Substrate processing apparatus and method for manufacturing semiconductor device
    71.
    发明授权
    Substrate processing apparatus and method for manufacturing semiconductor device 有权
    基板处理装置及半导体装置的制造方法

    公开(公告)号:US08828141B2

    公开(公告)日:2014-09-09

    申请号:US12379420

    申请日:2009-02-20

    摘要: A substrate processing apparatus of the present invention comprises: a processing chamber for storing and processing substrates stacked in multiple stages in horizontal posture; a processing gas supply unit for supplying two or more types of the processing gases to the inside of the processing chamber; an inactive gas supply unit for supplying an inactive gas to the inside of the processing chamber; and an exhaust unit for exhausting an atmosphere of the inside of the processing chamber, wherein the processing gas supply unit has at least two processing gas supply nozzles which extend running along an inner wall of the processing chamber in the stacking direction of the substrates and supply the processing gas to the inside of the processing chamber, and the inactive gas supply unit has a pair of inactive gas supply nozzles which are provided so as to extend running along the inner wall of the processing chamber in the stacking direction of the substrates and so as to sandwich at least one processing gas supply nozzle of the at least two processing gas supply nozzles from both sides thereof, along the circumferential direction of the substrates, and which supply the inactive gas to the inside of the processing chamber.

    摘要翻译: 本发明的基板处理装置包括:处理室,用于以水平姿态多层堆放和处理基板; 处理气体供应单元,用于将两种或多种类型的处理气体供应到处理室的内部; 用于向处理室的内部供应惰性气体的非活性气体供应单元; 以及用于排出处理室内部的气氛的排气单元,其中处理气体供应单元具有至少两个处理气体供应喷嘴,所述处理气体供应喷嘴沿着基板的堆叠方向沿处理室的内壁延伸并且供应 处理室内部的处理气体和非活性气体供给单元具有一对非活性气体供给喷嘴,其设置成沿着基板的堆叠方向沿着处理室的内壁延伸,因此 从而沿着基板的圆周方向从其两侧夹着至少两个处理气体供给喷嘴的至少一个处理气体供给喷嘴,并将惰性气体供给到处理室的内部。

    Manufacturing method of semiconductor device and semiconductor device
    72.
    发明授权
    Manufacturing method of semiconductor device and semiconductor device 有权
    半导体器件和半导体器件的制造方法

    公开(公告)号:US08691699B2

    公开(公告)日:2014-04-08

    申请号:US13427200

    申请日:2012-03-22

    IPC分类号: H01L21/311

    摘要: A manufacturing method of a semiconductor device includes: forming an insulating layer above a substrate; forming a recessed section in the insulating layer; forming, on the insulating layer, a mask pattern having a first opening which exposes the recessed section, and a second opening which is arranged outside the first opening and does not expose the recessed section; forming a first conductive member and a second conductive member by respectively depositing a conductive material in the first opening and the second opening; and polishing and removing the first conductive member and the second conductive member on the upper side of the insulating layer so as to leave the first conductive member in the recessed section.

    摘要翻译: 半导体器件的制造方法包括:在衬底上形成绝缘层; 在所述绝缘层中形成凹部; 在所述绝缘层上形成具有露出所述凹部的第一开口的掩模图案,以及布置在所述第一开口的外侧并且不露出所述凹部的第二开口; 通过在所述第一开口和所述第二开口中分别沉积导电材料来形成第一导电构件和第二导电构件; 并且在绝缘层的上侧抛光和去除第一导电构件和第二导电构件,以便将第一导电构件留在凹部中。

    Radio communications system
    73.
    发明授权
    Radio communications system 有权
    无线电通信系统

    公开(公告)号:US08447311B2

    公开(公告)日:2013-05-21

    申请号:US12710663

    申请日:2010-02-23

    IPC分类号: H04W72/00

    摘要: A radio communications system includes at least one terminal communication unit having one antenna that conducts a radio communication with a plurality of terminals; and at least one baseband modem that generates and decrypts a data signal, a cell being configured by at least one of the antenna, wherein the baseband modem divides a radio frequency band used for the radio communication into two or more subbands, generates and decrypts the data signal specific to each of the divided subbands, and allocates the data signal specific to the subband to the terminal communication unit, and wherein the terminal communication unit receives the data signal specific to the subband generated by the baseband modem, and forms the cell of each the subband by the data signal specific to the received subband.

