公开(公告)号：US06999492B2

公开(公告)日：2006-02-14

申请号：US10713583

申请日：2003-11-14

Applicant: Hubertus von Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei V. Govorkov

Inventor： Hubertus von Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei V. Govorkov

IPC: H01S3/097

CPC classification number: H01S3/097 ,  H01S3/225

Abstract: An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

Abstract translation: 无油脉冲发生器设计可用于生产更轻，生产成本更低，比现有系统简单的准分子或分子氟激光系统。 这样的设计允许将相对较低的DC电压施加到主变压器，允许脉冲发生器在没有油冷却的情况下运行。 该相对低的电压可以增加到驱动激光系统所需的所需电压水平，例如达到12kV至15kV。 可以使用诸如并联脉冲充电的一对电容器元件之类的标准组件来实现该转移，但是可以在其中一个电容器元件上的电荷反转之后串联放电。

公开(公告)号：US06965624B2

公开(公告)日：2005-11-15

申请号：US10338779

申请日：2003-01-06

Applicant: Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

Inventor： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

IPC: G02B5/18 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225 ,  H01S3/00 ,  H01S3/09 ,  H01S3/097 ,  H01S3/22

CPC classification number: G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

Abstract: A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

Abstract translation: 提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。 分子氟以初始分压提供，并在激光放电室内耗尽。 每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选地每次注射小于0.2毫巴，或者已经在其中的2％的量的7％ 在激光室内。 可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。 每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。 驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。 在每个范围内，气体注入和气体替换优选基于对放电的总施加电能和/或时间和/或脉冲计数进行。

公开(公告)号：US06898216B1

公开(公告)日：2005-05-24

申请号：US09574921

申请日：2000-05-19

Applicant: Jürgen Kleinschmidt

Inventor： Jürgen Kleinschmidt

IPC: G02B5/32 ,  G02B27/48 ,  G03F7/20 ,  H01L21/027 ,  H01S3/00 ,  H01S3/10 ,  H01S3/225

CPC classification number: G03F7/70583 ,  G02B5/32 ,  G02B27/48 ,  H01S3/005 ,  H01S3/225

Abstract: Speckle of a laser beam is reduced by inserting an anti-speckle apparatus in the beam path to disrupt its spatial coherence while maintaining its temporal coherence. In one embodiment, the anti-speckle apparatus is a phase retarder plate bearing periodic optically-coated regions. Transmission or reflection of the beam through coated and uncoated regions causes an internal phase shift of first beam portions relative to second beam portions, thereby disrupting spatial coherence. Size and thickness of the coated regions can be carefully tailored to meet requirements of stepper and scanner equipment manufacturers for maximum allowable spatial coherence expressed as a minimum permissible number of coherent cells across the beam cross-section. An alternative embodiment of an anti-speckle apparatus is a scattering plate bearing a roughened surface. Transmission or reflection of the beam by the roughened surface disrupts the beam's spatial coherence. The correlation length and/or surface height of structures on the roughened surface of the scattering plate may be adjusted to achieve desired divergency and spatial coherence. A liquid matching medium or solid overcoating may be contacted with the roughened surface to adjust the index of refraction at the interface with the roughened surface. The anti-speckle apparatus may serve to outcouple the laser beam, as well, and a fly eye lens may be positioned after the anti-speckle appartus.

Abstract translation: 激光束的斑点通过在光束路径中插入抗散斑装置来破坏其空间相干性同时保持其时间相干性而减小。 在一个实施例中，抗斑斑装置是带有周期性光学涂覆区域的相位延迟板。 通过涂覆和未涂覆区域的光束的透射或反射导致第一光束部分相对于第二光束部分的内部相移，从而破坏空间相干性。 涂层区域的尺寸和厚度可以仔细定制，以满足步进器和扫描仪设备制造商的要求，以最大允许空间相干性表示为横梁横截面上的最小允许数量的相干单元。 抗斑斑装置的替代实施例是带有粗糙表面的散射板。 粗糙表面的光束的传播或反射破坏了光束的空间相干性。 可以调节散射板的粗糙表面上的结构的相关长度和/或表面高度以实现期望的发散和空间相干性。 液体匹配介质或固体外涂层可以与粗糙表面接触以调节与粗糙表面的界面处的折射率。 抗斑斑装置也可以用于外接激光束，并且可以在抗散斑贴片之后定位飞眼镜片。

公开(公告)号：US06868106B1

公开(公告)日：2005-03-15

申请号：US10001954

申请日：2001-10-31

Applicant: Klaus Vogler

Inventor： Klaus Vogler

IPC: H01S3/08 ,  H01S3/106 ,  H01S3/225 ,  H01S3/22 ,  H01S3/09 ,  H01S3/097 ,  H01S3/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber filled with a laser gas mixture at least including a halogen-containing molecular species and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, and a resonator for generating a laser beam including an optical component made of MgF2. The optical component made of MgF2 has been previously cleaved along a predetermined plane, such that the refractive indices of the birefringent MgF2 material for orthogonal polarization components of the beam are either at least approximately equal so that the polarization of the beam due to the influence of the birefringent nature of the MgF2 material is not substantially reduced, or are approximately maximum so that at least a portion of one of the components is rejected by the resonator so that the polarization of the beam is increased due to the birefringent nature of the MgF2.

