公开(公告)号：US20140224997A1

公开(公告)日：2014-08-14

申请号：US14180350

申请日：2014-02-13

Applicant: Industry-University Cooperation Foundation Sunmoon University

Inventor： Tae Sik OH ,  Ho Seob KIM ,  Dae Wook KIM ,  Seung Joon AHN

IPC: H01J3/26 ,  H01J3/14

CPC classification number: H01J3/26 ,  H01J3/021 ,  H01J3/12 ,  H01J3/14 ,  H01J3/18 ,  H01J3/30 ,  H01J37/04 ,  H01J2237/1205

Abstract: An ultra-miniaturized electron optical microcolumn is provided. The electron optical microcolumn includes an electron-emitting source emitting electrons using a field emission principle, an extraction electrode causing the emission of electrons from the electron-emitting source, a focusing electrode to which voltage is flexibly applied in response to a working distance to a target for regulating a focusing force of electron beams emitted from the electron-emitting source, an acceleration electrode accelerating electrons emitted by the extraction electrode, a limit electrode regulating an amount and a size of electron beams using electrons accelerated by the acceleration electrode, and a deflector deflecting electron beams towards the target.

Abstract translation: 提供超小型电子光学微柱。 电子光学微柱包括使用场致发射原理发射电子的电子发射源，引起来自电子发射源的电子的引出电极，响应于工作距离而被柔性施加电压的聚焦电极 用于调节从电子发射源发射的电子束的聚焦力的目标，加速由引出电极发射的电子的加速电极，限制电极使用由加速电极加速的电子来调节电子束的量和尺寸，以及 偏转器偏转电子束朝向目标。

公开(公告)号：US20140175300A1

公开(公告)日：2014-06-26

申请号：US13722873

申请日：2012-12-20

Applicant: JOHAN JOOST KONING ,  Stijn Willem Herman Steenbrink ,  Bart Schipper

Inventor： JOHAN JOOST KONING ,  Stijn Willem Herman Steenbrink ,  Bart Schipper

IPC: H01J3/18

CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/15

Abstract: The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for assembling such a projection lens assembly. In particular the present invention discloses a modular projection lens assembly with enhanced structural integrity and/or increased placement precision of its most downstream electrode.

Abstract translation: 本发明涉及一种用于将多个带电粒子子束引导到位于下游方向的图像平面上的投影透镜组合模块，以及用于组装这种投影透镜组件的方法。 特别地，本发明公开了一种具有增强的结构完整性和/或其最下游电极的放置精度提高的模块化投影透镜组件。

公开(公告)号：US20130299714A1

公开(公告)日：2013-11-14

申请号：US13838785

申请日：2013-03-15

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takashi Shiozawa

IPC: H01J37/10

CPC classification number: H01J37/10 ,  H01J3/18 ,  H01J37/12 ,  H01J2237/038 ,  H01J2237/31774

Abstract: A charged-particle beam lens includes a plate-like anode, a plate-like cathode, and an insulator disposed between the anode and the cathode. The insulator, the anode, and the cathode have a passage portion through which a charged beam is passed. A high-resistance film is formed on an inner side of the insulator, the inner side forming the passage portion, or an outermost side of insulator, and the anode and the cathode are electrically connected together via the high-resistance film. The anode and the high-resistance film, and the cathode and the high-resistance film each contain the same metal or semiconductor element and have different resistant values. This suppresses electric field concentration due to an increase in resistance and poor connection at the interface between the anode and the cathode and the high-resistance film or at the interface between the electroconductive film and the high-resistance film, thus suppressing generation of discharge.

Abstract translation: 带电粒子束透镜包括板状阳极，板状阴极和布置在阳极和阴极之间的绝缘体。 绝缘体，阳极和阴极具有带电束通过的通道部分。 在绝缘体的内侧形成高电阻膜，形成绝缘体的通路部分或最外侧的内侧，并且阳极和阴极通过高电阻膜电连接在一起。 阳极和高电阻膜以及阴极和高电阻膜各自含有相同的金属或半导体元件，并具有不同的电阻值。 由于电阻增加和阳极与阴极与高电阻膜之间的界面或导电膜与高电阻膜之间的界面处的接合不良而抑制电场集中，因此抑制了放电的产生。

公开(公告)号：US20130256527A1

公开(公告)日：2013-10-03

申请号：US13800895

申请日：2013-03-13

Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

Inventor： Shengwu Chang

IPC: H01J3/18 ,  H01J49/06

CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/067 ,  H01J2237/121

Abstract: A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first electrode disposed at the first end and a second electrode disposed at the second end. The elongated tube is configured to receive a voltage bias to create an electric field within the Einzel lens as the ion beam travels through the hybrid electrostatic lens. The hybrid electrostatic lens further includes a quadrupole lens having a first stage and a second stage, where each of the stages is defined by a plurality of electrodes turned 90° with respect to each other to define a pathway in the Z direction through the elongated tube. The Einzel lens focuses the ion beam and the quadrupole lens shapes the ion beam.

