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72 条记录 (耗时 0.021 秒)

    Method for producing a resist structure
    52.
    发明授权
    Method for producing a resist structure 失效
    生产电阻结构的方法

    公开(公告)号：US5229258A

    公开(公告)日：1993-07-20

    申请号：US682142

    申请日：1991-04-08

    申请人： Recai Sezi ,  Horst Borndorfer ,  Eva Rissel ,  Rainer Leuschner ,  Michael Sebald ,  Hellmut Ahne ,  Siegfried Birkle

    发明人： Recai Sezi ,  Horst Borndorfer ,  Eva Rissel ,  Rainer Leuschner ,  Michael Sebald ,  Hellmut Ahne ,  Siegfried Birkle

    IPC分类号： G03F7/38 ,  G03F7/20 ,  G03F7/26 ,  G03F7/36 ,  H01L21/027

    CPC分类号： G03F7/2022 ,  G03F7/265

    摘要： High resolution resist structures with steep edges are obtained using standard equipment, even in cases involving critical contact-hole planes. First, a photoresist layer containing a polymer with chemically reactive groups and a photoactive component based on diazoketone or quinone diazide is deposited on a substrate. The photoresist layer is then irradiated with a patterned image and treated with a polyfunctional organic compound having functional groups that can chemically react with the reactive groups of the polymer. This step is followed by a maskless flood exposure. The photoresist layer irradiated in this manner is then treated with a metal-containing organic compound having at least one functional group capable of chemical reaction with the reactive groups of the polymer, followed by etching in an oxygen-containing plasma.

    摘要翻译： 使用标准设备获得具有陡边的高分辨率抗蚀结构，即使在涉及关键接触孔平面的情况下也是如此。 首先，将含有具有化学反应性基团的聚合物和基于重氮酮或醌二叠氮化物的光活性组分的光致抗蚀剂层沉积在基材上。 然后用图案化图像照射光致抗蚀剂层，并用具有可与聚合物的反应性基团发生化学反应的官能团的多官能有机化合物处理。 此步骤之后是无掩盖的洪水暴露。 然后以这种方式照射的光致抗蚀剂层用具有至少一个能够与聚合物的反应性基团进行化学反应的官能团的含金属有机化合物处理，随后在含氧等离子体中进行蚀刻。

    Device for electrodeposition of aluminum
    55.
    发明授权
    Device for electrodeposition of aluminum 失效
    电沉积铝装置

    公开(公告)号：US4425211A

    公开(公告)日：1984-01-10

    申请号：US393198

    申请日：1982-06-28

    申请人： Siegfried Birkle ,  Johann Gehring ,  Klaus Stoeger

    发明人： Siegfried Birkle ,  Johann Gehring ,  Klaus Stoeger

    IPC分类号： B65G49/04 ,  C25D3/44 ,  C25D17/00 ,  C25D17/06 ,  C25D19/00 ,  C25D17/02 ,  C25D21/02

    CPC分类号： C25D3/44

    摘要： A device for electrodepositing aluminum from an aprotic, oxygen-free, water-free aluminum-organic electrolyte, which comprises an electroplating tank, which is subdivided into a plurality of identical individual cells for receiving an electrolyte and anode plates, which cells contain support racks and are positioned one after another in a line or row, and the tank has a hood forming a protective chamber which contains a protective atmosphere. To charge and discharge workpiece holders into and out of the device includes a charging lock at one end of the row of cells forming the tank, a discharging lock at the other end of the row and a conveyor in the tank.

    摘要翻译： 一种用于从非质子，无氧，无水的铝 - 有机电解质中电沉积铝的装置，其包括电镀槽，其被细分成多个相同的单个电池，用于接收电解质和阳极板，所述电池和阳极板包含支撑架 并且一个接一个地定位成一排或一列，并且该罐具有形成保护室的罩，该保护室包含保护气氛。 为了将工件夹持器进出装置包括一个在形成罐的一排电池的一端的充电锁，排的另一端的排放锁和在该箱中的一个传送带。

    Method for heating aluminum baths
    56.
    发明授权
    Method for heating aluminum baths 失效
    铝浴加热方法

