摘要:
Cu-based interconnections are fabricated in a semiconductor device by depositing a thin film of Cu or Cu alloy on a dielectric film by sputtering, the dielectric film having trenches and/or via holes at least one groove and being arranged on or above a substrate, and carrying out high temperature and high pressure treatment to thereby embed the Cu or Cu alloy into the trenches and/or via holes, in which the sputtering is carried out at a substrate temperature of −20° C. to 0° C. using, as a sputtering gas, a gaseous mixture containing hydrogen gas and an inert gas in a ratio in percentage of 5:95 to 20:80.
摘要:
The present invention provides an Al alloy thin film for a semiconductor device electrode having an electrical resistivity of as low as 6 &mgr;&OHgr;cm or less, high hillock resistance, high void resistance, and high corrosion resistance against an alkaline solution, which are required for an electrode thin film of large-screen liquid crystal display (LCD) or high-resolution LCD. The present invention also provides a sputtering target to deposit the Al alloy film by sputtering process for a semiconductor device electrode. The Al alloy thin film for a semiconductor device electrode satisfies the conditions of Y≧0.3 at %, IVa group metal element≧0.2 at %, and 0.3Cy+3CIVa≦2 (wherein Cy: Y content (at %), CIVa: content of IVa group metal element (at %)), and the sputtering target is made of an Al alloy satisfying the above conditions.
摘要:
Film carrier detecting mechanism is provided to detect a film carrier positioned at an image reading position to find to what size of film the film carrier is applied. Optical system driving mechanism is controlled according to the size of a film detected by the film carrier detecting mechanism, and varies magnification of image forming optical system so that the width of a film image formed on the surface of photoelectric conversion element is kept constant irrespective of the difference in size of film. Image processing circuit processes and regularize an image reading data corresponding to the size of a film detected by the film carrier detecting mechanism based on a corresponding reading condition.
摘要:
The invention provides an Al alloy film for use as an electrode of a semiconductor device and also provides an Al alloy sputtering target used to produce such an Al alloy film wherein the Al alloy film has not only a low resistivity equal to or less than 5 .mu..OMEGA.cm and a high hillock resistance (property of hillock suppression) but also a high dielectric strength when it is anodized into an anodic oxide film and wherein the Al alloy film has a composition such that the Ni content is equal to or greater than 0.3 at % and the Y content is equal to or greater than 0.3 at % and such that 0.22 C.sub.Ni +0.74 C.sub.Y
摘要:
A method for counting living cells of microbes in a fluid sample continuously while flowing the sample using an apparatus which comprises a system for supplying at a predetermined rate to the flow line of the sample a reagent, such as, a derivative of fluorescein, capable of reacting with one or more substances intrinsic of the living cell, such as enzyme, to form an accumulative fluorescent product within the living cells; a reactor inserted in the flow line of the sample and being provided for the reaction of the reagent with the cell-intrinsic substance in the living cells; a photometric detection system arranged subsequent to the reactor for detecting fluorescence emitted as individual luminous point from the fluorescent product in each of the living cells floating in the flowing sample upon irradiation of the fluorescent product by an exciting ray; and an electronic unit including a pulse counter for counting electric pulses produced from each fluorescence from the luminous point.
摘要:
The present invention provides a process for preparing halogenated sulfones by reacting a halogenating agent with a salt of a hydroxysulfone. The halogenated sulfones are useful as an intermediate for vitamin A or its carboxylic acid esters employed as medicines or feed additives.
摘要:
Novel cyclohexanone derivatives of general formula: ##STR1## (wherein R.sup.1 is a hydrocarbon group of 1 to 15 carbon atoms) and new cyclohexanone derivatives of general formula: ##STR2## (wherein R.sup.1 and R.sup.2 each is a hydrocarbon group of 1 to 15 carbon atoms) are produced by an electrooxidative coupling of 1,3-cyclohexanedione with a vinyl ether of general formula:CH.sub.2 .dbd.CH-O-R.sup.1(wherein R.sup.1 is as defined above) in the presence or absence of an alcohol of general formula:R.sup.2 OH(wherein R.sup.2 is as defined above). These new cyclohexanone derivatives can be easily converted to N-substituted or unsubstituted-4-oxo-4,5,6,7-tetrahydroindoles, which are of value as intermediates for the production of N-substituted or unsubstituted-4-hydroxyindoles and, thence, to pindolol and its analogs.
摘要:
A light emitting module is provided with a light emitting element and an optical wavelength converting member. The optical wavelength converting member includes a light incident plane, a light output plane, and an outer plane which is a plane except for said light incident plane and said light output plane. The optical wavelength converting member converts a wavelength of light emitted on the light emitting element and entered from the light incident plane into the optical wavelength converting member and outputs the wavelength-converted light from the light output plane. An average roughness “Ra” of at least a portion of the outer plane is lower than an average roughness of the light output plane.
摘要:
An engine exhaust treatment device is capable of combusting PM accumulated in a DPF or activating an exhaust purification catalyst even immediately after engine startup or at the time of light load operation. A combustible gas supply passage (8) communicates with an exhaust passage (4) on an upstream of a combustion catalyst (5). An air supply unit (9) and an ignition unit (10) are provided in this supply passage and interlocked with a control unit (11). Where a temperature of the exhaust is lower than a predetermined temperature, the control unit supplies air (12) to a combustible gas by the air supply unit (9) and causes ignition of the combustible gas by the ignition unit (10), so as to cause flame combustion of the combustible gas. The temperature of the exhaust (6) in the exhaust passage (4) is increased by heat of this flame combustion.
摘要:
In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.