Abstract translation: 使用混合静电透镜来形成和聚焦离子束。 混合静电透镜包括由具有第一和第二端的细长管和设置在第一端的第一电极和设置在第二端的第二电极限定的Einzel透镜。 细长管被配置为当离子束穿过混合静电透镜时，接收电压偏置以在Einzel透镜内产生电场。 混合静电透镜还包括具有第一阶段和第二阶段的四极透镜，其中每个阶段由相对于彼此转动90°的多个电极限定，以通过细长管限定沿Z方向的路径 。 Einzel透镜聚焦离子束，四极透镜成像离子束。

公开(公告)号：US20130206999A1

公开(公告)日：2013-08-15

申请号：US13744536

申请日：2013-01-18

Applicant: CANON KABUSHIKI KAISHA

Inventor： Akira Shimazu

IPC: H01J3/18 ,  H01J37/30

CPC classification number: H01J3/18 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/022 ,  H01J2237/1205 ,  H01J2237/18

Abstract: Provided is a charged particle beam lens, including: a first electrode on a downstream side and a second electrode on an upstream side in a travelling direction of a charged particle beam; a distance defining member provided between the first electrode and the second electrode such that the first electrode and the second electrode are placed away from each other; and a gap surrounded by the first electrode, the second electrode, and the distance defining member, in which: each of the first electrode and the second electrode has a first through hole formed therein, through which the charged particle beam passes; the second electrode further has a second through hole formed therein, through which the charged particle beam does not pass; and both the first through hole and the second through hole communicate to the gap.

Abstract translation: 提供一种带电粒子束透镜，包括：下游侧的第一电极和带电粒子束的行进方向上游侧的第二电极; 设置在所述第一电极和所述第二电极之间的距离限定件，使得所述第一电极和所述第二电极彼此远离放置; 以及由第一电极，第二电极和距离限定部件围绕的间隙，其中：第一电极和第二电极中的每一个具有形成在其中的第一通孔，带电粒子束穿过该第一通孔; 第二电极还具有形成在其中的第二通孔，带电粒子束通过该第二通孔不通过; 并且第一通孔和第二通孔都与间隙连通。

公开(公告)号：US08253315B2

公开(公告)日：2012-08-28

申请号：US13332732

申请日：2011-12-21

Applicant: Artush A. Abgaryan ,  Eli Levi

Inventor： Artush A. Abgaryan ,  Eli Levi

IPC: H01J29/46

CPC classification number: H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

Abstract: System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a housing having a first interior portion and a second interior portion electrically insulated from the first interior portion. The second interior portion has an electric field-free space. An electrode system is disposed in the first interior portion and includes a cathode assembly and at least one anode assembly. The cathode assembly generates an electron beam that passes through each anode assembly and then into the electric field-free space in the second interior portion. A position of a crossover point on a longitudinal axis maybe regulated by varying dimensions of a substantially cylindrical portion of the anode assembly and a substantially cylindrical portion of a near-cathode electrode assembly.

Abstract translation: 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括具有与第一内部部分电绝缘的第一内部部分和第二内部部分的壳体。 第二内部部分具有无电场的空间。 电极系统设置在第一内部部分中并且包括阴极组件和至少一个阳极组件。 阴极组件产生通过每个阳极组件然后进入第二内部部分中的无电场空间的电子束。 横轴上的交叉点的位置可以通过阳极组件的基本圆柱形部分的大小和近阴极电极组件的基本上圆柱形的部分来调节。

公开(公告)号：US20100117510A1

公开(公告)日：2010-05-13

申请号：US12481995

申请日：2009-06-10

Applicant: Yong Woon PARK ,  Hyotcherl Ihee ,  Chang Bum Kim ,  In Soo Ko

Inventor： Yong Woon PARK ,  Hyotcherl Ihee ,  Chang Bum Kim ,  In Soo Ko

IPC: H01J29/46

CPC classification number: H01J37/045 ,  H01J3/18 ,  H01J37/063 ,  H01J37/073 ,  H01J37/295 ,  H01J2237/0432 ,  H01J2237/06333

Abstract: An apparatus and method for generating femtosecond electron beam are disclosed. The apparatus for generating electron beam by discharging an electron generated via a cathode to an anode includes a transmission window provided at one side of the cathode to allow incident laser to pass therethrough, a pinhole formed on the anode such that the pinhole corresponds to the position of the electron generated from the transmission window, and a focusing unit provided at one side of the cathode and generating an electric field to accelerate and at the same time concentrate the electron to the pinhole. Electrons are simultaneously concentrated and accelerated to the pinhole by an electric field generated by the focusing unit positioned at the cathode to generate femtosecond electron beam.

