公开(公告)号：US20060156975A1

公开(公告)日：2006-07-20

申请号：US11180364

申请日：2005-07-13

申请人： Fan Sze ,  Quanyuan Shang ,  John White

发明人： Fan Sze ,  Quanyuan Shang ,  John White

IPC分类号： B05D5/12 ,  B05C5/00 ,  B05B7/06

CPC分类号： G02F1/133516 ,  G02F1/133512

摘要： Embodiments of the invention describe an apparatus and a method for treating a substrate of flat panel display is provided. In one embodiment, an inkjet printing system for a substrate of flat panel display comprises a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display, a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage, and an inkjet printing module that dispenses inkjet on the substrate of flat panel display. In another embodiment, a processing system for a substrate of flat panel display comprises a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display wherein the chemical compound application assembly has a chemical compound applicator whose width substantially spans the width of the substrate of flat panel display, and a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage. In another embodiment, a method of processing a substrate of flat panel display comprises depositing a layer comprising a chemical compound on the surface of a substrate of flat panel display by a chemical compound application assembly, whose width spans substantially the width of the substrate of flat panel display, of a processing system, and then inkjetting at least three colors on the substrate of flat panel display by an inkjet printing module of the processing system.

摘要翻译： 本发明的实施例提供了一种用于处理平板显示器的基板的设备和方法。 在一个实施例中，用于平板显示器的基板的喷墨打印系统包括在平板显示器的基板上施加化学化合物的化合物施加组件，支撑平板显示器的基板的台阶和平台定位 移动台的系统以及在平板显示器的基板上分配喷墨的喷墨打印模块。 在另一个实施例中，一种用于平板显示器的基板的处理系统包括化学化合物应用组件，该化合物施用组件在平板显示器的基板上施加化学化合物，其中化合物施用组件具有化学复合施用器，其宽度基本上跨越 平板显示器的基板的宽度，以及支撑平板显示器的基板的台和使台阶移动的台架定位系统。 在另一个实施例中，一种处理平板显示器的基板的方法包括通过化学化合物施加组件在平板显示器的基板的表面上沉积包含化合物的层，其宽度基本上跨过平面的基板的宽度 面板显示器，然后通过处理系统的喷墨打印模块在平板显示器的基板上喷墨至少三种颜色。

公开(公告)号：US07031600B2

公开(公告)日：2006-04-18

申请号：US10409466

申请日：2003-04-07

申请人： Sanjay D. Yadav ,  Quanyuan Shang ,  Wendell T. Blonigan

发明人： Sanjay D. Yadav ,  Quanyuan Shang ,  Wendell T. Blonigan

IPC分类号： C23C14/00

CPC分类号： C23C16/402 ,  C23C16/4485

摘要： A method and apparatus for depositing a dielectric material at a rate of at least 3000 Angstroms per minute on a large area substrate that has a surface area of at least about 0.35 square meters is provided. In one embodiment, the dielectric material is silicon oxide. Also provided is a large area substrate having a layer of dielectric material deposited by a process yielding a deposition rate in excess of about 3000 Angstroms per minute and a processing chamber for fabricating the same.

公开(公告)号：US20050255244A1

公开(公告)日：2005-11-17

申请号：US11188375

申请日：2005-07-25

申请人： Li Hou ,  Quanyuan Shang ,  Robert Greene

发明人： Li Hou ,  Quanyuan Shang ,  Robert Greene

IPC分类号： H01L21/687 ,  C23C16/00 ,  H05H1/24

CPC分类号： H01L21/68742 ,  H01L21/68778

摘要： A method for lifting a substrate from a susceptor. A plurality of lift pins is configured so that they support the substrate without contacting a central portion of the substrate. The processed substrate has a first dimension that is at least 500 millimeters and a second dimension that is at least 500 millimeters. Each lift pin in the plurality of lift pins is configured so that it supports the substrate from a point that is at least 120 millimeters from a center of the substrate. The plurality of lift pins is configured so that each side of the susceptor is supported by at least three lift pins. In some embodiments, a support member overlies at least a subset of the plurality of lift pins.

摘要翻译： 一种用于从基座提起基板的方法。 多个提升销构造成使得它们支撑基板而不接触基板的中心部分。 经处理的基底具有至少500毫米的第一尺寸和至少500毫米的第二尺寸。 多个提升销中的每个提升销被构造成使得其从距衬底的中心至少120毫米的点支撑衬底。 多个提升销构造成使得基座的每侧由至少三个提升销支撑。 在一些实施例中，支撑构件覆盖多个提升销的至少一个子集。

公开(公告)号：US20050253917A1

公开(公告)日：2005-11-17

申请号：US10845629

申请日：2004-05-13

申请人： Quanyuan Shang ,  Fan Cheung Sze ,  John White

发明人： Quanyuan Shang ,  Fan Cheung Sze ,  John White

IPC分类号： G02B5/20 ,  B41M5/20 ,  B41M7/00 ,  G02B5/23 ,  G02F1/1335

CPC分类号： G02F1/133516 ,  B41M7/0072 ,  B41M7/0081

摘要： A method for forming color filters for flat panel displays comprising dispensing color inks into a pre-patterned matrix using an inkjet device and curing the dispensed color inks. In one aspect, the color inks are cured in a concave configuration. In another aspect, the color inks are cured using electron beam, laser, X-ray, or other suitable high energy source.

