predetermined pressure to polish the workpiece. The polishing apparatus comprises at least two dressing units for dressing the polishing surface by being brought into contact with the ppolishing surface, which is a surface of a polishing cloth.
摘要:
The present invention is characterized by the provision of a traveling course setting system for a moving vehicle comprising a light reflector that is moved along the peripheral outline of the work area for reflecting light in the direction of incidence, and a light beam generator mounted on the moving vehicle for circumferentially scanning a light beam around the moving vehicle. The system detects the distance between the moving light reflector and the moving vehicle and the azimuth of the moving light reflector relative to the moving vehicle on the basis of the light reflected from the moving light reflector, calculates the position of the moving light reflector based on the distance and azimuth with respect to the moving vehicle which are detected while the moving vehicle is stopped, stores the calculated position as a locus thereof, and sets a traveling course in the work area recognized on the basis of the stored locus of the moving light reflector. The travel locus of the light reflector, or the outline of the work area, can be recognized and a traveling course for the moving vehicle can be set in the work area while the vehicle is stopped.
摘要:
A steering control system for a moving vehicle causes the vehicle to travel along a predetermined traveling course in a region in which a predetermined working operation, such as grass cutting or the like, is to be performed by the vehicle as it moves along the traveling course. An obstacle sensor is mounted on the vehicle, and when the sensor detects presence of an obstacle on the predetermined traveling course, the steering control system operates to cause the vehicle to leave the predetermined traveling course and to detour around the obstacle while maintaining a substantially constant distance between the obstacle and the moving vehicle. The control system is also operative to determine whether the obstacle is stationary or movable and, upon completion of the vehicle travel along the predetermined course, is operative to determine whether a movable obstacle has been removed from the predetermined course and, if so, causes the vehicle to perform its working operation in that portion of the region in which the working operation was not previously performed due to its detour around the obstacle.
摘要:
A plating apparatus can form a bump having a flat top or can form a metal film having a good in-plane uniformity even when the plating of a plating object (substrate) is carried out under high-current density conditions. The plating apparatus includes a plating tank for holding a plating solution; an anode to be immersed in the plating solution in the plating tank; a holder for holding a plating object and disposing the plating object at a position opposite the anode; a paddle, disposed between the anode and the plating object held by the holder, which reciprocates parallel to the plating object to stir the plating solution; and a control section for controlling a paddle drive section which drives the paddle. The control section controls the paddle drive section so that the paddle moves at a velocity whose average absolute value is 70 cm/sec to 100 cm/sec.
摘要:
In a capacitor-compensation-type generator having a rotor wound with a field winding, a stator wound with an output winding adapted to cross flux generated by the field winding to output AC power, and an internal combustion engine that drives the rotor to rotate relative to the stator, there are equipped with an actuator that changes the engine speed and an actuator controller that controls operation of the actuator in accordance with a constant voltage operation mode in which the engine speed is controlled to a desired speed such that a detected output voltage becomes a desired voltage, or a constant frequency operation mode in which the detected engine speed is controlled to a predetermined speed such that frequency of AC power outputted from the output winding becomes a desired frequency, thereby enabling to output AC power at constant voltage or frequency.
摘要:
It is an object of the invention to provide the operability of an engine power generator having a remote controller. A starting switch 90 of a remote controller 9 and a starting switch on a power generator body's side can be operated in parallel. A stopping switch 91 of the remote controller 9 and a stopping switch on the body's side can be operated in parallel. The stopping switch 91 and an oil level switch 26 are connected to each other in parallel. The starting switch 90 and the stopping switch 91 can be operated when a combination switch 12 is in ON position. An engine 2 can be started and stopped by switching operation on the body's side in parallel to remote control operation.