Semiconductor manufacturing method and apparatus
    52.
    发明申请
    Semiconductor manufacturing method and apparatus 审中-公开
    半导体制造方法和装置

    公开(公告)号:US20050150516A1

    公开(公告)日:2005-07-14

    申请号:US10486207

    申请日:2002-05-14

    CPC classification number: H01L21/02238 H01L21/31138 H01L21/31658

    Abstract: The present invention aims to provide processes and equipments for manufacturing semiconductors, according to which oxidation of wafer surfaces can be controlled by simple means and contaminants promoting oxidation and contaminants inviting a decreased yield of wafers can also be totally controlled. To achieve the object above, the present invention provides a process for manufacturing a semiconductor, characterized in that a substrate is treated while exposing the surface of the substrate with a negative ion-enriched gas; and an equipment for manufacturing a semiconductor comprising a gas channel through which a gas to be treated is passed; a negative ion-enriched gas generator consisting of a gas cleaner located at an upstream part of said gas channel and a negative ion generator located at a downstream part thereof: and means for supplying the resulting negative ion-enriched gas to the surface of each substrate.

    Abstract translation: 本发明的目的在于提供制造半导体的工艺和设备,根据该工艺和设备可以通过简单的手段控制晶片表面的氧化,并且可以完全控制促进氧化的污染物和引起晶片产量降低的污染物。 为了实现上述目的,本发明提供一种制造半导体的方法,其特征在于,在用负离子富集气体暴露基板的表面的同时对基板进行处理; 以及用于制造半导体的设备,包括通过待处理气体的气体通道; 由位于所述气体通道的上游部分的气体清洁器和位于其下游部分的负离子发生器组成的负离子富集气体发生器和用于将所得负离子富集气体供应到每个基板的表面的装置 。

    Electrochemistry technical field
    53.
    发明申请
    Electrochemistry technical field 有权
    电化学技术领域

    公开(公告)号:US20050139484A1

    公开(公告)日:2005-06-30

    申请号:US10507659

    申请日:2003-03-11

    Abstract: The invention relates to novel methods for affecting, controlling and/or directing various reactions and/or reaction pathways or systems by exposing one or more components in a holoreaction system to at least one spectral energy pattern. In a first aspect of the invention, at least one spectral energy pattern can be applied to a reaction system. In a second aspect of the invention, at least one spectral energy conditioning pattern can be applied to a conditioning reaction system. The spectral energy conditioning pattern can, for example, be applied at a separate location from the reaction vessel (e.g., in a conditioning reaction vessel) or can be applied in (or to) the reaction vessel, but prior to other reaction system participants being introduced into the reaction vessel.

    Abstract translation: 本发明涉及通过将一种或多种组合物暴露于至少一种光谱能量图案来影响,控制和/或指导各种反应和/或反应途径或系统的新方法。 在本发明的第一方面中,至少一种光谱能量图案可以应用于反应系统。 在本发明的第二方面,至少一种光谱能量调节模式可以应用于调理反应系统。 例如,光谱能量调节图案可以在与反应容器(例如在调节反应容器中)分开的位置处施加,或者可以应用于反应容器中(或到其中),但在其它反应系统参与者之前 引入反应容器。

    Accelerated plasma clean
    54.
    发明申请
    Accelerated plasma clean 有权
    加速等离子清洁

    公开(公告)号:US20050103266A1

    公开(公告)日:2005-05-19

    申请号:US10968420

    申请日:2004-10-18

    CPC classification number: C23C16/4405 Y10S134/902 Y10S438/905

    Abstract: A method and apparatus that reduces the time required to clean a processing chamber employing a reactive plasma cleaning process. A plasma is formed in an Astron fluorine source generator from a flow of substantially pure inert-source gas. After formation of the plasma, a flow of a fluorine source gas is introduced therein such that the fluorine source flow accelerates at a rate no greater than 1.67 standard cubic centimeters per second2 (scc/s2). In this fashion, the plasma contains a plurality of radicals and dissociated inert-source gas atoms, defining a cleaning mixture. The ratio of inert-source gas to fluorine source is greater than 1:1.

    Abstract translation: 一种减少使用反应性等离子体清洗工艺清洁处理室所需时间的方法和装置。 在基本上纯的惰性气体气体的流中,在Astron氟源发生器中形成等离子体。 在形成等离子体之后,引入氟源气体的流动,使得氟源流以不大于1.67标准立方厘米/秒的速度加速(scc / s < 2 )。 以这种方式,等离子体包含多个自由基和解离的惰性气体原子,限定清洁混合物。 惰性气体与氟源的比例大于1:1。

    Electrochemical surface treatment
    58.
    发明授权
    Electrochemical surface treatment 失效
    电化学表面处理

    公开(公告)号:US5997722A

    公开(公告)日:1999-12-07

    申请号:US103690

    申请日:1998-06-24

    CPC classification number: C25F3/04 G03G5/10 G03G5/102

    Abstract: A method for producing a photoreceptor having a substrate subjected to a surface finishing treatment to result in a finished substrate surface, wherein the method includes:(a) analyzing the finished substrate surface by performing a first surface energy reading, a first ellipsometry reading, a first x-ray diffraction reading, and a first profilometry reading;(b) removing electrochemically via an alternating voltage or alternating current a portion of the finished substrate surface, thereby resulting in a cleaned substrate surface;(c) analyzing the cleaned substrate surface by performing a second surface energy reading, a second ellipsometry reading, a second x-ray diffraction reading, and a second profilometry reading, wherein the removing step (b) is accomplished to the extent that the second surface energy reading and the second ellipsometry reading are measurably changed from the first surface energy reading and the first ellipsometry reading, but the second x-ray diffraction reading and the second profilometry reading are measurably unchanged from the first x-ray diffraction reading and the first profilometry reading; and(d) depositing a layer of the photoreceptor on the cleaned substrate surface.

