ELECTRONIC ELEMENT INCLUDING DIELECTRIC STACK
    62.
    发明申请
    ELECTRONIC ELEMENT INCLUDING DIELECTRIC STACK 审中-公开
    电子元件包括电介质堆叠

    公开(公告)号:US20140061869A1

    公开(公告)日:2014-03-06

    申请号:US13600266

    申请日:2012-08-31

    IPC分类号: H01L29/02

    摘要: An electronic element includes a substrate; a patterned first electrically conductive layer on the substrate; a patterned second electrically conductive layer on the substrate; and a dielectric stack on the substrate. A portion of the first electrically conductive layer and a portion of the second electrically conductive layer overlap each other such that an overlap region is present. At least a portion of the dielectric stack is positioned in the overlap region between the patterned first electrically conductive layer and the patterned second electrically conductive layer. The dielectric stack includes a first inorganic thin film dielectric material layer and a second inorganic thin film dielectric material layer. The first inorganic thin film dielectric material layer and the second inorganic thin film dielectric material layer have the same material composition.

    摘要翻译: 电子元件包括基板; 图案化的第一导电层; 图案化的第二导电层; 和基片上的电介质叠层。 第一导电层的一部分和第二导电层的一部分彼此重叠,使得存在重叠区域。 电介质堆叠的至少一部分位于图案化的第一导电层和图案化的第二导电层之间的重叠区域中。 电介质堆叠包括第一无机薄膜电介质材料层和第二无机薄膜电介质材料层。 第一无机薄膜电介质材料层和第二无机薄膜电介质材料层具有相同的材料组成。

    Deposition system for thin film formation
    64.
    发明授权
    Deposition system for thin film formation 有权
    薄膜形成沉积系统

    公开(公告)号:US08182608B2

    公开(公告)日:2012-05-22

    申请号:US11861420

    申请日:2007-09-26

    IPC分类号: C23C16/00

    摘要: An apparatus for maintaining the alignment or positional relationship between at least two coating modules in an ALD system, the apparatus comprising a plurality of coating modules in a coating section, at least a first bar and a second bar for supporting the coating modules, and at least a first bar mounting structure and a second bar mounting structure for supporting the bars, wherein each of the coating modules are supported by the first bar and the second bar, and wherein the combination of the at least two coating modules and the first bar and the second bar define a coating section profile for the output faces of the coating modules. Also disclosed is a process for making such apparatus.

    摘要翻译: 一种用于维持ALD系统中的至少两个涂覆模块之间的对准或位置关系的装置,该装置包括涂覆部分中的多个涂覆模块,至少第一条和用于支撑涂覆模块的第二条,以及在 至少第一杆安装结构和用于支撑杆的第二杆安装结构,其中每个涂覆模块由第一杆和第二杆支撑,并且其中至少两个涂层模块与第一杆和 第二条形状限定了用于涂层模块的输出面的涂层部分轮廓。 还公开了制造这种装置的方法。

    DEPOSITION INHIBITOR COMPOSITION AND METHOD OF USE
    65.
    发明申请
    DEPOSITION INHIBITOR COMPOSITION AND METHOD OF USE 审中-公开
    沉积抑制剂组合物和使用方法

    公开(公告)号:US20110120544A1

    公开(公告)日:2011-05-26

    申请号:US12622660

    申请日:2009-11-20

    摘要: A deposition inhibitor composition includes two compatible solvents. The first solvent has a vapor pressure of at least 10 mm Hg at room temperature and the second solvent has a vapor pressure of less than that of the first solvent. The composition further includes a hydrophilic deposition inhibitor material that is dissolved in the composition. This material is soluble in an aqueous solution that comprises at least 50% by weight of water and has a free acid content of less than 2.5 meq/g. This composition is useful to provide a deposition inhibitor pattern for chemical vapor deposition methods such as an atomic-layer-deposition method for forming a patterned thin film includes applying a hydrophilic deposition inhibitor material to a substrate.

