公开(公告)号：US20090004600A1

公开(公告)日：2009-01-01

申请号：US12143268

申请日：2008-06-20

申请人： Makoto Akita ,  Isao Yoshida ,  Kazuhiko Hashimoto

发明人： Makoto Akita ,  Isao Yoshida ,  Kazuhiko Hashimoto

IPC分类号： G03C1/053

CPC分类号： G03F7/0397 ,  C07C69/00 ,  C07C2603/24 ,  C08F212/14 ,  C08F212/34 ,  C08F220/18 ,  G03F7/0045 ,  G03F7/0046 ,  Y10S430/106

摘要： A chemically amplified positive resist composition comprising (A) a resin which comprises (i) a polymerization unit represented by the formula (I): wherein R7 represents a hydrogen atom etc., R8 represents a C1-C4 alkyl group, p represents an integer of 1 to 3, and q represents an integer of 0 to 2, (ii) at least one polymerization unit selected from a group consisting of a polymerization unit represented by the formula (II): wherein R1 represents a hydrogen atom etc., R2 represents a C1-C8 alkyl group and ring X represents an alicyclic hydrocarbon group, and a polymerization unit represented by the formula (IV): wherein R3 represents a hydrogen atom etc., R4 and R5 independently represents a hydrogen atom etc., R10 represents a C1-C6 alkyl group etc., and (iii) a polymerization unit represented by the formula (III): wherein R3, R4 and R5 are the same as defined above, E represents a divalent hydrocarbon group, G represents a single bond etc., Z represents a carbonyl group etc. and L represents an anthryl group etc., and (B) at least one acid generator.

摘要翻译： 一种化学放大正型抗蚀剂组合物，其包含（A）树脂，其包含（i）由式（I）表示的聚合单元：其中R7表示氢原子等，R8表示C1-C4烷基，p表示整数 为1〜3，q为0〜2的整数，（ii）至少一种选自由式（II）表示的聚合单元的聚合单元：其中，R1表示氢原子等，R2 代表C1-C8烷基，X代表脂环族烃基，和由式（Ⅳ）表示的聚合单元：其中R3表示氢原子等，R4和R5独立地表示氢原子等，R10表示 C 1 -C 6烷基等，和（iii）由式（III）表示的聚合单元：其中R3，R4和R5与上述定义相同，E表示二价烃基，G表示单键等 Z表示羰基等，L r 表示蒽基等，和（B）至少一种酸发生剂。

公开(公告)号：US20050160325A1

公开(公告)日：2005-07-21

申请号：US10510986

申请日：2003-02-21

申请人： Hiroyuki Ogino ,  Hideki Omori ,  Hidekazu Yamashita ,  Naofumi Nakatani ,  Osamu Eguchi ,  Makoto Imai ,  Wataru Uchiyama ,  Kazuhiko Hashimoto ,  Tadashi Miki ,  Haruo Terai ,  Kenji Kida

发明人： Hiroyuki Ogino ,  Hideki Omori ,  Hidekazu Yamashita ,  Naofumi Nakatani ,  Osamu Eguchi ,  Makoto Imai ,  Wataru Uchiyama ,  Kazuhiko Hashimoto ,  Tadashi Miki ,  Haruo Terai ,  Kenji Kida

IPC分类号： G08B13/196 ,  G08B25/08 ,  G06F11/00

CPC分类号： G08B13/19656 ,  G08B13/19645 ,  G08B13/19658 ,  G08B13/19691 ,  G08B13/19697 ,  G08B25/08

摘要： A monitoring system which is suitable for, for example, preventing crime for a residence, includes a plurality of terminals (31, 32, . . . ) for monitoring whether predetermined monitoring points are in a stationary state or a nonstationary state, and a central processing device (10) for controlling a setting/canceling operation of alarm operations of the terminals (31, 32, . . . ). The central processing device (10) has a communication unit that receives information related to the stationary/nonstationary states from the terminals and transmits predetermined information including commands to the terminals. Each terminal has a communication unit that transmits information related to stationary/nonstationary states to the central processing device and receives the predetermined information from the central processing device. Thus bidirectional communication can be achieved between the central processing device and the terminals. The plurality of terminals (31, 32, . . . ) may include a terminal with an emergency call unit which operates in an emergency to call or notify, and a terminal having a notification unit which indicates that notification of occurrence of nonstationay state has been accepted by a predetermined point of contact.