    Abstract translation: 一种制造感光体的方法,所述感光体具有进行了表面精加工处理以得到成品基材表面的基材,其中所述方法包括:(a)通过执行第一表面能读数,第一椭偏仪读数, 第一次x射线衍射读数和第一轮廓测量读数; (b)通过交流电压或交流电一部分完成的衬底表面电化学去除,由此导致清洁的衬底表面; (c)通过执行第二表面能读数,第二椭偏仪读数,第二x射线衍射读数和第二轮廓测量读数来分析所清洁的衬底表面,其中所述去除步骤(b)完成到第二 表面能读数和第二椭偏仪读数从第一表面能读数和第一椭偏仪读数可测量地改变,但第二x射线衍射读数和第二轮廓测量读数与第一x射线衍射读数和第 轮廓测量读数; 和(d)将感光体层沉积在清洁的基底表面上。

    Process and device for electrolytic treatment of continuous running
material
    59.
    发明授权
    Process and device for electrolytic treatment of continuous running material 失效
    连续运行材料的电解处理工艺和装置

    公开(公告)号:US5938913A

    公开(公告)日:1999-08-17

    申请号:US838522

    申请日:1997-04-08

    CPC classification number: C25D21/12 C25F7/00

    Abstract: Process for electrolytic treatment of continuous running material in which the material runs through an electrolytic liquid and electric potential is applied to the material. In order to guarantee freedom from differential potential in the material to be treated in any form of electrolytic treatment, the differential potential in the treated material is measured after electrolytic treatment and at least the same degree of inverse compensating potential is applied to the material. In an apparatus to implement the process, comprising at least one treatment tank to hold the electrolytic liquid and through which the material being treated is guided by means of guide rolls, as well as comprising at least one pair of electrodes to apply electric potential in the material, at least one device is included to achieve this aim and which is used to measure the differential potential of the treated material, together with at least one pair of additional electrodes connected to an adjustable rectifier, where the device for measuring the differential potential is connected to the controlling part of the rectifier.

    Abstract translation: 用于电解处理连续运行材料的方法,其中材料穿过电解液体并且电势被施加到材料上。 为了确保在任何形式的电解处理中待处理的材料中不受电位的差异,在电解处理后测量处理材料中的微分电位,并且至少对材料施加相同程度的反向补偿电位。 在实施该方法的装置中,包括至少一个处理槽以保持电解液,并且被处理的材料通过该导向辊被引导,并且包括至少一对电极以在电解液中施加电势 包括至少一个装置以实现该目的并且用于测量经处理的材料的差分电位以及连接到可调节整流器的至少一对附加电极,其中用于测量差分电位的装置是 连接到整流器的控制部分。

    Method of and apparatus for manufacturing metallic fiber and the twine
of metallic fibers, and method of coloring metallic fiber and the twine
of metallic fibers
    60.
    发明授权
    Method of and apparatus for manufacturing metallic fiber and the twine of metallic fibers, and method of coloring metallic fiber and the twine of metallic fibers 失效
    金属纤维和金属纤维缠绕的方法和设备,以及金属纤维和金属纤维的缠绕方法

    公开(公告)号:US5858200A

    公开(公告)日:1999-01-12

    申请号:US862702

    申请日:1997-05-23

    Abstract: A method of manufacturing a metallic fiber in which from a convergent extended wire, which is formed by a metallic fiber and a matrix member which is formed of a metallic material and whose dissolvability is higher than the dissolvability of the metallic fiber, the matrix member is continuously dissolved and removed by an electrolytic processing in a plurality of electrolytic tanks which are arranged in the conveying direction of the convergent extended wire, wherein: the convergent extended wire is passed through electrolytes in the plurality of electrolytic tanks, which are arranged in the shape of a gentle convex arch at the vertical direction upper side which includes the conveying passage of the convergent extended wire, the convergent extended wire is passed above a plurality of feeding devices which are provided at the outer sides of the electrolytes and which are disposed in the same arch-shape so as to correspond to the electrolytic tanks, in each of the plurality of electrolytic tanks, the metallic fiber is maintained in one of a cathode reduction area and a passivation area, or alternatively, anode current is maintained at a predetermined potential which is closer to 0, and the matrix member is anode-electrolyzed. At this time, a method of manufacturing the twine of metallic fibers, further including the step of: intertwining the convergent extended member in the unit of two to four before the electrolytic processing, while the convergent extended member is formed by a forming device in a spiral shape whose diameter is larger than the diameter of a closely-intertwined twine.

    Abstract translation: 一种金属纤维的制造方法,其特征在于,从由金属纤维形成的会聚延长线和由金属材料形成的矩阵构件,其溶解性高于金属纤维的溶解性的金属纤维的矩阵构件为 通过在会聚延长线的输送方向上配置的多个电解槽中的电解处理连续地溶解除去,其中:会聚延长线穿过多个电解槽中的电解质,其形状为 在包括会聚延长线的输送通道的垂直方向上侧具有平缓的凸拱,收敛的延伸线在设置在电解质外侧的多个供给装置的上方通过, 相同的拱形,以便在多个电解中的每一个中对应于电解槽 金属纤维保持在阴极还原区域和钝化区域中的一个中,或者,阳极电流保持在更接近0的预定电位,并且基体元件被阳极电解。 此时,制造金属纤维线的方法,还包括以下步骤:在电解处理之前将会聚延伸构件缠绕在二至四单位之间,而会聚延伸构件由成形装置形成在 螺旋形的直径大于紧密缠绕的麻绳的直径。

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