Method and device for gas sensing
    52.
    发明授权
    Method and device for gas sensing 失效
    气体检测方法和装置

    公开(公告)号:US6109094A

    公开(公告)日:2000-08-29

    申请号:US809905

    申请日:1997-06-19

    CPC分类号: G01N33/005 G01N27/4141

    摘要: A gas sensing device having a semiconductor substrate, wherein the semiconductor substrate is covered by an insulator layer, on which an intermediate layer is formed, and subsequently covered by a gas sensing catalytic layer, wherein the intermediate layer and the catalytic layer are made of different materials. The gas sensing device may optionally have dispersed between the insulator layer and the intermediate layer a catalytic metal layer. The gas sensing device provides improved stability and speed of response, even when used at high ambient temperatures, such as temperatures found in combustion systems. A method for making the gas sensing device is also disclosed.

    摘要翻译: PCT No.PCT / SE95 / 01084 Sec。 371日期:1997年6月19日 102(e)日期1996年6月19日PCT提交1995年9月22日PCT公布。 第WO96 / 09534号公报 日期:1996年3月28日一种具有半导体衬底的气体感测装置,其中半导体衬底由绝缘体层覆盖,其上形成有中间层,并随后被气体感测催化层覆盖,其中中间层和催化剂 层由不同的材料制成。 气体感测装置可以可选地在绝缘体层和中间层之间分散有催化金属层。 气体传感装置即使在高环境温度下使用时也能提供更好的稳定性和响应速度,例如在燃烧系统中发现的温度。 还公开了一种用于制造气体感测装置的方法。

    Method for gaseous component indentification with #3 polymeric film
    53.
    发明授权
    Method for gaseous component indentification with #3 polymeric film 失效
    用#3聚合物膜进行气态成分识别的方法

    公开(公告)号:US5071770A

    公开(公告)日:1991-12-10

    申请号:US608852

    申请日:1990-11-05

    IPC分类号: G01N27/414

    CPC分类号: G01N27/4141

    摘要: A sensor having an interdigitated gate electrode field effect transistor (IGEFET) coupled to an electron beam evaporated copper phthalocyanine thin film is used to selectively detect parts-per-billion concentration levels of atmosphere contaminants such as nitrogen dioxide (NO.sub.2) and diisopropyl methylphosphonate (DIMP). The sensor is excited with a voltage pulse, and its time- and frequency-domain response are examined. The envelopes of the magnitude of the normalized difference frequency spectrums reveal features which unambiguously distinguish the NO.sub.2 and DIMP exposures.

    摘要翻译: 使用具有与电子束蒸发的铜酞菁薄膜耦合的叉指式栅电极场效应晶体管(IGEFET)的传感器来选择性地检测大气污染物(例如二氧化氮(NO 2))和二异丙基甲基膦酸盐(DIMP )。 传感器用电压脉冲激励,并检查其时域和频域响应。 归一化差分频谱幅度的包络揭示了明确区分NO2和DIMP曝光的特征。

    Apparatus and method for measuring the concentration of components in
fluids

    公开(公告)号:US4411741A

    公开(公告)日:1983-10-25

    申请号:US338943

    申请日:1982-01-12

    申请人: Jiri Janata

    发明人: Jiri Janata

    CPC分类号: G01N27/4141

    摘要: An apparatus and method for measuring the concentration of various components in a fluid sample. The apparatus comprises a chemically sensitive field effect transistor (CHEMFET) having a semiconductor substrate and a pair of diffusion regions formed at the surface of the substrate. An electrical insulating layer is positioned adjacent the substrate and a fluid pervious bridge member is mounted to the insulating layer so as to form a gap between the bridge member and insulating layer. The apparatus also includes means for imposing an electrical charge on the bridge member, means for imposing an electrical potential between the diffusion regions, and means for detecting current flow between the diffusion regions. The fluid sample to be analyzed is introduced through the fluid pervious bridge member and into the gap where various components of the fluid sample are adsorbed by the bridge member, and in another embodiment, also by an adsorptive layer which is applied within the gap. The adsorptive layer can be specifically chosen so as to render the apparatus chemically selective of one or more fluid components.