Electron beam lithography apparatus using a patterned emitter
    62.
    发明授权
    Electron beam lithography apparatus using a patterned emitter 有权
    使用图案化发射器的电子束光刻设备

    公开(公告)号:US06815681B2

    公开(公告)日:2004-11-09

    申请号:US10465600

    申请日:2003-06-20

    CPC classification number: H01J37/3175 H01J2237/31781

    Abstract: An electron beam lithography apparatus, which uses a patterned emitter, includes a pyroelectric plate emitter that emits electrons using a patterned metal thin layer formed on the pyroelectric plate as a mask. When the emitter is heated, electrons are emitted from portions of the emitter covered with a patterned dielectric layer, and not from portions of the emitter covered with a patterned metal thin layer, and a pattern of the emitter is thereby projected onto a substrate. To prevent dispersion of emitted electron beams, the electron beams may be controlled by a permanent magnet, an electro-magnet, or a deflector unit. A one-to-one or x-to-one projection of a desired pattern on the substrate is thereby obtained.

    Abstract translation: 使用图案化发射器的电子束光刻设备包括使用形成在热电板上的图案化金属薄层作为掩模发射电子的热电板发射器。 当发射极被加热时,电子从被图案化电介质层覆盖的发射体的部分发射,而不是由图案化的金属薄层覆盖的发射体的部分发射,并且因此将发射极的图案投影到衬底上。 为了防止发射的电子束的分散,电子束可以由永磁体,电磁体或偏转器单元来控制。 从而获得在衬底上所需图案的一对一或一对一投影。

    Electron projection lithography apparatus using secondary electrons

    公开(公告)号:US06784438B2

    公开(公告)日:2004-08-31

    申请号:US10688953

    申请日:2003-10-21

    Abstract: An electron projection lithography apparatus using secondary electrons includes a secondary electron emitter which is spaced apart from a substrate holder by a first predetermined interval and has a patterned mask formed on a surface thereof to face the substrate holder, a primary electron emitter which is spaced apart by a second predetermined interval from the secondary electron emitter in a direction opposite to the substrate holder and emits primary electrons to the secondary electron emitter, a second power supply which applies a second predetermined voltage between the substrate holder and the secondary electron emitter, a first power supply which applies a first predetermined voltage between the secondary electron emitter and the primary electron emitter, and a magnetic field generator which controls a path of secondary electrons emitted from the secondary electron emitter.

    Matrix type multiple numeration system ferroelectric random access
memory using leakage current
    64.
    发明授权
    Matrix type multiple numeration system ferroelectric random access memory using leakage current 失效
    矩阵式多计数系统铁电随机存取存储器采用漏电流

    公开(公告)号:US6077716A

    公开(公告)日:2000-06-20

    申请号:US368580

    申请日:1999-08-05

    Applicant: In-kyeong Yoo

    Inventor: In-kyeong Yoo

    CPC classification number: H01L27/11502 G11C11/5657 H01L27/11585 H01L27/1159

    Abstract: The present invention relates to a matrix type multiple numeration system ferroelectric random access memory using a leakage current of dielectric, which is non-volatile and with which a multiple numeration system is realized, and a method for manufacturing the same. In the memory according to the present invention, the unit cells formed of the dielectric and ferroelectric capacitors are arranged in a matrix, the lower electrodes are connected to bit lines, and the upper electrodes are connected to word lines. Thus, a transistor for selecting cells is included for each word line and each bit line. Therefore, it is possible to heighten the integration degree, since the memory cells are each formed of only a dielectric and a ferroelectric capacitor, and to improve productivity since manufacturing processes are simple.

    Abstract translation: 本发明涉及使用非易失性的电介质的漏电流并实现多计数系统的矩阵式多计数系统铁电随机存取存储器及其制造方法。 在根据本发明的存储器中,由电介质和铁电电容器形成的单电池以矩阵形式布置,下电极连接到位线,并且上电极连接到字线。 因此,用于选择单元的晶体管包括每个字线和每个位线。 因此,由于存储单元仅由电介质和铁电体电容器构成,所以可以提高积分度,并且由于制造工艺简单,所以提高了生产率。

    Matrix type multiple numeration system ferroelectric random access
memory using leakage current

    公开(公告)号:US5986298A

    公开(公告)日:1999-11-16

    申请号:US961883

    申请日:1997-10-31

    Applicant: In-kyeong Yoo

    Inventor: In-kyeong Yoo

    CPC classification number: H01L27/11502 G11C11/5657 H01L27/11585 H01L27/1159

    Abstract: The present invention relates to a matrix type multiple numeration system ferroelectric random access memory using a leakage current of dielectric, which is non-volatile and with which a multiple numeration system is realized, and a method for manufacturing the same. In the memory according to the present invention, the unit cells formed of the dielectric and ferroelectric capacitors are arranged in a matrix, the lower electrodes are connected to bit lines, and the upper electrodes are connected to word lines. Thus, a transistor for selecting cells is included for each word line and each bit line. Therefore, it is possible to heighten the integration degree, since the memory cells are each formed of only a dielectric and a ferroelectric capacitor, and to improve productivity since manufacturing processes are simple.

    Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device
    66.
    发明授权
    Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device 有权
    纳米结构声光装置,以及使用纳米结构声光装置的光学扫描器,光学调制器和全息显示装置

    公开(公告)号:US09477101B2

    公开(公告)日:2016-10-25

    申请号:US13360616

    申请日:2012-01-27

    Abstract: An acousto-optic device capable of increasing a range of a diffraction angle of output light by using a nanostructured acousto-optic medium, and an optical scanner, an optical modulator, a two-dimensional/three-dimensional (2D/3D) conversion stereoscopic image display apparatus, and a holographic display apparatus using the acousto-optic device. The acousto-optic device may include a nanostructured acousto-optic medium formed by at least two different mediums repeatedly alternating with each other, wherein at least one of the at least two different mediums includes an acousto-optic medium. The acousto-optic device having the aforementioned structure may increase the range of a diffraction angle of output light. Thus, various systems such as the optical scanner, the optical modulator, the 2D/3D conversion stereoscopic image display apparatus, and the holographic display apparatus may not require a separate optical system to increase an operational angle range, thereby decreasing a size of the system and/or improving a resolution of the system.

    Abstract translation: 一种能够通过使用纳米结构的声光介质和光学扫描器,光学调制器,二维/三维(2D / 3D)转换立体视觉增强输出光的衍射角的范围的声光器件 图像显示装置和使用该声光装置的全息显示装置。 声光装置可以包括由至少两个不同介质形成的纳米结构的声光介质,所述至少两个介质彼此重复交替,其中所述至少两种不同介质中的至少一种包括声光介质。 具有上述结构的声光装置可以增加输出光的衍射角的范围。 因此,诸如光学扫描器,光学调制器,2D / 3D转换立体图像显示装置和全息显示装置的各种系统可能不需要单独的光学系统来增加操作角度范围,从而减小系统的尺寸 和/或提高系统的分辨率。

    Apparatuses for and methods of displaying three-dimensional images
    67.
    发明授权
    Apparatuses for and methods of displaying three-dimensional images 有权
    显示三维图像的装置和方法

    公开(公告)号:US08633868B2

    公开(公告)日:2014-01-21

    申请号:US12659156

    申请日:2010-02-26

    Abstract: An apparatus for displaying a three-dimensional (3D) image may include a plurality of display panels and a controller configured to apply image signals to each of the plurality of display panels. At least one of the display panels may include a transparent display panel. The plurality of display panels may be spaced apart from each other in a depth direction. A method of displaying a three-dimensional (3D) image may include displaying plane images on each of a plurality of display panels. At least one of the plurality of display panels may include a transparent display panel. The plurality of display panels may be spaced apart from each other in a depth direction.

    Abstract translation: 用于显示三维(3D)图像的装置可以包括多个显示面板和被配置为将图像信号应用于多个显示面板中的每一个的控制器。 至少一个显示面板可以包括透明显示面板。 多个显示面板可以在深度方向上彼此间隔开。 显示三维(3D)图像的方法可以包括在多个显示面板的每一个上显示平面图像。 多个显示面板中的至少一个可以包括透明显示面板。 多个显示面板可以在深度方向上彼此间隔开。

    OPTICAL ELEMENTS AND INFORMATION STORAGE DEVICES INCLUDING THE SAME
    70.
    发明申请
    OPTICAL ELEMENTS AND INFORMATION STORAGE DEVICES INCLUDING THE SAME 有权
    光学元件和信息存储设备,包括它们

    公开(公告)号:US20120257484A1

    公开(公告)日:2012-10-11

    申请号:US13297713

    申请日:2011-11-16

    CPC classification number: G11C13/06 G02B5/008 G02F2203/10

    Abstract: An optical element and an information storage device including the same. The optical element may include an optical waveguide structure for transforming circularly polarized light into plasmon and transmitting the plasmon. The optical waveguide structure may emit a circularly polarized plasmonic field. The optical element may be used in an information storage device. For example, the information storage device may include a recording medium and a recording element for recording information on the recording medium, and the recording element may include the optical element. The information may be recorded on the recording medium by using the circularly polarized plasmonic field generated by the optical element.

    Abstract translation: 光学元件和包括该元件的信息存储装置。 光学元件可以包括用于将圆偏振光转换成等离子体并传输等离子体的光波导结构。 光波导结构可以发射圆偏振等离子体场。 光学元件可以用在信息存储装置中。 例如,信息存储装置可以包括用于在记录介质上记录信息的记录介质和记录元件,并且记录元件可以包括光学元件。 信息可以通过使用由光学元件产生的圆偏振等离子体场来记录在记录介质上。

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