Method for fabricating copper-based interconnections for semiconductor device
    41.
    发明申请
    Method for fabricating copper-based interconnections for semiconductor device 失效
    制造半导体器件铜基互连的方法

    公开(公告)号:US20060019496A1

    公开(公告)日:2006-01-26

    申请号:US11157862

    申请日:2005-06-22

    IPC分类号: H01L21/4763 H01L21/44

    CPC分类号: H01L21/2855 H01L21/76882

    摘要: Cu-based interconnections are fabricated in a semiconductor device by depositing a thin film of Cu or Cu alloy on a dielectric film by sputtering, the dielectric film having trenches and/or via holes at least one groove and being arranged on or above a substrate, and carrying out high temperature and high pressure treatment to thereby embed the Cu or Cu alloy into the trenches and/or via holes, in which the sputtering is carried out at a substrate temperature of −20° C. to 0° C. using, as a sputtering gas, a gaseous mixture containing hydrogen gas and an inert gas in a ratio in percentage of 5:95 to 20:80.

    摘要翻译: 在半导体器件中通过溅射在电介质膜上沉积Cu或Cu合金薄膜来形成Cu基互连,所述电介质膜具有至少一个沟槽和/或通孔至少一个沟槽并且布置在衬底上或上方, 进行高温高压处理,从而将Cu或Cu合金嵌入沟槽和/或通孔中,在基板温度为-20℃〜0℃下进行溅射, 作为溅射气体,含有比例为5:95至20:80的氢气和惰性气体的气体混合物。

    A1 alloy thin film for semiconductor device electrode and sputtering target to deposit A1 film by sputtering process for semiconductor device electrode
    42.
    发明授权
    A1 alloy thin film for semiconductor device electrode and sputtering target to deposit A1 film by sputtering process for semiconductor device electrode 失效
    用于半导体器件电极的Al合金薄膜和用于半导体器件电极的溅射工艺沉积Al膜的溅射靶

    公开(公告)号:US06387536B1

    公开(公告)日:2002-05-14

    申请号:US09612383

    申请日:2000-07-07

    IPC分类号: C23C1400

    摘要: The present invention provides an Al alloy thin film for a semiconductor device electrode having an electrical resistivity of as low as 6 &mgr;&OHgr;cm or less, high hillock resistance, high void resistance, and high corrosion resistance against an alkaline solution, which are required for an electrode thin film of large-screen liquid crystal display (LCD) or high-resolution LCD. The present invention also provides a sputtering target to deposit the Al alloy film by sputtering process for a semiconductor device electrode. The Al alloy thin film for a semiconductor device electrode satisfies the conditions of Y≧0.3 at %, IVa group metal element≧0.2 at %, and 0.3Cy+3CIVa≦2 (wherein Cy: Y content (at %), CIVa: content of IVa group metal element (at %)), and the sputtering target is made of an Al alloy satisfying the above conditions.

    摘要翻译: 本发明提供了一种用于半导体器件电极的Al合金薄膜,其具有电极对电极所需的电阻率低至6μΩEG·cm以下,耐高耐候性,高耐空隙性和耐碱腐蚀性 薄膜大屏幕液晶显示器(LCD)或高分辨率液晶显示器。 本发明还提供了一种用于半导体器件电极的溅射工艺沉积Al合金膜的溅射靶。 用于半导体器件电极的Al合金薄膜满足Y> = 0.3原子%的条件,IVa族金属元素> 0.2原子%,和0.3Cy + 3CIVa <= 2(其中Cy:Y含量(at%)) CIVa:IVa族金属元素的含量(原子%)),溅射靶由满足上述条件的Al合金构成。

    Image reading apparatus for reading images from different kinds of film in accordance with the size and characteristics of the film
    43.
    发明授权
    Image reading apparatus for reading images from different kinds of film in accordance with the size and characteristics of the film 失效
    根据胶片的尺寸和特性从不同种类的胶片读取图像的图像读取装置

    公开(公告)号:US06215563B1

    公开(公告)日:2001-04-10

    申请号:US08552249

    申请日:1995-11-02

    IPC分类号: G02B530

    摘要: Film carrier detecting mechanism is provided to detect a film carrier positioned at an image reading position to find to what size of film the film carrier is applied. Optical system driving mechanism is controlled according to the size of a film detected by the film carrier detecting mechanism, and varies magnification of image forming optical system so that the width of a film image formed on the surface of photoelectric conversion element is kept constant irrespective of the difference in size of film. Image processing circuit processes and regularize an image reading data corresponding to the size of a film detected by the film carrier detecting mechanism based on a corresponding reading condition.