摘要翻译： 一种用于形成用于平板显示器的滤色器的方法，包括使用喷墨装置将彩色油墨分散到预先图案化的基质中并固化所分配的彩色油墨。 在一个方面，彩色油墨以凹形构型固化。 另一方面，彩色油墨使用电子束，激光，X射线或其他合适的高能量源固化。

公开(公告)号：US06869838B2

公开(公告)日：2005-03-22

申请号：US10118864

申请日：2002-04-09

申请人： Kam Law ,  Quanyuan Shang ,  William Reid Harshbarger ,  Dan Maydan

发明人： Kam Law ,  Quanyuan Shang ,  William Reid Harshbarger ,  Dan Maydan

IPC分类号： H01L21/336 ,  H01L27/10

CPC分类号： H01L29/66757 ,  H01L29/66765 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of passivation layer deposition using a cyclical deposition process is described. The cyclical deposition process may comprise alternately adsorbing a silicon-containing precursor and a reactant gas on a substrate structure. Thin film transistors, such as a bottom-gate transistor or a top-gate transistor, including a silicon-containing passivation layer, may be formed using such cyclical deposition techniques.

摘要翻译： 描述了使用循环沉积工艺的钝化层沉积的方法。 循环沉积工艺可以包括在衬底结构上交替地吸附含硅前体和反应气体。 可以使用这种循环沉积技术来形成包括含硅钝化层的诸如底栅晶体管或顶栅晶体管的薄膜晶体管。

公开(公告)号：US06858548B2

公开(公告)日：2005-02-22

申请号：US10125961

申请日：2002-04-18

申请人： Tae Kyung Won ,  Quanyuan Shang ,  William R. Harshbarger

发明人： Tae Kyung Won ,  Quanyuan Shang ,  William R. Harshbarger

IPC分类号： C23C16/40 ,  C23C16/509 ,  G02F1/1362 ,  H01L21/77 ,  H01L21/84 ,  H01L27/12 ,  H01L21/31 ,  H01L21/469

CPC分类号： G02F1/1362 ,  C23C16/401 ,  C23C16/5096 ,  G02F1/136227 ,  H01L27/1248 ,  Y10T428/31663

摘要： A process for depositing a low dielectric constant layer (k

摘要翻译： 一种用于在平板显示器和平板显示器上沉积低介电常数层（k <3）的工艺。 该方法包括使一种或多种有机硅化合物与含氧化合物以约0.345W / cm 2至约1.265W / cm 2的RF功率水平反应。 平板显示器包括具有第一基板，沉积在第一基板上的多个屏障，第二基板，沉积在第二基板上的低介电常数层（k <3）的等离子体显示面板，以及多个接地电极 形成在阻挡层和电介质层之间。

公开(公告)号：US06765178B2

公开(公告)日：2004-07-20

申请号：US10025152

申请日：2001-12-18

申请人： Quanyuan Shang ,  Janine Kardokus ,  Akihiro Hosokawa

发明人： Quanyuan Shang ,  Janine Kardokus ,  Akihiro Hosokawa

IPC分类号： F27B514

CPC分类号： H01L21/67109

摘要： Embodiments of the invention generally provide an apparatus and a method for providing a uniform thermal profile to a plurality of substrates during heat processing. In one embodiment, a cassette containing one or more heated substrate supports is moveably disposed within a heating chamber having an about uniform thermal profile therein to more uniformly heat the substrates.

摘要翻译： 本发明的实施例通常提供一种用于在热处理期间向多个基板提供均匀热分布的装置和方法。 在一个实施例中，包含一个或多个加热的衬底支撑件的盒可移动地设置在其中具有大致均匀的热分布的加热室内，以更均匀地加热衬底。

公开(公告)号：US06432255B1

公开(公告)日：2002-08-13

申请号：US09494581

申请日：2000-01-31

申请人： Sheng Sun ,  Quanyuan Shang ,  William R. Harshbarger ,  Robert I. Greene

发明人： Sheng Sun ,  Quanyuan Shang ,  William R. Harshbarger ,  Robert I. Greene

IPC分类号： H05H100

CPC分类号： H01L21/67063 ,  H01L21/67069

摘要： A system for processing substrates within a chamber and for cleaning accumulated material from chamber components is provided. The system includes a reactive species generator adapted to generate a reactive gas species for chemically etching accumulated material from chamber components, and a processing chamber having at least one component with a mirror polished surface which is exposed to the reactive species. Preferably to have the greatest impact on chamber cleaning efficiency, the mirror polished surface is a surface of a component such as a gas distribution plate or a backing plate, and/or is a surface of a plurality of smaller components (e.g., chamber wall liners, a gas conductance line, etc.) so as to constitute a large percentage of the surface area exposed to the reactive species. Most preferably all bare aluminum surfaces which the reactive species contacts are mirror polished.

