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公开(公告)号：US20130140977A1
公开(公告)日：2013-06-06
申请号：US13812700
申请日：2011-06-15
IPC分类号： H01J29/48
CPC分类号： H01J29/484 , H01J3/02 , H01J3/027 , H01J3/40 , H01J29/488 , H01J37/026 , H01J37/073 , H01J37/248 , H01J2237/038 , H01J2237/06341 , H01J2237/0802
摘要： In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.
摘要翻译： 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。
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公开(公告)号：US08803411B2
公开(公告)日：2014-08-12
申请号：US13812700
申请日：2011-06-15
CPC分类号： H01J29/484 , H01J3/02 , H01J3/027 , H01J3/40 , H01J29/488 , H01J37/026 , H01J37/073 , H01J37/248 , H01J2237/038 , H01J2237/06341 , H01J2237/0802
摘要： In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.
摘要翻译： 在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。 因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。 当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布 在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。
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公开(公告)号：US20130087703A1
公开(公告)日：2013-04-11
申请号：US13699054
申请日：2011-05-18
IPC分类号： H01J37/26
CPC分类号： H01J37/261 , H01J3/021 , H01J9/39 , H01J9/505 , H01J37/065 , H01J37/073 , H01J37/26 , H01J2237/022 , H01J2237/06341 , H01J2237/1035 , H01J2237/14 , H01J2237/182 , Y02W30/828
摘要： In an electron microscope having a magnetic field immersion type cold-FE electron gun, the electron gun and the electron microscope are provided with high observation efficiency and the focal distance of the electron gun does not change during use. The degree of vacuum in the electron gun is improved with a getter pump for stabilization. Further, observation efficiency is improved by cleaning the electron source periodically and returning to recorded optical conditions on the occasion.
摘要翻译： 在具有磁场浸渍型冷FE电子枪的电子显微镜中，电子枪和电子显微镜具有高观察效率，并且电子枪的焦距在使用期间不改变。 使用吸气泵来稳定电子枪中的真空度得到改善。 此外，通过周期性地清洁电子源并返回记录的光学条件来改善观察效率。
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公开(公告)号：US08669535B2
公开(公告)日：2014-03-11
申请号：US13322025
申请日：2010-04-14
IPC分类号： H01J1/50
CPC分类号： H01J37/063 , H01J37/073 , H01J37/141 , H01J2237/06316 , H01J2237/06341 , H01J2237/065 , H01J2237/26
摘要： The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large current. The present invention provides a field-emission electron gun which extracts an electron beam from a cathode and converges the extracted electron beam, the field-emission electron gun including: a magnetic field lens which is provided such that the cathode is disposed inside of a magnetic field of the lens; and an extraction electrode for extracting electrons from the cathode, the extraction electrode being formed into a cylindrical shape without an aperture structure. The present invention can provide an electron gun having a function of converging an electron beam using a magnetic field, the electron gun which is capable of reducing an incidental electrostatic lens action and has small aberration and high brightness.
摘要翻译： 本发明的目的是提供一种具有低像差的冷阴极场致发射电子枪，从而即使在大电流的情况下也提供高亮度电子枪。 本发明提供一种场致发射电子枪，其从阴极提取电子束并使所提取的电子束会聚，该场发射电子枪包括：磁场透镜，其被设置为使得阴极设置在磁性 镜头领域; 以及用于从阴极提取电子的引出电极，所述引出电极形成为没有孔结构的圆筒形状。 本发明可以提供一种电子枪，其具有使用磁场会聚电子束的功能，该电子枪能够减少偶然的静电透镜作用并且具有小的像差和高亮度。
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5.发明授权Method and scanning electron microscope for measuring width of material on sample 有权用于测量样品材料宽度的方法和扫描电子显微镜公开(公告)号：US07385196B2
公开(公告)日：2008-06-10
申请号：US10911480
申请日：2004-08-05
申请人： Goroku Shimoma , Tadashi Otaka , Mitsugu Sato , Hideo Todokoro , Shunichi Watanabe , Tadanori Takahashi , Masahiro Kawawa , Masanori Gunji , Terumichi Nishino
发明人： Goroku Shimoma , Tadashi Otaka , Mitsugu Sato , Hideo Todokoro , Shunichi Watanabe , Tadanori Takahashi , Masahiro Kawawa , Masanori Gunji , Terumichi Nishino
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , H01J2237/2814
摘要： A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.
