Silicon-on-insulator substrate and method of forming
    61.
    发明授权
    Silicon-on-insulator substrate and method of forming 失效
    绝缘体上硅衬底及其成型方法

    公开(公告)号:US08536035B2

    公开(公告)日:2013-09-17

    申请号:US13363603

    申请日:2012-02-01

    CPC classification number: H01L21/76254

    Abstract: Silicon-on-insulator (SOI) structures and related methods of forming such structures. In one case, a method includes providing a silicon-on-insulator (SOI) handle substrate having: a substantially uniform resistivity profile along a depth of the handle substrate; and an interstitial oxygen (Oi) concentration of less than approximately 10 parts per million atoms (ppma). The method further includes counter-doping a surface region of the handle, causing the surface region to have a resistivity greater than approximately 3 kOhm-cm, and joining the surface region of the handle substrate with a donor wafer.

    Abstract translation: 绝缘体上硅(SOI)结构和形成这种结构的相关方法。 在一种情况下,一种方法包括提供绝缘体上硅(SOI)手柄衬底,其具有:沿着手柄衬底的深度的基本均匀的电阻率分布; 和间隙氧(Oi)浓度小于约10ppm(ppma)。 所述方法还包括对所述手柄的表面区域进行反掺杂,使所述表面区域具有大于约3kOhm-cm的电阻率,并且将所述手柄衬底的表面区域与施主晶片接合。

    DIFFUSION BARRIER FOR OPPOSITELY DOPED PORTIONS OF GATE CONDUCTOR
    62.
    发明申请
    DIFFUSION BARRIER FOR OPPOSITELY DOPED PORTIONS OF GATE CONDUCTOR 有权
    用于门式导体的对位部分的扩散障碍物

    公开(公告)号:US20130181293A1

    公开(公告)日:2013-07-18

    申请号:US13352851

    申请日:2012-01-18

    CPC classification number: H01L21/823842 H01L21/28052

    Abstract: A method patterns a polysilicon gate over two immediately adjacent, opposite polarity transistor devices. The method patterns a mask over the polysilicon gate. The mask has an opening in a location where the opposite polarity transistor devices abut one another. The method then removes some (a portion) of the polysilicon gate through the opening to form at least a partial recess (or potentially a complete opening) in the polysilicon gate. The recess separates the polysilicon gate into a first polysilicon gate and a second polysilicon gate. After forming the recess, the method dopes the first polysilicon gate using a first polarity dopant and dopes the second polysilicon gate using a second polarity dopant having an opposite polarity of the first polarity dopant.

    Abstract translation: 一种在两个紧邻的相反极性的晶体管器件上形成多晶硅栅极的方法。 该方法在多晶硅栅极上形成掩模。 掩模在相反极性晶体管器件彼此邻接的位置处具有开口。 然后,该方法通过开口去除多晶硅栅极的一些(一部分),以在多晶硅栅极中形成至少一个部分凹槽(或潜在的完整开口)。 凹槽将多晶硅栅极分离成第一多晶硅栅极和第二多晶硅栅极。 在形成凹槽之后,该方法使用第一极性掺杂剂掺杂第一多晶硅栅极,并使用具有与第一极性掺杂剂相反极性的第二极性掺杂剂掺杂第二多晶硅栅极。

    PASSIVATED THROUGH WAFER VIAS IN LOW-DOPED SEMICONDUCTOR SUBSTRATES
    63.
    发明申请
    PASSIVATED THROUGH WAFER VIAS IN LOW-DOPED SEMICONDUCTOR SUBSTRATES 有权
    通过低压半导体衬底中的波形钝化

    公开(公告)号:US20130026646A1

    公开(公告)日:2013-01-31

    申请号:US13193991

    申请日:2011-07-29

    CPC classification number: H01L21/76898 H01L21/26586 H01L29/732

    Abstract: A method for forming passivated through wafer vias, passivated through wafer via structures, and passivated through wafer via design structures. The method includes: forming a through wafer via in a semiconductor substrate, the through wafer via comprising an electrical conductor extending from a top of the semiconductor substrate to a bottom surface of the semiconductor substrate; and forming a doped layer abutting all sidewalls of the electrical conductor, the doped layer of a same dopant type as the semiconductor substrate, the concentration of dopant in the doped layer greater than the concentration of dopant in the semiconductor substrate, the doped layer intervening between the electrical conductor and the semiconductor substrate.

