METHOD FOR MANUFACTURING AN OPTICAL DEVICE
    73.
    发明申请

    公开(公告)号:US20180106954A1

    公开(公告)日:2018-04-19

    申请号:US15730415

    申请日:2017-10-11

    Abstract: The present invention relates to a method for manufacturing an optical device comprising forming a first trench in a glass plate and a second trench perpendicular to the first trench, wherein the first trench has an end opening into the second trench. The trenches are treated with hydrofluoric acid. The first trench is filled with a material to form a waveguide, and a mirror is formed on the wall of the second trench opposite the waveguide. An encapsulation layer is deposited over the glass plate, waveguide and second trench.

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