摘要翻译： 适用于例如防止住宅犯罪的监视系统包括用于监视预定监视点是处于静止状态还是处于非稳态状态的多个终端（31,32 ...）和中央 处理装置（10），用于控制终端（31,32 ...）的报警操作的设置/取消操作。 中央处理装置（10）具有通信单元，其从终端接收与静止/非平稳状态有关的信息，并向终端发送包括命令的预定信息。 每个终端具有通信单元，其向中央处理设备发送与静止/非静止状态相关的信息，并从中央处理设备接收预定信息。 因此，可以在中央处理装置和终端之间实现双向通信。 多个终端（31,32 ...）可以包括具有在紧急情况下操作以进行呼叫或通知的紧急呼叫单元的终端，以及具有指示非易失性状态的发生通知已经被通知的通知单元的终端 接受预定的接触点。

公开(公告)号：US06893792B2

公开(公告)日：2005-05-17

申请号：US10366673

申请日：2003-02-14

申请人： Yoshiko Miya ,  Kouji Toishi ,  Kazuhiko Hashimoto

发明人： Yoshiko Miya ,  Kouji Toishi ,  Kazuhiko Hashimoto

IPC分类号： G03F7/004 ,  G03F7/039

CPC分类号： G03F7/0046 ,  G03F7/0045 ,  G03F7/0395 ,  Y10S430/108

摘要： The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.

摘要翻译： 本发明提供一种正型抗蚀剂组合物，其包含本身在碱性水溶液中不溶或难溶于但通过酸作用而在碱性水溶液中溶解的树脂，和酸产生剂，其中卤素原子的含量 树脂为40重量％以上，构成树脂的结构单元中的至少一个为具有脂环烃骨架的结构单元，具有脂环烃骨架的结构单元含有至少一个使树脂溶于 碱水溶液，通过酸的作用和至少一个卤素原子。

公开(公告)号：US06674081B2

公开(公告)日：2004-01-06

申请号：US10251953

申请日：2002-09-23

申请人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

发明人： Kazuhiko Hashimoto ,  Tomonori Mukaigawa ,  Ryuichi Kubo ,  Hiroyuki Kishihara ,  Minoru Noda ,  Masanori Okuyama

IPC分类号： G01J500

CPC分类号： H01L37/02 ,  G01J5/34 ,  H01L27/16

摘要： An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

摘要翻译： 由铁电体膜形成的红外线检测电容器，其电容器部分由第一和第二互连线支撑，以保持在位于沟槽两侧的Si衬底上。 下电极与第一互连线耦合，而上电极与第二互连线耦合。 电容器部分是平面图中的矩形，没有在对角线方向上彼此相对的小三角形部分。

公开(公告)号：US06616607B2

公开(公告)日：2003-09-09

申请号：US09981333

申请日：2001-10-17

申请人： Kazuhiko Hashimoto ,  Shinji Tanaka ,  Shigeyuki Inoue ,  Nobuyuki Yoshiike

发明人： Kazuhiko Hashimoto ,  Shinji Tanaka ,  Shigeyuki Inoue ,  Nobuyuki Yoshiike

IPC分类号： A61B500

CPC分类号： A61B5/1113 ,  A61B5/0022 ,  A61B5/11 ,  A61B5/1116 ,  A61B5/1128 ,  A61B5/117 ,  A61B5/6823 ,  A61B5/6889 ,  G06F19/00 ,  G16H40/67 ,  Y10S128/903

摘要： A state information acquisition system has a terminal which has physiological state detecting means of detecting the physiological state of a person or animal, posture/action detecting means of detecting the posture and/or action state of the person or animal, and detection signal transmitting means of transmitting detection signals based on the detection of (1) the physiological state and (2) the posture and/or action state, and is attachable to the person or animal; and signal receiving and processing means which receives and processes a signal transmitted from the terminal and is located in a predetermined region; and thereby obtaining state information indicating the state of the person or animal on the basis of the detection signal.

