公开(公告)号：US20190136372A1

公开(公告)日：2019-05-09

申请号：US16101329

申请日：2018-08-10

Applicant: Applied Materials, Inc.

Inventor： Guodong Zhan ,  David Fenwick ,  Jennifer Y. Sun

IPC: C23C16/30 ,  C23C16/455 ,  C23C16/40

Abstract: Embodiments of the disclosure relate to articles, coated chamber components and methods of coating chamber components with a low volatile coating. The low volatile coating can include a rare earth metal-containing layer that coats all surfaces of a component (e.g., a high temperature heater).

公开(公告)号：US10242888B2

公开(公告)日：2019-03-26

申请号：US13998723

申请日：2013-11-26

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Ren-Guan Duan ,  Jie Yuan ,  Li Xu ,  Kenneth S. Collins

IPC: C04B35/486 ,  C04B35/505 ,  H01L21/67

Abstract: A solid solution-comprising ceramic article useful in semiconductor processing, which article may be in the form of a solid, bulk ceramic, or may be in the form of a substrate having a ceramic coating of the same composition as the bulk ceramic material on at least one outer surface. The ceramic article is resistant to erosion by halogen-containing plasmas and provides advantageous mechanical properties. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. The ceramic-comprising article includes ceramic which is formed from zirconium oxide at a molar concentration ranging from about 96 mole % to about 91 mole %, and yttrium oxide at a molar concentration ranging from about 4 mole % to about 9 mole %.

公开(公告)号：US20190078206A1

公开(公告)日：2019-03-14

申请号：US15903103

申请日：2018-02-23

Applicant: Applied Materials, Inc.

Inventor： Xiaowei Wu ,  David Fenwick ,  Jennifer Y. Sun

IPC: C23C16/455 ,  C01F17/00 ,  C01B11/24 ,  C09D1/00

Abstract: An article comprises a body having a coating. The coating comprises a M-O-F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.

公开(公告)号：US20190078200A1

公开(公告)日：2019-03-14

申请号：US15903091

申请日：2018-02-23

Applicant: Applied Materials, Inc.

Inventor： Xiaowei Wu ,  David Fenwick ,  Jennifer Y. Sun

IPC: C23C16/40 ,  C23C16/455

Abstract: An article comprises a body having a coating. The coating comprises a M-O-F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.

公开(公告)号：US20190078199A1

公开(公告)日：2019-03-14

申请号：US16108195

申请日：2018-08-22

Applicant: Applied Materials, Inc.

Inventor： Xiaowei Wu ,  David Fenwick ,  Jennifer Y. Sun ,  Michael R. Rice

IPC: C23C16/30 ,  C23C16/455

Abstract: An article comprises a body having a coating. The coating comprises a M-O—F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.

公开(公告)号：US20180327892A1

公开(公告)日：2018-11-15

申请号：US15965810

申请日：2018-04-27

Applicant: Applied Materials, Inc.

Inventor： Xiaowei Wu ,  David Fenwick ,  Guodong Zhan ,  Jennifer Y. Sun ,  Michael R. Rice

IPC: C23C4/18 ,  C23C4/134 ,  C23C4/11 ,  C23C14/08 ,  C23C14/22 ,  C23C16/40 ,  C23C16/455 ,  C23C14/58 ,  C23C16/56

CPC classification number: C23C16/405 ,  C23C4/11 ,  C23C4/134 ,  C23C4/18 ,  C23C14/081 ,  C23C14/221 ,  C23C14/5826 ,  C23C14/5846 ,  C23C16/28 ,  C23C16/403 ,  C23C16/452 ,  C23C16/45525 ,  C23C16/45536 ,  C23C16/56 ,  H01J37/32357 ,  H01J37/32908 ,  H01J37/32963 ,  H01J2237/332 ,  H01J2237/334

Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.

