公开(公告)号：US20120210792A1

公开(公告)日：2012-08-23

申请号：US13503146

申请日：2010-10-20

申请人： Philippe Robert ,  Sébastien Hentz

发明人： Philippe Robert ,  Sébastien Hentz

IPC分类号： G01P15/10 ,  H01L41/22 ,  B05D5/12

CPC分类号： G01P15/0802 ,  G01P15/123 ,  G01P2015/0817

摘要： An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured.

摘要翻译： 一种面内MEMS或NEMS检测装置，用于测量沿着包括相对于衬底悬挂的地震质量的方向引导的位移，所述抗震质量可围绕垂直于衬底平面的轴线枢转，至少一个压电应变仪机械 连接到抗震块和基底，其中压阻计的厚度低于抗震块的厚度，并且其中压阻应变计的轴线与包含枢转轴线的平面和地震的重心正交 质量和平面垂直于要测量的位移的方向。

公开(公告)号：US08156807B2

公开(公告)日：2012-04-17

申请号：US12214627

申请日：2008-06-20

申请人： Philippe Robert

发明人： Philippe Robert

IPC分类号： G01P15/10

CPC分类号： B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/0271 ,  G01C19/574 ,  G01C19/5755 ,  G01C19/5769 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  H03H9/02259

摘要： This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection means comprising at least one suspended beam type strain gauge made from piezo-resistive material, in which each strain gauge has a common plane with the resonator, and is connected to this resonator at a point situated outside of this at least one embedded portion to increase the stress observed by this strain gauge.

摘要翻译： 本发明涉及一种谐振装置，其在使用体上的表面技术制成的压电平面中具有检测功能，该谐振装置包括通过至少一个嵌入部分连接到该体的谐振器，激励该谐振器的装置和包括至少一个 由压电材料制成的悬挂梁式应变计，其中每个应变计具有与谐振器的公共平面，并且在位于该至少一个嵌入部分外部的点处连接到该谐振器，以增加由该观测到的应力 应变计。

公开(公告)号：US20100053199A1

公开(公告)日：2010-03-04

申请号：US12448447

申请日：2007-12-17

申请人： Philippe Robert ,  Guylaine Le Jan ,  Jürgen Stauder

发明人： Philippe Robert ,  Guylaine Le Jan ,  Jürgen Stauder

IPC分类号： G09G5/02 ,  G09G5/00

CPC分类号： H04N9/68 ,  H04N9/646

摘要： The invention relates to a processing method of a sequence of images comprising image points each of which is associated with a colour component. The method comprises a processing step of at least one image of the sequence from reference images, the processing step being adapted to reduce the flicker effects. According to the invention, the reference images are selected according to the following stages: calculate, for at least one image part of each of the images of the sequence, the mean value of the colour component, the mean value being associated with the image, and a first selection step to select from the mean values a first series of reference images forming a subset of the sequence.

摘要翻译： 本发明涉及包括与颜色分量相关联的图像点的图像序列的处理方法。 该方法包括来自参考图像的序列的至少一个图像的处理步骤，该处理步骤适于减少闪烁效应。 根据本发明，根据以下阶段选择参考图像：对于序列的每个图像的至少一个图像部分计算颜色分量的平均值，与图像相关联的平均值， 以及第一选择步骤，从平均值中选择形成序列的子集的第一系列参考图像。

公开(公告)号：US07648859B2

公开(公告)日：2010-01-19

申请号：US10582343

申请日：2004-12-14

申请人： Philippe Robert

发明人： Philippe Robert

IPC分类号： H01L21/00 ,  H01L21/311 ,  H01L23/04

CPC分类号： B81C1/00293 ,  B81C2203/0145 ,  G01P1/023

摘要： The microcavity is delineated by a cover, comprising a first layer, in which at least one hole is formed. A second layer hermetically seals the microcavity. A third layer is arranged between the first and the second layer. An additional microcavity, communicating with the hole, is arranged between the first and the third layer. At least one additional hole, adjacent to the additional microcavity, formed in the third layer and offset with respect to the hole, is sealed by the second layer, after sacrificial layers have been removed through the additional hole. The microcomponent includes at least one mechanically stressed layer arranged above the first layer.

