公开(公告)号：US20110065265A1

公开(公告)日：2011-03-17

申请号：US12949268

申请日：2010-11-18

申请人： Hitoshi KASAI ,  Takuji Okahisa ,  Shunsuke Fujita ,  Naoki Matsumoto ,  Hideuki Ijiri ,  Fumitaka Sato ,  Kensaku Motoki ,  Seiji Nakahata ,  Koji Uematsu ,  Ryu Hirota

发明人： Hitoshi KASAI ,  Takuji Okahisa ,  Shunsuke Fujita ,  Naoki Matsumoto ,  Hideuki Ijiri ,  Fumitaka Sato ,  Kensaku Motoki ,  Seiji Nakahata ,  Koji Uematsu ,  Ryu Hirota

IPC分类号： H01L21/20

CPC分类号： H01L21/02617 ,  C23C16/303 ,  C23C16/4405 ,  C23C16/4488 ,  C30B23/02 ,  C30B25/02 ,  C30B29/403

摘要： A fabrication method of a group III nitride crystal substance includes the steps of cleaning the interior of a reaction chamber by introducing HCl gas into the reaction chamber, and vapor deposition of a group III nitride crystal substance in the cleaned reaction chamber. A fabrication apparatus of a group III nitride crystal substance includes a configuration to introduce HCl gas into the reaction chamber, and a configuration to grow a group III nitride crystal substance by HVPE. Thus, a fabrication method of a group III nitride crystal substance including the method of effectively cleaning deposits adhering inside the reaction chamber during crystal growth, and a fabrication apparatus employed in the fabrication method are provided.

摘要翻译： III族氮化物晶体物质的制造方法包括以下步骤：通过将HCl气体引入反应室来清洗反应室的内部，并将III族氮化物结晶物质气相沉积在清洁的反应室中。 III族氮化物晶体物质的制造装置包括将HCl气体引入反应室的结构，以及通过HVPE生长III族氮化物结晶物质的结构。 因此，提供了包括在晶体生长期间有效清洁附着在反应室内的沉积物的方法的III族氮化物晶体物质的制造方法以及制造方法中使用的制造装置。

公开(公告)号：US07795897B1

公开(公告)日：2010-09-14

申请号：US12412364

申请日：2009-03-27

申请人： Yasuhiro Urabe ,  Naoki Matsumoto ,  Yuji Kuwana

发明人： Yasuhiro Urabe ,  Naoki Matsumoto ,  Yuji Kuwana

IPC分类号： G01R31/26

CPC分类号： G01R31/2889 ,  G01R31/31924

摘要： Provided is a test apparatus that tests a device under test, comprising a driver circuit that generates an output signal according to a prescribed input pattern, and supplies the output signal to the device under test; and a measuring section that measures a response signal output by the device under test to judge the acceptability of the device under test, wherein the driver circuit includes an input gate drive section that selects one of a plurality of input drive voltages supplied thereto, according to a logic value of the input pattern, and outputs the selected input drive voltage; a voltage switching section that includes a transistor and that outputs the output signal according to the drain voltage of the transistor, the transistor having a gate terminal that receives the input drive voltage output by the input gate drive section and a source terminal to which is applied a prescribed reference voltage; and an input drive voltage supplying section that generates the input drive voltages according to the reference voltage, and supplies the input drive voltages to the input gate drive section.

摘要翻译： 提供了一种测试被测设备的测试装置，包括根据规定的输入模式产生输出信号的驱动电路，并将输出信号提供给被测器件; 以及测量部，其测量由所述被测设备输出的响应信号，判断被测设备的可接受性，其中，所述驱动电路包括：输入栅极驱动部，其根据所述输入栅极驱动部选择供给的多个输入驱动电压中的一个， 输入图案的逻辑值，并输出所选择的输入驱动电压; 电压切换部，其包括晶体管，并且根据所述晶体管的漏极电压输出所述输出信号，所述晶体管具有接收由所述输入栅极驱动部输出的输入驱动电压的栅极端子和施加到所述输入栅极驱动部的源极端子 规定的参考电压; 以及输入驱动电压供给部，其根据所述基准电压生成所述输入驱动电压，并将所述输入驱动电压提供给所述输入栅极驱动部。