    摘要翻译: 提供胶片载体检测机构以检测位于图像读取位置的胶片载体,以找出涂膜载体的胶片尺寸。 根据由胶片载体检测机构检测到的胶片尺寸来控制光学系统驱动机构,并且改变成像光学系统的放大倍数,使得形成在光电转换元件的表面上的胶片图像的宽度保持不变,而不管 电影大小的差异。 图像处理电路基于相应的读取条件来处理和归一化与胶片载体检测机构检测到的胶片尺寸对应的图像读取数据。

    A1-N1-Y alloy films for electrodes of semiconductor devices and
sputtering targets for depositing the A1-N1-Y alloy films
    44.
    发明授权
    A1-N1-Y alloy films for electrodes of semiconductor devices and sputtering targets for depositing the A1-N1-Y alloy films 失效
    用于半导体器件电极的A1-N1-Y合金膜和用于沉积A1-N1-Y合金膜的溅射靶

    公开(公告)号:US6096438A

    公开(公告)日:2000-08-01

    申请号:US58896

    申请日:1998-04-13

    摘要: The invention provides an Al alloy film for use as an electrode of a semiconductor device and also provides an Al alloy sputtering target used to produce such an Al alloy film wherein the Al alloy film has not only a low resistivity equal to or less than 5 .mu..OMEGA.cm and a high hillock resistance (property of hillock suppression) but also a high dielectric strength when it is anodized into an anodic oxide film and wherein the Al alloy film has a composition such that the Ni content is equal to or greater than 0.3 at % and the Y content is equal to or greater than 0.3 at % and such that 0.22 C.sub.Ni +0.74 C.sub.Y

    摘要翻译: 本发明提供了用作半导体器件的电极的Al合金膜,并且还提供了用于制造这种Al合金膜的Al合金溅射靶,其中Al合金膜不仅具有等于或小于5μm的低电阻 OMEGA cm和高小丘抗性(小丘抑制性质),并且当阳极氧化成阳极氧化膜时也具有高介电强度,并且其中Al合金膜具有使Ni含量等于或大于0.3的组成 %,Y含量等于或大于0.3原子%,其中CNi表示Ni含量(原子%)和CY表示Y含量(原子%)为0.22 CNi + 0.74 CY <1.6原子%,此外, 为了通过溅射沉积Al合金膜,使用包含Ni和Y的喷镀Al合金靶。

    Method for counting living cells of microbes and apparatus therefor
    45.
    发明授权
    Method for counting living cells of microbes and apparatus therefor 失效
    计数微生物活细胞的方法及其设备

    公开(公告)号:US5389544A

    公开(公告)日:1995-02-14

    申请号:US658646

    申请日:1991-02-21

    摘要: A method for counting living cells of microbes in a fluid sample continuously while flowing the sample using an apparatus which comprises a system for supplying at a predetermined rate to the flow line of the sample a reagent, such as, a derivative of fluorescein, capable of reacting with one or more substances intrinsic of the living cell, such as enzyme, to form an accumulative fluorescent product within the living cells; a reactor inserted in the flow line of the sample and being provided for the reaction of the reagent with the cell-intrinsic substance in the living cells; a photometric detection system arranged subsequent to the reactor for detecting fluorescence emitted as individual luminous point from the fluorescent product in each of the living cells floating in the flowing sample upon irradiation of the fluorescent product by an exciting ray; and an electronic unit including a pulse counter for counting electric pulses produced from each fluorescence from the luminous point.

    摘要翻译: 一种用于在流动样品的同时流动样品时连续测量流体样品中的微生物的活细胞的方法,该装置包括用于以预定速率向样品的流动管线供应诸如荧光素的衍生物的试剂,所述试剂能够 与活细胞固有的一种或多种物质如酶反应,在活细胞内形成累积荧光产物; 插入样品流线中的反应器,用于使试剂与活细胞中的细胞固有物质反应; 光检测系统,其布置在所述反应器之后,用于在通过激发光线照射所述荧光产品时,从漂浮在流动样品中的每个活细胞中的荧光产物中检测作为各个发光点发出的荧光; 以及包括用于计数从发光点的每个荧光产生的电脉冲的脉冲计数器的电子单元。

    1,3-Cyclohexanedione derivatives
    47.
    发明授权
    1,3-Cyclohexanedione derivatives 失效
    1,3-环己二酮衍生物

    公开(公告)号:US4336202A

    公开(公告)日:1982-06-22

    申请号:US264463

    申请日:1981-05-18

    摘要: Novel cyclohexanone derivatives of general formula: ##STR1## (wherein R.sup.1 is a hydrocarbon group of 1 to 15 carbon atoms) and new cyclohexanone derivatives of general formula: ##STR2## (wherein R.sup.1 and R.sup.2 each is a hydrocarbon group of 1 to 15 carbon atoms) are produced by an electrooxidative coupling of 1,3-cyclohexanedione with a vinyl ether of general formula:CH.sub.2 .dbd.CH-O-R.sup.1(wherein R.sup.1 is as defined above) in the presence or absence of an alcohol of general formula:R.sup.2 OH(wherein R.sup.2 is as defined above). These new cyclohexanone derivatives can be easily converted to N-substituted or unsubstituted-4-oxo-4,5,6,7-tetrahydroindoles, which are of value as intermediates for the production of N-substituted or unsubstituted-4-hydroxyindoles and, thence, to pindolol and its analogs.