Abstract translation: 准分子或分子氟激光系统包括填充有至少包含含卤素分子种类和缓冲气体的激光气体混合物的放电室，在放电室内连接到用于激发气体混合物的放电电路的多个电极，以及 用于产生包括由MgF 2制成的光学部件的激光束的谐振器。 由MgF2制成的光学部件已经预先沿着预定平面切割，使得用于光束的正交偏振分量的双折射MgF 2材料的折射率至少近似相等，使得由于影响的光束的偏振 MgF 2材料的双折射性质基本上不降低，或近似为最大值，使得这些组分中的一种的至少一部分被谐振器排斥，从而由于MgF 2的双折射性质而使光束的偏振增加。

公开(公告)号：US06862307B2

公开(公告)日：2005-03-01

申请号：US09858147

申请日：2001-05-14

Applicant: Rustem Osmanow ,  Uwe Stamm ,  Andreas Targsdorg

Inventor： Rustem Osmanow ,  Uwe Stamm ,  Andreas Targsdorg

IPC: H01S3/097 ,  H01S3/08 ,  H01S3/0975 ,  H01S3/098 ,  H01S3/225 ,  H01S3/00 ,  H01S3/22

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/0975

Abstract: Method and system for providing an excimer or molecular fluorine laser including a laser tube filled with a laser gas surrounded by an optical resonator, where the laser tube has multiple electrodes including a pair of main discharge electrodes connected to a discharge circuit for exciting the laser gas to produce a laser output beam. The discharge circuit has an all solid state switch and preferably does not include a transformer. The solid state switch includes multiple solid state devices that may be capable of switching voltages in excess of 12 kV, such as 14-32 kV or more, or the voltage needed to switch the laser. The series of switches has a rise time of approximately less than 300 ns, and preferably around 100 ns or less. The switch may be capable of switching voltages of slightly more than half, but less than the entire voltage needed to produce laser pulses of desired energies, and a voltage doubling circuit may be used to produce the voltage required to produce the desired output pulse energies. An oscillator-amplifier configuration may be used, wherein an oscillator switch may be capable of switching voltages less than the entire voltage needed to produce the desired laser pulse energies, while the amplifier amplifies the pulses to the desired pulse energies.

Abstract translation: 用于提供准分子或分子氟激光的方法和系统，其包括填充有由光学谐振器包围的激光气体的激光管，其中激光管具有多个电极，其包括连接到用于激发激光气体的放电电路的一对主放电电极 以产生激光输出光束。 放电电路具有全固态开关，并且优选地不包括变压器。 固态开关包括多个固态器件，其能够切换超过12kV的电压，例如14-32kV或更高，或切换激光所需的电压。 该系列开关具有大约小于300ns的上升时间，优选地在约100ns以下。 该开关可能能够切换稍大于一半但小于产生所需能量的激光脉冲所需的整个电压的电压，并且可以使用倍压电路来产生产生所需输出脉冲能量所需的电压。 可以使用振荡器放大器配置，其中振荡器开关可以能够切换小于产生所需激光脉冲能量所需的整个电压的电压，而放大器将脉冲放大到期望的脉冲能量。

公开(公告)号：US06839375B1

公开(公告)日：2005-01-04

申请号：US10236036

申请日：2002-09-04

Applicant: Peter Lokai ,  Farid Seddighi

Inventor： Peter Lokai ,  Farid Seddighi

IPC: G01N21/25 ,  G01N21/64 ,  G01N21/958 ,  H01J65/08 ,  H01S3/08

CPC classification number: G01N21/958 ,  G01N21/6402

Abstract: Some of the key optical components of lithography lasers are very sensitive to intensive UV radiation. Intensive UV radiation can cause color center formation in these components. The color centers are reason for laser energy dropping, worse laser-bandwidth and limited life-time. The on-line monitoring of the color-center formation during operation of the lithography lasers detecting laser induced fluorescence and investigation of the fluorescence spectrum can be helpful for maintenance of lithography lasers. The fluorescence signal is analyzed and delivers information about optics quality.