    摘要翻译: 无线电通信系统包括至少一个具有与多个终端进行无线电通信的天线的终端通信单元; 以及生成和解密数据信号的至少一个基带调制解调器,由所述天线中的至少一个配置的小区,其中所述基带调制解调器将用于无线电通信的无线电频带划分成两个或更多个子带,生成并解密 数据信号,并且将该子带特有的数据信号分配给终端通信单元,并且其中,终端通信单元接收由基带调制解调器生成的子带特有的数据信号,并形成小区 每个子带由接收到的子带特有的数据信号。

    METHOD FOR THE PREPARATION OF A FUEL COMPOSITION FOR USE IN GASOLINE ENGINES AND BLENDING COMPONENT
    75.
    发明申请
    METHOD FOR THE PREPARATION OF A FUEL COMPOSITION FOR USE IN GASOLINE ENGINES AND BLENDING COMPONENT 审中-公开
    燃料组合物的制备方法,用于汽油发动机和混合组分

    公开(公告)号:US20120101316A1

    公开(公告)日:2012-04-26

    申请号:US13133763

    申请日:2009-12-11

    IPC分类号: C10L1/16

    CPC分类号: C10L1/06

    摘要: A method for the preparation of a fuel composition for use in gasoline engines and a blending component is provided, in which the fractions from cracking apparatus is used. In the method, light cycle oil obtained from fluid catalytic apparatus is subjected to fractionation and used as a blending component. The blending component obtained by fractionation has a distillation characteristic of from 160 to 230° C., a content of aromatic hydrocarbons with 9 or more carbon atoms of amount not less than 80% by volume and an indane content of amount not less than 20% by volume.

    摘要翻译: 提供了一种制备用于汽油发动机的燃料组合物和共混组分的方法,其中使用来自裂化装置的馏分。 在该方法中,将从流化催化装置获得的轻循环油进行分馏并用作混合组分。 通过分馏获得的共混组分的蒸馏特征为160〜230℃,碳原子数为9以上的芳香族烃的含量为80体积%以上,二氢化茚含量不低于20体积% 按体积计算。

    Quaternary phase modulator
    76.
    发明授权
    Quaternary phase modulator 失效
    第四相调制器

    公开(公告)号:US08095018B2

    公开(公告)日:2012-01-10

    申请号:US12222574

    申请日:2008-08-12

    IPC分类号: H04B10/00 H04B10/04 H04J14/00

    摘要: In a quaternary phase modulator including two phase modulators disposed in parallel and a phase adjuster that adjusts a phase difference when the outputs of the two phase modulators are combined, there are provided a second light source that introduces light propagated in a backward direction, a first controller that controls the bias of the two phase modulators so that the intensity of the backward light is a minimum on the input side of the quaternary phase modulator, and a second controller that controls the bias of the phase adjuster so that a result monitored by a photodiode having a bandwidth not exceeding the bit rate on the output side of the quaternary phase modulator is a minimum, the first controller being implemented after the second controller is implemented.

    摘要翻译: 在包括并联设置的两个相位调制器和在两个相位调制器的输出被组合时调节相位差的相位调节器的四元相位调制器中,提供了一种引入沿后向传播的光的第二光源,第一 控制器,其控制两个相位调制器的偏置,使得反向光的强度在四元相位调制器的输入侧是最小的;以及第二控制器,其控制相位调节器的偏置,使得由a 具有不超过四元相位调制器的输出侧的比特率的带宽的光电二极管是最小的,第一控制器在第二控制器被实现之后被实现。

    Data transmission system and transmission code generating method for the same
    77.
    发明授权
    Data transmission system and transmission code generating method for the same 有权
    数据传输系统和传输码生成方法相同

    公开(公告)号:US08090269B2

    公开(公告)日:2012-01-03

    申请号:US12007846

    申请日:2008-01-16

    IPC分类号: H04B10/04

    摘要: A data transmission system comprising a transmitter and a receiver. The transmitter comprises a phase encoder for partitioning consecutive bit data to be input in data in units of X bits; and converting a 2x value indicated by the data of X bits in unique association with an (N/2−1)Y value of a Y symbol, and for confining use of signal points, from among the signal points of N-ary phase, only to a signal point P1 (at a phase angle 0) and N/2−2 signal points P(2n+2) (where 1≦n