    摘要翻译: 沉积抑制剂组合物包括两种相容的溶剂。 第一溶剂在室温下的蒸汽压至少为10mmHg,第二溶剂的蒸气压小于第一溶剂的蒸气压。 组合物还包括溶解在组合物中的亲水性沉积抑制剂材料。 该材料可溶于包含至少50重量%水并且游离酸含量小于2.5meq / g的水溶液。 该组合物可用于提供用于化学气相沉积方法的沉积抑制剂图案,例如用于形成图案化薄膜的原子层沉积方法,包括将亲水性沉积抑制剂材料施加到基底上。

    FLUID DISTRIBUTION MANIFOLD OPERATING STATE MANAGEMENT SYSTEM
    66.
    发明申请
    FLUID DISTRIBUTION MANIFOLD OPERATING STATE MANAGEMENT SYSTEM 审中-公开
    流体分配管理操作状态管理系统

    公开(公告)号:US20110097492A1

    公开(公告)日:2011-04-28

    申请号:US12606238

    申请日:2009-10-27

    IPC分类号: C23C16/44 C23C16/52

    摘要: A fluid conveyance system for thin film material deposition is provided. A first fluid distribution manifold includes an output face that includes a plurality of elongated slots. The plurality of elongated slots include a source slot and an exhaust slot. A gas source is in fluid communication with the source slot. The gas source is configured to provide a gas to the output face of the distribution manifold. A gas receiving chamber is in fluid communication with the exhaust slot. The gas receiving chamber is configured to collect the gas provided to the output face of the distribution manifold through the exhaust slot. A sensor positioned to sense a parameter of the gas traveling from the gas source to the gas receiving chamber. A controller is connected in electrical communication with the sensor. The controller is configured to modify an operating parameter of the conveyance system based on data received from the sensor.

    摘要翻译: 提供了用于薄膜材料沉积的流体输送系统。 第一流体分配歧管包括包括多个细长槽的输出面。 多个细长槽包括源槽和排气槽。 气源与源槽流体连通。 气源被配置为向分配歧管的输出面提供气体。 气体接收室与排气槽流体连通。 气体接收室构造成通过排气槽收集设置在分配歧管的输出面上的气体。 定位成感测从气体源传播到气体接收室的气体的参数的传感器。 控制器与传感器电连接。 控制器被配置为基于从传感器接收的数据来修改传送系统的操作参数。

    Remotely located pleasure devices
    67.
    发明授权
    Remotely located pleasure devices 有权
    远程定位乐器

    公开(公告)号:US07608037B2

    公开(公告)日:2009-10-27

    申请号:US11531224

    申请日:2006-09-12

    申请人: David H. Levy

    发明人: David H. Levy

    IPC分类号: A61F5/00

    摘要: A sexual preference transfer function that combines the masturbatory action of a first person with the expressed or non-expressed sexual preferences of a second person. A sexual preference transfer function is utilized to improve the control or influence of a sexual pleasure device in contact with a second person based on autonomic and/or manually collected data.

    摘要翻译: 性倾向转移功能,其将第一人的手淫动作与第二人的表达或不表达的性偏好相结合。 使用性偏好转移函数来改善基于自主和/或手动收集的数据与第二人接触的性快乐装置的控制或影响。

    DELIVERY DEVICE FOR DEPOSITION
    68.
    发明申请
    DELIVERY DEVICE FOR DEPOSITION 有权
    递送装置用于沉积

    公开(公告)号:US20090081366A1

    公开(公告)日:2009-03-26

    申请号:US11861402

    申请日:2007-09-26

    IPC分类号: C23C16/00 B21D51/38 F17D1/02

    摘要: A delivery device for thin-film material deposition has at least first, second, and third inlet ports for receiving a common supply for a first, a second and a third gaseous material, respectively. Each of the first, second, and third elongated emissive channels allow gaseous fluid communication with one of corresponding first, second, and third inlet ports. The delivery device can be formed from apertured plates, superposed to define a network of interconnecting supply chambers and directing channels for routing each of the gaseous materials from its corresponding inlet port to a corresponding plurality of elongated emissive channels. The delivery device comprises a diffusing channel formed by a relief pattern between facing plates. Also disclosed is a process for thin film deposition. Finally, more generally, a flow diffuser and a corresponding method of diffusing flow is disclosed.