公开(公告)号：US20020105995A1

公开(公告)日：2002-08-08

申请号：US10036848

申请日：2001-11-06

Applicant: Lambda Physik AG

Inventor： Sergei V. Govorkov ,  Gonxue Hua

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/106 ,  H01S3/2258

Abstract: A molecular fluorine laser system for generating a laser output beam around 157 nm includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator. The resonator includes at least one optic for selecting a primary line including suppressing a secondary line among multiple characteristic photoemission lines around 157 nm. The same or a different optic, which may be intracavity or alternatively extracavity, may be configured for polarizing the selected line so that the output beam has a polarization of at least substantially 95% when the beam exits the laser system.

Abstract translation: 用于产生约157nm的激光输出光束的分子氟激光系统包括：填充有分子氟和缓冲气体的气体混合物的放电室，放电室内的多个电极，并连接到用于激发气体混合物的放电电路;以及 谐振器。 谐振器包括至少一个用于选择主线的光学器件，包括抑制157nm附近的多个特征光电子发射线中的次级线。 可以将相同或不同的光学元件（其可以是腔内或可选地为外腔）配置为使所选择的线偏振，使得当光束离开激光系统时，输出光束具有至少基本上95％的偏振。

公开(公告)号：US20020101902A1

公开(公告)日：2002-08-01

申请号：US10114620

申请日：2002-04-01

Applicant: Lambda Physik AG

Inventor： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Thomas Schroeder

IPC: H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225

Abstract: A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

公开(公告)号：US20020101900A1

公开(公告)日：2002-08-01

申请号：US10001217

申请日：2001-11-30

Applicant: Lambda Physik AG

Inventor： Sergei V. Govorkov ,  Gongxue Hua

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/106 ,  H01S3/2258

Abstract: A molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator for generating an output beam. The resonator includes at least one wavelength selection optic for selecting a primary line among multiple characteristic photoemission lines around 157 nm including suppressing a secondary line among the plurality of characteristic photoemission lines around 157 nm to below 1%. The resonator further includes at least one polarizing optic for polarizing the selected line so that the output beam has a polarization of at least substantially 95%, and preferably 97.5% or more.

Abstract translation: 分子氟激光系统包括：填充有至少包括分子氟和缓冲气体的气体混合物的放电室，放电室内的多个电极并连接到用于激励气体混合物的放电电路，以及用于产生输出光束的谐振器 。 谐振器包括至少一个波长选择光学器件，用于在157nm以下的多个特征光发射线中选择一条主线，包括抑制157nm附近的多个特征光电子发射线中的次级线至低于1％。 谐振器还包括至少一个偏振光学器件，用于偏振所选择的线，使得输出光束具有至少大致为95％，优选为97.5％或更大的极化。

公开(公告)号：US20020075933A1

公开(公告)日：2002-06-20

申请号：US10077328

申请日：2002-02-15

Applicant: Lambda Physik AG

Inventor： Uwe Stamm ,  Sergei V. Govorkov

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/0057 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/081 ,  H01S3/0812 ,  H01S3/106 ,  H01S3/1062 ,  H01S3/1305 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2258 ,  Y10S372/70

Abstract: A narrow band molecular fluorine laser system includes an oscillator and an amplifier, wherein the oscillator produces a 157 nm beam having a linewidth less than 1 pm and the amplifier increases the power of the beam above a predetermined amount, such as more than one or several Watts. The oscillator includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, electrodes within the discharge chamber connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam having a wavelength around 157 nm. Line-narrowing optics are included intra- and/or extra-resonator for reducing the linewidth of the laser beam to less than 1 pm. The amplifier may be the same or a different discharge chamber, and optical and/or electronic delays may be used for timing pulses from the oscillator to reach the amplifier at a maximum in the discharge current of the amplifier.

Abstract translation: 窄带分子氟激光系统包括振荡器和放大器，其中振荡器产生具有小于1μm的线宽的157nm波束，并且放大器将波束的功率增加到高于预定量，例如多于一个或多个 瓦特。 所述振荡器包括：填充有分子氟和缓冲气体的激光气体的放电室，所述放电室内的电极连接到用于激励分子氟的放电电路;以及谐振器，包括所述放电室，用于产生具有波长 约157nm。 线狭窄光学器件包括内部和/或超谐振器，用于将激光束的线宽减小到小于1 pm。 放大器可以是相同的或不同的放电室，并且光学和/或电子延迟可用于来自振荡器的定时脉冲以放大器的放电电流中的最大值到达放大器。