摘要翻译： 微腔由覆盖物描绘，包括第一层，其中形成有至少一个孔。 第二层气密密封微腔。 第三层布置在第一层和第二层之间。 在第一和第三层之间布置了与孔连通的另外的微腔。 在通过附加孔去除牺牲层之后，在第三层中形成并且相对于孔偏移的至少一个附加的孔邻近附加的微腔被第二层密封。 微组件包括布置在第一层上方的至少一个机械应力层。

公开(公告)号：US20090321887A1

公开(公告)日：2009-12-31

申请号：US12488841

申请日：2009-06-22

申请人： Vincent Larrey ,  François Perruchot ,  Bernard Diem ,  Laurent Clavelier ,  Philippe Robert

发明人： Vincent Larrey ,  François Perruchot ,  Bernard Diem ,  Laurent Clavelier ,  Philippe Robert

IPC分类号： H01L21/30 ,  H01L23/58

CPC分类号： H01L29/66007 ,  B81B2201/0264 ,  B81C1/00357 ,  B81C1/00682 ,  B81C2201/019 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention relates to a method of fabricating an electromechanical structure presenting a first substrate (1) including at least one layer (1′) of monocrystalline material covered in a sacrificial layer (2) that presents a free surface, the structure presenting at least one mechanical reinforcing pillar received in said sacrificial layer, the method being characterized in that it comprises: a) making at least one well region (51, 52) in the sacrificial layer (2) by etching, at least in the entire thickness of the sacrificial layer (2), the well region defining at least one said mechanical pillar; b) depositing a first functionalization layer (4, 31) of a first material, relative to which the sacrificial layer is suitable for being etched selectively, the functionalization layer (4) filling at least one well region (51) at least partially and covering the free surface of the sacrificial layer (2) at least around the well region(s); and b′) depositing a filler layer (6, 32) of a second material different from the first material for terminating the filling of the well region(s) (5′), said filler layer (6) covering the first functionalization layer (4) at least in part around the well region(s) (5′), and planarizing the filler layer (6, 32), the pillar(s) being formed by the superposition of at least the first material and the second material in the well region(s); and releasing the electromechanical structure by removing at least partially the sacrificial layer (2). The invention also relates to an electromechanical structure obtained by the method.

摘要翻译： 本发明涉及一种制造机电结构的方法，所述机电结构呈现第一衬底（1），所述第一衬底（1）包括覆盖在呈现自由表面的牺牲层（2）中的至少一层单晶材料层（1'），所述结构呈现至少一个 所述方法的特征在于：其包括：a）至少在所述牺牲层的整个厚度中通过蚀刻在所述牺牲层（2）中制造至少一个阱区域（51,52） 层（2），所述阱区限定至少一个所述机械支柱; b）沉积第一材料的第一官能化层（4,31），所述第一材料相对于所述第一材料，所述第一材料相对于所述第一材料，所述牺牲层适于被选择性地蚀刻，所述官能化层（4）至少部分填充至少一个阱区域（51）并且覆盖 所述牺牲层（2）的至少围绕所述阱区域的自由表面; 和b'）沉积与所述第一材料不同的第二材料的填充层（6,32），以终止所述阱区域（5'）的填充，所述填充层（6）覆盖所述第一官能化层（ 4）至少部分地围绕所述阱区域（5'）周围，并且平坦化所述填充层（6,32），所述柱通过至少所述第一材料和所述第二材料的叠加形成 井区; 以及通过至少部分去除所述牺牲层（2）来释放所述机电结构。 本发明还涉及通过该方法获得的机电结构。

公开(公告)号：US20090299172A1

公开(公告)日：2009-12-03

申请号：US12308089

申请日：2007-06-06

申请人： Claire Corot ,  Marc Port ,  Philippe Robert ,  Michel Schaefer ,  Denis Le Bihan ,  Johannes M. Fröhlich

发明人： Claire Corot ,  Marc Port ,  Philippe Robert ,  Michel Schaefer ,  Denis Le Bihan ,  Johannes M. Fröhlich

IPC分类号： A61B5/055

CPC分类号： A61B5/055 ,  A61B5/415 ,  A61B5/416 ,  A61B5/418 ,  G01R33/281 ,  G01R33/5601 ,  G01R33/56341

摘要： The invention relates to a method of water diffusion imaging in magnetic resonance imaging in an area of diagnostic interest, characterized in that it comprises, in combination, the administration of a contrast product capable of generating a signal specifically in its specific location area, said location area being included in said area of interest, the application of a water diffusion imaging sequence to the whole area of interest, and the reading of the images in the area of interest, the specific signal due to the contrast product significantly and specifically modifying the signal in the specific location area relative to the signal of the whole area of interest.

摘要翻译： 本发明涉及一种在诊断感兴趣区域的磁共振成像中的水扩散成像方法，其特征在于，其组合包括能够特异地在其特定位置区域中产生信号的造影剂的施用，所述位置 包括在所述感兴趣区域中的区域，将水扩散成像序列应用于感兴趣的整个区域，以及在感兴趣区域中读取图像，由于对比度产物引起的特定信号显着地并且具体地修改信号 在相对于感兴趣的整个区域的信号的特定位置区域。

公开(公告)号：US07592739B2

公开(公告)日：2009-09-22

申请号：US10502802

申请日：2003-02-11

申请人： Philippe Robert

发明人： Philippe Robert

IPC分类号： H01L41/08

CPC分类号： H03H9/172 ,  H03H9/173 ,  H03H2009/241

摘要： A suspended film bulk acoustic micro-resonator that includes a beam made of a piezoelectric material fixed to a support and sandwiched between excitation electrodes. The resonator also includes a mechanism modifying limiting conditions of the resonator composed of the excited beam to modify the micro-resonator resonant frequency.

