Temperature control device and arrayed waveguide grating optical wavelength multiplexer/demultiplexer
    71.
    发明授权
    Temperature control device and arrayed waveguide grating optical wavelength multiplexer/demultiplexer 失效
    温度控制装置和阵列波导光栅光波长多路复用器/解复用器

    公开(公告)号:US07050673B2

    公开(公告)日:2006-05-23

    申请号:US10485627

    申请日:2003-04-01

    IPC分类号: G02B6/34

    摘要: In a temperature control device which maintains an object to be controlled at a preset constant temperature and an arrayed waveguide grating optical wavelength multiplexer/demultiplexer, the adverse effect of the junction temperature of the semiconductor control element is eliminated for the purpose of simplifying the overall structure and improving operation efficiency. The object to be controlled and semiconductor control element are fixed on the soaking plate. A negative feedback control is applied to the conduction condition of the semiconductor control element. Consequently, the junction temperature of the semiconductor control element is effectively used as a heating source not as a loss, thereby reducing the power consumption and stabilizing the performance.

    摘要翻译: 在将待控制的物体保持在预定的恒定温度的温度控制装置和阵列波导光栅光学波长多路复用器/解复用器中,为了简化整体结构,省略了半导体控制元件的结温的不利影响 提高运行效率。 要控制的对象和半导体控制元件固定在均热板上。 对半导体控制元件的导通条件施加负反馈控制。 因此,半导体控制元件的结温被有效地用作不是损耗的加热源,从而降低功耗并稳定性能。

    Mask defect inspection apparatus
    73.
    发明申请
    Mask defect inspection apparatus 有权
    掩模缺陷检测仪器

    公开(公告)号:US20050213083A1

    公开(公告)日:2005-09-29

    申请号:US11083202

    申请日:2005-03-18

    摘要: The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection optical systems having a detection sensor for obtaining an image of the pattern, respectively, and which receive illumination light from illumination areas different from each other through the objective lens, respectively; and focusing changing means for changing a position of focusing between sites of the pattern in a film thickness direction of the mask and the pattern images obtained by the detection sensors, such that the pattern images obtained by the detection sensors are changed corresponding to the film-thickness direction of the mask.

    摘要翻译: 掩模缺陷检查装置包括用于照亮其上形成有图案的掩模的照明光学系统; 面对面罩的物镜; 至少一对检测光学系统,具有分别用于获得图案的图像的检测传感器,并分别通过物镜从彼此不同的照明区域接收照明光; 以及聚焦改变装置,用于改变在掩模的膜厚度方向上的图案的位置之间的聚焦位置和由检测传感器获得的图案图像,使得由检测传感器获得的图案图像相应地变化, 掩模的厚度方向。

    Process equipment selecting system and method for selecting process equipment
    74.
    发明授权
    Process equipment selecting system and method for selecting process equipment 失效
    过程设备选择系统和选择过程设备的方法

    公开(公告)号:US06529792B1

    公开(公告)日:2003-03-04

    申请号:US09576228

    申请日:2000-05-22

    IPC分类号: G06F1900

    摘要: A process selection system and method enable the automatic control of the specification to equipment most suitable for each lot. Processing using this specific equipment can be performed by further selecting the most suitable equipment from equipment used for the product type. Since a plurality of equipment can be specified for each lot, the equipment can be specified from an equipment group having these plurality of equipment. The adequate number of products in process for each equipment-specific process equipment id can be calculated based on the distribution percentage ri. The equipment-specific process equipment having the maximum value of the differential Gi between the adequate number of products in process ni and the collected actual number of products in process can be determined as the equipment-specific process equipment for the lot.

    摘要翻译: 过程选择系统和方法能够将规范自动控制到最适合每批的设备。 使用该特定设备的处理可以通过从用于产品类型的设备中进一步选择最合适的设备来执行。 由于可以为每个批次指定多个设备,所以可以从具有这些多个设备的设备组指定设备。 对于每个设备特定的过程设备ID,正在处理的足够数量的产品可以基于分配百分比ri来计算。 具有过程ni中的足够数量的产品之间的差分Gi的最大值的设备特定的过程设备可以被确定为该批次的设备特定的处理设备。

    Pattern inspection equipment, pattern inspection method, and storage medium storing pattern inspection program
    75.
    发明授权
    Pattern inspection equipment, pattern inspection method, and storage medium storing pattern inspection program 失效
    图案检验设备,图案检验方法和存储介质存储图案检验程序

    公开(公告)号:US06400838B2

    公开(公告)日:2002-06-04

    申请号:US09122779

    申请日:1998-07-27

    IPC分类号: G06K942

    摘要: Pattern inspection equipment has at least a measured data generation unit for generating measured data from patterns that have been delineated on a sample according to design data, a reference data generation unit for generating reference data used to inspect the patterns from gradational data expressed in multiple gradation levels, and a fault decision circuit for comparing the measured data with the reference data. The reference data generation unit has a multi-valued pattern development circuit for developing the design data into the gradational data and a fine adjustment circuit for finely shifting the positions or adjusting the curvatures of pattern edges in the pattern constructed with the gradational data. The fine adjustment of the pattern edges is necessary to cope with slightly displaced edges and rounded corners of the actual patterns on the sample. These slightly displaced edges and rounded corners are caused through mask manufacturing processes and are frequently smaller than the size of a sensor pixel. To adjust the reference data to the displaced edges, a size modification circuit detects a maximum value in a specified area in the gradational data and modifies the size of the pattern constructed with the gradational data. To adjust the reference data to match with the actual rounded corners, a corner rounding circuit rounds corners in the pattern constructed with the gradational data. Also provided is a pattern inspection method for developing the design data into the gradational data, adjusting the gradational data to displaced edges and rounded corners of the actual patterns and preparing the reference data, and testing the patterns for faults. Further provided is a storage medium for storing a pattern inspection program for realizing the pattern inspection method.