摘要翻译： 一种状态信息获取系统具有检测人或动物的生理状态的生理状态检测装置的终端，检测人或动物的姿势和/或动作状态的姿势/动作检测装置，以及检测信号发送装置 基于（1）生理状态的检测和（2）姿势和/或动作状态发送检测信号，并且可附接到人或动物; 信号接收和处理装置，其接收并处理从终端发送并位于预定区域中的信号; 并且通过基于检测信号获得指示人或动物的状态的状态信息。

公开(公告)号：US06262418B1

公开(公告)日：2001-07-17

申请号：US09177148

申请日：1998-10-22

申请人： Kazuhiko Hashimoto ,  Masanori Okuyama ,  Ryuichi Kubo ,  Tomonori Mukaigawa

发明人： Kazuhiko Hashimoto ,  Masanori Okuyama ,  Ryuichi Kubo ,  Tomonori Mukaigawa

IPC分类号： G01J510

CPC分类号： G01J5/34

摘要： A thermal type infrared sensing device has; a plurality of light-receiving electrodes for outputting a change of surface charge associated with a polarization that occurs in a dielectric when subjected to infrared radiation; and a plurality of compensation electrodes, corresponding one for one to plurality of light-receiving electrodes, for compensating the outputs of corresponding light-receiving electrodes, and wherein plurality of compensation electrodes are formed on a different substrate from a substrate on which plurality of light-receiving electrodes are formed.

摘要翻译： 一种热式红外传感器具有： 多个光接收电极，用于输出当经受红外辐射时在电介质中发生的与偏振有关的表面电荷的变化; 以及多个补偿电极，对应一个用于一个到多个光接收电极，用于补偿相应的光接收电极的输出，并且其中多个补偿电极形成在不同的衬底上，所述衬底上具有多个光 形成接收电极。

公开(公告)号：US5939132A

公开(公告)日：1999-08-17

申请号：US833193

申请日：1997-04-14

申请人： Toyokazu Fujii ,  Mikio Nishio ,  Mitsuru Sekiguchi ,  Kazuhiko Hashimoto

发明人： Toyokazu Fujii ,  Mikio Nishio ,  Mitsuru Sekiguchi ,  Kazuhiko Hashimoto

IPC分类号： C23C14/04 ,  C23C16/04 ,  H01L21/00 ,  H01L21/677 ,  B05D5/12 ,  H07L21/301

CPC分类号： H01L21/67167 ,  C23C14/042 ,  C23C16/042 ,  H01L21/67207 ,  H01L21/67225 ,  H01L21/67796 ,  H01L2223/54473 ,  H01L2223/5448 ,  Y10S438/975

摘要： On a semiconductor substrate, chips to be products and alignment chips located at a portion a part thereof is left out from a peripheral part of the semiconductor substrate are formed. Contact holes and alignment marks are formed at the chips to be products and the alignment chips. Covering the alignment chips with alignment mark cover parts of a substrate holder, a material for metal wiring is deposited on the semiconductor substrate to form a metal film on the substrate. A mask pattern is formed on the metal film using the alignment marks of the alignment chips on which the metal film is not formed.

摘要翻译： 在半导体基板上，形成从半导体基板的周边部分留出的成为产品的芯片和位于其一部分的对准芯片。 在作为产品的芯片和对准芯片上形成接触孔和对准标记。 用衬底保持器的对准标记覆盖部分覆盖对准芯片，在半导体衬底上沉积用于金属布线的材料，以在衬底上形成金属膜。 使用未形成金属膜的取向芯片的对准标记，在金属膜上形成掩模图案。

公开(公告)号：US5877688A

公开(公告)日：1999-03-02

申请号：US629937

申请日：1996-04-12

申请人： Katsuya Morinaka ,  Nobuyuki Yoshiike ,  Kazuhiko Hashimoto ,  Tetsuya Kawai

发明人： Katsuya Morinaka ,  Nobuyuki Yoshiike ,  Kazuhiko Hashimoto ,  Tetsuya Kawai

IPC分类号： G01S7/481 ,  G01S7/483 ,  G01S7/497 ,  G01S15/42 ,  G01S15/88 ,  G01S17/02 ,  G01S17/10 ,  G01S17/88 ,  G06K9/00 ,  G08B13/19 ,  G08B13/191 ,  G08B29/26 ,  H04N5/33 ,  G08B17/00

CPC分类号： G01S7/497 ,  G01S17/023 ,  G01S17/10 ,  G01S7/4813 ,  G01S7/483 ,  G06K9/00362 ,  G08B13/19 ,  G08B13/191 ,  G08B29/26 ,  G01S15/42 ,  G01S15/88 ,  G01S17/88 ,  H04N5/33

摘要： A thermal object detecting method and apparatus. According to the method and apparatus, a thermal image of a measuring space is obtained by a two-dimensional thermal image detecting device. Then, position information of an object in the measuring space is obtained by an object distance detecting device, which determines a distance between the apparatus and the object. The output of the two-dimensional thermal image detecting device can be corrected using the distance data from the object distance detecting device.