摘要翻译： 一种悬浮膜体声波微型谐振器，其包括由固定到支撑体上并夹在激励电极之间的压电材料制成的梁。 谐振器还包括修改由激发光束组成的谐振器的限制条件以修改微谐振器谐振频率的机构。

公开(公告)号：US20090038386A1

公开(公告)日：2009-02-12

申请号：US11917760

申请日：2006-06-15

申请人： Bernard Bavoux ,  Maxime Pauly ,  Ida Elsa Meneguz ,  Remy Pauly ,  Jean-Sebastien Danel ,  Philippe Robert

发明人： Bernard Bavoux ,  Maxime Pauly ,  Ida Elsa Meneguz ,  Remy Pauly ,  Jean-Sebastien Danel ,  Philippe Robert

IPC分类号： G01M15/08

CPC分类号： G01L19/086 ,  G01K1/024 ,  G01K13/00 ,  G01L23/10 ,  G01L23/22

摘要： A sensor structure is disclosed, notably for a harsh environment in a motor vehicle. The sensor includes a sensor body having, at one end, an element sensitive to the quantity to be measured in the harsh environment and, at another end, a circuit for connecting it, placed outside the harsh environment, physically separated from each other, connected by means for transmitting data without a connection, and between which means are provided that are permeable to data, for protecting the connecting circuit from the environment.

摘要翻译： 公开了一种传感器结构，特别是用于机动车辆中的恶劣环境。 该传感器包括传感器本体，其一端具有对于在恶劣环境中要测量的量敏感的元件，另一端具有连接它的电路，放置在恶劣环境之外，物理上彼此分离，连接 通过用于传输数据而没有连接的装置，以及提供可渗透数据的装置，用于保护连接电路免受环境影响。

公开(公告)号：US07489228B2

公开(公告)日：2009-02-10

申请号：US10561948

申请日：2004-06-30

申请人： Philippe Robert

发明人： Philippe Robert

IPC分类号： H01H37/52 ,  H01H59/00 ,  H01P1/10

CPC分类号： H01H1/0036 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2061/006

摘要： A bistable MEMS microswitch produced on a substrate and capable of electrically connecting ends of at least two conductive tracks, including a beam suspended above the surface of the substrate. The beam is embedded at its two ends and is subjected to compressive stress when it is in the non-deformed position. The beam has an electrical contact configured to produce a lateral connection with the ends of the two conductive tracks when the beam is deformed in a horizontal direction with respect to the surface of the substrate. Actuators enable the beam to be placed in a first deformed position, corresponding to a first stable state, or in a second deformed position, corresponding to a second stable state, and the electrical contact ensures connection of the ends of the two conductive tracks.

摘要翻译： 一种双稳态MEMS微型开关，其制造在基板上并且能够电连接至少两个导电轨道的端部，包括悬挂在基板表面上的梁。 梁被嵌入其两端，当其处于非变形位置时受到压应力。 光束具有电接触，其被配置为当光束相对于衬底的表面沿水平方向变形时，与两个导电轨道的端部产生横向连接。 致动器使得梁能够对应于第一稳定状态的第一变形位置或对应于第二稳定状态的第二变形位置，并且电接触确保两个导电轨道的端部的连接。

公开(公告)号：US20080245144A1

公开(公告)日：2008-10-09

申请号：US12065803

申请日：2006-09-04

申请人： Bernard Bavoux ,  Jean-Sebastien Danel ,  Philippe Robert ,  Maxime Pauly

发明人： Bernard Bavoux ,  Jean-Sebastien Danel ,  Philippe Robert ,  Maxime Pauly

IPC分类号： G01M19/02

CPC分类号： G01D21/00

摘要： A sensor structure notably for a harsh environment in a motor vehicle is disclosed. The sensor structure has a sensor body (1) having at one end an element (2) sensitive to the quantity to be measured in the harsh environment and at another end a connection circuit (3) for the latter, placed away from the harsh environment, and physically separated from one another. The sensor structure is connected by means for transmitting information by carrier current on an electrical conductor (5) of the sensor with which the sensitive element and the connection circuit are associated by wireless coupling means and between which are provided means (4) for protecting the connection circuit from the environment.

摘要翻译： 公开了一种特别用于机动车辆的恶劣环境的传感器结构。 传感器结构具有传感器主体（1），其一端具有对在恶劣环境中待测量的元件敏感的元件（2），另一端具有用于远离恶劣环境的连接电路（3） ，并且彼此物理上分离。 传感器结构通过载体电流在传感器的电导体（5）上传送信息的方式连接，传感器的感应元件和连接电路通过该导体（5）与无线耦合装置相关联，并且设置有用于保护 连接电路从环境。