摘要:
A substrate processing apparatus of the present invention comprises: a processing chamber for storing and processing substrates stacked in multiple stages in horizontal posture; a processing gas supply unit for supplying two or more types of the processing gases to the inside of the processing chamber; an inactive gas supply unit for supplying an inactive gas to the inside of the processing chamber; and an exhaust unit for exhausting an atmosphere of the inside of the processing chamber, wherein the processing gas supply unit has at least two processing gas supply nozzles which extend running along an inner wall of the processing chamber in the stacking direction of the substrates and supply the processing gas to the inside of the processing chamber, and the inactive gas supply unit has a pair of inactive gas supply nozzles which are provided so as to extend running along the inner wall of the processing chamber in the stacking direction of the substrates and so as to sandwich at least one processing gas supply nozzle of the at least two processing gas supply nozzles from both sides thereof, along the circumferential direction of the substrates, and which supply the inactive gas to the inside of the processing chamber.
摘要:
A manufacturing method of a semiconductor device includes: forming an insulating layer above a substrate; forming a recessed section in the insulating layer; forming, on the insulating layer, a mask pattern having a first opening which exposes the recessed section, and a second opening which is arranged outside the first opening and does not expose the recessed section; forming a first conductive member and a second conductive member by respectively depositing a conductive material in the first opening and the second opening; and polishing and removing the first conductive member and the second conductive member on the upper side of the insulating layer so as to leave the first conductive member in the recessed section.
摘要:
A radio communications system includes at least one terminal communication unit having one antenna that conducts a radio communication with a plurality of terminals; and at least one baseband modem that generates and decrypts a data signal, a cell being configured by at least one of the antenna, wherein the baseband modem divides a radio frequency band used for the radio communication into two or more subbands, generates and decrypts the data signal specific to each of the divided subbands, and allocates the data signal specific to the subband to the terminal communication unit, and wherein the terminal communication unit receives the data signal specific to the subband generated by the baseband modem, and forms the cell of each the subband by the data signal specific to the received subband.
摘要:
Disclosed is a magnetic material having high Hc and High Curie point, which is capable of controlling such magnetic characteristics without requiring rare or expensive raw materials. Specifically disclosed is a magnetic material composed of particles of a magnetic iron oxide which is represented by the following general formula: ε-AxByFe2−x−yO3 or ε-AxByCzFe2−x−y−zO3 (wherein A, B and C each represents a metal excluding Fe and different from each other, satisfying 0
摘要:
A method for the preparation of a fuel composition for use in gasoline engines and a blending component is provided, in which the fractions from cracking apparatus is used. In the method, light cycle oil obtained from fluid catalytic apparatus is subjected to fractionation and used as a blending component. The blending component obtained by fractionation has a distillation characteristic of from 160 to 230° C., a content of aromatic hydrocarbons with 9 or more carbon atoms of amount not less than 80% by volume and an indane content of amount not less than 20% by volume.
摘要:
In a quaternary phase modulator including two phase modulators disposed in parallel and a phase adjuster that adjusts a phase difference when the outputs of the two phase modulators are combined, there are provided a second light source that introduces light propagated in a backward direction, a first controller that controls the bias of the two phase modulators so that the intensity of the backward light is a minimum on the input side of the quaternary phase modulator, and a second controller that controls the bias of the phase adjuster so that a result monitored by a photodiode having a bandwidth not exceeding the bit rate on the output side of the quaternary phase modulator is a minimum, the first controller being implemented after the second controller is implemented.
摘要:
A data transmission system comprising a transmitter and a receiver. The transmitter comprises a phase encoder for partitioning consecutive bit data to be input in data in units of X bits; and converting a 2x value indicated by the data of X bits in unique association with an (N/2−1)Y value of a Y symbol, and for confining use of signal points, from among the signal points of N-ary phase, only to a signal point P1 (at a phase angle 0) and N/2−2 signal points P(2n+2) (where 1≦n
摘要:
A problem to be solved in an optical communication system for carrying out bidirectional transmission between communication nodes by wavelength-division-multiplexed optical signals is that a plurality of optical add-drop multiplexers installed in the communication nodes are required for each transmission direction, and therefore, the communication cost is increased. An optical circulator or an optical coupler is arranged at an input/output port of the optical add-drop multiplexer and the wavelength-division-multiplexed optical signals are assembled for each transmission direction, whereby optical signals transmitted bidirectionally can be handled by one optical add-drop multiplexer.
摘要:
Provided are silver nanoparticles having a good affinity (that is, dispersibility) for γ-butyrolactone (C4H6O2), an organic solvent which has a relatively high boiling point though having a relatively small molecular weight, and has a low viscosity and a low surface tension and which has little irritating odor.The above problems are solved by providing a silver micropowder excellent in affinity for at least γ-butyrolactone, which comprises silver particles processed to adsorb at least one of 1,4-dihydroxy-2-naphthoic acid (C11H8O4) and gallic acid (C7H6O5) on the surfaces thereof and having an X-ray crystal particle diameter Dx of from 1 to 40 nm, preferably from 1 to 15 nm. The invention also provides a silver ink obtained by dispersing silver particles processed to adsorb an organic compound having a carboxyl group on the surfaces thereof and having an X-ray crystal particle diameter Dx of from 1 to 40 nm, preferably from 1 to 15 nm (or having a mean particle diameter DTEM, as measured through TEM microscopy, of from 3 to 40 nm, preferably from 4 to 15 nm), in γ-butyrolactone.
摘要翻译:本发明提供对γ-丁内酯(C 4 H 6 O 2)具有良好的亲和性(即分散性)的银纳米颗粒,其是具有相对较高沸点的有机溶剂,虽然具有较小的分子量,并且具有低粘度和低表面张力 并且几乎没有刺激性气味。 通过提供一种对至少γ-丁内酯的亲和性优异的银微粉来解决上述问题,所述银微粒包含加工成吸附1,4-二羟基-2-萘甲酸(C 11 H 8 O 4)和没食子酸(C 7 H 6 O 5)中的至少一种的银粒子, 其表面上的X射线结晶粒径Dx为1〜40nm,优选为1〜15nm。 本发明还提供一种银粉,其通过将经加工的银颗粒分散在其表面上吸附具有羧基的有机化合物并具有1至40nm,优选1至15nm的X射线晶体粒径Dx( 或者通过TEM显微镜测得的平均粒径DTEM为3〜40nm,优选为4〜15nm)的γ-丁内酯。