    摘要翻译: 一种包括发射机和接收机的数据传输系统。 发射机包括相位编码器,用于分割以X位为单位输入数据的连续位数据; 并且将由X位的数据指示的2x值与Y符号的(N / 2-1)Y值唯一相关联,并且为了限制使用信号点,从N阶相位的信号点中, 只有信号点P1(相位角0)和N / 2-2信号点P(2n + 2)(其中1≦̸ n

    Optical add-drop multiplexer
    79.
    发明授权
    Optical add-drop multiplexer 失效
    光分插复用器

    公开(公告)号:US07903975B2

    公开(公告)日:2011-03-08

    申请号:US10888016

    申请日:2004-07-12

    IPC分类号: H04J14/02

    摘要: A problem to be solved in an optical communication system for carrying out bidirectional transmission between communication nodes by wavelength-division-multiplexed optical signals is that a plurality of optical add-drop multiplexers installed in the communication nodes are required for each transmission direction, and therefore, the communication cost is increased. An optical circulator or an optical coupler is arranged at an input/output port of the optical add-drop multiplexer and the wavelength-division-multiplexed optical signals are assembled for each transmission direction, whereby optical signals transmitted bidirectionally can be handled by one optical add-drop multiplexer.

    摘要翻译: 用于通过波分复用光信号在通信节点之间进行双向传输的光通信系统中要解决的问题在于,每个传输方向都需要安装在通信节点中的多个光分插复用器,因此 通信成本增加。 在光分插复用器的输入/输出端口处设置光环行器或光耦合器,并且为每个传输方向组合波分复用光信号,由此双向传输的光信号可以通过一个光学加法 - 多路复用器

    SILVER MICROPOWDER HAVING EXCELLENT AFFINITY FOR POLAR MEDIUM, AND SILVER INK
    80.
    发明申请
    SILVER MICROPOWDER HAVING EXCELLENT AFFINITY FOR POLAR MEDIUM, AND SILVER INK 有权
    具有极性介质的优质微波炉和银墨水

    公开(公告)号:US20100288159A1

    公开(公告)日:2010-11-18

    申请号:US12811598

    申请日:2008-12-25

    IPC分类号: C09D11/00 B32B5/16

    摘要: Provided are silver nanoparticles having a good affinity (that is, dispersibility) for γ-butyrolactone (C4H6O2), an organic solvent which has a relatively high boiling point though having a relatively small molecular weight, and has a low viscosity and a low surface tension and which has little irritating odor.The above problems are solved by providing a silver micropowder excellent in affinity for at least γ-butyrolactone, which comprises silver particles processed to adsorb at least one of 1,4-dihydroxy-2-naphthoic acid (C11H8O4) and gallic acid (C7H6O5) on the surfaces thereof and having an X-ray crystal particle diameter Dx of from 1 to 40 nm, preferably from 1 to 15 nm. The invention also provides a silver ink obtained by dispersing silver particles processed to adsorb an organic compound having a carboxyl group on the surfaces thereof and having an X-ray crystal particle diameter Dx of from 1 to 40 nm, preferably from 1 to 15 nm (or having a mean particle diameter DTEM, as measured through TEM microscopy, of from 3 to 40 nm, preferably from 4 to 15 nm), in γ-butyrolactone.

    摘要翻译: 本发明提供对γ-丁内酯(C 4 H 6 O 2)具有良好的亲和性(即分散性)的银纳米颗粒,其是具有相对较高沸点的有机溶剂,虽然具有较小的分子量,并且具有低粘度和低表面张力 并且几乎没有刺激性气味。 通过提供一种对至少γ-丁内酯的亲和性优异的银微粉来解决上述问题,所述银微粒包含加工成吸附1,4-二羟基-2-萘甲酸(C 11 H 8 O 4)和没食子酸(C 7 H 6 O 5)中的至少一种的银粒子, 其表面上的X射线结晶粒径Dx为1〜40nm,优选为1〜15nm。 本发明还提供一种银粉,其通过将经加工的银颗粒分散在其表面上吸附具有羧基的有机化合物并具有1至40nm,优选1至15nm的X射线晶体粒径Dx( 或者通过TEM显微镜测得的平均粒径DTEM为3〜40nm,优选为4〜15nm)的γ-丁内酯。