Abstract translation: 公开了一种用于产生飞秒电子束的装置和方法。 通过将通过阴极发射的电子放电到阳极来产生电子束的装置包括设置在阴极的一侧以允许入射激光通过的透射窗口，形成在阳极上的针孔，使得针孔对应于位置 的发射窗产生的电子，以及设置在阴极一侧的聚焦单元，产生电场以加速并同时将电子集中到针孔。 通过由位于阴极处的聚焦单元产生的电场，电子同时集中并加速到针孔，以产生飞秒电子束。

公开(公告)号：US20080203881A1

公开(公告)日：2008-08-28

申请号：US11915679

申请日：2006-05-29

Applicant: Ho Seob Kim ,  Byeng Jin

Inventor： Ho Seob Kim ,  Byeng Jin

IPC: H01J1/00 ,  H01K1/30

CPC classification number: H01J3/18 ,  H01J3/26 ,  H01J37/12 ,  H01J2237/0492 ,  H01J2237/1205

Abstract: The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.

Abstract translation: 本发明涉及包括电子发射源和透镜的电子柱，更具体地说，涉及具有能够促进电子发射源和透镜的对准和组装的结构的电子柱。 具有根据本发明的电子发射源和透镜单元的电子柱的特征在于，透镜单元包括两个或更多个透镜层，并且执行源透镜功能和聚焦功能。 此外，电子柱的特征在于，透镜单元包括一个或多个偏转器型透镜层，并且另外执行偏转器功能。

公开(公告)号：US4126781A

公开(公告)日：1978-11-21

申请号：US795614

申请日：1977-05-10

Applicant: Melvin W. Siegel

Inventor： Melvin W. Siegel

IPC: G21K1/087 ,  H01J3/18 ,  H01J49/48 ,  B01D59/44 ,  H01J39/34

CPC classification number: H01J3/18 ,  G21K1/087 ,  H01J49/48

Abstract: Electric fields for electrostatic optics for focusing or otherwise controlling beams of ions, electrons and charged particles in general produced by surface current distributions which flow on appropriately shaped and located resistive elements from electrical power sources of appropriate voltage connected to two or more points or regions of the resistive surfaces; the resulting electric fields in the proximity of the current carrying surfaces are parallel to these surfaces. Useful electric field configurations may be produced which are inconvenient or impossible to produce by the prior art using surface charge distributions. New and improved analyzers of "concentric hemisphere" and "parallel plate" types are specifically utilized for ion kinetic energy selection prior to measurement of the mass-to-charge ratio of secondary ions produced by primary ion bombardment of surfaces.

Abstract translation: 用于聚焦或以其他方式控制离子，电子和带电粒子束的静电光学电场，通常由表面电流分布产生，其通过适当形状和位置的电阻元件流过适当电压的电源，该电源连接到两个或更多个点或 电阻表面; 在载流表面附近产生的电场平行于这些表面。 可以产生有用的电场结构，其通过使用表面电荷分布的现有技术产生不方便或不可能。 在测量表面初级离子轰击产生的二次离子的质荷比之前，将“同心半球”和“平行板”类型的新型改进分析仪专门用于离子动能选择。

公开(公告)号：US09536723B1

公开(公告)日：2017-01-03

申请号：US14615889

申请日：2015-02-06

Applicant: Agilent Technologies, Inc.

Inventor： James L. Bertsch ,  Kenneth R. Newton

IPC: H01J49/42 ,  H01J49/00 ,  B01D59/44 ,  H01J49/06 ,  H01J49/26

CPC classification number: H01J49/063 ,  H01J3/18 ,  H01J49/067 ,  H01J49/26 ,  H01J49/4215

Abstract: A field terminator includes a plurality of electrode plates positioned around a guide axis at a radial distance therefrom. The plates generate a quadrupole DC field such that a polarity on each plate is opposite to a polarity on the plates adjacent thereto. The plates may be positioned at an axial end of a quadrupole ion guide such as a mass filter. In addition to an RF field, the ion guide may generate a quadrupole DC field. The DC field of the plates may be opposite in polarity to that of the ion guide.

Abstract translation: 场终止器包括多个电极板，定位在引导轴线的径向距离处。 板产生四极DC场，使得每个板上的极性与相邻的板上的极性相反。 板可以位于四极离子导向器的轴向端部，例如质量过滤器。 除了RF场之外，离子导向器可以产生四极DC场。 板的DC场可能与离子导向器的极性相反。