Manufacturing semiconductor devices
    62.
    发明授权
    Manufacturing semiconductor devices 有权
    制造半导体器件

    公开(公告)号:US08563378B2

    公开(公告)日:2013-10-22

    申请号:US13238104

    申请日:2011-09-21

    IPC分类号: H01L21/336

    摘要: A semiconductor device includes a semiconductor pattern on a substrate, gate structures on sidewalls of the semiconductor pattern, the gate structures being spaced apart from one another, insulating interlayers among the gate structures, wherein an uppermost insulating interlayer is lower than an upper face of the semiconductor pattern, a common source line contacting the substrate and protruding above the uppermost insulating interlayer, an etch stop layer pattern on the semiconductor pattern and on the common source line wherein the common source line protrudes above the uppermost insulating interlayer, an additional insulating interlayer on the uppermost insulating interlayer, and contact plugs extending through the additional insulating interlayer so as to make contact with the semiconductor pattern and the common source line, respectively.

    摘要翻译: 半导体器件包括衬底上的半导体图案,半导体图案的侧壁上的栅极结构,栅极结构彼此间隔开,栅极结构之间的绝缘夹层,其中最上层的绝缘中间层低于栅极结构的上表面 半导体图案,与基板接触并突出在最上层绝缘夹层之上的公共源极线,在半导体图案上的公共源极线上的共同源极线上的蚀刻停止层图案,其中共同源极线突出在最上面的绝缘中间层之上,在 最上层的绝缘中间层和延伸穿过附加绝缘夹层的接触插塞分别与半导体图案和公共源极线接触。

    Semiconductor device
    63.
    发明授权
    Semiconductor device 失效
    半导体器件

    公开(公告)号:US08222742B2

    公开(公告)日:2012-07-17

    申请号:US12457290

    申请日:2009-06-05

    IPC分类号: H01L23/48

    摘要: A semiconductor device includes a lower semiconductor layer with first conductive regions and including at least one dummy first conductive region, an upper semiconductor layer with second conductive regions on the lower semiconductor layer and including at least one dummy second conductive region, a penetration hole in the upper semiconductor layer and penetrating the dummy second conductive region and the upper semiconductor layer under the dummy second conductive region, a lower conductive line on the lower semiconductor layer and electrically connected to the first conductive regions, an upper conductive line on the upper semiconductor layer and electrically connected to the second conductive regions, and a first conductive plug in the penetration hole between the lower conductive line and the upper conductive line, the first conductive plug electrically connecting the lower and upper conductive lines and being spaced apart from sidewalls of the penetration hole.

    摘要翻译: 半导体器件包括具有第一导电区域并且包括至少一个虚设第一导电区域的下半导体层,在下半导体层上具有第二导电区域的上半导体层,并且包括至少一个虚拟第二导电区域, 上半导体层并且穿过虚设第二导电区域和虚设第二导电区域下的上半导体层,在下半导体层上的下导电线并且电连接到第一导电区域,在上半导体层上的上导电线, 电连接到第二导电区域,以及在下导电线路和上导电线路之间的穿透孔中的第一导电插塞,第一导电插头电连接下导电线路和上导电线路并与穿孔的侧壁间隔开 。

    Semiconductor device
    66.
    发明申请
    Semiconductor device 失效
    半导体器件

    公开(公告)号:US20090315187A1

    公开(公告)日:2009-12-24

    申请号:US12457290

    申请日:2009-06-05

    IPC分类号: H01L23/522

    摘要: A semiconductor device includes a lower semiconductor layer with first conductive regions and including at least one dummy first conductive region, an upper semiconductor layer with second conductive regions on the lower semiconductor layer and including at least one dummy second conductive region, a penetration hole in the upper semiconductor layer and penetrating the dummy second conductive region and the upper semiconductor layer under the dummy second conductive region, a lower conductive line on the lower semiconductor layer and electrically connected to the first conductive regions, an upper conductive line on the upper semiconductor layer and electrically connected to the second conductive regions, and a first conductive plug in the penetration hole between the lower conductive line and the upper conductive line, the first conductive plug electrically connecting the lower and upper conductive lines and being spaced apart from sidewalls of the penetration hole.

    摘要翻译: 半导体器件包括具有第一导电区域并且包括至少一个虚设第一导电区域的下半导体层,在下半导体层上具有第二导电区域的上半导体层,并且包括至少一个虚拟第二导电区域, 上半导体层并且穿过虚设第二导电区域和虚设第二导电区域下的上半导体层,在下半导体层上的下导电线并且电连接到第一导电区域,在上半导体层上的上导电线, 电连接到第二导电区域,以及在下导电线路和上导电线路之间的穿透孔中的第一导电插塞,第一导电插头电连接下导电线路和上导电线路并与穿孔的侧壁间隔开 。

    Vertical memory devices and methods of manufacturing the same
    69.
    发明授权
    Vertical memory devices and methods of manufacturing the same 有权
    垂直存储器件及其制造方法

    公开(公告)号:US08772857B2

    公开(公告)日:2014-07-08

    申请号:US13221380

    申请日:2011-08-30

    IPC分类号: H01L29/788

    CPC分类号: H01L27/11582 H01L29/7926

    摘要: A vertical memory device includes a channel, a ground selection line (GSL), word lines and a string selection line (SSL). The channel extends in a first direction substantially perpendicular to a top surface of a substrate, and a thickness of the channel is different according to height. The GSL, the word lines and the SSL are sequentially formed on a sidewall of the channel in the first direction and spaced apart from each other.

    摘要翻译: 垂直存储器件包括通道,接地选择线(GSL),字线和字符串选择线(SSL)。 通道沿基本上垂直于基板的顶表面的第一方向延伸,并且通道的厚度根据高度而不同。 GSL,字线和SSL顺序地形成在通道的第一方向的侧壁上并且彼此间隔开。

    Semiconductor memory device
    70.
    发明申请
    Semiconductor memory device 审中-公开
    半导体存储器件

    公开(公告)号:US20100001337A1

    公开(公告)日:2010-01-07

    申请号:US12456537

    申请日:2009-06-18

    IPC分类号: H01L29/792 H01L29/66

    摘要: A semiconductor memory device includes: sequentially stacked first and second semiconductor layers; at least one first memory transistor disposed on the first semiconductor layer; and at least one second memory transistor disposed on the second semiconductor layer, wherein a gate electrode of the first memory transistor has a broader width than that of the second memory transistor.

    摘要翻译: 半导体存储器件包括:顺序堆叠的第一和第二半导体层; 设置在所述第一半导体层上的至少一个第一存储晶体管; 以及设置在所述第二半导体层上的至少一个第二存储晶体管,其中所述第一存储晶体管的栅电极具有比所述第二存储晶体管宽的宽度。