Microbellows actuator
    42.
    发明授权
    Microbellows actuator 有权
    微型致动器

    公开(公告)号:US6146543A

    公开(公告)日:2000-11-14

    申请号:US427513

    申请日:1999-10-26

    CPC分类号: B81B3/007 B81B2201/031

    摘要: A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed. The microbellows membrane is manufactured by alternating deposition of structural layers and sacrificial layers on a substrate. The structural layers can be made of silicon nitride and the sacrificial layers can be made of polysilicon. The substrate is etched from the back to form an opening exposing the sacrificial layers, and then the membrane is released by etching away the sacrificial layers.

    摘要翻译: 与具有相似尺寸的单层平膜相比,微加工的多层微波导式致动器能够提供更大的偏转。 公开了提高微量膜的强度的锚结构。 使用表征装置来测量微波膜的性能。 还公开了具有电阻加热器芯片的热气动执行器。 微波膜是通过在衬底上交替沉积结构层和牺牲层来制造的。 结构层可以由氮化硅制成,并且牺牲层可以由多晶硅制成。 从背面蚀刻衬底以形成暴露牺牲层的开口,然后通过蚀刻去除牺牲层来释放膜。

    Electromagnetically actuated micromachined flap
    44.
    发明授权
    Electromagnetically actuated micromachined flap 失效
    电磁致动微机械瓣

    公开(公告)号:US5629918A

    公开(公告)日:1997-05-13

    申请号:US377018

    申请日:1995-01-20

    IPC分类号: B44C1/22

    CPC分类号: H02K99/00

    摘要: A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

    摘要翻译: 表面微加工微磁致动器设置有能够使用磁力作为致动力来实现高于100微米的大偏转的挡板。 翼片通过一个或多个梁耦合到基底并且在基底上悬臂。 坡度合金层或磁性线圈设置在翼片上,使得当翼片被放置在磁场中时,可以使其选择性地相互作用并旋转出磁致动器的平面。 通过蚀刻设置在翼片和基底之间的下面的牺牲层,将悬臂翼片从下面的基底释放。 蚀刻出来的和现在的悬臂翼片被磁力驱动,以保持其与基底不接触,同时刚刚蚀刻的装置被干燥以获得高的释放产率。

    NEUROMODULATION SYSTEMS AND METHODS OF USING SAME

    公开(公告)号:US20180185648A1

    公开(公告)日:2018-07-05

    申请号:US15713456

    申请日:2017-09-22

    摘要: Neuromodulation systems are described. An example neuromodulation system includes a controller wirelessly communicatively coupled to a host computer, a signal generator communicatively coupled to the controller, and a plurality of electrodes communicatively coupled to the signal generator. The controller, in conjunction with the signal generator and the at least one electrode are configured to deliver a stimulation to a mammal based on an instruction received from the host computer. The stimulation is configured to induce voluntary movement or restore function in the mammal.

    NEUROMODULATION SYSTEMS AND METHODS OF USING SAME
    49.
    发明申请
    NEUROMODULATION SYSTEMS AND METHODS OF USING SAME 审中-公开
    神经网络系统及其使用方法

    公开(公告)号:US20150217120A1

    公开(公告)日:2015-08-06

    申请号:US14596118

    申请日:2015-01-13

    IPC分类号: A61N1/372 A61N1/36

    摘要: Neuromodulation systems are described. An example neuromodulation system includes a controller wirelessly communicatively coupled to a host computer, a signal generator communicatively coupled to the controller, and a plurality of electrodes communicatively coupled to the signal generator. The controller, in conjunction with the signal generator and the at least one electrode are configured to deliver a stimulation to a mammal based on an instruction received from the host computer. The stimulation is configured to induce voluntary movement or restore function in the mammal.

    摘要翻译: 描述神经调节系统。 示例性神经调节系统包括无线通信地耦合到主计算机的控制器,通信地耦合到控制器的信号发生器,以及通信地耦合到信号发生器的多个电极。 控制器结合信号发生器和至少一个电极被配置为基于从主计算机接收的指令向哺乳动物传送刺激。 刺激被配置为诱导哺乳动物的自愿运动或恢复功能。