公开(公告)号：US07692441B2

公开(公告)日：2010-04-06

申请号：US12136049

申请日：2008-06-10

申请人： Naoki Matsumoto ,  Takashi Sekino

发明人： Naoki Matsumoto ,  Takashi Sekino

IPC分类号： G01R31/26

CPC分类号： G01R31/31924 ,  G01R31/3191

摘要： There is provided a test apparatus including a driver that outputs a test signal to a device under test, a first switch that switches whether to connect the driver to the device under test, a comparator that receives an output signal from the device under test via the first switch, and compares a voltage of the output signal with a predetermined reference voltage, a reference voltage input section that inputs the reference voltage into the comparator, a second switch that is provided between the reference voltage input section and the comparator, and a dummy resistance that is connected at one end thereof to a connection point between the comparator and the second switch and at the other end thereof to a predetermined potential. Here, a resistance ratio between an output resistance of the driver and an on-resistance of the first switch is substantially equal to a resistance ratio between the dummy resistance and an on-resistance of the second switch.

摘要翻译： 提供了一种测试装置，包括将测试信号输出到被测设备的驱动器，切换是否将驱动器连接到被测器件的第一开关，比较器，经由该测试装置从被测器件接收输出信号 第一开关，将输出信号的电压与规定的基准电压进行比较，将基准电压输入到比较器的基准电压输入部，设置在基准电压输入部和比较器之间的第二开关， 电阻在其一端连接到比较器和第二开关之间的连接点，另一端连接到预定电位。 这里，驱动器的输出电阻和第一开关的导通电阻之间的电阻比基本上等于虚拟电阻和第二开关的导通电阻之间的电阻比。

公开(公告)号：US07573639B2

公开(公告)日：2009-08-11

申请号：US12146717

申请日：2008-06-26

申请人： Naoki Matsumoto

发明人： Naoki Matsumoto

IPC分类号： G02B1/10

CPC分类号： G02B5/204

摘要： A terahertz band optical filter having a dielectric multilayer periodic structure in which a plurality of dielectric materials are periodically layered. Multi-cavity layers each having an optical path length of n times λ/2 (n is an integer greater than or equal to 1) and made of a low-refractive index medium are arranged. The cavity layers are coupled using a single-layer coupling layer having an optical path length λ/4 and made of a high-refractive index medium, thus forming a multi-cavity structure. Matching layers each including a high refractive index layer and a low refractive index layer each having an optical path length of λ/4 are disposed at either end of the multi-cavity structure.

摘要翻译： 一种具有电介质多层周期性结构的太赫波带滤光器，其中多个电介质材料周期性地分层。 布置具有n倍λ/ 2（n是大于或等于1的整数）并且由低折射率介质制成的光程长度的多腔层。 使用具有光路长度λ/ 4并由高折射率介质制成的单层耦合层耦合腔层，从而形成多腔结构。 在多腔结构的任一端设置各自包括高折射率层和低折射率层的匹配层，每层具有λ/ 4的光程。

公开(公告)号：US07528637B2

公开(公告)日：2009-05-05

申请号：US11495144

申请日：2006-07-28

申请人： Naoki Matsumoto ,  Takashi Sekino

发明人： Naoki Matsumoto ,  Takashi Sekino

IPC分类号： H03K3/00

CPC分类号： G01R31/31924 ,  H03F3/3076 ,  H03F3/45085 ,  H03F2200/504 ,  H03F2200/516 ,  H03F2203/45508 ,  H03F2203/45702 ,  H03F2203/7203

摘要： A driver circuit for outputting an output signal corresponding to an input signal given to the driver circuit, includes a voltage generating unit for outputting a basic output voltage corresponding to the input signal, a first buffer circuit for outputting an output voltage corresponding to the basic output voltage outputted by the voltage generating unit, a second buffer circuit, of which power consumption is larger than the first buffer circuit, for generating and outputting a voltage corresponding to the output voltage as the output signal, a simulating circuit including a simulating buffer circuit for generating a simulated voltage corresponding to the basic output voltage outputted by the voltage generating unit, the simulating buffer circuit having substantially the same characteristic as that of the first buffer circuit, and a controlling unit for controlling the basic output voltage outputted by the voltage generating unit based on the simulated voltage.

