摘要:
In a temperature control device which maintains an object to be controlled at a preset constant temperature and an arrayed waveguide grating optical wavelength multiplexer/demultiplexer, the adverse effect of the junction temperature of the semiconductor control element is eliminated for the purpose of simplifying the overall structure and improving operation efficiency. The object to be controlled and semiconductor control element are fixed on the soaking plate. A negative feedback control is applied to the conduction condition of the semiconductor control element. Consequently, the junction temperature of the semiconductor control element is effectively used as a heating source not as a loss, thereby reducing the power consumption and stabilizing the performance.
摘要:
A method of uniforming physical random numbers, capable of maintaining a random number generating rate and ensuring security concurrently. The method sequentially inputs a plurality of physical random numbers to a shift register to hold them there, and shifts them every time a reference pulse signal rises. Physical random numbers held in the shift register are randomly selected and output by a selector based on part of them. Accordingly, physical random numbers input to the shift register are uniformed and then output even thought they have a deviation, thereby eliminating the chance of not outputting random numbers or letting others recognize the deviation of random numbers.
摘要:
The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection optical systems having a detection sensor for obtaining an image of the pattern, respectively, and which receive illumination light from illumination areas different from each other through the objective lens, respectively; and focusing changing means for changing a position of focusing between sites of the pattern in a film thickness direction of the mask and the pattern images obtained by the detection sensors, such that the pattern images obtained by the detection sensors are changed corresponding to the film-thickness direction of the mask.
摘要:
A process selection system and method enable the automatic control of the specification to equipment most suitable for each lot. Processing using this specific equipment can be performed by further selecting the most suitable equipment from equipment used for the product type. Since a plurality of equipment can be specified for each lot, the equipment can be specified from an equipment group having these plurality of equipment. The adequate number of products in process for each equipment-specific process equipment id can be calculated based on the distribution percentage ri. The equipment-specific process equipment having the maximum value of the differential Gi between the adequate number of products in process ni and the collected actual number of products in process can be determined as the equipment-specific process equipment for the lot.
摘要:
Pattern inspection equipment has at least a measured data generation unit for generating measured data from patterns that have been delineated on a sample according to design data, a reference data generation unit for generating reference data used to inspect the patterns from gradational data expressed in multiple gradation levels, and a fault decision circuit for comparing the measured data with the reference data. The reference data generation unit has a multi-valued pattern development circuit for developing the design data into the gradational data and a fine adjustment circuit for finely shifting the positions or adjusting the curvatures of pattern edges in the pattern constructed with the gradational data. The fine adjustment of the pattern edges is necessary to cope with slightly displaced edges and rounded corners of the actual patterns on the sample. These slightly displaced edges and rounded corners are caused through mask manufacturing processes and are frequently smaller than the size of a sensor pixel. To adjust the reference data to the displaced edges, a size modification circuit detects a maximum value in a specified area in the gradational data and modifies the size of the pattern constructed with the gradational data. To adjust the reference data to match with the actual rounded corners, a corner rounding circuit rounds corners in the pattern constructed with the gradational data. Also provided is a pattern inspection method for developing the design data into the gradational data, adjusting the gradational data to displaced edges and rounded corners of the actual patterns and preparing the reference data, and testing the patterns for faults. Further provided is a storage medium for storing a pattern inspection program for realizing the pattern inspection method.
摘要:
Image pick-up device reads image pick-up signals of all the pixels of CCD only when a light intercepting plate is moved from the light non-intercepting position to the light intercepting position for the first time after a battery replacement. By comparing the image pick-up signal from each pixel with a first threshold value, a possibly defective pixels are extracted. Thereafter, by reading the image pick-up signals for a prescribed number of times from CCD, accumulated value of the image pick-up signals of each of the possibly defective pixels is calculated. Based on the result of comparison between the accumulated value corresponding to each of the possibly defective pixels and second threshold value, an actually defective pixel is specified from the possibly defective pixels.
摘要:
A battery assembly has a temperature control mechanism for effecting cooling or heating unit batteries for operation in a desired temperature range. First heat-exchange planar members of respective heat-transfer plates are sandwiched between the unit batteries that are arranged in an array, and second heat-exchange planar members thereof are held against transverse narrow side walls of the unit batteries. The unit batteries and the heat-transfer plates are securely fastened together by holder plates. Heat produced when the unit batteries are in operation is transferred through the first and second heat-exchange planar members of the heat-transfer plates and dissipated into an appropriate cooling medium, such as atmospheric air or another cooling fluid, through a heat-exchange.
摘要:
A novel and improved soundproof wall is disclosed comprising a main wall rising from the ground, a first branch wall provided atop the main wall and inclined toward a noise source and a second branch wall provided atop the main wall and inclined away from the noise source. In addition, a subordinate branch wall is provided on at least one of the first and second branch walls and extending in a direction other than that of the branch wall.
摘要:
An automated container transferring and loading system having a large number of carriage retracting lanes disposed orthogonally with respect to a row of stage conveyors of a cargo sorting yard, a carriage tow device for retracting a plurality of connected carriages into the carriage retracting lane, at least one group of stopper operation devices for locking and unlocking cargo stoppers on the carriages which are parked in the lane, and a pusher device capable of sliding longitudinally up and down the carriage retracting lanes for unloading containers on the carriage which are released by the cargo stoppers thereof and for loading a container from the stage conveyor onto the carriage.