摘要翻译： 一种宽度测量方法，用于减少或消除由光束直径尺寸导致的样品宽度测量误差，其中宽度测量对象的宽度测量值已经在 从其上具有待宽度测量对象的样品发射的二次粒子获得的二次信号的基础用相对于束直径的尺寸值的值进行校正。
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6.发明申请FIELD EMISSION ELECTRON GUN AND ELECTRON BEAM APPLIED DEVICE USING THE SAME 有权现场发射电子枪和使用该电子枪的电子束应用装置公开(公告)号：US20080029700A1
公开(公告)日：2008-02-07
申请号：US11831989
申请日：2007-08-01
IPC分类号： H01J37/073 , H01J37/26 , H01J37/30
CPC分类号： H01J37/073 , B82Y10/00 , B82Y40/00 , H01J1/3044 , H01J9/025 , H01J37/3174 , H01J2201/3043 , H01J2201/30434 , H01J2201/30469 , H01J2201/30484 , H01J2201/30488 , H01J2201/30496 , H01J2237/06341 , H01J2237/26
摘要： The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
摘要翻译： 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外，还要获得能量扩散比电子枪窄的电子束。 此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。 此外，还将场致发射电子枪应用于各种电子束施加装置。
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公开(公告)号：USD413076S
公开(公告)日：1999-08-24
申请号：US95176
申请日：1998-10-19
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公开(公告)号：US4653963A
公开(公告)日：1987-03-31
申请号：US823221
申请日：1986-01-28
申请人： Kozo Taneda , Masae Chiba , Junichi Naka , Shunichi Watanabe
发明人： Kozo Taneda , Masae Chiba , Junichi Naka , Shunichi Watanabe
CPC分类号： B65G51/26
摘要： In a transport apparatus, a plurality of flat bodies are respectively aligned uprightly and juxtaposed laterally to form a block of the flat bodies, the block is loaded in a movable capsule, and the capsule is transported under the application of air flow through a transport pipeline. A loading mechanism having a pair of openable and closable holding arms is disposed to oppose a loading opening of a loading station, and an unloading mechanism having a pair of openable and closable holding arms is disposed to oppose an unloading opening of an unloading station.
摘要翻译： 在运送装置中，多个扁平体分别垂直并排并排并排成平行体的块体，该块被装载在可移动的胶囊中，并且胶囊在空气流的运送下通过运输管线 。 具有一对可打开和关闭的保持臂的装载机构设置成与装载站的装载开口相对，并且具有一对可打开和关闭的保持臂的卸载机构设置成与卸载站的卸载开口相对。
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9.发明授权
公开(公告)号：US4410626A
公开(公告)日：1983-10-18
申请号：US201739
申请日：1980-10-29
申请人： Hiroshi Gushima , Shunichi Watanabe , Takeshi Saito , Toshio Sasaki , Hideo Eiki , Yoshihiko Oka , Takashi Osono
发明人： Hiroshi Gushima , Shunichi Watanabe , Takeshi Saito , Toshio Sasaki , Hideo Eiki , Yoshihiko Oka , Takashi Osono
IPC分类号： A61K31/545 , A61K31/546 , A61P31/04 , C07D501/57 , C12P35/08 , C12N9/06 , C12R1/465 , C12R1/52
CPC分类号： C12P35/08 , Y10S435/886 , Y10S435/893 , Y10S435/897
摘要： 7.alpha.-Methoxy-3-p-sulfooxy or p-hydroxycinnamoyloxymethyl cephalosporin derivatives which are useful as antibiotics and as intermediates for the production of other 7.alpha.-methoxycephalosporin derivatives.
摘要翻译： 7α-甲氧基-3-对磺基氧基或对羟基肉桂酸氧甲基头孢菌素衍生物，其可用作抗生素和用作生产其它7种α-甲氧基头孢菌素衍生物的中间体。
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公开(公告)号：US20120062094A1
公开(公告)日：2012-03-15
申请号：US13322025
申请日：2010-04-14
CPC分类号： H01J37/063 , H01J37/073 , H01J37/141 , H01J2237/06316 , H01J2237/06341 , H01J2237/065 , H01J2237/26
摘要： The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large current. The present invention provides a field-emission electron gun which extracts an electron beam from a cathode and converges the extracted electron beam, the field-emission electron gun including: a magnetic field lens which is provided such that the cathode is disposed inside of a magnetic field of the lens; and an extraction electrode for extracting electrons from the cathode, the extraction electrode being formed into a cylindrical shape without an aperture structure. The present invention can provide an electron gun having a function of converging an electron beam using a magnetic field, the electron gun which is capable of reducing an incidental electrostatic lens action and has small aberration and high brightness.
摘要翻译： 本发明的目的是提供一种具有低像差的冷阴极场致发射电子枪，从而即使在大电流的情况下也提供高亮度电子枪。 本发明提供一种场致发射电子枪，其从阴极提取电子束并使所提取的电子束会聚，该场发射电子枪包括：磁场透镜，其被设置为使得阴极设置在磁性 镜头领域; 以及用于从阴极提取电子的引出电极，所述引出电极形成为没有孔结构的圆筒形状。 本发明可以提供一种电子枪，其具有使用磁场会聚电子束的功能，该电子枪能够减少偶然的静电透镜作用并且具有小的像差和高亮度。
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