公开(公告)号：US10119188B2

公开(公告)日：2018-11-06

申请号：US15814597

申请日：2017-11-16

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Biraja P. Kanungo ,  Vahid Firouzdor ,  Tom Cho

IPC: C23C14/08 ,  B32B18/00 ,  H01J37/32 ,  C23C14/22 ,  C23C14/34

Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

公开(公告)号：US20180221948A1

公开(公告)日：2018-08-09

申请号：US15941812

申请日：2018-03-30

Applicant: Applied Materials, Inc.

Inventor： Christopher A. Rowland ,  Anantha K. Subramani ,  Kasiraman Krishnan ,  Kartik Ramaswamy ,  Thomas B. Brezoczky ,  Swaminathan Srinivasan ,  Jennifer Y. Sun ,  Simon Yavelberg ,  Srinivas D. Nemani ,  Nag B. Patibandla ,  Hou T. Ng

IPC: B22F3/00 ,  B28B1/00 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B23K10/00 ,  H05B3/00

CPC classification number: B22F3/008 ,  B22F2003/1051 ,  B22F2003/1057 ,  B22F2998/10 ,  B23K10/006 ,  B23K10/027 ,  B28B1/001 ,  B29C64/153 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  H05B3/0061

Abstract: An additive manufacturing system includes a platen to support an object to be fabricated, a dispenser assembly positioned above the platen, and an energy source configured to selectively fuse a layer of powder. The dispenser assembly includes a first dispenser, a second dispenser, and a drive system. The first dispenser delivers a first powder in a first linear region that extends along a first axis, and the second dispenser delivers a second powder in a second linear region that extends parallel to the first linear region and is offset from the first linear region along a second axis perpendicular to the first axis. The drive system a drive system moves the support with the first dispenser and second dispenser together along the second axis.

公开(公告)号：US20180134612A1

公开(公告)日：2018-05-17

申请号：US15865720

申请日：2018-01-09

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Ren-Guan Duan ,  Kenneth S. Collins

IPC: C03C10/16 ,  C03C3/247

CPC classification number: C03C10/16 ,  C03C3/247 ,  C03C3/325 ,  C03C8/24 ,  C03C2204/00 ,  C04B35/119 ,  C04B37/005 ,  C04B2235/3201 ,  C04B2235/3206 ,  C04B2235/3225 ,  C04B2235/445 ,  C04B2235/5445 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/80 ,  C04B2237/06 ,  C04B2237/064 ,  C04B2237/08 ,  C04B2237/10 ,  C04B2237/34 ,  C04B2237/343 ,  C04B2237/60 ,  C04B2237/708 ,  C04B2237/72 ,  H01L21/6719

Abstract: A bonded ceramic component which is resistant to reactive halogen-containing plasmas, said component comprising ceramic portions which are bonded together by a bonding material which includes an oxyfluoride glass-ceramic-comprising transition area between interfaces of the ceramic portions, where the transition area includes form at least 0.1 volume % amorphous phase up to about 50 volume % amorphous phase.

公开(公告)号：US20180108517A1

公开(公告)日：2018-04-19

申请号：US15844248

申请日：2017-12-15

Applicant: Applied Materials, Inc.

Inventor： Jennifer Y. Sun ,  Yikai Chen ,  Biraja P. Kanungo

IPC: H01J37/32 ,  C23C4/18 ,  C23C4/10

CPC classification number: H01J37/32495 ,  C23C4/10 ,  C23C4/11 ,  C23C4/134 ,  C23C4/18 ,  H01J37/32477 ,  Y10T428/24967 ,  Y10T428/249981

Abstract: A method of plasma spraying an article comprises inserting the article into a vacuum chamber for a low pressure plasma spraying system. A low pressure plasma spray process is then performed by the low pressure plasma spraying system to form a first plasma resistant layer having a thickness of 20-500 microns and a porosity of over 1%. A plasma spray thin film, plasma spray chemical vapor deposition or plasma spray physical vapor deposition process is then performed by the low pressure plasma spraying system to deposit a second plasma resistant layer on the first plasma resistant layer, the second plasma resistant layer having a thickness of less than 50 microns and a porosity of less than 1%.