Cutting apparatus
    70.
    发明授权

    公开(公告)号:US09636844B2

    公开(公告)日:2017-05-02

    申请号:US14333016

    申请日:2014-07-16

    申请人: DISCO CORPORATION

    发明人: Nobuhiko Wakita

    摘要: A cutting unit includes a spindle, a spindle housing, a support flange on the front of the spindle, a cutting blade detachably supported to the support flange, and a fixing flange for fixing the cutting blade to the support flange. The support flange includes a boss portion adapted to be inserted through a central opening of the cutting blade, a flange portion for supporting one side surface of the cutting blade, and a cylindrical portion for engaging the front of the spindle. The flange portion has a suction hole opening toward the fixing flange, and the cylindrical portion has a communication hole communicating with the suction hole. The communication hole is connected to a vacuum source through a rotary joint fixed to the spindle housing so that communication between the communication hole and the vacuum source is selectively made by an on-off valve.