    公开(公告)号：US4382844A

    公开(公告)日：1983-05-10

    申请号：US410520

    申请日：1982-08-23

    申请人： Siegfried Birkle ,  Klaus Stoeger

    发明人： Siegfried Birkle ,  Klaus Stoeger

    IPC分类号： C25D21/02 ,  C25D17/06 ,  C25D17/18

    CPC分类号： C25D21/02 ,  Y10S204/09

    摘要： Aluminum electroplating installations containing aprotic electrolyte bath systems typically require an electrolyte operating temperature of over 80.degree. C. in order to achieve useable aluminum precipitations. The warming-up and heating of such aluminum electrolyte baths has heretofore been accomplished with indirect heating methods, such as surrounding the baths with a heating jacket or by conducting electrolyte out of the bath through a heat exchanger and then returning the heated electrolyte. The present invention concerns a more efficient heating method whereby Joule's heat is used to heat an aprotic electrolyte bath. Accordingly, at least two electrodes are immersed into the electrolyte and charged with alternating pulses by a square wave pulse generator such that a heating current flows through the electrolyte. The anodes and cathodes of the aluminization electrolyte bath are preferably used as the heating electrodes.

    摘要翻译： 包含非质子电解液浴系统的铝电镀设备通常需要电解液操作温度超过80℃，以便实现可用的铝沉淀。 迄今为止，这种铝电解液的加热和加热是通过间接加热方法完成的，例如用加热套围绕浴，或者通过热交换器将电解质从浴中导出，然后返回加热的电解质。 本发明涉及一种更有效的加热方法，其中焦耳热用于加热非质子电解液浴。 因此，将至少两个电极浸入电解质中并用方波脉冲发生器以交替脉冲充电，使得加热电流流过电解质。 优选使用镀铝电解液槽的阳极和阴极作为加热电极。

    Highly heat-resistant positive resists comprising end-capped hydroxypolyamides
    60.
    发明授权
    Highly heat-resistant positive resists comprising end-capped hydroxypolyamides 失效
    包含封端的羟基聚酰胺的高耐热正性抗蚀剂

    公开(公告)号：US5376499A

    公开(公告)日：1994-12-27

    申请号：US880139

    申请日：1992-05-07

    申请人： Albert Hammerschmidt ,  Siegfried Birkle ,  Hellmut Ahne

    发明人： Albert Hammerschmidt ,  Siegfried Birkle ,  Hellmut Ahne

    IPC分类号： C08L77/10 ,  C08G73/10 ,  C08L77/00 ,  G03F7/022 ,  G03F7/023 ,  G03F7/037 ,  G03F7/039 ,  G03F7/30 ,  G03F7/40 ,  H01L21/027 ,  H01L21/312

    CPC分类号： G03F7/0233 ,  Y10S430/107

    摘要： Cost-effective, highly heat-resistant positive resists based on oligomer and/or polymer polybenzoxazole precursors and diazo quinones possess a high [level of] stability in storage when the polybenzoxazole precursors are hydroxypolyamides of the following structure: ##STR1## whereby R, R*, R.sub.1, R*.sub.1, and R.sub.2 are aromatic groups, R.sub.3 is an aliphatic, cycloaliphatic or aromatic group having at least one alkenyl or alkynyl grouping and, with respect to n.sub.1, n.sub.2 and n.sub.3, the following applies:n.sub.1 =1 to 100, n.sub.3 and n.sub.3 =0 orn.sub.1 and n.sub.2 =1 to 100, n.sub.3 =0 orn.sub.2 =1 to 100, n.sub.1 and n.sub.3 =0 orn.sub.1, n.sub.2 and n.sub.3 =1 to 100 (whereby R.noteq.R* and/or R.noteq.R*.sub.1) orn.sub.1 and n.sub.3 =1 to 100, n.sub.2 =0 (whereby R.noteq.R* and/or R.sub.1 .noteq.R*.sub.1) ,provided that: n.sub.1 +n.sub.2 +n.sub.3 >3.

    摘要翻译： 当聚苯并恶唑前体是具有以下结构的羟基酰胺时，基于低聚物和/或聚合物聚苯并恶唑前体和重氮醌的成本有效的高耐热正性抗蚀剂在储存中具有高的[水平的]稳定性： + TR 3。