公开(公告)号：US08226903B2

公开(公告)日：2012-07-24

申请号：US13187039

申请日：2011-07-20

Applicant: Peter L. Kellerman ,  Frederick Carlson ,  Frank Sinclair

Inventor： Peter L. Kellerman ,  Frederick Carlson ,  Frank Sinclair

IPC: B01D11/02

CPC classification number: C30B11/003 ,  C30B11/001 ,  C30B28/06 ,  C30B29/02 ,  C30B29/06 ,  C30B29/08 ,  C30B29/403 ,  C30B29/64 ,  H01L31/182 ,  Y02E10/546 ,  Y02P70/521 ,  Y10S588/90 ,  Y10T117/1024 ,  Y10T117/1092

Abstract: A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.

Abstract translation: 将材料的熔体冷却，并在熔体中形成一片材料。 将该片材运输，切割成至少一个片段，并在冷却室中冷却。 该材料可以是Si，Si和Ge，Ga或GaN。 冷却配置为防止应力或应变。 在一种情况下，冷却室具有气体冷却。

公开(公告)号：US08049168B2

公开(公告)日：2011-11-01

申请号：US12618115

申请日：2009-11-13

Applicant: Frank Sinclair

Inventor： Frank Sinclair

IPC: H01J49/00

CPC classification number: H01J49/025 ,  H01J49/48

Abstract: This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.

Abstract translation: 该测量装置用于确定带电粒子的能量。 测量装置包括两个段和限定两个阈值或间隙的板。 作为带电粒子的电流通过这些阈值或间隙被测量。 然后测量装置计算带电粒子的能量。 能量污染也可以确定。

公开(公告)号：US20110240877A1

公开(公告)日：2011-10-06

申请号：US12754318

申请日：2010-04-05

Applicant: Victor Benveniste ,  Bon-Woong Koo ,  Shardul Patel ,  Frank Sinclair

Inventor： Victor Benveniste ,  Bon-Woong Koo ,  Shardul Patel ,  Frank Sinclair

IPC: H01J27/08 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J37/3171 ,  H01J2237/002

Abstract: An ion source is provided that utilizes a cooling plate and a gap interface to control the temperature of an ion source chamber. The gap interface is defined between the cooling plate and a wall of the chamber. A coolant gas is supplied to the interface at a given pressure where the pressure determines thermal conductivity from the cooling plate to the chamber to control the temperature of the interior of the chamber.

Abstract translation: 提供了一种利用冷却板和间隙界面来控制离子源室的温度的离子源。 间隙界面限定在冷却板和腔室的壁之间。 在给定压力下将冷却剂气体供应到界面，其中压力确定从冷却板到室的导热性，以控制室内部的温度。

公开(公告)号：US20110124186A1

公开(公告)日：2011-05-26

申请号：US12947078

申请日：2010-11-16

Applicant: Anthony Renau ,  Ludovic Godet ,  Timothy J. Miller ,  Joseph C. Olson ,  Vikram Singh ,  James Buonodono ,  Frank Sinclair ,  Deepak A. Ramappa ,  Russell Low ,  Atul Gupta ,  Kevin M. Daniels

Inventor： Anthony Renau ,  Ludovic Godet ,  Timothy J. Miller ,  Joseph C. Olson ,  Vikram Singh ,  James Buonodono ,  Frank Sinclair ,  Deepak A. Ramappa ,  Russell Low ,  Atul Gupta ,  Kevin M. Daniels

IPC: H01L21/265 ,  G21K5/10

CPC classification number: B01J19/081 ,  H01J37/3171 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/32623 ,  H01J2237/0453 ,  H01J2237/1205 ,  H01L21/2236 ,  H01L31/022425 ,  H01L31/068 ,  H01L31/08 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: A plasma processing apparatus comprises a plasma source configured to produce a plasma in a plasma chamber, such that the plasma contains ions for implantation into a workpiece. The apparatus also includes a focusing plate arrangement having an aperture arrangement configured to modify a shape of a plasma sheath of the plasma proximate the focusing plate such that ions exiting an aperture of the aperture arrangement define focused ions. The apparatus further includes a processing chamber containing a workpiece spaced from the focusing plate such that a stationary implant region of the focused ions at the workpiece is substantially narrower that the aperture. The apparatus is configured to create a plurality of patterned areas in the workpiece by scanning the workpiece during ion implantation.

Abstract translation: 等离子体处理装置包括等离子体源，其被配置为在等离子体室中产生等离子体，使得等离子体包含用于注入工件的离子。 该装置还包括聚焦板装置，该聚焦板装置具有孔结构，其被配置为修改离开聚焦板附近的等离子体鞘的等离子体鞘的形状，使得离开孔结构的孔的离子限定聚焦离子。 该设备还包括处理室，其包含与聚焦板间隔开的工件，使得在工件处的聚焦离子的固定注入区域基本上比孔更窄。 该装置被配置为通过在离子注入期间扫描工件来在工件中产生多个图案化区域。

公开(公告)号：US20110117234A1

公开(公告)日：2011-05-19

申请号：US12948248

申请日：2010-11-17

Applicant: Peter L. Kellerman ,  Frank Sinclair

Inventor： Peter L. Kellerman ,  Frank Sinclair

IPC: C30B28/10 ,  B28B11/14

CPC classification number: H01L31/02 ,  C30B15/06 ,  C30B15/14 ,  C30B15/30 ,  C30B28/10 ,  C30B29/06

Abstract: This sheet production apparatus comprises a vessel defining a channel configured to hold a melt. The melt is configured to flow from a first point to a second point of the channel. A cooling plate is disposed proximate the melt and is configured to form a sheet on the melt. A spillway is disposed at the second point of the channel. This spillway is configured to separate the sheet from the melt.