    Abstract translation: 用于形成钝化的晶片通孔的方法,通过晶片通孔结构钝化,并通过设计结构钝化通过晶片。 该方法包括:在半导体衬底中形成贯穿晶片通孔,所述贯通晶片通孔包括从半导体衬底的顶部延伸到半导体衬底的底表面的电导体; 并且形成邻接电导体的所有侧壁的掺杂层,与半导体衬底相同的掺杂剂类型的掺杂层,掺杂层中掺杂剂的浓度大于半导体衬底中掺杂剂的浓度,掺杂层介于 电导体和半导体衬底。

    Variable dynamic range pixel sensor cell, design structure and method
    64.
    发明授权
    Variable dynamic range pixel sensor cell, design structure and method 有权
    可变动态范围像素传感器单元,设计结构和方法

    公开(公告)号:US08233070B2

    公开(公告)日:2012-07-31

    申请号:US12553457

    申请日:2009-09-03

    CPC classification number: H04N5/37452 H01L27/14609 H04N5/35581 H04N5/3575

    Abstract: A pixel sensor cell including a column circuit, a design structure for fabricating the pixel sensor cell including the column circuit and a method for operating the pixel sensor cell including the column circuit are predicated upon the measurement of multiple reference data point and signal data point pairs from a floating diffusion at a variable capacitance. The variable capacitance is provided by excluding or including a transfer gate transistor capacitance in addition to a floating diffusion capacitance. Such a variable capacitance provides variable dynamic ranges for the pixel sensor cell including the column circuit.

    Abstract translation: 包括列电路的像素传感器单元,用于制造包括列电路的像素传感器单元的设计结构和用于操作包括列电路的像素传感器单元的方法基于多个参考数据点和信号数据点对的测量 从可变电容的浮动扩散。 通过排除或包括传输栅极晶体管电容以及浮动扩散电容来提供可变电容。 这种可变电容为包括列电路的像素传感器单元提供了可变的动态范围。

    CMOS IMAGER PHOTODIODE WITH ENHANCED CAPACITANCE
    65.
    发明申请
    CMOS IMAGER PHOTODIODE WITH ENHANCED CAPACITANCE 有权
    具有增强电容的CMOS IMAGER光电二极管

    公开(公告)号:US20120122261A1

    公开(公告)日:2012-05-17

    申请号:US13288686

    申请日:2011-11-03

    Abstract: A method for manufacturing a pixel sensor cell that includes a photosensitive element having a non-laterally disposed charge collection region. The method includes forming a trench recess in a substrate of a first conductivity type material, and filling the trench recess with a material having second conductivity type material. The second conductivity type material is then diffused out of the filled trench material to the substrate region surrounding the trench to form the non-laterally disposed charge collection region. The filled trench material is removed to provide a trench recess, and the trench recess is filled with a material having a first conductivity type material. A surface implant layer is formed at either side of the trench having a first conductivity type material. A collection region of a trench-type photosensitive element is formed of the outdiffused second conductivity type material and is isolated from the substrate surface.

    Abstract translation: 一种制造像素传感器单元的方法,该像素传感器单元包括具有非横向放置的电荷收集区域的感光元件。 该方法包括在第一导电类型材料的衬底中形成沟槽凹槽,并用具有第二导电类型材料的材料填充沟槽凹槽。 然后将第二导电类型材料从填充的沟槽材料扩散到围绕沟槽的衬底区域,以形成非横向布置的电荷收集区域。 去除填充的沟槽材料以提供沟槽凹槽,并且用具有第一导电类型材料的材料填充沟槽凹槽。 表面注入层形成在具有第一导电类型材料的沟槽的任一侧。 沟槽型感光元件的收集区域由向外扩散的第二导电型材料形成,并与衬底表面隔离。

    Self-dicing chips using through silicon vias
    66.
    发明授权
    Self-dicing chips using through silicon vias 失效
    通过硅通孔的自切割芯片

    公开(公告)号:US08168474B1

    公开(公告)日:2012-05-01

    申请号:US12987402

    申请日:2011-01-10

    CPC classification number: H01L21/78 H01L21/76898

    Abstract: Systems and methods simultaneously form first openings and second openings in a substrate. The first openings are formed smaller than the second openings. The method also simultaneously forms a first material in the first openings and the second openings. The first material fills the first openings, and the first material lines the second openings. The method forms a second material different than the first material in the second openings. The second material fills the second openings. The method forms a plurality of integrated circuit structures over the first material and the second material within the second openings. The method applies mechanical stress to the substrate to cause the substrate to split along the first openings.

    Abstract translation: 系统和方法同时在衬底中形成第一开口和第二开口。 第一开口形成为小于第二开口。 该方法还同时在第一开口和第二开口中形成第一材料。 第一材料填充第一开口,第一材料将第二开口排列。 该方法形成与第二开口中的第一材料不同的第二材料。 第二材料填充第二开口。 该方法在第二开口内的第一材料和第二材料上形成多个集成电路结构。 该方法对基板施加机械应力以使基板沿着第一开口分开。

    METHODS FOR ENHANCING QUALITY OF PIXEL SENSOR IMAGE FRAMES FOR GLOBAL SHUTTER IMAGING
    67.
    发明申请
    METHODS FOR ENHANCING QUALITY OF PIXEL SENSOR IMAGE FRAMES FOR GLOBAL SHUTTER IMAGING 有权
    用于增强全球快门成像像素传感器图像质量的方法

    公开(公告)号:US20120038811A1

    公开(公告)日:2012-02-16

    申请号:US13283819

    申请日:2011-10-28

    CPC classification number: H04N5/361 H04N5/359

    Abstract: The image qualify of an image frame from a CMOS image sensor array operated in global shutter mode may be enhanced by dispersing or randomizing the noise introduced by leakage currents from floating drains among the rows of the image frame. Further, the image quality may be improved by accounting for time dependent changes in the output of dark pixels in dark pixel rows or dark pixel columns. In addition, voltage and time dependent changes in the output of dark pixels may also be measured to provide an accurate estimate of the noise introduced to the charge held in the floating drains. Such methods may be employed individually or in combination to improve the quality of the image.