摘要翻译： 用于输出与给予驱动电路的输入信号对应的输出信号的驱动电路包括用于输出对应于输入信号的基本输出电压的电压产生单元，用于输出与基本输出对应的输出电压的第一缓冲电路 由电压产生单元输出的电压，第二缓冲电路，其功耗大于第一缓冲电路，用于产生和输出与输出电压相对应的电压作为输出信号;模拟电路，包括模拟缓冲电路， 产生与电压产生单元输出的基本输出电压对应的模拟电压，模拟缓冲电路具有与第一缓冲电路基本相同的特性;以及控制单元，用于控制由电压产生单元输出的基本输出电压 基于模拟电压。

公开(公告)号：US20090014297A1

公开(公告)日：2009-01-15

申请号：US12192617

申请日：2008-08-15

申请人： Katsuhisa Sakaguchi ,  Ikko Mori ,  Naoki Matsumoto ,  Tsuyoshi Hirabayashi

发明人： Katsuhisa Sakaguchi ,  Ikko Mori ,  Naoki Matsumoto ,  Tsuyoshi Hirabayashi

IPC分类号： H01H13/06

CPC分类号： G03B17/08 ,  G03B2217/002 ,  H01H13/06 ,  H01H23/06 ,  H01H23/143 ,  H01H23/164 ,  H01H2001/5888 ,  H01H2221/016 ,  H01H2223/014 ,  H01H2231/044 ,  H01H2231/046

摘要： A switch mechanism usable underwater including a cover serving as an exterior member, a shaft member displaceable in a longitudinal direction and fitted into a shaft hole having substantially the same cross-sectional area provided in the cover, an O-ring maintaining a water-tight sliding seal between the shaft member and the shaft hole, and a lever member movable about an axis for moving the shaft member by application of a pressing force applied to the lever member in a first direction against a force of a bias member, the pressing force being applied at a first point which is a first distance from said axis, the lever member engaging the shaft at a second point a second distance from said axis which is less than said first distance to move the lever member in a second direction opposite said first direction when the pressing force is removed.

摘要翻译： 一种可在水下使用的开关机构，包括用作外部构件的盖，可沿长度方向移位并装配到具有设置在盖中的基本相同的横截面积的轴孔中的轴构件，保持水密性的O形环 轴构件和轴孔之间的滑动密封，以及杆构件，其可绕着轴移动，用于通过施加施加到杠杆构件的抵抗力抵抗偏压构件的力的第一方向上的按压力来移动轴构件，该按压力 被施加在距离所述轴线的第一距离的第一点处，所述杆构件在距离所述轴线的第二距离处的第二点处接合所述轴，所述第二点小于所述第一距离，以沿与所述第一距离相反的第二方向移动所述杆构件 当按压力被去除时的方向。

公开(公告)号：US20080308396A1

公开(公告)日：2008-12-18

申请号：US12192580

申请日：2008-08-15

申请人： Naoki Matsumoto ,  Ikko Mori ,  Katsuhisa Sakaguchi ,  Tsuyoshi Hirabayashi

发明人： Naoki Matsumoto ,  Ikko Mori ,  Katsuhisa Sakaguchi ,  Tsuyoshi Hirabayashi

IPC分类号： H01H3/12

CPC分类号： G03B17/08 ,  G03B2217/002 ,  H01H13/06 ,  H01H23/06 ,  H01H23/143 ,  H01H23/164 ,  H01H2001/5888 ,  H01H2221/016 ,  H01H2223/014 ,  H01H2231/044 ,  H01H2231/046

摘要： The present invention provides a switch mechanism usable underwater including a rear cover serving as an exterior member, two shaft members being displaceable in a shaft direction and fitting into two shaft holes having the same cross-sectional area provided in the rear cover, an O-ring watertightly maintaining the shaft member and the shaft hole, and a lever member being engaged with the two shaft members in a manner to be capable of pressing-down or pulling-up the shaft member, and being configured to balance water pressure applied to one shaft member with that applied to the other shaft member.