    摘要翻译: 新型的通式为:IMA(其中R 1为1至15个碳原子的烃基)的环己酮衍生物和通式为新的环己酮衍生物:其中R1和R2各自为1至15个碳原子的烃基 原子)通过在通式R 2 OH的存在或不存在的情况下,通过1,3-环己二酮与通式为CH 2 = CH-O-R 1(其中R 1如上定义)的乙烯基醚的电氧偶合而产生 (其中R2如上所定义)。 这些新的环己酮衍生物可以容易地转化成N-取代或未取代的-4-氧代-4,5,6,7-四氢吲哚,它们作为制备N-取代或未取代的4-羟基吲哚的中间体, 因此,对吲哚洛尔及其类似物。

    Light emitting module and optical wavelength converting member
    48.
    发明授权
    Light emitting module and optical wavelength converting member 有权
    发光模块和光波长转换构件

    公开(公告)号:US08801234B2

    公开(公告)日:2014-08-12

    申请号:US13085859

    申请日:2011-04-13

    摘要: A light emitting module is provided with a light emitting element and an optical wavelength converting member. The optical wavelength converting member includes a light incident plane, a light output plane, and an outer plane which is a plane except for said light incident plane and said light output plane. The optical wavelength converting member converts a wavelength of light emitted on the light emitting element and entered from the light incident plane into the optical wavelength converting member and outputs the wavelength-converted light from the light output plane. An average roughness “Ra” of at least a portion of the outer plane is lower than an average roughness of the light output plane.

    摘要翻译: 发光模块设置有发光元件和光波长转换构件。 光波长转换构件包括光入射面,光输出面和作为除了所述光入射面和所述光输出面之外的平面的外平面。 光波长转换部件将从光入射面入射的发光元件的光的波长转换成光波长转换部件,并输出来自光输出面的波长转换光。 外平面的至少一部分的平均粗糙度“Ra”低于光输出面的平均粗糙度。

    ENGINE EXHAUST TREATMENT DEVICE
    49.
    发明申请
    ENGINE EXHAUST TREATMENT DEVICE 有权
    发动机排气处理装置

    公开(公告)号:US20130336843A1

    公开(公告)日:2013-12-19

    申请号:US14002597

    申请日:2012-01-26

    IPC分类号: B01D53/94

    摘要: An engine exhaust treatment device is capable of combusting PM accumulated in a DPF or activating an exhaust purification catalyst even immediately after engine startup or at the time of light load operation. A combustible gas supply passage (8) communicates with an exhaust passage (4) on an upstream of a combustion catalyst (5). An air supply unit (9) and an ignition unit (10) are provided in this supply passage and interlocked with a control unit (11). Where a temperature of the exhaust is lower than a predetermined temperature, the control unit supplies air (12) to a combustible gas by the air supply unit (9) and causes ignition of the combustible gas by the ignition unit (10), so as to cause flame combustion of the combustible gas. The temperature of the exhaust (6) in the exhaust passage (4) is increased by heat of this flame combustion.

    摘要翻译: 发动机排气处理装置能够即使在发动机启动后或轻负载运转时,也可以燃烧积聚在DPF中的PM或者使排气净化催化剂活化。 可燃气体供给通路(8)与燃烧催化剂(5)的上游侧的排气通路(4)连通。 供气单元(9)和点火单元(10)设置在该供应通道中并与控制单元(11)互锁。 在排气温度低于预定温度的情况下,控制单元通过空气供应单元(9)将空气(12)供应到可燃气体,并使点燃单元(10)点燃可燃气体,以便 引起可燃气体的火焰燃烧。 排气通道(4)中的排气(6)的温度由于该火焰燃烧的热量而增加。

    CHARGED PARTICLE BEAM RADIATION APPARATUS
    50.
    发明申请
    CHARGED PARTICLE BEAM RADIATION APPARATUS 有权
    充电颗粒光束辐射装置

    公开(公告)号:US20130140977A1

    公开(公告)日:2013-06-06

    申请号:US13812700

    申请日:2011-06-15

    IPC分类号: H01J29/48

    摘要: In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

    摘要翻译: 在使用导电绝缘体的加速管中,导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀,使得导电绝缘体的表面电阻变得不均匀。 因此,在导电绝缘体加速管的内表面上形成有多个周向槽,并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时,加速管内表面上的金属化区域的电位变为固定值,因此电位分布 在加速管的内表面上,在垂直方向上可以保持基本上相等于圆周方向。