    Abstract translation: 来自在全球快门模式下操作的CMOS图像传感器阵列的图像帧的图像限定可以通过将来自浮动排水口的泄漏电流引入的噪声分散或随机化在图像帧的行中来增强。 此外,通过考虑暗像素行或暗像素列中的暗像素的输出中的时间依赖性变化,可以提高图像质量。 此外,还可以测量暗像素的输出中的电压和时间相关的变化,以提供引入到浮动排水管中的电荷的噪声的准确估计。 这样的方法可以单独使用或组合使用以提高图像的质量。

    INTERFACE DEVICE WITH INTEGRATED SOLAR CELL(S) FOR POWER COLLECTION
    68.
    发明申请
    INTERFACE DEVICE WITH INTEGRATED SOLAR CELL(S) FOR POWER COLLECTION 有权
    具有用于电力收集的集成太阳能电池的界面装置

    公开(公告)号:US20110279399A1

    公开(公告)日:2011-11-17

    申请号:US12779994

    申请日:2010-05-14

    Abstract: Disclosed herein are embodiments of an interface device (e.g., a display, touchpad, touchscreen display, etc.) with integrated power collection functions. In one embodiment, a solar cell or solar cell array can be located within a substrate at a first surface and an array of interface elements can also be located within the substrate at the first surface such that portions of the solar cell(s) laterally surround the individual interface elements or groups thereof. In another embodiment, a solar cell or solar cell array can be located within the substrate at a first surface and an array of interface elements can be located within the substrate at a second surface opposite the first surface (i.e., opposite the solar cell or solar cell array). In yet another embodiment, an array of diodes, which can function as either solar cells or sensing elements, can be within a substrate at a first surface and can be wired to allow for selective operation in either a power collection mode or sensing mode.

    Abstract translation: 这里公开了具有集成的功率收集功能的接口设备(例如,显示器,触摸板,触摸屏显示器等)的实施例。 在一个实施例中,太阳能电池或太阳能电池阵列可以位于第一表面的衬底内,并且界面元件阵列也可以位于第一表面的衬底内,使得太阳能电池的一部分横向包围 各个接口元件或其组合。 在另一个实施例中,太阳能电池或太阳能电池阵列可以位于第一表面的衬底内,并且界面元件的阵列可以位于衬底内的与第一表面相对的第二表面(即,与太阳能电池或太阳能 单元格阵列)。 在另一个实施例中,可以用作太阳能电池或感测元件的二极管阵列可以在第一表面的衬底内,并且可以被布线以允许在电力收集模式或感测模式中的选择性操作。

    HIGH EFFICIENCY CMOS IMAGE SENSOR PIXEL EMPLOYING DYNAMIC VOLTAGE SUPPLY
    69.
    发明申请
    HIGH EFFICIENCY CMOS IMAGE SENSOR PIXEL EMPLOYING DYNAMIC VOLTAGE SUPPLY 失效
    高效CMOS图像传感器像素采用动态电压供应

    公开(公告)号:US20100097511A1

    公开(公告)日:2010-04-22

    申请号:US12641589

    申请日:2009-12-18

    CPC classification number: H04N5/361 G06F17/5063 H04N5/359 H04N5/3745

    Abstract: A global shutter compatible pixel circuit comprising a reset gate (RG) transistor is provided in which a dynamic voltage is applied to the drain of the reset gate transistor in order to reduce a floating diffusion (FD) leakage therethrough during signal hold time. The drain voltage of the reset gate transistor is held at a lower voltage than a circuit supply voltage to minimize the off-state leakage through the RG transistor, thus reducing the change in the voltage at the floating diffusion during the signal hold time. In addition, a design structure for such a circuit providing a dynamic voltage to the drain of a reset gate of a pixel circuit is also provided.

    Abstract translation: 提供了包括复位栅极(RG)晶体管的全局快门兼容像素电路,其中动态电压被施加到复位栅极晶体管的漏极,以便减少在信号保持时间期间通过其的浮动扩散(FD)泄漏。 复位栅极晶体管的漏极电压保持在比电路电源电压更低的电压,以最小化通过RG晶体管的截止状态泄漏,从而减少信号保持时间期间浮动扩散时的电压变化。 此外,还提供了用于向像素电路的复位栅极的漏极提供动态电压的这种电路的设计结构。

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