摘要翻译： 本发明提供一种可在水下使用的开关机构，其包括用作外部构件的后盖，两个轴构件可沿轴向移动并且装配到具有设置在后盖中的相同横截面积的两个轴孔中， 水密地保持轴构件和轴孔，杆构件以能够压下或拉起轴构件的方式与两个轴构件接合，并且构造成平衡施加到一个的构件的水压力 轴构件施加到另一个轴构件。

公开(公告)号：US20080236749A1

公开(公告)日：2008-10-02

申请号：US12056665

申请日：2008-03-27

申请人： Chishio KOSHIMIZU ,  Naoki Matsumoto ,  Satoshi Tanaka ,  Toru Ito

发明人： Chishio KOSHIMIZU ,  Naoki Matsumoto ,  Satoshi Tanaka ,  Toru Ito

IPC分类号： H01L21/3065

CPC分类号： H01J37/21 ,  H01J37/32091 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32348 ,  H01J37/32449 ,  H01J37/32467 ,  H01J37/32642 ,  H01J2237/21 ,  H01J2237/334

摘要： A plasma processing apparatus includes a processing chamber, a first electrode and a second electrode disposed to face each other, a high frequency power supply unit for applying a high frequency power to either the first electrode or the second electrode, a processing gas supply unit for supplying a processing gas to a processing space, and a main dielectric member provided at a substrate mounting portion on a main surface of the first electrode. A focus ring is attached to the first electrode to cover a peripheral portion of the main surface of the first electrode and a peripheral dielectric member is provided in a peripheral portion on the main surface of the first electrode so that an electrostatic capacitance per unit area applied between the first electrode and the focus ring is smaller than that applied between the first electrode and the substrate by the main dielectric member.

摘要翻译： 等离子体处理装置包括处理室，第一电极和彼此相对配置的第二电极，用于向第一电极或第二电极施加高频电力的高频电源单元，用于 将处理气体供给到处理空间，以及设置在第一电极的主表面上的基板安装部的主电介质部件。 聚焦环安装在第一电极上以覆盖第一电极的主表面的周边部分，并且在第一电极的主表面的周边部分设置外围电介质构件，使得每单位面积的静电电容 在第一电极和聚焦环之间的距离小于通过主电介质构件施加在第一电极和衬底之间的位置。

公开(公告)号：US20080094728A1

公开(公告)日：2008-04-24

申请号：US11999817

申请日：2007-12-06

申请人： Naoki Matsumoto ,  Hitoshi Yoshida ,  Akira Futami ,  Toshifumi Nakano ,  Tsuyoshi Kawai

发明人： Naoki Matsumoto ,  Hitoshi Yoshida ,  Akira Futami ,  Toshifumi Nakano ,  Tsuyoshi Kawai

IPC分类号： G02B15/14 ,  G02B7/02

CPC分类号： H04N5/2252 ,  H04N5/2251 ,  H04N5/2254

摘要： A camera having a lens barrel housed therein includes a reflection optical member for reflecting a light beam incident along a first optical axis (O1) from a subject so as to reflect the light beam toward a second optical axis (O2) intersecting the first optical axis; a light-quantity adjusting member for adjusting the quantity of incident light from the subject; and a drive source for displacing the light-quantity adjusting member, in which by displacing the light-quantity adjusting member, the quantity of the incident light from the subject can be adjusted, and the light-quantity adjusting member is displaced in a direction substantially perpendicular to an optical axial plane inclusive of the first optical axis and the second optical axis so as to adjust the light-quantity.

公开(公告)号：US07339656B2

公开(公告)日：2008-03-04

申请号：US10831757

申请日：2004-04-26

申请人： Naoki Matsumoto ,  Yohei Yamazawa ,  Chishio Koshimizu ,  Tatsuo Matsudo ,  Sumie Segawa

发明人： Naoki Matsumoto ,  Yohei Yamazawa ,  Chishio Koshimizu ,  Tatsuo Matsudo ,  Sumie Segawa

IPC分类号： G01N21/00

CPC分类号： G01N21/68 ,  H01J37/32174 ,  H01J37/32935 ,  H01J37/32972 ,  H01L21/31116

摘要： An apparatus for measuring plasma electron density precisely measures electron density in plasma even under a low electron density condition or high pressure condition. This plasma electron density measuring apparatus includes a vector network analyzer in a measuring unit, which measures a complex reflection coefficient and determines a frequency characteristic of an imaginary part of the coefficient. A resonance frequency at a point where the imaginary part of the complex reflection coefficient is zero-crossed is read and the electron density is calculated based on the resonance frequency by a measurement control unit.