Methods used in fabricating integrated circuitry and methods of forming 2T-1C memory cell arrays

    公开(公告)号:US11968821B2

    公开(公告)日:2024-04-23

    申请号:US17528128

    申请日:2021-11-16

    Inventor: Scott E. Sills

    CPC classification number: H10B12/20 H10B12/033 H10B12/31 H01L28/91 H01L29/7827

    Abstract: A two transistor-one capacitor memory cell comprises first and second transistors laterally displaced relative one another. A capacitor is above the first and second transistors. The capacitor comprises a conductive first capacitor node directly above and electrically coupled to a first node of the first transistor. A conductive second capacitor node is directly above the first and second transistors and is electrically coupled to a first node of the second transistor. A capacitor insulator is between the first and second capacitor nodes. The second capacitor node comprises an elevationally-extending conductive pillar directly above the first node of the second transistor. The conductive pillar has an elevationally outer portion that is of four-sided diamond shape in horizontal cross-section. Other memory cells, including arrays of memory cells are disclosed as are methods.

    SUPPORT PILLARS WITH MULTIPLE, ALTERNATING EPITAXIAL SILICON FOR HORIZONTAL ACCESS DEVICES IN VERTICAL

    公开(公告)号:US20240098969A1

    公开(公告)日:2024-03-21

    申请号:US17945448

    申请日:2022-09-15

    CPC classification number: H01L27/10805 H01L27/1085 H01L27/10891

    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes formed in tiers. And, more particularly, to multiple, alternating silicon germanium (SiGe) and single crystalline silicon (Si) in different thicknesses to form tiers in which to form the horizontal access devices in vertical three-dimensional (3D) memory. The horizontally oriented access devices can have a first source/drain regions and a second source drain regions separated by single crystalline silicon (Si) channel regions. The single crystalline silicon (Si) channel regions can include a dielectric material to provide support structure to the single crystalline channel regions when forming the horizontal access devices in vertical three-dimensional (3D) memory. Horizontally oriented access lines can connect to gate structures opposing the channel regions. Vertical digit lines coupled to the first source/drain regions.

    DEVICES INCLUDING VERTICAL TRANSISTORS, AND RELATED METHODS

    公开(公告)号:US20220302318A1

    公开(公告)日:2022-09-22

    申请号:US17806427

    申请日:2022-06-10

    Abstract: A device comprises vertically oriented transistors. The device comprises a pillar comprising at least one oxide semiconductor material, the pillar wider in a first lateral direction at an upper portion thereof than at a lower portion thereof, a gate dielectric material over sidewalls of the pillar and extending in the first lateral direction, and at least one gate electrode adjacent to at least a portion of the gate dielectric material. Related devices, electronic systems, and methods are also disclosed.

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