Electrically conductive polymeric materials and uses thereof
    53.
    发明授权
    Electrically conductive polymeric materials and uses thereof 失效
    导电聚合材料及其用途

    公开(公告)号:US5200112A

    公开(公告)日:1993-04-06

    申请号:US718079

    申请日:1991-06-20

    摘要: Structures containing conducting polymers and methods of fabrication thereof. Electrical conductivity can be induced in polymers selected from the group of substituted and unsubstituted polyanilines, polyparaphenylenvinyles, substituted and unsubstituted polythiophenes substituted and unsubstituted poly-p-phenylene sulfides, substituted polyfuranes, substituted polypyrroles, substituted polyselenophene, polyacetylines formed from soluble precursors, combinations thereof and blends thereof with other polymers. The polymer contains a doping precursor, selected from the group of onium salts, iodonium salts, triflate salts, borate salts and tosylate salts and sulfonoxylimides. Conductivity can be selectively induced in the polymer by selectivly doping upon selective exposure to a source of energy such as electromagnetic radiation, an electron beam and heat. The electrically conductive polymers of the present invention are useful as electron discharge layers for electron beam applications, such as, SEM observations, as electromagnetic interference coatings on dielectric surfaces and as electron beam resist which acts as a discharge layer.

    摘要翻译: 含有导电聚合物的结构及其制造方法。 可以在选自取代和未取代的聚苯胺,聚对苯二烯基乙烯基,取代和未取代的聚噻吩,取代和未取代的聚对苯硫醚,取代的聚呋喃,取代的聚吡咯,取代的聚硒酚,由可溶性前体形成的聚乙炔,其组合 及其与其它聚合物的共混物。 聚合物含有选自鎓盐,碘鎓盐,三氟甲磺酸盐,硼酸盐和甲苯磺酸盐和磺酰氧基酰亚胺的掺杂前体。 可以通过在选择性地暴露于诸如电磁辐射,电子束和热的能量源之间选择性地掺杂在聚合物中选择性地诱导电导率。 本发明的导电聚合物可用作用于电子束应用的电子放电层,例如SEM观察,作为电介质表面上的电磁干扰涂层和用作放电层的电子束抗蚀剂。