    摘要翻译: 用于薄膜材料沉积的递送装置具有至少第一,第二和第三入口端口,用于分别接收用于第一,第二和第三气态材料的共同供应。 第一,第二和第三细长发射通道中的每一个允许与对应的第一,第二和第三入口端口之一的气态流体连通。 输送装置可以由孔板形成,叠加以形成互连供应室的网络,并且引导通道用于将每个气态材料从其相应的入口端口路由到相应的多个细长的发射通道。 输送装置包括由相对板之间的浮雕图案形成的扩散通道。 还公开了一种用于薄膜沉积的方法。 最后,更一般地,公开了一种流扩散器和相应的扩散流的方法。

    DEPOSITION SYSTEM FOR THIN FILM FORMATION
    69.
    发明申请
    DEPOSITION SYSTEM FOR THIN FILM FORMATION 有权
    薄膜形成沉积系统

    公开(公告)号:US20090078204A1

    公开(公告)日:2009-03-26

    申请号:US11861420

    申请日:2007-09-26

    IPC分类号: C23C16/00

    摘要: An apparatus for maintaining the alignment or positional relationship between at least two coating modules in an ALD system, the apparatus comprising a plurality of coating modules in a coating section, at least a first bar and a second bar for supporting the coating modules, and at least a first bar mounting structure and a second bar mounting structure for supporting the bars, wherein each of the coating modules are supported by the first bar and the second bar, and wherein the combination of the at least two coating modules and the first bar and the second bar define a coating section profile for the output faces of the coating modules. Also disclosed is a process for making such apparatus.

    摘要翻译: 一种用于维持ALD系统中的至少两个涂覆模块之间的对准或位置关系的装置,该装置包括涂覆部分中的多个涂覆模块,至少第一条和用于支撑涂覆模块的第二条,以及在 至少第一杆安装结构和用于支撑杆的第二杆安装结构,其中每个涂覆模块由第一杆和第二杆支撑,并且其中至少两个涂层模块与第一杆和 第二条形状限定涂层模块的输出面的涂层部分轮廓。 还公开了制造这种装置的方法。

    METHOD OF MAKING THIN FILM TRANSISTORS COMPRISING ZINC-OXIDE-BASED SEMICONDUCTOR MATERIALS
    70.
    发明申请
    METHOD OF MAKING THIN FILM TRANSISTORS COMPRISING ZINC-OXIDE-BASED SEMICONDUCTOR MATERIALS 审中-公开
    制备含有氧化锌基半导体材料的薄膜晶体管的方法

    公开(公告)号:US20080296567A1

    公开(公告)日:2008-12-04

    申请号:US11757549

    申请日:2007-06-04

    IPC分类号: H01L29/22 H01L21/34

    摘要: A method of making a thin film transistor comprising a zinc-oxide-containing semiconductor material and spaced apart first and second electrodes in contact with the material. The co-generation of high quality zinc oxide semiconductor films and contact electrodes is obtained, at low temperatures, using non-vacuum conditions, silver nanoparticles are deposited to form the source and drain and, upon heating, converted to conducting metal. Such an in-situ formation of the silver metal/zinc oxide interface provides superior transistor activity compared to evaporated silver.

    摘要翻译: 一种制造薄膜晶体管的方法,所述薄膜晶体管包括含氧化锌的半导体材料和与所述材料接触的间隔开的第一和第二电极。 在低温下,使用非真空条件获得高质量的氧化锌半导体膜和接触电极的共同产生,沉积银纳米颗粒以形成源极和漏极,并且在加热时转化为导电金属。 与蒸发的银相比,银金属/氧化锌界面的原位形成提供优异的晶体管活性。