摘要翻译： 一种热物体检测方法和装置。 根据该方法和装置，通过二维热图像检测装置获得测量空间的热像。 然后，通过确定设备和对象之间的距离的物体距离检测装置获得测量空间中的对象的位置信息。 可以使用来自物体距离检测装置的距离数据来校正二维热图像检测装置的输出。

公开(公告)号：US5866887A

公开(公告)日：1999-02-02

申请号：US922600

申请日：1997-09-03

申请人： Kazuhiko Hashimoto ,  Nobuyuki Yoshiike ,  Katsuya Morinaka

发明人： Kazuhiko Hashimoto ,  Nobuyuki Yoshiike ,  Katsuya Morinaka

IPC分类号： G06M7/00 ,  G01J1/02 ,  G01P13/04 ,  G01V8/12 ,  G06K9/20 ,  G06M11/00 ,  G07C9/00 ,  B61L1/16

CPC分类号： G06K9/00778 ,  G06K9/2018 ,  G07C9/00

摘要： A plurality of rows are provided on a calling of sensors and each have a plurality of distance variation measuring sensors. The distance variation measuring sensors each include a light emitter and a light receiver arranged in the orthogonal direction to the direction in which human bodies pass. The number of passers is detected on the basis of the number of the distance variation measuring sensors which have detected a human body. The traveling direction of human bodies is detected on the basis of the change in the distance to the distance variation measuring human bodies measured by the sensors.

摘要翻译： 在传感器的呼叫上提供多行，并且每行具有多个距离变化测量传感器。 距离变化测量传感器各自包括在与人体通过的方向正交的方向上布置的光发射器和光接收器。 基于已经检测到人体的距离变化测量传感器的数量来检测路人的数量。 基于与由传感器测量的测量人体的距离变化的距离的变化来检测人体的行进方向。

公开(公告)号：US5476753A

公开(公告)日：1995-12-19

申请号：US238793

申请日：1994-05-06

申请人： Kazuhiko Hashimoto ,  Masayuki Endo

发明人： Kazuhiko Hashimoto ,  Masayuki Endo

IPC分类号： G03F7/004 ,  G03F7/075 ,  G03C5/00

CPC分类号： G03F7/0754 ,  G03F7/0045 ,  Y10S430/143

摘要： A high polymer organic film is applied as a bottom layer to a semiconductor silicon substrate. Then, a material including an acid generator and a polysilane resin insoluble in an alkaline solution is applied to the bottom layer as an electron beam resist layer. The polysilane resin includes a Si--Si bond or Si--O bond in a principle chain and a substituted hydroxy group expressed as --OR in a side chain wherein R denotes a substitution group of hydrocarbon. The acid generator generates an acid when irradiated with an electron beam. Then, a pattern is formed with an electron beam in the photosensitive layer, and it is developed with an alkaline solution. Then, by using the resist pattern as a mask, the bottom layer is etched. Thus, a fine resist pattern of correct high aspect ratio can be formed easily.

摘要翻译： 将高分子有机膜作为底层施加到半导体硅衬底。 然后，作为电子束抗蚀剂层，将作为酸性发生剂和不溶于碱性溶液的聚硅烷树脂的材料涂布在底层。 聚硅烷树脂在原料链中包含Si-Si键或Si-O键，在侧链中表示为-OR的取代羟基，其中R表示烃的取代基。 当用电子束照射时酸产生器产生酸。 然后，在感光层中形成有电子束的图案，并用碱性溶液显影。 然后，通过使用抗蚀剂图案作为掩模，蚀刻底层。 因此，可以容易地形成具有正确高纵横比的精细抗蚀剂图案。