DETECTOR MODULE FOR A PHOTO-ACOUSTIC GAS SENSOR

    公开(公告)号:US20200057031A1

    公开(公告)日:2020-02-20

    申请号:US16534143

    申请日:2019-08-07

    Abstract: A detector module is disclosed. In one example, the detector module is for a photo-acoustic gas sensor and comprises a first substrate made of a semiconductor material and comprising a first surface and a second surface opposite to the first surface, a second substrate comprising a third surface, a fourth surface opposite to the third surface, and a first recess formed in the fourth surface. The second substrate is connected with its fourth surface to the first substrate so that the first recess forms an airtight-closed first cell which is filled with a reference gas and a pressure sensitive element comprising a membrane disposed in contact with the reference gas. The detector module is further configured such that a beam of light pulses passes through the first substrate and thereby enters the first cell.

    Photo-Acoustic Gas Sensor Module Having Light Emitter and Detector Units
    58.
    发明申请
    Photo-Acoustic Gas Sensor Module Having Light Emitter and Detector Units 审中-公开
    具有光发射器和检测器单元的光声气体传感器模块

    公开(公告)号:US20160313288A1

    公开(公告)日:2016-10-27

    申请号:US15136469

    申请日:2016-04-22

    CPC classification number: G01N29/2425 G01N29/032 G01N2291/021

    Abstract: A photo-acoustic gas sensor includes a light emitter unit having a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and a wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit having a microphone. The light emitter unit is arranged so that the beam of light pulses traverses an area configured to accommodate the gas. The detector unit is arranged so that the microphone can receive a signal oscillating with the repetition frequency.

    Abstract translation: 光声气体传感器包括光发射器单元,其具有光发射器,其被配置为发射具有预定重复频率和对应于待感测气体的吸收带的波长的光脉冲束,以及具有麦克风的检测器单元 。 光发射器单元布置成使得光束脉冲穿过配置成容纳气体的区域。 检测器单元布置成使得麦克风可以接收以重复频率振荡的信号。

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