Abstract translation: 该片材生产设备包括限定被配置为保持熔体的通道的容器。 熔体构造成从通道的第一点流到第二点。 冷却板靠近熔体设置并且被配置成在熔体上形成片材。 溢流道设置在通道的第二点。 该溢流道构造成将片材与熔体分离。

公开(公告)号：US20110003024A1

公开(公告)日：2011-01-06

申请号：US12877753

申请日：2010-09-08

Applicant: Peter L. KELLERMAN ,  Frank Sinclair ,  Frederick Carlson

Inventor： Peter L. KELLERMAN ,  Frank Sinclair ,  Frederick Carlson

IPC: B29D7/01

CPC classification number: C30B11/003 ,  C30B11/001 ,  C30B28/06 ,  C30B29/06 ,  C30B29/60

Abstract: A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.

Abstract translation: 可以由熔体形成无位错的片材。 使用冷却板在材料的熔体上形成具有第一宽度的材料片。 这张纸有位错。 片材相对于冷却板输送，并且位错迁移到片材的边缘。 片材的第一宽度通过冷却板增加到第二宽度。 片材在第二个宽度上不具有位错。 在一种情况下，冷却板可以具有两种不同宽度的形状。 冷却板可以具有在不同温度下操作的段，以在另一种情况下增加片材的宽度。 片材可以相对于冷却板拉动或流动。

公开(公告)号：US20100155593A1

公开(公告)日：2010-06-24

申请号：US12618115

申请日：2009-11-13

Applicant: Frank Sinclair

Inventor： Frank Sinclair

IPC: H01J49/04

CPC classification number: H01J49/025 ,  H01J49/48

Abstract: This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.

Abstract translation: 该测量装置用于确定带电粒子的能量。 测量装置包括两个段和限定两个阈值或间隙的板。 作为带电粒子的电流通过这些阈值或间隙被测量。 然后测量装置计算带电粒子的能量。 能量污染也可以确定。

公开(公告)号：US07700925B2

公开(公告)日：2010-04-20

申请号：US11966312

申请日：2007-12-28

Applicant: Svetlana Radovanov ,  Bon Woong Koo ,  Frank Sinclair ,  Victor M. Benveniste

Inventor： Svetlana Radovanov ,  Bon Woong Koo ,  Frank Sinclair ,  Victor M. Benveniste

IPC: H01J37/08

CPC classification number: H01J27/08 ,  H01J27/16 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/061 ,  H01J2237/0817 ,  H01J2237/082

Abstract: Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.

Abstract translation: 公开了提供多模离子源的技术。 在一个特定的示例性实施例中，可以将技术实现为用于离子注入的装置，该装置包括具有热阴极和高频等离子体发生器的离子源，其中离子源具有多种操作模式。

公开(公告)号：US20090315220A1

公开(公告)日：2009-12-24

申请号：US12487058

申请日：2009-06-18

Applicant: Peter L. Kellerman ,  Frank Sinclair ,  Frederick Carlson

Inventor： Peter L. Kellerman ,  Frank Sinclair ,  Frederick Carlson

IPC: B29C39/02 ,  B67D5/54 ,  B22D29/00

CPC classification number: B22D39/02 ,  C30B11/001 ,  C30B11/003 ,  C30B29/02 ,  C30B29/06 ,  C30B29/08 ,  C30B29/403 ,  C30B29/60

Abstract: An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.

Abstract translation: 公开了一种用于泵送熔体的装置。 泵具有限定被配置为保持熔体的腔的腔室。 气体源与腔室流体连通。 第一阀在腔室和第一管之间，第二阀在腔室和第二管之间。 在一个实施例中，阀可以是止回阀。

公开(公告)号：US20090302281A1

公开(公告)日：2009-12-10

申请号：US12478513

申请日：2009-06-04

Applicant: Peter L. Kellerman ,  Frank Sinclair ,  Frederick Carlson ,  Nicholas P.T. Bateman ,  Robert J. Mitchell

Inventor： Peter L. Kellerman ,  Frank Sinclair ,  Frederick Carlson ,  Nicholas P.T. Bateman ,  Robert J. Mitchell

IPC: H01B1/02 ,  C01B33/02 ,  B29C55/02 ,  B29C61/00

CPC classification number: C30B11/003 ,  C30B11/001 ,  C30B28/06 ,  C30B29/06 ,  C30B29/60

Abstract: A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.

Abstract translation: 可以由熔体形成无位错的片材。 使用冷却板在材料的熔体上形成具有第一宽度的材料片。 这张纸有位错。 片材相对于冷却板输送，并且位错迁移到片材的边缘。 片材的第一宽度通过冷却板增加到第二宽度。 片材在第二个宽度上不具有位错。 在一种情况下，冷却板可以具有两种不同宽度的形状。 冷却板可以具有在不同温度下操作的段，以在另一种情况下增加片材的宽度。 片材可以相对于冷却板拉动或流动。