摘要翻译： 提供了一种用于在室内处理基板并且用于从腔室部件清洗积聚的材料的系统。 该系统包括适于产生反应性气体种类的反应物种发生器，用于从腔室部件化学蚀刻积聚的材料，以及处理室，其具有至少一个具有暴露于反应性物质的镜面抛光表面的部件。 优选地，对室清洁效率具有最大的影响，镜面抛光表面是诸如气体分配板或背板的部件的表面，和/或是多个较小部件的表面（例如，室壁衬套 ，气体导电线等），以便构成暴露于反应性物质的大部分表面积。 最优选地，反应性物质接触的所有裸铝表面被镜面抛光。

公开(公告)号：US08449950B2

公开(公告)日：2013-05-28

申请号：US12862244

申请日：2010-08-24

申请人： Quanyuan Shang ,  Lu Yang ,  Karl M. Brown ,  Donald J. K. Olgado ,  Victor Pebenito ,  Hooman Bolandi ,  Tetsuya Ishikawa ,  Robert Z. Bachrach ,  Liang-Yuh Chen

发明人： Quanyuan Shang ,  Lu Yang ,  Karl M. Brown ,  Donald J. K. Olgado ,  Victor Pebenito ,  Hooman Bolandi ,  Tetsuya Ishikawa ,  Robert Z. Bachrach ,  Liang-Yuh Chen

IPC分类号： C23C4/06 ,  C23C4/08 ,  B05D3/00 ,  B05D3/14 ,  H05H1/24

CPC分类号： H01M4/0419 ,  H01M4/1391

摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

摘要翻译： 提供一种用于形成薄膜电池的电化学层的方法和装置。 包含分散在携带介质中的前体颗粒的前体混合物通过施加电场在活化室中活化，以电离至少一部分前体混合物。 然后将活化的前体混合物与可燃气体混合物混合，以向前体颗粒添加热能，将其转化成沉积在基材上的纳米晶体。 当第二前体沉积在表面上以增强粘附性和导电性时，可与纳米晶体共混。

公开(公告)号：US08372205B2

公开(公告)日：2013-02-12

申请号：US11182168

申请日：2005-07-15

申请人： Soo Young Choi ,  Beom Soo Park ,  Quanyuan Shang ,  John M. White ,  Dong-Kil Yim ,  Chung-Hee Park

发明人： Soo Young Choi ,  Beom Soo Park ,  Quanyuan Shang ,  John M. White ,  Dong-Kil Yim ,  Chung-Hee Park

IPC分类号： H01L21/306 ,  C23C16/00 ,  C23F1/00

CPC分类号： C23C16/4581 ,  B24C1/06 ,  B24C1/10 ,  B24C3/322 ,  C23C16/4404 ,  C23C16/545 ,  C25D11/04 ,  C25D11/16 ,  C25D11/18 ,  H01J37/32082 ,  H01J37/32477 ,  H01J37/32559 ,  H01J37/32715 ,  H01L21/68757

摘要： A substrate support and method for fabricating the same are provided. In one embodiment of the invention, a substrate support includes an electrically conductive body having a substrate support surface that is covered by an electrically insulative coating. At least a portion of the coating centered on the substrate support surface has a surface finish of between about 200 to about 2000 micro-inches. In another embodiment, a substrate support includes an anodized aluminum body having a surface finish on the portion of the body adapted to support a substrate thereon of between about 200 to about 2000 micro-inches. In one embodiment, a substrate support assembly includes an electrically conductive body having a substrate support surface, a substrate support structure that is adapted to support the conductive body and the conductive body is covered by an electrically insulative coating.

摘要翻译： 提供了一种基板支撑件及其制造方法。 在本发明的一个实施例中，衬底支撑件包括具有由电绝缘涂层覆盖的衬底支撑表面的导电体。 以基板支撑表面为中心的涂层的至少一部分具有介于约200至约2000微英寸之间的表面光洁度。 在另一个实施例中，衬底支撑件包括阳极化铝体，其在主体部分上具有表面光洁度，其适于在其上支撑约200至约2000微英寸的衬底。 在一个实施例中，衬底支撑组件包括具有衬底支撑表面的导电体，适于支撑导电体的衬底支撑结构，并且导电体被电绝缘涂层覆盖。