    摘要翻译: 模式检查设备至少具有测量数据生成单元,用于根据设计数据从已经在样本上划定的模式生成测量数据;参考数据生成单元,用于生成用于根据以多个等级表示的分级数据检查模式的参考数据 电平,以及用于将测量数据与参考数据进行比较的故障判定电路。 参考数据生成单元具有用于将设计数据发展成渐变数据的多值图案开发电路和用于精细移位位置或调整由渐变数据构成的图案中的图案边缘的曲率的微调电路。 图案边缘的精细调整是必要的,以应对样品上实际图案的稍微偏移的边缘和圆角。 这些略微偏移的边缘和圆角是通过掩模制造工艺引起的,并且通常小于传感器像素的尺寸。 为了将参考数据调整到移位边缘,尺寸修改电路检测渐变数据中指定区域中的最大值,并修改由渐变数据构成的图案的大小。 为了调整参考数据以与实际的圆角匹配,一个圆角圆形回转线使用渐变数据构造的图案中的角落圆。 还提供了一种用于将设计数据开发到等级数据的模式检查方法,将等级数据调整到实际模式的偏移边缘和圆角,并准备参考数据,并测试故障模式。 还提供了一种用于存储用于实现图案检查方法的图案检查程序的存储介质。

    Defective pixel detecting circuit of a solid state image pick-up device
capable of detecting defective pixels with low power consumption and
high precision, and image pick-up device having such detecting circuit
    76.
    发明授权
    Defective pixel detecting circuit of a solid state image pick-up device capable of detecting defective pixels with low power consumption and high precision, and image pick-up device having such detecting circuit 有权
    能够以低功耗和高精度检测缺陷像素的固体摄像装置的有缺陷的像素检测电路,以及具有这种检测电路的图像拾取装置

    公开(公告)号:US06002433A

    公开(公告)日:1999-12-14

    申请号:US154374

    申请日:1998-09-16

    CPC分类号: H04N5/367

    摘要: Image pick-up device reads image pick-up signals of all the pixels of CCD only when a light intercepting plate is moved from the light non-intercepting position to the light intercepting position for the first time after a battery replacement. By comparing the image pick-up signal from each pixel with a first threshold value, a possibly defective pixels are extracted. Thereafter, by reading the image pick-up signals for a prescribed number of times from CCD, accumulated value of the image pick-up signals of each of the possibly defective pixels is calculated. Based on the result of comparison between the accumulated value corresponding to each of the possibly defective pixels and second threshold value, an actually defective pixel is specified from the possibly defective pixels.

    摘要翻译: 只有在电池更换之后第一次将遮光板从不透光位置移动到遮光位置时,图像拾取装置才能读取CCD的所有像素的图像拾取信号。 通过将来自每个像素的摄像信号与第一阈值进行比较,提取可能的缺陷像素。 此后,通过从CCD读取规定次数的图像拾取信号,计算每个可能缺陷像素的图像拾取信号的累积值。 基于与每个可能的故障像素相对应的累积值与第二阈值之间的比较结果,从可能有缺陷的像素指定实际缺陷像素。

    Soundproof wall
    79.
    发明授权
    Soundproof wall 失效
    隔音墙

    公开(公告)号:US5678364A

    公开(公告)日:1997-10-21

    申请号:US504008

    申请日:1995-07-19

    IPC分类号: E01F8/00 E02D27/00

    CPC分类号: E01F8/0041

    摘要: A novel and improved soundproof wall is disclosed comprising a main wall rising from the ground, a first branch wall provided atop the main wall and inclined toward a noise source and a second branch wall provided atop the main wall and inclined away from the noise source. In addition, a subordinate branch wall is provided on at least one of the first and second branch walls and extending in a direction other than that of the branch wall.

    摘要翻译: 公开了一种新颖且改进的隔音墙,其包括从地面上升的主壁,设置在主壁顶部并朝向噪声源倾斜的第一分支壁和设置在主壁顶部并且远离噪声源倾斜的第二分支壁。 此外,在第一和第二分支壁中的至少一个上设置有从分支壁以外的方向延伸的从属分支壁。

    Automated container transferring and loading system and a method therefor
    80.
    发明授权
    Automated container transferring and loading system and a method therefor 失效
    自动化集装箱搬运和装载系统及其方法

    公开(公告)号:US5518355A

    公开(公告)日:1996-05-21

    申请号:US101073

    申请日:1993-08-04

    IPC分类号: B65G63/00 B65G57/20

    CPC分类号: B65G63/004

    摘要: An automated container transferring and loading system having a large number of carriage retracting lanes disposed orthogonally with respect to a row of stage conveyors of a cargo sorting yard, a carriage tow device for retracting a plurality of connected carriages into the carriage retracting lane, at least one group of stopper operation devices for locking and unlocking cargo stoppers on the carriages which are parked in the lane, and a pusher device capable of sliding longitudinally up and down the carriage retracting lanes for unloading containers on the carriage which are released by the cargo stoppers thereof and for loading a container from the stage conveyor onto the carriage.

    摘要翻译: 一种自动化的容器传送和装载系统,其具有相对于货物分类场的一排级输送机正交设置的大量托架缩回通道,用于将多个连接的托架缩回到托架缩回通道中的托架拖车装置,至少 一组用于锁定和解锁停在车道上的滑架上的货物塞子的止动器操作装置,以及能够纵向上下滑动滑架收回车道的推动装置,用于卸载托架上的容器,该货架由货物止动件释放 并且用于将容器从平台传送器装载到滑架上。